KR980001838A - Recycling Method of Iron Chloride Etching Waste - Google Patents

Recycling Method of Iron Chloride Etching Waste Download PDF

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Publication number
KR980001838A
KR980001838A KR1019970028263A KR19970028263A KR980001838A KR 980001838 A KR980001838 A KR 980001838A KR 1019970028263 A KR1019970028263 A KR 1019970028263A KR 19970028263 A KR19970028263 A KR 19970028263A KR 980001838 A KR980001838 A KR 980001838A
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South Korea
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iron
iron chloride
waste liquid
etching waste
liquid
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KR1019970028263A
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Korean (ko)
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KR100325981B1 (en
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쓰토무 이노시타
다다오 기타자와
히로유키 마쓰모토
마사키 나가시마
히로시 요시노
오네지로 나가오카
가츠마사 미토
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이리에 노부아키
가부시키가이샤 아스텍크 이리에
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Priority claimed from JP18850896A external-priority patent/JP3489942B2/en
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C1/00—Electrolytic production, recovery or refining of metals by electrolysis of solutions
    • C25C1/06—Electrolytic production, recovery or refining of metals by electrolysis of solutions or iron group metals, refractory metals or manganese
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G3/00—Compounds of copper
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G49/00—Compounds of iron
    • C01G49/10—Halides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G53/00—Compounds of nickel
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/20—Recycling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W10/00—Technologies for wastewater treatment
    • Y02W10/40—Valorisation of by-products of wastewater, sewage or sludge processing

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)

Abstract

1. 청구범위에 기재된 발명이 속하는 기술분야1. TECHNICAL FIELD OF THE INVENTION

염화철계 에칭폐액의 재생방법.Recycling method of iron chloride etching waste liquid.

2. 발명이 해결하려고 하는 기술적 과제2. The technical problem to be solved by the invention

제강로로부터 발생하는 더스트를 세정처리하여 얻어지는 철분을 이용하여, 보다 대량의 에칭폐액을 보다 적은 동력으로 효율적으로 환원처리하는 것이 가능하고, 또한 염화철계 에칭폐액중의 동, 니켈 등과 같이 철로부터 이온화경향이 작은 금속이온(이하, ″불순물 금속이온″이라 하는 경우도 있음)을 환원회수하는 것이 가능한 염화철계 에칭폐액의 재생방법을 제공함.By using iron powder obtained by washing dust generated from a steelmaking furnace, it is possible to efficiently reduce a large amount of etching waste liquid with less power, and to ionize it from iron such as copper and nickel in iron chloride etching waste liquid. Provides a method for regenerating an iron chloride etching waste liquid capable of reducing and recovering metal ions having a low tendency (hereinafter sometimes referred to as "impurity metal ions").

3. 발명의 해결방법의 요지3. Summary of Solution to Invention

동, 니켈 등의 철보다 이온화경향이 작은 불순물 금속이온을 포함하는 염화철계 에칭폐액(11)에 철분으로 혼입하고, 철분과 금속이온을 반응시켜서, 불순물 금속이온을 제거하는 염화철계 에칭폐액의 재생방법이다. 철분을 유지하는 교반조(18)의 바다부로부터 염화철계 에칭폐액(11) 또는 그 중간처리액인 염화철계 폐액(17)을 공급함과 동시에, 교반조(18)의 상부로부터 용출하는 철분처리액(19)을 취출하고, 교반조(18)의 바닥부에 순환공급함으로써 유동바닥을 형성하여, 철보다 이온화경향이 작은 금속이온이 제거된 철분처리액(19)을 얻는다.Regeneration of the iron chloride etching waste liquid which is mixed with iron chloride etching liquid 11 containing impurity metal ions which have a smaller ionization tendency than iron, such as copper and nickel, and reacts iron and metal ions to remove impurity metal ions. Way. The iron chloride-based etching liquid 11 or the iron chloride-based waste liquid 17, which is an intermediate treatment liquid thereof, is supplied from the sea portion of the stirring vessel 18 holding the iron powder, and the iron treatment liquid eluted from the upper portion of the stirring vessel 18. (19) is taken out, and it circulates and supplies to the bottom part of the stirring tank 18, and a fluidized bottom is formed, and the iron powder liquid 19 from which metal ion with a smaller ionization tendency than iron was removed is obtained.

4. 발명의 중요한 용도4. Important uses of the invention

IC, LSI용의 리드프레임이나 브라운관의 섀도우 마스크 등을 에칭가공할 때에 발생하는 염화철계 에칭폐액을 재생하는데 사용함.It is used to regenerate the iron chloride-based etching waste liquid generated when etching the lead frame for the IC or LSI or the shadow mask of the CRT.

