MD2585G2 - Process for semiconductor nanostructures obtaining - Google Patents
Process for semiconductor nanostructures obtainingInfo
- Publication number
- MD2585G2 MD2585G2 MDA20040137A MD20040137A MD2585G2 MD 2585 G2 MD2585 G2 MD 2585G2 MD A20040137 A MDA20040137 A MD A20040137A MD 20040137 A MD20040137 A MD 20040137A MD 2585 G2 MD2585 G2 MD 2585G2
- Authority
- MD
- Moldova
- Prior art keywords
- obtaining
- semiconductor
- semiconductor nanostructures
- carried out
- ion implantation
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention refers to the semiconductor production technology, in particular to the processes for semiconductor nanostructures obtaining.Summary of the invention consists in that the process for obtaining semiconductor nanostructures includes the deposition of a mask onto one of the surfaces of the semiconductor plate, the ion implantation, the electrochemical treatment and removal of the mask. The ion implantation is carried out at the ion energy of at least 30 keV and a dose of up to 1011 cm-2, and the electrochemical treatment is carried out at the current passage with a density of at least 100 mA/cm2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MDA20040137A MD2585G2 (en) | 2004-06-01 | 2004-06-01 | Process for semiconductor nanostructures obtaining |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MDA20040137A MD2585G2 (en) | 2004-06-01 | 2004-06-01 | Process for semiconductor nanostructures obtaining |
Publications (2)
Publication Number | Publication Date |
---|---|
MD2585F1 MD2585F1 (en) | 2004-10-31 |
MD2585G2 true MD2585G2 (en) | 2005-05-31 |
Family
ID=33308445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MDA20040137A MD2585G2 (en) | 2004-06-01 | 2004-06-01 | Process for semiconductor nanostructures obtaining |
Country Status (1)
Country | Link |
---|---|
MD (1) | MD2585G2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MD2982G2 (en) * | 2005-08-10 | 2006-10-31 | Институт Прикладной Физики Академии Наук Молдовы | Process for obtaining semiconductor nanostructures |
MD3811G2 (en) * | 2007-11-06 | 2009-08-31 | Институт Прикладной Физики Академии Наук Молдовы | Process for obtaining semiconductor nanostructural zones |
MD193Z (en) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Process for the obtaining of polysulphide film |
MD4063C1 (en) * | 2010-02-18 | 2011-03-31 | Технический университет Молдовы | Method for producing nanotubes of titanium dioxide on a titanium substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2192698C1 (en) * | 2001-07-05 | 2002-11-10 | Омский государственный технический университет | Electric motor protective device |
-
2004
- 2004-06-01 MD MDA20040137A patent/MD2585G2/en not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2192698C1 (en) * | 2001-07-05 | 2002-11-10 | Омский государственный технический университет | Electric motor protective device |
Non-Patent Citations (1)
Title |
---|
I.M. Tiginyanu, C. Schwab, J.J. Grob, B. Prevot, H.L. Hartnagel, A. Vogt, G.Irmer, J.Monecke. Appl. Phys. Lett., vol. 71, nr. 26, 1997, p.3829-3831 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MD2982G2 (en) * | 2005-08-10 | 2006-10-31 | Институт Прикладной Физики Академии Наук Молдовы | Process for obtaining semiconductor nanostructures |
MD3811G2 (en) * | 2007-11-06 | 2009-08-31 | Институт Прикладной Физики Академии Наук Молдовы | Process for obtaining semiconductor nanostructural zones |
MD193Z (en) * | 2009-06-04 | 2010-11-30 | Институт Прикладной Физики Академии Наук Молдовы | Process for the obtaining of polysulphide film |
MD4063C1 (en) * | 2010-02-18 | 2011-03-31 | Технический университет Молдовы | Method for producing nanotubes of titanium dioxide on a titanium substrate |
Also Published As
Publication number | Publication date |
---|---|
MD2585F1 (en) | 2004-10-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
KA4A | Patent for invention lapsed due to non-payment of fees (with right of restoration) | ||
MM4A | Patent for invention definitely lapsed due to non-payment of fees |