KR970017724A - Thin film inductor and manufacturing method thereof - Google Patents

Thin film inductor and manufacturing method thereof Download PDF

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Publication number
KR970017724A
KR970017724A KR1019950028920A KR19950028920A KR970017724A KR 970017724 A KR970017724 A KR 970017724A KR 1019950028920 A KR1019950028920 A KR 1019950028920A KR 19950028920 A KR19950028920 A KR 19950028920A KR 970017724 A KR970017724 A KR 970017724A
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KR
South Korea
Prior art keywords
insulating substrate
forming
pattern layer
conductor pattern
external electrode
Prior art date
Application number
KR1019950028920A
Other languages
Korean (ko)
Other versions
KR0167392B1 (en
Inventor
오태희
송병무
이충국
Original Assignee
우덕창
쌍용양회공업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 우덕창, 쌍용양회공업 주식회사 filed Critical 우덕창
Priority to KR1019950028920A priority Critical patent/KR0167392B1/en
Publication of KR970017724A publication Critical patent/KR970017724A/en
Application granted granted Critical
Publication of KR0167392B1 publication Critical patent/KR0167392B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/06—Thin magnetic films, e.g. of one-domain structure characterised by the coupling or physical contact with connecting or interacting conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/28—Coils; Windings; Conductive connections
    • H01F27/29—Terminals; Tapping arrangements for signal inductances
    • H01F27/292—Surface mounted devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/16—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates the magnetic material being applied in the form of particles, e.g. by serigraphy, to form thick magnetic films or precursors therefor

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

본 발명의 박막형 인덕터는 스파이럴 형태의 도체 패턴층을 형성할때 중심에 있는 스파이럴 패턴의 한쪽 끝을 외부 전극과 연결시키기 위한 인출선을 형성하는 것을 특징으로 하며, 기존의 인출선은 도체 패턴층과 같은 평면 쪽에 위치하여 제조 방법이 까다롭고 정전용량으로 인하여 고주파사용에 한계가 있으나, 본 발명에서는 인출선의 제작을 기판을 관통하여 기판 하부면에 형성시킴으로 인해 제조 공정이 간단하고 도체 패턴-절연물-인출선에서 오는 정전 용량을 무시할 수 있기 때문에 인덕터의 주파수 사용 한계를 높일 수 있다.The thin film inductor of the present invention is characterized by forming a leader line for connecting one end of a spiral pattern at the center to an external electrode when forming a spiral pattern conductor pattern layer. It is located on the same plane and the manufacturing method is difficult and there is a limit to the use of high frequency due to the capacitance. However, in the present invention, the manufacturing process is simple and the conductor pattern-insulation-drawing is performed by forming the lead wire through the substrate to form the lower surface of the substrate. The capacitance from the line can be ignored, which increases the frequency usage limit of the inductor.

Description

박막형 인덕터 및 그의 제조방법Thin film inductor and manufacturing method thereof

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제2도는 본 발명에 따라 제조된 박막형 인덕터의 사시도이다.2 is a perspective view of a thin film inductor manufactured according to the present invention.

제3도는 제2도의 본 발명에 따른 박막형 인덕터를 제조하기 위한 공정도이다.3 is a process chart for manufacturing a thin film inductor according to the present invention of FIG.

Claims (3)

절연 기판(31)에 도체 패턴층(33)을 형성시켜 고주파에서 사용되는 박막형 인덕터에 있어서, 상기 절연기판(31)의 한면에 스파이럴 형태로 형성된 도체 패턴층(33)의 한쪽 단자가 동일 면 상의 외부 전극(34)과 연결되어 있고, 상기 도체 패턴층(33)의 다른쪽 단자는 상기 절연 기판(31)의 중앙부에서 해당 절연 기판(31)을 관통하는 연결 구멍(35)을 통해서 해당 절연 기판(31)의 반대면에 형성된 인출선(37)에 의해 외부 전극(38)과 연결되어 있는 것을 특징으로 하는 고주파용 박막형 인덕터.In a thin film type inductor used by forming a conductor pattern layer 33 on an insulating substrate 31 at a high frequency, one terminal of the conductor pattern layer 33 formed in a spiral shape on one surface of the insulating substrate 31 is formed on the same surface. The other terminal of the conductive pattern layer 33 is connected to an external electrode 34 and is connected to the insulating substrate through a connection hole 35 passing through the insulating substrate 31 at the center of the insulating substrate 31. Thin film inductor for high frequency, characterized in that connected to the external electrode 38 by a lead line 37 formed on the opposite side of the (31). 절연 기판의 한면에서 그 반대면으로 관통하는 연결 구멍을 중앙 부위에 형성하는 단계; 상기 절연 기판의 양쪽면 가장자리에 외부 전극을 각각 형성하는 단계; 및 상기 절연 기판의 서로 반대면에 각각 상기 연결 구멍과 상기 외부 전극을 연결하는 인출선과 스파이럴 형태의 도체 패턴층을 형성하는 단계로 이루어지는 것을 특징으로 하는 박막형 인덕터의 제조 방법.Forming a connection hole at a central portion thereof, penetrating from one side of the insulating substrate to the other side thereof; Forming external electrodes on both side edges of the insulating substrate; And forming a leader line and a spiral pattern conductor pattern layer connecting the connection hole and the external electrode to opposite surfaces of the insulating substrate, respectively. 제2항에 있어서, 상기 외부 전극은 연결 구멍과 동시에 제조하며, 상기 도체 패턴층은 구리, 은, 니켈, 크롬, 금, 티타늄, 알루미늄 또는 이들을 포함한 복합 물질로부터 선택한 것을 사용하는 박막형 인덕터의 제조 방법.The method of claim 2, wherein the external electrode is simultaneously manufactured with a connection hole, and the conductor pattern layer is selected from copper, silver, nickel, chromium, gold, titanium, aluminum, or a composite material including the same. . ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950028920A 1995-09-05 1995-09-05 A film-type inductor and method for preparing the same KR0167392B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950028920A KR0167392B1 (en) 1995-09-05 1995-09-05 A film-type inductor and method for preparing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950028920A KR0167392B1 (en) 1995-09-05 1995-09-05 A film-type inductor and method for preparing the same

Publications (2)

Publication Number Publication Date
KR970017724A true KR970017724A (en) 1997-04-30
KR0167392B1 KR0167392B1 (en) 1999-01-15

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KR1019950028920A KR0167392B1 (en) 1995-09-05 1995-09-05 A film-type inductor and method for preparing the same

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007049115A (en) * 2005-07-13 2007-02-22 Seiko Epson Corp Semiconductor device
KR102016483B1 (en) 2013-09-24 2019-09-02 삼성전기주식회사 Inductor

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