KR970046866U - 웨이퍼 클램핑 링 - Google Patents

웨이퍼 클램핑 링

Info

Publication number
KR970046866U
KR970046866U KR2019950052649U KR19950052649U KR970046866U KR 970046866 U KR970046866 U KR 970046866U KR 2019950052649 U KR2019950052649 U KR 2019950052649U KR 19950052649 U KR19950052649 U KR 19950052649U KR 970046866 U KR970046866 U KR 970046866U
Authority
KR
South Korea
Prior art keywords
clamping ring
wafer clamping
wafer
ring
clamping
Prior art date
Application number
KR2019950052649U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950052649U priority Critical patent/KR970046866U/ko
Publication of KR970046866U publication Critical patent/KR970046866U/ko

Links

KR2019950052649U 1995-12-29 1995-12-29 웨이퍼 클램핑 링 KR970046866U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950052649U KR970046866U (ko) 1995-12-29 1995-12-29 웨이퍼 클램핑 링

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950052649U KR970046866U (ko) 1995-12-29 1995-12-29 웨이퍼 클램핑 링

Publications (1)

Publication Number Publication Date
KR970046866U true KR970046866U (ko) 1997-07-31

Family

ID=60874966

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950052649U KR970046866U (ko) 1995-12-29 1995-12-29 웨이퍼 클램핑 링

Country Status (1)

Country Link
KR (1) KR970046866U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application