KR970072019A - Coating device - Google Patents

Coating device Download PDF

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Publication number
KR970072019A
KR970072019A KR1019970012175A KR19970012175A KR970072019A KR 970072019 A KR970072019 A KR 970072019A KR 1019970012175 A KR1019970012175 A KR 1019970012175A KR 19970012175 A KR19970012175 A KR 19970012175A KR 970072019 A KR970072019 A KR 970072019A
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KR
South Korea
Prior art keywords
supply
coating liquid
substrate
coating
supply port
Prior art date
Application number
KR1019970012175A
Other languages
Korean (ko)
Other versions
KR100240210B1 (en
Inventor
이즈루 이세키
테쯔 다카하시
Original Assignee
이시다 아키라
다이닛뽕 스크린 세이조오 가부시키가이샤
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Publication date
Application filed by 이시다 아키라, 다이닛뽕 스크린 세이조오 가부시키가이샤 filed Critical 이시다 아키라
Publication of KR970072019A publication Critical patent/KR970072019A/en
Application granted granted Critical
Publication of KR100240210B1 publication Critical patent/KR100240210B1/en

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

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  • Coating Apparatus (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

본 발명은 대기 중인 도포헤드를 작동시키는 경우에, 도포액을 낭비하지 않고 소정 두께를 가지는 적정한 도포막을 형성시킬 수 있도록 하는 것을 과제로 한다. 본 발명에 의하면, 슬릿모양의 공급부(24)를 갖는 도포헤드(20)와 기판(W)을 상대적으로 이동시키면서 공급부(24)로부터 도포액을 공급함으로써 기판(W)상에 도포막을 형성하는 도포장치에 있어서, 용제 공급수단(80)에 의해 용제를 공급한 헤드클리너(60)의 닦아내기부재(66)를 도포헤드(20)의 공급부(24)와 봉지부재(50)의 봉지부(51)에 접촉시키면서 이동시켜, 도포헤드(20)의 공급부(24)와 봉지부재(50)의 봉지부(51)에 존재하고 있는 반고화상태나 고화상태의 도포액을 용제로 용해시킴과 동시에, 닦아내기부재(66)로 닦아냄으로써 공급부(24)로부터 도포액을 정상적으로 공급할 수 있다.An object of the present invention is to make it possible to form an appropriate coating film having a predetermined thickness without wasting the coating liquid when the atmospheric coating head is operated. According to the present invention, an application for forming a coating film on the substrate W by supplying a coating liquid from the supply portion 24 while relatively moving the application head 20 and the substrate W having the slit-shaped supply portion 24. In the apparatus, the wiping member (66) of the head cleaner (60) supplied with the solvent by the solvent supply means (80) is sealed in the supply section (24) of the coating head (20) and the sealing member (50). And dissolving the semi-solidified or solidified coating liquid present in the supply portion 24 of the coating head 20 and the encapsulation portion 51 of the encapsulation member 50 with a solvent. By wiping with the wiping member 66, the coating liquid can be supplied normally from the supply part 24.

Description

도포장치Coating device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도는 본 발명의 도포장치의 제어구성을 나타내는 블록도.3 is a block diagram showing a control configuration of the coating apparatus of the present invention.

Claims (4)