Description

염화철계 에칭폐액의 재생방법Recycling Method of Iron Chloride Etching Waste

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

Claims (11)

교반조내의 동, 니켈 등의 철보다 이온화경향이 작은 금속이온을 함유하는 염화철계 폐액에, 철분을 혼입하고, 이 철분과 상기 금속이온을 반응시켜서, 그 금속이온을 석출제거한 후, 그 철분처리액을 산화처리하는 염화철계 에칭폐액의 재생방법에 있어서, 상기 교반조에 상기 염화철계 폐액을 공급함과 동시에, 그 교반조의 상부로부터 상기 철분을 반응시킨 후의 상기 철분처리액을 취출하고, 그 교반조의 바닥에 순화공급함으로써, 상기 철분이 분산부유하는 유동바닥을 형성하고, 또 상기 교반조의 상부로부터 잉여의 상기 철분처리액을 취출하는 것을 특징으로 하는 염화철계 에칭폐액의 재생방법.Iron powder is mixed into the iron chloride waste liquid containing metal ions having a smaller ionization tendency than iron, such as copper and nickel, in the stirring vessel, and the iron and metal ions are reacted to precipitate and remove the metal ions. In the regeneration method of an iron chloride etching waste liquid which oxidizes a liquid, while supplying the said iron chloride waste liquid to the said stirring tank, the said iron processing liquid after reacting the said iron powder from the upper part of the stirring tank is taken out, and the bottom of the stirring tank is taken out. The method for regenerating an iron chloride etching waste liquid comprising purifying and supplying to a stream to form a fluidized bottom in which the iron powder is dispersed and extracting the excess iron powder from the top of the stirring vessel. 제1항에 있어서, 상기 염화철계 폐액은, 상기 교반조의 바닥부로부터 공급하고, 상기 유동바닥의 형성을 조장하는 염화철계 에칭폐액의 재생방법.The method for regenerating an iron chloride etching waste liquid according to claim 1, wherein the iron chloride waste liquid is supplied from a bottom portion of the stirring vessel and encourages formation of the fluidized bottom. 제1항에 있어서, 상기 교반조의 상부에는, 상기 유동바닥이 형성되는 유동바닥 형성부보다 지름을 크게 하여 상승액의 유속을 느리게 하고, 분산부유하는 철분의 상승을 억제하는 철분분리부가 설치되어 있는 염화철계 에칭폐액 재생방법.2. The iron chloride according to claim 1, wherein an upper portion of the stirring tank is provided with an iron separator having a larger diameter than the fluidized bottom forming portion in which the fluidized bottom is formed to slow the flow rate of the rising liquid and suppressing the increase of the iron contained in the dispersed oil. Recycling Etching Waste Solution. 제1항에 있어서, 상기 교반조에 넣는 염화철계 폐액은, 염화철계 에칭폐액을 전기분해처리에 의해서 제2철이온의 일부 또는 거의를 제1철이온으로 환원한 환원염화철 수용액인 염화철계 에칭폐액의 재생방법.The iron chloride waste liquid of claim 1, wherein the iron chloride waste liquid to be added to the stirring vessel is an iron chloride etching waste liquid which is an aqueous solution of reduced iron chloride in which part or most of the ferric ion is reduced to ferrous ion by electrolytic treatment. How to play. 제4항에 있어서, 상기 전기분해처리에서의 상기 염화철계 에칭폐액의 전해전압을 1~4.5V, 전류밀도를 2~40A/dm2의 범위로 제어하는 염화철계 에칭폐액의 재생방법.5. The method for regenerating an iron chloride etching solution according to claim 4, wherein the electrolytic voltage of said iron chloride etching solution in said electrolytic treatment is controlled to be in the range of 1 to 4.5 V and the current density is in the range of 2 to 40 A / dm 2 . 제4항에 있어서, 상기 전기분해처리에서의 전기분해조의 양극판 및 음극판간의 극간거리를 1.5~50㎜로 하는 염화철계 에칭폐액의 재생방법.The iron chloride etching waste recycling method according to claim 4, wherein the gap distance between the positive electrode plate and the negative electrode plate of the electrolytic bath in the electrolytic treatment is 1.5 to 50 mm. 제4항에 있어서, 상기 전기분해처리를 행하는 전기분해조를, 통액성을 가지는 격막에 의해서 양극을 구비한 양극실과, 음극을 구비한 음극실로 칸막이하고, 상기 염화철계 에칭폐액을 상기 음극실의 일부로부터 공급하고, 그 음극실을 통과하여 환원처리되는 상기 환원염화철 수용액을 그 음극실의 다른 부로부터 취출하는 염화철계 에칭폐액의 재생방법.The electrolytic bath according to claim 4 is partitioned into an anode chamber having an anode by a liquid-permeable diaphragm and a cathode chamber having a cathode, and the iron chloride-based etching waste liquid is separated from the cathode chamber. A method for regenerating an iron chloride etching waste solution, wherein the reduced iron chloride aqueous solution supplied from a portion and passed through the cathode chamber is reduced from another portion of the cathode chamber. 제4항에 있어서, 상기 환원염화철 수용액내의 잔존한 제2철이온의 농도를 10~120g/ℓ로 하는 염화철계 에칭폐액의 재생방법.The method for regenerating iron chloride etching waste according to claim 4, wherein the concentration of ferric ions remaining in said reduced iron chloride aqueous solution is 10 to 120 g / l. 제4항에 있어서, 상기 전기분해처리에서 상기 양극으로부터 생성하는 염소가스의 일부 또는 전부를, 상기 철분처리액의 산화처리에 사용하는 염화철계 에칭폐액의 재생방법.The method for regenerating an iron chloride etching waste liquid according to claim 4, wherein part or all of the chlorine gas generated from the anode in the electrolytic treatment is used for the oxidation treatment of the iron powder. 제1항에 있어서, 상기 철분이, 제강로로부터 발생하는 CaO 등의 불순물을 더 포함하는 더스트로부터 습식법에 의해서 철분더스트를 회수하고, 그 철분더스트를 분쇄하여 물세정하고 상기 불순물을 제거하고, 다시 산세정한 정제철분인 염화철계 에칭폐액의 재생방법.2. The method of claim 1, wherein the iron powder is recovered from the dust further containing impurities such as CaO generated from the steelmaking furnace by a wet method, the iron dust is pulverized, washed with water to remove the impurities, and pickled again. Regeneration method of the iron chloride-based etching waste liquid as defined iron. 제10항에 있어서, 상기 철분더스트의 산세정은, 그 철분더스트를 저장하는 침전조에 경사지게 배치되고, 상부에 산액주입구를 구비한 스크류 콘베이어에 의해서 서서히 배출되는 과정에서 행하여지는 염화철계 에칭폐액의 재생방법.The method of regenerating iron chloride etching waste according to claim 10, wherein the pickling of the iron dust is inclined in a sedimentation tank for storing the iron dust, and is gradually discharged by a screw conveyor having an acid injection hole therein. . ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019970028263A 1996-06-28 1997-06-27 Method for regenerating a waste solution of iron chloride-based etching solution KR100325981B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP18850896A JP3489942B2 (en) 1996-06-28 1996-06-28 Impurity metal removal method of iron chloride aqueous solution using iron powder fluidized stirring tank
JP18850696 1996-06-28
JP96-188506 1996-06-28
JP96-188508 1996-06-28

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KR980001838A true KR980001838A (en) 1998-03-30
KR100325981B1 KR100325981B1 (en) 2002-07-02

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100335601B1 (en) * 2000-02-15 2002-05-08 박호군 Apparatus for continuously reducing iron chloride aqueous solution
KR100395114B1 (en) * 1999-12-23 2003-08-21 주식회사 포스코 A reusing method of waste sulfuric acid solution as pickling solution and ferrous sulfate coagulant
KR20180000225A (en) * 2016-06-22 2018-01-02 솔브레인 주식회사 Recycling device of waste etchant and recycling method of waste etchant

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100485091C (en) * 2004-03-23 2009-05-06 上海绿澄环保科技有限公司 Separation method of nickel ion in iron trichloride solution by crystallization and extraction method
CN110862180A (en) * 2018-08-28 2020-03-06 淄博泰典新材料有限公司 Method and device for treating and recycling high-acid mercury-containing wastewater

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100395114B1 (en) * 1999-12-23 2003-08-21 주식회사 포스코 A reusing method of waste sulfuric acid solution as pickling solution and ferrous sulfate coagulant
KR100335601B1 (en) * 2000-02-15 2002-05-08 박호군 Apparatus for continuously reducing iron chloride aqueous solution
KR20180000225A (en) * 2016-06-22 2018-01-02 솔브레인 주식회사 Recycling device of waste etchant and recycling method of waste etchant

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Publication number Publication date
CN1185367C (en) 2005-01-19
CN1178261A (en) 1998-04-08
KR100325981B1 (en) 2002-07-02

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