KR970053412A - Device Separation Method of Semiconductor Device - Google Patents
Device Separation Method of Semiconductor Device Download PDFInfo
- Publication number
- KR970053412A KR970053412A KR1019950054960A KR19950054960A KR970053412A KR 970053412 A KR970053412 A KR 970053412A KR 1019950054960 A KR1019950054960 A KR 1019950054960A KR 19950054960 A KR19950054960 A KR 19950054960A KR 970053412 A KR970053412 A KR 970053412A
- Authority
- KR
- South Korea
- Prior art keywords
- pattern
- nitride
- film pattern
- device isolation
- forming
- Prior art date
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- Element Separation (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
본 발명은 반도체소자의 소자분리막 제조방법에 관한 것으로, 본 발명은 LOCOS 공정을 응용한 소자분리막 제조방법에 있어서, 반도체기판의 상부에 소자분리영역을 노출하는 제1질화막패턴과, 열산화막패턴, 제2질화막패턴을 차례로 형성하여 필드산화막 형성시 상기 열산화막패턴의 응축응력 성질을 이용하여 상기 제1질화막 패턴의 인장응력을 완화하므로써, 소자분리막을 용이하게 형성한다.The present invention relates to a device isolation film manufacturing method of a semiconductor device, the present invention relates to a device isolation film manufacturing method applying a LOCOS process, the first nitride film pattern for exposing the device isolation region on the semiconductor substrate, a thermal oxide film pattern, By forming the second nitride film pattern in sequence to reduce the tensile stress of the first nitride film pattern by using the condensation stress property of the thermal oxide film pattern, the device isolation film is easily formed.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2A도 내지 제2D도는 본 발명의 실시예에 따른 반도체소자의 소자분리막 제조 공정도.2A through 2D are diagrams illustrating a process of fabricating an isolation layer of a semiconductor device in accordance with an embodiment of the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950054960A KR970053412A (en) | 1995-12-22 | 1995-12-22 | Device Separation Method of Semiconductor Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950054960A KR970053412A (en) | 1995-12-22 | 1995-12-22 | Device Separation Method of Semiconductor Device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970053412A true KR970053412A (en) | 1997-07-31 |
Family
ID=66617621
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950054960A KR970053412A (en) | 1995-12-22 | 1995-12-22 | Device Separation Method of Semiconductor Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970053412A (en) |
-
1995
- 1995-12-22 KR KR1019950054960A patent/KR970053412A/en not_active Application Discontinuation
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