LT2015085A - Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys - Google Patents

Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys

Info

Publication number
LT2015085A
LT2015085A LT2015085A LT2015085A LT2015085A LT 2015085 A LT2015085 A LT 2015085A LT 2015085 A LT2015085 A LT 2015085A LT 2015085 A LT2015085 A LT 2015085A LT 2015085 A LT2015085 A LT 2015085A
Authority
LT
Lithuania
Prior art keywords
laser beam
intensity profile
workpiece
gauss
optical element
Prior art date
Application number
LT2015085A
Other languages
English (en)
Other versions
LT6428B (lt
Inventor
Mindaugas Mikutis
Original Assignee
Uab "Altechna R&D"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Uab "Altechna R&D" filed Critical Uab "Altechna R&D"
Priority to LT2015085A priority Critical patent/LT6428B/lt
Priority to CN201610255377.0A priority patent/CN106560269B/zh
Priority to KR1020187012424A priority patent/KR102584490B1/ko
Priority to US15/761,596 priority patent/US20180345419A1/en
Priority to LTEP16787347.0T priority patent/LT3356300T/lt
Priority to PCT/EP2016/073460 priority patent/WO2017055576A1/en
Priority to JP2018516757A priority patent/JP7046798B2/ja
Priority to EP16787347.0A priority patent/EP3356300B1/en
Publication of LT2015085A publication Critical patent/LT2015085A/lt
Publication of LT6428B publication Critical patent/LT6428B/lt

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0823—Devices involving rotation of the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/07—Cutting armoured, multi-layered, coated or laminated, glass products
    • C03B33/072—Armoured glass, i.e. comprising reinforcement
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/08—Severing cooled glass by fusing, i.e. by melting through the glass
    • C03B33/082—Severing cooled glass by fusing, i.e. by melting through the glass using a focussed radiation beam, e.g. laser
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Laser Beam Processing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

Išradimas priklauso lazerių sričiai ir yra susijęs su skaidrių terpių apdirbimu ir gali būti panaudotas skaidrių terpių tarp jų stiklų, chemiškai grūdintų stiklų, safyrų bei kitokių kristalinių medžiagų pjaustymui, skaldymui ir kitiems apdirbimo procesams panaudojant ultratrumpųjų impulsų lazerinės spinduliuotės Beselio-Gauso asimetrinio intensyvumo skirstinio pluoštą. Gauso intensyvumo skirstinio ultratrumpųjų impulsų lazerio pluoštą transformuoja į asimetrinio intensyvumo skirstinio Beselio-Gauso pluoštą patalpinant optinį elementą Gauso arba Beselio-Gauso intensyvumo skirtinio pluošto optiniame kelyje, Beselio-Gauso intensyvumo skirstinio pluošto asimetriją keičia parenkant optinio elemento medžiagą ir/arba parametrus ir/arba jo išdėstymą optiniame kelyje taip, kad Beselio-Gauso lazerinės spinduliuotės pluoštas, lokalizuotas apdirbamame ruošinyje, turi pailgą pavidalą tiek pluošto sklidimo kryptimi tiek plokštumoje, statmenoje minėtai lazerinės spinduliuotės pluošto sklidimo krypčiai. Formuojant pjovimo ir/arba skilimo plokštumą, minėtą skaidrios medžiagos ruošinį ir lokalizuotą Beselio-Gauso lazerinės spinduliuotės pluoštą vienas kito atžvilgiu valdomai perkelia taip, kad ruošinyje suformuotos pailgo pavidalo pažaidos sritys išilgai išdėstomos viena po kitos pjovimo ir/arba skilimo plokštumos trajektorijoje.
LT2015085A 2015-10-02 2015-10-02 Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys LT6428B (lt)

Priority Applications (8)

Application Number Priority Date Filing Date Title
LT2015085A LT6428B (lt) 2015-10-02 2015-10-02 Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys
CN201610255377.0A CN106560269B (zh) 2015-10-02 2016-04-22 对透明材料进行激光加工的方法和装置
KR1020187012424A KR102584490B1 (ko) 2015-10-02 2016-09-30 투명한 재료의 레이저 가공 방법 및 장치
US15/761,596 US20180345419A1 (en) 2015-10-02 2016-09-30 Method and device for laser processing of transparent materials
LTEP16787347.0T LT3356300T (lt) 2015-10-02 2016-09-30 Skaidrių medžiagų lazerinio apdorojimo būdas ir prietaisas
PCT/EP2016/073460 WO2017055576A1 (en) 2015-10-02 2016-09-30 Method and device for laser processing of transparent materials
JP2018516757A JP7046798B2 (ja) 2015-10-02 2016-09-30 透明材料のレーザ加工方法および装置
EP16787347.0A EP3356300B1 (en) 2015-10-02 2016-09-30 Method and device for laser processing of transparent materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LT2015085A LT6428B (lt) 2015-10-02 2015-10-02 Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys

Publications (2)

Publication Number Publication Date
LT2015085A true LT2015085A (lt) 2017-04-10
LT6428B LT6428B (lt) 2017-07-25

Family

ID=55022652

Family Applications (2)

Application Number Title Priority Date Filing Date
LT2015085A LT6428B (lt) 2015-10-02 2015-10-02 Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys
LTEP16787347.0T LT3356300T (lt) 2015-10-02 2016-09-30 Skaidrių medžiagų lazerinio apdorojimo būdas ir prietaisas

Family Applications After (1)

Application Number Title Priority Date Filing Date
LTEP16787347.0T LT3356300T (lt) 2015-10-02 2016-09-30 Skaidrių medžiagų lazerinio apdorojimo būdas ir prietaisas

Country Status (7)

Country Link
US (1) US20180345419A1 (lt)
EP (1) EP3356300B1 (lt)
JP (1) JP7046798B2 (lt)
KR (1) KR102584490B1 (lt)
CN (1) CN106560269B (lt)
LT (2) LT6428B (lt)
WO (1) WO2017055576A1 (lt)

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TW201919805A (zh) * 2017-08-25 2019-06-01 美商康寧公司 使用遠焦光束調整組件以雷射處理透明工件的設備與方法
US10830943B2 (en) * 2017-10-31 2020-11-10 Corning Incorporated Optical fibers and optical systems comprising the same
WO2019179603A1 (de) * 2018-03-20 2019-09-26 Robert Bosch Gmbh Verfahren und vorrichtung zur prozessorientierten strahlformanpassung und strahlorientierung
US11059131B2 (en) 2018-06-22 2021-07-13 Corning Incorporated Methods for laser processing a substrate stack having one or more transparent workpieces and a black matrix layer
US11075496B2 (en) * 2018-06-28 2021-07-27 Samsung Electronics Co., Ltd. Laser dicing device, method of laser beam modulation, and method of dicing a substrate
WO2020188861A1 (ja) * 2019-03-19 2020-09-24 株式会社村田製作所 光学装置
LT6791B (lt) * 2019-05-15 2020-12-28 Uab "Altechna R&D" Skaidrių medžiagų apdirbimo būdas ir įrenginys
US10903121B1 (en) * 2019-08-14 2021-01-26 Applied Materials, Inc. Hybrid wafer dicing approach using a uniform rotating beam laser scribing process and plasma etch process
CN114556163A (zh) * 2019-08-15 2022-05-27 康宁股份有限公司 结合基材以及通过结合部分离所结合的基材的一部分的方法，例如制造液体透镜阵列以及将阵列分离为独立的液体透镜
CN110539085A (zh) * 2019-09-11 2019-12-06 华东师范大学重庆研究院 一种飞秒光丝隐切方法及装置
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CN113770548A (zh) * 2020-06-10 2021-12-10 大族激光科技产业集团股份有限公司 激光加工***、激光加工方法及获得椭圆形光斑的方法
KR20230037547A (ko) * 2020-07-15 2023-03-16 하마마츠 포토닉스 가부시키가이샤 레이저 가공 장치, 및 레이저 가공 방법
KR102375235B1 (ko) * 2020-09-08 2022-03-16 주식회사 필옵틱스 레이저 가공 시스템 및 방법
CN112142315A (zh) * 2020-09-22 2020-12-29 东莞市盛雄激光先进装备股份有限公司 一种厚玻璃的超快激光加工***及方法
DE102020134195A1 (de) * 2020-12-18 2022-06-23 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und Verfahren zum Trennen eines Materials
WO2022167254A1 (de) * 2021-02-02 2022-08-11 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und verfahren zur laserbearbeitung eines werkstücks
WO2022167257A1 (de) * 2021-02-02 2022-08-11 Trumpf Laser- Und Systemtechnik Gmbh Vorrichtung und verfahren zur laserbearbeitung eines werkstücks
DE102021123801A1 (de) 2021-06-02 2022-12-08 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und Vorrichtung zur Laserbearbeitung eines Werkstücks
DE102021123962A1 (de) 2021-09-16 2023-03-16 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und Vorrichtung zur Laserbearbeitung eines Werkstücks
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EP3356300A1 (en) 2018-08-08
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EP3356300B1 (en) 2019-08-14
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