LT2691803T - Plokščio lauko telecentrinis skeneris su difrakcijos ribojamomis eksploatacijos savybėmis - Google Patents
Plokščio lauko telecentrinis skeneris su difrakcijos ribojamomis eksploatacijos savybėmisInfo
- Publication number
- LT2691803T LT2691803T LTEP12711874.3T LT12711874T LT2691803T LT 2691803 T LT2691803 T LT 2691803T LT 12711874 T LT12711874 T LT 12711874T LT 2691803 T LT2691803 T LT 2691803T
- Authority
- LT
- Lithuania
- Prior art keywords
- flat field
- diffraction limited
- limited performance
- field telecentric
- telecentric scanner
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/0005—Optical objectives specially designed for the purposes specified below having F-Theta characteristic
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/125—Details of the optical system between the polygonal mirror and the image plane
- G02B26/126—Details of the optical system between the polygonal mirror and the image plane including curved mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Mechanical Optical Scanning Systems (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP11160661 | 2011-03-31 | ||
PCT/EP2012/055749 WO2012131015A1 (en) | 2011-03-31 | 2012-03-30 | Flat field telecentric scanner with diffraction limited performance |
Publications (1)
Publication Number | Publication Date |
---|---|
LT2691803T true LT2691803T (lt) | 2017-08-25 |
Family
ID=44259882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
LTEP12711874.3T LT2691803T (lt) | 2011-03-31 | 2012-03-30 | Plokščio lauko telecentrinis skeneris su difrakcijos ribojamomis eksploatacijos savybėmis |
Country Status (5)
Country | Link |
---|---|
US (1) | US9939633B2 (lt) |
EP (1) | EP2691803B1 (lt) |
KR (1) | KR101805968B1 (lt) |
LT (1) | LT2691803T (lt) |
WO (1) | WO2012131015A1 (lt) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014101576B4 (de) | 2014-02-07 | 2019-10-02 | Dr. Mergenthaler Gmbh & Co. Kg | Vorrichtung zur Bearbeitung von Werkstücken |
US20170225393A1 (en) * | 2016-02-04 | 2017-08-10 | Global Filtration Systems, A Dba Of Gulf Filtration Systems Inc. | Apparatus and method for forming three-dimensional objects using two-photon absorption linear solidification |
FR3047579B1 (fr) * | 2016-02-04 | 2020-10-30 | O Computers | Procede de selection d'un mode de capture d'ecran |
KR102603393B1 (ko) | 2016-12-06 | 2023-11-17 | 삼성디스플레이 주식회사 | 레이저 가공 장치 |
KR20180077385A (ko) * | 2016-12-28 | 2018-07-09 | 주식회사 비아트론 | 폴리곤 스캐너를 이용한 기판 열처리 장치 및 방법 |
US10304155B2 (en) * | 2017-02-24 | 2019-05-28 | Advanced Micro Devices, Inc. | Delta color compression application to video |
KR102285441B1 (ko) * | 2017-03-07 | 2021-08-03 | 주식회사 비아트론 | 화이버 레이저와 폴리곤 스캐너를 이용한 실리콘 박막 결정화 방법 |
CN111279244B (zh) * | 2017-10-25 | 2022-03-18 | 株式会社尼康 | 图案描绘装置 |
US11092425B2 (en) | 2018-07-05 | 2021-08-17 | University Of Rochester | Telecentric and broadband achromatic objective lens systems |
US20230099600A1 (en) * | 2020-03-10 | 2023-03-30 | Alex Blate | Applications of ultra-short pulse laser systems |
US11945043B2 (en) * | 2020-11-20 | 2024-04-02 | Concept Laser Gmbh | Energy beam generation systems and optical systems with expanded scan fields |
US20220206290A1 (en) * | 2020-12-29 | 2022-06-30 | Beijing Voyager Technology Co., Ltd. | Adaptive beam divergence control in lidar |
KR102591666B1 (ko) * | 2021-03-08 | 2023-10-19 | 주식회사 이솔 | 고성능 euv 마스크 패턴 스캐닝 장치 |
CN114326068A (zh) * | 2022-01-05 | 2022-04-12 | 中国工程物理研究院激光聚变研究中心 | 离轴非球面扩束组件装调方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4880299A (en) | 1986-04-28 | 1989-11-14 | Minolta Camera Kabushiki Kaisha | Telecentric fθ lens system for laser COM |
JP2566405B2 (ja) | 1987-04-03 | 1996-12-25 | 旭光学工業株式会社 | f・θレンズ |
US5168386A (en) * | 1990-10-22 | 1992-12-01 | Tencor Instruments | Flat field telecentric scanner |
JP3330248B2 (ja) * | 1995-02-20 | 2002-09-30 | 松下電器産業株式会社 | 光走査装置、画像形成装置及び画像読み取り装置 |
JP3104618B2 (ja) | 1996-05-10 | 2000-10-30 | 富士ゼロックス株式会社 | 光学走査装置及び光学レンズ |
JP3856881B2 (ja) * | 1996-05-17 | 2006-12-13 | 株式会社リコー | 光走査装置 |
US6022115A (en) | 1998-06-15 | 2000-02-08 | Universite Laval | Optical system for optical beam scanning |
JP2002277787A (ja) | 2001-03-16 | 2002-09-25 | Ricoh Co Ltd | 光走査装置及び画像形成装置 |
JP2003107383A (ja) | 2001-09-27 | 2003-04-09 | Fuji Photo Film Co Ltd | 光走査装置 |
EP2005249A1 (en) * | 2006-04-07 | 2008-12-24 | Carl Zeiss SMT AG | Microlithography projection optical system and method for manufacturing a device |
-
2012
- 2012-03-30 KR KR1020137028910A patent/KR101805968B1/ko active IP Right Grant
- 2012-03-30 LT LTEP12711874.3T patent/LT2691803T/lt unknown
- 2012-03-30 WO PCT/EP2012/055749 patent/WO2012131015A1/en active Application Filing
- 2012-03-30 US US14/007,832 patent/US9939633B2/en active Active
- 2012-03-30 EP EP12711874.3A patent/EP2691803B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
US9939633B2 (en) | 2018-04-10 |
US20140009811A1 (en) | 2014-01-09 |
EP2691803A1 (en) | 2014-02-05 |
WO2012131015A1 (en) | 2012-10-04 |
KR101805968B1 (ko) | 2017-12-06 |
EP2691803B1 (en) | 2017-05-10 |
KR20140025425A (ko) | 2014-03-04 |
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