KR970030210A - Chemical Supply Control Tank of Semiconductor Manufacturing Equipment - Google Patents
Chemical Supply Control Tank of Semiconductor Manufacturing Equipment Download PDFInfo
- Publication number
- KR970030210A KR970030210A KR1019950042900A KR19950042900A KR970030210A KR 970030210 A KR970030210 A KR 970030210A KR 1019950042900 A KR1019950042900 A KR 1019950042900A KR 19950042900 A KR19950042900 A KR 19950042900A KR 970030210 A KR970030210 A KR 970030210A
- Authority
- KR
- South Korea
- Prior art keywords
- tank
- chemical
- chemical supply
- supply
- semiconductor manufacturing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Weting (AREA)
Abstract
본 발명은 케미컬을 일정량씩 공급하기 위한 것으로, 소정의 용량을 갖고 밀폐된 탱크와, 상기 탱크에 케미컬을 저장하기 위한 공급파이프와, 상기 탱크에 저장된 케미컬을 배출하기 위한 배출파이프와, 상기 탱크내에 저장된 캐미컬이 소정높이에서 자동 배출되도록 하여 항상 일정한 량이 저장되도록 하는 오버 플로우 파이프를 구비하는 반도체 제조장치의 케미컬 공급량 조절탱크에 있어서, 상기 탱크내에 부레를 설치하고, 상기 부레를 승, 하강 수단이 수직방향으로 이동시키도록 된 구성이다. 따라서 케미컬 공급량이 간단하게 조절되어 작업성이 향상되고, 미세조절이 가능하여 정확한 혼합비가 유지됨으로써 공정의 안정화를 이룰 수 있으며, 설비의 가동중에도 조절이 가능하고 케미컬의 변화량을 육안으로 확인할 수 있어 편리한 효과가 있다.The present invention is to supply a chemical by a fixed amount, the tank having a predetermined capacity, a supply pipe for storing the chemical in the tank, a discharge pipe for discharging the chemical stored in the tank, and in the tank In the chemical feed amount control tank of the semiconductor manufacturing apparatus having an overflow pipe which is to automatically discharge the stored chemical at a predetermined height so that a constant amount is always stored, a tank is installed in the tank, and the means for raising and lowering the tank is It is configured to move in the vertical direction. Therefore, the chemical supply amount can be easily adjusted to improve workability, and fine adjustment is possible to maintain the correct mixing ratio, thereby achieving stabilization of the process, and to control the amount of chemical change while operating the equipment. It works.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제3도는 본 발명에 케미컬 공급량 조절 탱크를 나타낸 부분 절개사시도이다.3 is a partial cutaway perspective view showing the chemical feed amount control tank according to the present invention.
제4도는 제3도 A-A선 확대 단면도이다.4 is an enlarged cross-sectional view taken along a line A-A of FIG.
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950042900A KR0166208B1 (en) | 1995-11-22 | 1995-11-22 | A chemical supply control tank for semiconductor device fabrication equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950042900A KR0166208B1 (en) | 1995-11-22 | 1995-11-22 | A chemical supply control tank for semiconductor device fabrication equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970030210A true KR970030210A (en) | 1997-06-26 |
KR0166208B1 KR0166208B1 (en) | 1999-02-01 |
Family
ID=19435187
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950042900A KR0166208B1 (en) | 1995-11-22 | 1995-11-22 | A chemical supply control tank for semiconductor device fabrication equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0166208B1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100812081B1 (en) * | 2003-12-31 | 2008-03-07 | 동부일렉트로닉스 주식회사 | Bath Cleaner |
-
1995
- 1995-11-22 KR KR1019950042900A patent/KR0166208B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0166208B1 (en) | 1999-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20060830 Year of fee payment: 9 |
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LAPS | Lapse due to unpaid annual fee |