KR980006011A - I / O dedicated stacker - Google Patents
I / O dedicated stacker Download PDFInfo
- Publication number
- KR980006011A KR980006011A KR1019960023930A KR19960023930A KR980006011A KR 980006011 A KR980006011 A KR 980006011A KR 1019960023930 A KR1019960023930 A KR 1019960023930A KR 19960023930 A KR19960023930 A KR 19960023930A KR 980006011 A KR980006011 A KR 980006011A
- Authority
- KR
- South Korea
- Prior art keywords
- stacker
- input
- output
- dedicated
- rail
- Prior art date
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Abstract
반도체 설비에 있어서 입출력 전용 스탁커가 포함되어 있다. 본 발명은, 상기 스탁커가 입력 전용으로만 사용되는 입력 전용 스탁커와 출력 전용으로만 사용되는 출력 전용 스탁커가 별도로 구성되며, 상기 입력 전용 스탁커는 상기 입력 전용 스탁커 내부에 위치하는 AGV와, 상기 입력 전용 스탁커 외부에 위치하는 하나의 입력 컨테이너와, 상기 입력 전용 스탁커의 양쪽에 각각 하나씩 위치하며 인레일(In-rail) 및 아웃레일(Out-rail)에 각각 연력되는 두 개의 출력포트(Port)로 이루어지고, 상기 출력 전용 스탁커는, 상기 출력 전용 스탁커 내부에 위치하는 AGV와, 상기 출력 전용 스탁커 외부에 위치하는 하나의 출력 컨테이너와, 상기 출력 전용 스탁커의 양쪽에 각각 하나씩 위치하며 인레일 및 아웃레일에 각각 연결되는 두 개의 입력포트로 이루어지는 것을 특징으로 한다. 따라서, 본 발명은 런 이동이 빨라지는 장점이 있고, 또한 베이당 똑같이 두 개의 스탁커를 사용하는 경우라면 런의 대기상태가 줄어들므로 스탁커의 이용효율이 높아지는 장점이 있다.I / O stackers are included in semiconductor equipment. According to the present invention, an input-only stacker in which the stacker is used only for input and an output-only stacker used only for output are separately configured, and the input-only stacker includes an AGV located inside the input-only stacker; One input container located outside the input dedicated stacker, and two output ports each located at both sides of the input dedicated stacker and connected to in-rail and out-rail, respectively. The output dedicated stacker includes an AGV located inside the output dedicated stacker, one output container located outside the output dedicated stacker, and each of the output dedicated stacker. It is located one by one, characterized in that consisting of two input ports respectively connected to the in-rail and out-rail. Therefore, the present invention has the advantage that the run movement is faster, and if the two stackers are used equally per bay, there is an advantage that the utilization efficiency of the stacker is increased because the standby state of the run is reduced.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명에 따른 입출력 전용 스탁커의 구성을 나타내는 개략도.2 is a schematic diagram showing a configuration of an input / output dedicated stacker according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960023930A KR980006011A (en) | 1996-06-26 | 1996-06-26 | I / O dedicated stacker |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960023930A KR980006011A (en) | 1996-06-26 | 1996-06-26 | I / O dedicated stacker |
Publications (1)
Publication Number | Publication Date |
---|---|
KR980006011A true KR980006011A (en) | 1998-03-30 |
Family
ID=66287706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960023930A KR980006011A (en) | 1996-06-26 | 1996-06-26 | I / O dedicated stacker |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR980006011A (en) |
-
1996
- 1996-06-26 KR KR1019960023930A patent/KR980006011A/en not_active Application Discontinuation
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Legal Events
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WITN | Withdrawal due to no request for examination |