KR970015315U - Wafer quantity measuring device - Google Patents

Wafer quantity measuring device

Info

Publication number
KR970015315U
KR970015315U KR2019950025788U KR19950025788U KR970015315U KR 970015315 U KR970015315 U KR 970015315U KR 2019950025788 U KR2019950025788 U KR 2019950025788U KR 19950025788 U KR19950025788 U KR 19950025788U KR 970015315 U KR970015315 U KR 970015315U
Authority
KR
South Korea
Prior art keywords
measuring device
quantity measuring
wafer quantity
wafer
measuring
Prior art date
Application number
KR2019950025788U
Other languages
Korean (ko)
Other versions
KR0132409Y1 (en
Inventor
전영준
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950025788U priority Critical patent/KR0132409Y1/en
Publication of KR970015315U publication Critical patent/KR970015315U/en
Application granted granted Critical
Publication of KR0132409Y1 publication Critical patent/KR0132409Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019950025788U 1995-09-22 1995-09-22 Counting apparatus of wafer KR0132409Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950025788U KR0132409Y1 (en) 1995-09-22 1995-09-22 Counting apparatus of wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950025788U KR0132409Y1 (en) 1995-09-22 1995-09-22 Counting apparatus of wafer

Publications (2)

Publication Number Publication Date
KR970015315U true KR970015315U (en) 1997-04-28
KR0132409Y1 KR0132409Y1 (en) 1999-02-01

Family

ID=19423971

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950025788U KR0132409Y1 (en) 1995-09-22 1995-09-22 Counting apparatus of wafer

Country Status (1)

Country Link
KR (1) KR0132409Y1 (en)

Also Published As

Publication number Publication date
KR0132409Y1 (en) 1999-02-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090828

Year of fee payment: 12

EXPY Expiration of term