KR970030635A - Device Separation Method of Nonvolatile Memory Device - Google Patents
Device Separation Method of Nonvolatile Memory Device Download PDFInfo
- Publication number
- KR970030635A KR970030635A KR1019950040695A KR19950040695A KR970030635A KR 970030635 A KR970030635 A KR 970030635A KR 1019950040695 A KR1019950040695 A KR 1019950040695A KR 19950040695 A KR19950040695 A KR 19950040695A KR 970030635 A KR970030635 A KR 970030635A
- Authority
- KR
- South Korea
- Prior art keywords
- oxide film
- film
- ion implantation
- forming
- region
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823481—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B99/00—Subject matter not provided for in other groups of this subclass
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Abstract
본 발명은 필드트랜지스터의 임계전압의 감소와 내압전압의 특성저하를 동시에 방지할 수 있는 불휘발성 메모리 장치의 소자분리방법에 관하여 개시한다. 본 발명의 불휘발성 메모리 장치의 소자분리방법에 의하면, 셀어레이지역은 1,2차의 불순물 이온주입에 의한 소자분리(channel stop)를 진행함으로써 1차의 불순물 이온주입 후 필드산화막의 성장시 편석현상에 의한 불순물 손실을 2차의 이온주입으로 보완해 줌에 따라 칩의 동작시 셀-어레이 지역의 제어게이트에 인가되는 고전압에 의한 인접 셀(cell)들과의 간섭현상을 막아주며, 1차 불순물 이온주입이 되지 않은 고전압회로지역은 필드산화막 성장 후 셀어레이 지역에 진행되는 2차 불순물 이온주입의 사진공정을 이용하여 동시에 불순물을 이온주입함에 따라 필드산화막 성장시의 불순물의 수평확산과 편석현상을 모두 감소시킬 수 있다.The present invention discloses a device isolation method of a nonvolatile memory device capable of simultaneously preventing the reduction of the threshold voltage of the field transistor and the deterioration of characteristics of the breakdown voltage. According to the device isolation method of the nonvolatile memory device of the present invention, the cell array region is segregated during the growth of the field oxide film after the primary impurity ion implantation by performing channel stop by the first and second impurity ion implantation. As the impurity loss caused by the phenomenon is compensated by the secondary ion implantation, it prevents the interference with adjacent cells due to the high voltage applied to the control gate in the cell-array region during the operation of the chip. In the high voltage circuit region where impurity ion implantation is not performed, the horizontal diffusion and segregation of impurities during field oxide film growth are performed by implanting impurities at the same time by using the secondary impurity ion implantation process performed in the cell array region after the field oxide film growth. Can be reduced.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1도는 본 발명에 의하여 셀어레이지역 및 주변회로지역을 갖는 불휘발성 메모리 장치의 소자분리방법을 설명하기 위한 평면도이다.1 is a plan view illustrating a device isolation method of a nonvolatile memory device having a cell array region and a peripheral circuit region according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950040695A KR970030635A (en) | 1995-11-10 | 1995-11-10 | Device Separation Method of Nonvolatile Memory Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950040695A KR970030635A (en) | 1995-11-10 | 1995-11-10 | Device Separation Method of Nonvolatile Memory Device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970030635A true KR970030635A (en) | 1997-06-26 |
Family
ID=66587049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950040695A KR970030635A (en) | 1995-11-10 | 1995-11-10 | Device Separation Method of Nonvolatile Memory Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970030635A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100298498B1 (en) * | 1998-07-17 | 2001-08-07 | 아끼구사 나오유끼 | Correlator and Delay Lock Loop Circuitry |
-
1995
- 1995-11-10 KR KR1019950040695A patent/KR970030635A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100298498B1 (en) * | 1998-07-17 | 2001-08-07 | 아끼구사 나오유끼 | Correlator and Delay Lock Loop Circuitry |
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WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |