KR970077491A - Device separation membrane manufacturing method - Google Patents
Device separation membrane manufacturing method Download PDFInfo
- Publication number
- KR970077491A KR970077491A KR1019960017365A KR19960017365A KR970077491A KR 970077491 A KR970077491 A KR 970077491A KR 1019960017365 A KR1019960017365 A KR 1019960017365A KR 19960017365 A KR19960017365 A KR 19960017365A KR 970077491 A KR970077491 A KR 970077491A
- Authority
- KR
- South Korea
- Prior art keywords
- spacer
- silicon substrate
- nitride
- oxide film
- film
- Prior art date
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- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Abstract
본 발명은 반도체소자의 소자분리막 제조방법에 관한 것으로, 소자분리마스크용 질화막 패턴의 측벽에 형성되는 질화막 스페이서의 저부면이 실리콘 기판과 직접 접촉되는 면적을 최소화하기 위하여 질화막 스페이서의 저부면에 산화막 스페이서를 형성한다. 그로인하여 질화막 스페이서가 실리콘기판에 직접 접촉되는 영역이 최소화되어 질화막 스페이서에 의해 실리콘기판이 받는 스트레스가 감소되고 그 결과 실리콘 기판내에 발생되는 결함을 최소화 할 수 있는 기술이다.The present invention relates to a method of manufacturing an element isolation film for a semiconductor device, in which an oxide spacer is formed on a bottom surface of a nitride spacer so as to minimize an area where a bottom surface of a nitride spacer formed on a sidewall of a nitride- . Thereby minimizing the area where the nitride film spacer directly contacts the silicon substrate, thereby reducing the stress of the silicon substrate due to the nitride film spacer, thereby minimizing defects occurring in the silicon substrate.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제6도 내지 제12도는 본 발명에 의해 실리콘기판에 소자분리막을 제조하는 과정을 도시한 단면도.6 to 12 are cross-sectional views illustrating a process of manufacturing an element isolation film on a silicon substrate according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960017365A KR970077491A (en) | 1996-05-22 | 1996-05-22 | Device separation membrane manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960017365A KR970077491A (en) | 1996-05-22 | 1996-05-22 | Device separation membrane manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970077491A true KR970077491A (en) | 1997-12-12 |
Family
ID=66219687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960017365A KR970077491A (en) | 1996-05-22 | 1996-05-22 | Device separation membrane manufacturing method |
Country Status (1)
Country | Link |
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KR (1) | KR970077491A (en) |
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1996
- 1996-05-22 KR KR1019960017365A patent/KR970077491A/en not_active Application Discontinuation
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