KR970046866U - 웨이퍼 클램핑 링 - Google Patents
웨이퍼 클램핑 링Info
- Publication number
- KR970046866U KR970046866U KR2019950052649U KR19950052649U KR970046866U KR 970046866 U KR970046866 U KR 970046866U KR 2019950052649 U KR2019950052649 U KR 2019950052649U KR 19950052649 U KR19950052649 U KR 19950052649U KR 970046866 U KR970046866 U KR 970046866U
- Authority
- KR
- South Korea
- Prior art keywords
- clamping ring
- wafer clamping
- wafer
- ring
- clamping
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950052649U KR970046866U (ko) | 1995-12-29 | 1995-12-29 | 웨이퍼 클램핑 링 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950052649U KR970046866U (ko) | 1995-12-29 | 1995-12-29 | 웨이퍼 클램핑 링 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970046866U true KR970046866U (ko) | 1997-07-31 |
Family
ID=60874966
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950052649U KR970046866U (ko) | 1995-12-29 | 1995-12-29 | 웨이퍼 클램핑 링 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970046866U (ko) |
-
1995
- 1995-12-29 KR KR2019950052649U patent/KR970046866U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |