KR970046630U - Integral gas injector - Google Patents
Integral gas injectorInfo
- Publication number
- KR970046630U KR970046630U KR2019950052648U KR19950052648U KR970046630U KR 970046630 U KR970046630 U KR 970046630U KR 2019950052648 U KR2019950052648 U KR 2019950052648U KR 19950052648 U KR19950052648 U KR 19950052648U KR 970046630 U KR970046630 U KR 970046630U
- Authority
- KR
- South Korea
- Prior art keywords
- gas injector
- integral gas
- integral
- injector
- gas
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950052648U KR200158123Y1 (en) | 1995-12-29 | 1995-12-29 | Built-in gas injector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950052648U KR200158123Y1 (en) | 1995-12-29 | 1995-12-29 | Built-in gas injector |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970046630U true KR970046630U (en) | 1997-07-31 |
KR200158123Y1 KR200158123Y1 (en) | 1999-10-15 |
Family
ID=19441831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950052648U KR200158123Y1 (en) | 1995-12-29 | 1995-12-29 | Built-in gas injector |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200158123Y1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102323078B1 (en) * | 2014-11-05 | 2021-11-10 | 세메스 주식회사 | Apparatus for treating substrate |
-
1995
- 1995-12-29 KR KR2019950052648U patent/KR200158123Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200158123Y1 (en) | 1999-10-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20050621 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |