MD2585G2 - Process for semiconductor nanostructures obtaining - Google Patents

Process for semiconductor nanostructures obtaining

Info

Publication number
MD2585G2
MD2585G2 MDA20040137A MD20040137A MD2585G2 MD 2585 G2 MD2585 G2 MD 2585G2 MD A20040137 A MDA20040137 A MD A20040137A MD 20040137 A MD20040137 A MD 20040137A MD 2585 G2 MD2585 G2 MD 2585G2
Authority
MD
Moldova
Prior art keywords
obtaining
semiconductor
semiconductor nanostructures
carried out
ion implantation
Prior art date
Application number
MDA20040137A
Other languages
Romanian (ro)
Russian (ru)
Other versions
MD2585F1 (en
Inventor
Эдуард МОНАЙКО
Ион ТИГИНЯНУ
Ала КОЖОКАРУ
Вячеслав УРСАКИ
Original Assignee
Ион ТИГИНЯНУ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ион ТИГИНЯНУ filed Critical Ион ТИГИНЯНУ
Priority to MDA20040137A priority Critical patent/MD2585G2/en
Publication of MD2585F1 publication Critical patent/MD2585F1/en
Publication of MD2585G2 publication Critical patent/MD2585G2/en

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Abstract

The invention refers to the semiconductor production technology, in particular to the processes for semiconductor nanostructures obtaining.Summary of the invention consists in that the process for obtaining semiconductor nanostructures includes the deposition of a mask onto one of the surfaces of the semiconductor plate, the ion implantation, the electrochemical treatment and removal of the mask. The ion implantation is carried out at the ion energy of at least 30 keV and a dose of up to 1011 cm-2, and the electrochemical treatment is carried out at the current passage with a density of at least 100 mA/cm2.
MDA20040137A 2004-06-01 2004-06-01 Process for semiconductor nanostructures obtaining MD2585G2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDA20040137A MD2585G2 (en) 2004-06-01 2004-06-01 Process for semiconductor nanostructures obtaining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDA20040137A MD2585G2 (en) 2004-06-01 2004-06-01 Process for semiconductor nanostructures obtaining

Publications (2)

Publication Number Publication Date
MD2585F1 MD2585F1 (en) 2004-10-31
MD2585G2 true MD2585G2 (en) 2005-05-31

Family

ID=33308445

Family Applications (1)

Application Number Title Priority Date Filing Date
MDA20040137A MD2585G2 (en) 2004-06-01 2004-06-01 Process for semiconductor nanostructures obtaining

Country Status (1)

Country Link
MD (1) MD2585G2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD2982G2 (en) * 2005-08-10 2006-10-31 Институт Прикладной Физики Академии Наук Молдовы Process for obtaining semiconductor nanostructures
MD3811G2 (en) * 2007-11-06 2009-08-31 Институт Прикладной Физики Академии Наук Молдовы Process for obtaining semiconductor nanostructural zones
MD193Z (en) * 2009-06-04 2010-11-30 Институт Прикладной Физики Академии Наук Молдовы Process for the obtaining of polysulphide film
MD4063C1 (en) * 2010-02-18 2011-03-31 Технический университет Молдовы Method for producing nanotubes of titanium dioxide on a titanium substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2192698C1 (en) * 2001-07-05 2002-11-10 Омский государственный технический университет Electric motor protective device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2192698C1 (en) * 2001-07-05 2002-11-10 Омский государственный технический университет Electric motor protective device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
I.M. Tiginyanu, C. Schwab, J.J. Grob, B. Prevot, H.L. Hartnagel, A. Vogt, G.Irmer, J.Monecke. Appl. Phys. Lett., vol. 71, nr. 26, 1997, p.3829-3831 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD2982G2 (en) * 2005-08-10 2006-10-31 Институт Прикладной Физики Академии Наук Молдовы Process for obtaining semiconductor nanostructures
MD3811G2 (en) * 2007-11-06 2009-08-31 Институт Прикладной Физики Академии Наук Молдовы Process for obtaining semiconductor nanostructural zones
MD193Z (en) * 2009-06-04 2010-11-30 Институт Прикладной Физики Академии Наук Молдовы Process for the obtaining of polysulphide film
MD4063C1 (en) * 2010-02-18 2011-03-31 Технический университет Молдовы Method for producing nanotubes of titanium dioxide on a titanium substrate

Also Published As

Publication number Publication date
MD2585F1 (en) 2004-10-31

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Legal Events

Date Code Title Description
KA4A Patent for invention lapsed due to non-payment of fees (with right of restoration)
MM4A Patent for invention definitely lapsed due to non-payment of fees