LT2691803T - Plokščio lauko telecentrinis skeneris su difrakcijos ribojamomis eksploatacijos savybėmis - Google Patents

Plokščio lauko telecentrinis skeneris su difrakcijos ribojamomis eksploatacijos savybėmis

Info

Publication number
LT2691803T
LT2691803T LTEP12711874.3T LT12711874T LT2691803T LT 2691803 T LT2691803 T LT 2691803T LT 12711874 T LT12711874 T LT 12711874T LT 2691803 T LT2691803 T LT 2691803T
Authority
LT
Lithuania
Prior art keywords
flat field
diffraction limited
limited performance
field telecentric
telecentric scanner
Prior art date
Application number
LTEP12711874.3T
Other languages
English (en)
Inventor
Ronny De Loor
Original Assignee
Next Scan Technology Bvba
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Next Scan Technology Bvba filed Critical Next Scan Technology Bvba
Publication of LT2691803T publication Critical patent/LT2691803T/lt

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/125—Details of the optical system between the polygonal mirror and the image plane
    • G02B26/126—Details of the optical system between the polygonal mirror and the image plane including curved mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
LTEP12711874.3T 2011-03-31 2012-03-30 Plokščio lauko telecentrinis skeneris su difrakcijos ribojamomis eksploatacijos savybėmis LT2691803T (lt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP11160661 2011-03-31
PCT/EP2012/055749 WO2012131015A1 (en) 2011-03-31 2012-03-30 Flat field telecentric scanner with diffraction limited performance

Publications (1)

Publication Number Publication Date
LT2691803T true LT2691803T (lt) 2017-08-25

Family

ID=44259882

Family Applications (1)

Application Number Title Priority Date Filing Date
LTEP12711874.3T LT2691803T (lt) 2011-03-31 2012-03-30 Plokščio lauko telecentrinis skeneris su difrakcijos ribojamomis eksploatacijos savybėmis

Country Status (5)

Country Link
US (1) US9939633B2 (lt)
EP (1) EP2691803B1 (lt)
KR (1) KR101805968B1 (lt)
LT (1) LT2691803T (lt)
WO (1) WO2012131015A1 (lt)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014101576B4 (de) 2014-02-07 2019-10-02 Dr. Mergenthaler Gmbh & Co. Kg Vorrichtung zur Bearbeitung von Werkstücken
US20170225393A1 (en) * 2016-02-04 2017-08-10 Global Filtration Systems, A Dba Of Gulf Filtration Systems Inc. Apparatus and method for forming three-dimensional objects using two-photon absorption linear solidification
FR3047579B1 (fr) * 2016-02-04 2020-10-30 O Computers Procede de selection d'un mode de capture d'ecran
KR102603393B1 (ko) 2016-12-06 2023-11-17 삼성디스플레이 주식회사 레이저 가공 장치
KR20180077385A (ko) * 2016-12-28 2018-07-09 주식회사 비아트론 폴리곤 스캐너를 이용한 기판 열처리 장치 및 방법
US10304155B2 (en) * 2017-02-24 2019-05-28 Advanced Micro Devices, Inc. Delta color compression application to video
KR102285441B1 (ko) * 2017-03-07 2021-08-03 주식회사 비아트론 화이버 레이저와 폴리곤 스캐너를 이용한 실리콘 박막 결정화 방법
CN111279244B (zh) * 2017-10-25 2022-03-18 株式会社尼康 图案描绘装置
US11092425B2 (en) 2018-07-05 2021-08-17 University Of Rochester Telecentric and broadband achromatic objective lens systems
US20230099600A1 (en) * 2020-03-10 2023-03-30 Alex Blate Applications of ultra-short pulse laser systems
US11945043B2 (en) * 2020-11-20 2024-04-02 Concept Laser Gmbh Energy beam generation systems and optical systems with expanded scan fields
US20220206290A1 (en) * 2020-12-29 2022-06-30 Beijing Voyager Technology Co., Ltd. Adaptive beam divergence control in lidar
KR102591666B1 (ko) * 2021-03-08 2023-10-19 주식회사 이솔 고성능 euv 마스크 패턴 스캐닝 장치
CN114326068A (zh) * 2022-01-05 2022-04-12 中国工程物理研究院激光聚变研究中心 离轴非球面扩束组件装调方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4880299A (en) 1986-04-28 1989-11-14 Minolta Camera Kabushiki Kaisha Telecentric fθ lens system for laser COM
JP2566405B2 (ja) 1987-04-03 1996-12-25 旭光学工業株式会社 ｆ・θレンズ
US5168386A (en) * 1990-10-22 1992-12-01 Tencor Instruments Flat field telecentric scanner
JP3330248B2 (ja) * 1995-02-20 2002-09-30 松下電器産業株式会社 光走査装置、画像形成装置及び画像読み取り装置
JP3104618B2 (ja) 1996-05-10 2000-10-30 富士ゼロックス株式会社 光学走査装置及び光学レンズ
JP3856881B2 (ja) * 1996-05-17 2006-12-13 株式会社リコー 光走査装置
US6022115A (en) 1998-06-15 2000-02-08 Universite Laval Optical system for optical beam scanning
JP2002277787A (ja) 2001-03-16 2002-09-25 Ricoh Co Ltd 光走査装置及び画像形成装置
JP2003107383A (ja) 2001-09-27 2003-04-09 Fuji Photo Film Co Ltd 光走査装置
EP2005249A1 (en) * 2006-04-07 2008-12-24 Carl Zeiss SMT AG Microlithography projection optical system and method for manufacturing a device

Also Published As

Publication number Publication date
US9939633B2 (en) 2018-04-10
US20140009811A1 (en) 2014-01-09
EP2691803A1 (en) 2014-02-05
WO2012131015A1 (en) 2012-10-04
KR101805968B1 (ko) 2017-12-06
EP2691803B1 (en) 2017-05-10
KR20140025425A (ko) 2014-03-04

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