기판의 표면에 도포막을 형성하는 도포장치에 있어서, 기판을 유지하는 기판 유지수단과, 기판에 도포액을 공급하기 위한 슬릿모양의 공급구를 갖는 도포액 공급수단과, 기판의 표면과 상기 공급구가 상대적으로 이동하도록, 상기 기판 유지수단과 상기 도포액 공급수단을 상대적으로 이동시키는 제1이동수단과, 상기 공급구와 접촉이 가능하며, 또한 상기 공급구를 청소하기 위한 장척(長尺) 모양의 부재, 상기 장척 모양의 부재를 바깥으로 감은 공급로울러, 및 상기 공급로울러로부터 상기 장척모양의 부재를 끌어내는 감기 로울러를 갖는 청소수단과, 상기 공급구와 상기 장척모양의 부재를 접촉시키면서, 상기 도포액 공급수단과 상기 청소수단을 상대적으로 이동시키는 제2이동수단과, 상기 장척모양의 부재에 용제(溶劑)를 공급하는 용제 공급수단을 구비한 것을 특징으로 하는 도포장치.1. A coating apparatus for forming a coating film on the surface of a substrate, comprising: a substrate holding means for holding a substrate, coating liquid supply means having a slit-shaped supply port for supplying a coating liquid to the substrate, a surface of the substrate and the supply port The first moving means for relatively moving the substrate holding means and the coating liquid supplying means so as to move relatively, and the supply port is in contact with, and has a long shape for cleaning the supply port. A cleaning means having a member, a supply roller wound around the long member, and a winding roller which pulls the long member out of the supply roller, and the coating liquid while contacting the supply port and the long member. Second supply means for relatively moving the supply means and the cleaning means, and solvent supply water for supplying a solvent to the elongate member A coating device, characterized in that comprises a. 제1항에 있어서, 상기 기판 유지수단과 상기 도포액 공급수단이 대기상태에 있는 경우에, 상기 공급부를 닫아 막는 봉지부재와, 상기 공급구와 상기 봉지부재를 대향시킨 상태로, 상기 도포액 공급수단과 상기 봉지부재를 접촉ㆍ분리방향으로 상대적으로 이동시키는 제3이동수단을 더 구비한 것을 특징으로 하는 도포장치.2. The coating liquid supplying means according to claim 1, wherein when the substrate holding means and the coating liquid supplying means are in a standby state, the sealing member which closes and closes the supply portion, and the coating liquid and the sealing member face each other. And a third moving means for moving the sealing member relatively in the contacting and separating direction. 제2항에 있어서, 상기 청소수단은, 가이드 플레이트를 더 가지고 있고, 상기 가이드 플레이트의 일면측에 상기 공급로울러가 설치됨과 동시에, 상기 가이드 플레이트의 다른 면측에 상기 감기 로울러가 설치되어, 일면측의 상기 공급로울러부터 끌어 내어진 상기 장척모양의 부재를 상기 가이드 플레이트의 선단부에서 방향반전시켜 다른 면측의 상기 감기 로울러에 감겨지게 하고, 상기 제2 이동수단은, 상기 봉지부재와 상기 장척모양의 부재를 접촉시키면서, 상기 봉지부재와 상기 청소수단을 상대적으로 이동시키는 것을 특징으로 하는 도포장치.The said cleaning means further has a guide plate, The supply roller is provided in the one surface side of the said guide plate, The winding roller is provided in the other surface side of the said guide plate, The long member drawn out from the supply roller is inverted at the distal end of the guide plate to be wound around the winding roller on the other side, and the second moving means includes the sealing member and the long member. And the sealing member and the cleaning means are relatively moved while being in contact. 제2항 또는 제3항에 있어서, 상기 봉지부재는, 탄성부재로 형성되고, 또한 상기 공급구와 접촉 가능한 봉지부를 구비한 것을 특징으로 하는 도포장치.4. An applicator according to claim 2 or 3, wherein the encapsulation member is formed of an elastic member and provided with an encapsulation portion which is in contact with the supply port. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019970012175A 1996-04-24 1997-04-02 A coating apparatus provide with a supply port cleaner KR100240210B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10278696A JP3386655B2 (en) 1996-04-24 1996-04-24 Coating device
JP96-102786 1996-04-24

Publications (2)

Publication Number Publication Date
KR970072019A true KR970072019A (en) 1997-11-07
KR100240210B1 KR100240210B1 (en) 2000-01-15

Family

ID=14336821

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970012175A KR100240210B1 (en) 1996-04-24 1997-04-02 A coating apparatus provide with a supply port cleaner

Country Status (2)

Country Link
JP (1) JP3386655B2 (en)
KR (1) KR100240210B1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7416758B2 (en) 2004-12-31 2008-08-26 Lg Display Co., Ltd. Slit coater
US7449069B2 (en) 2004-12-28 2008-11-11 Lg Display Co., Ltd. Slit coater having apparatus for supplying a coating solution
US7647884B2 (en) 2004-12-31 2010-01-19 Lg. Display Co., Ltd. Slit coater with a standby unit for a nozzle and a coating method using the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100468529B1 (en) * 2002-05-18 2005-01-27 엘지.필립스 엘시디 주식회사 etchant coating apparatus and wet etching method using thereof
JP4832963B2 (en) * 2006-06-06 2011-12-07 アスリートＦａ株式会社 Resin coating system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7449069B2 (en) 2004-12-28 2008-11-11 Lg Display Co., Ltd. Slit coater having apparatus for supplying a coating solution
US7416758B2 (en) 2004-12-31 2008-08-26 Lg Display Co., Ltd. Slit coater
US7647884B2 (en) 2004-12-31 2010-01-19 Lg. Display Co., Ltd. Slit coater with a standby unit for a nozzle and a coating method using the same

Also Published As

Publication number Publication date
JP3386655B2 (en) 2003-03-17
KR100240210B1 (en) 2000-01-15
JPH09293653A (en) 1997-11-11

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