KR960038472A - Shutter for Exposure Equipment - Google Patents

Shutter for Exposure Equipment Download PDF

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Publication number
KR960038472A
KR960038472A KR1019950008492A KR19950008492A KR960038472A KR 960038472 A KR960038472 A KR 960038472A KR 1019950008492 A KR1019950008492 A KR 1019950008492A KR 19950008492 A KR19950008492 A KR 19950008492A KR 960038472 A KR960038472 A KR 960038472A
Authority
KR
South Korea
Prior art keywords
shutter
coupled
disc
exposure apparatus
support
Prior art date
Application number
KR1019950008492A
Other languages
Korean (ko)
Other versions
KR0153455B1 (en
Inventor
김용기
Original Assignee
이대원
삼성항공산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이대원, 삼성항공산업 주식회사 filed Critical 이대원
Priority to KR1019950008492A priority Critical patent/KR0153455B1/en
Publication of KR960038472A publication Critical patent/KR960038472A/en
Application granted granted Critical
Publication of KR0153455B1 publication Critical patent/KR0153455B1/en

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B9/00—Exposure-making shutters; Diaphragms
    • G03B9/08—Shutters
    • G03B9/10—Blade or disc rotating or pivoting about axis normal to its plane
    • G03B9/16—Two separate members moving in the same direction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G03B17/12—Bodies with means for supporting objectives, supplementary lenses, filters, masks, or turrets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B7/00—Control of exposure by setting shutters, diaphragms or filters, separately or conjointly
    • G03B7/08—Control effected solely on the basis of the response, to the intensity of the light received by the camera, of a built-in light-sensitive device
    • G03B7/10—Control effected solely on the basis of the response, to the intensity of the light received by the camera, of a built-in light-sensitive device a servo-motor providing energy to move the setting member

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

모타에 의하여 고속으로 회전하는 블레이드가 정지시에 유발되는 관성력을 작게 발생시키도록 하고, 동시에 한 개의 광원으로 여러개의 웨이퍼에 필요한 광원을 공급할 수 있도록 하는데에 있는 것으로써, 그 구조는 제1지지체와 제2지지체를 상부에 상호 대향되게 구비하면서, 빛이 통과할 수 있도록 된 윈도우를 구비한 프레임과, 상기 하부 프레임의 윈도우상에 위치하면서 상기 제1 지지체와 제2지지체에 원판에 구비된 축이 회전 되도록 결합되되. 이 원판의 외주에 결합되어 설치되면서 광원으로부터 비추어지는 빛을 통과 시키거나 차단시키는 블레이드와, 상기 제2지지체에 결합되어 있는 축에 회전 동력을 전달하는 모타가 결합되어 설피된 노광장치용 셔터를 제공한다.The blade rotating at high speed by the motor generates small inertia force caused at the time of stopping, and at the same time, it is possible to supply the necessary light sources to several wafers with one light source. A frame having a window allowing light to pass therethrough, the second supporting body being opposed to the upper portion, and an axis provided on the disc on the first support and the second supporting body while being positioned on the window of the lower frame; Combined to rotate. It is installed coupled to the outer periphery of the disc and the blade for passing or blocking the light emitted from the light source, and the motor for transmitting rotational power to the shaft coupled to the second support is coupled to provide a shutter for the exposure apparatus. do.

Description

노광장치용 셔터Shutter for Exposure Equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명인 셔터가 노광장치에 설치되어 사용되는 상태 예시도, 제2도는 본 발명인 셔터의 결합 단면도, 제3도는 본 발명인 노광장치의 A-A선 단면도, 제4도는 본 발명인 노광장치의 B-B선 단면도, 제5도 (가)(나)(다)는 본 발명인 노광장치의 작동상태도, 제6도는 종래 사용되는 셔터가 노광장치에 설치되어 사용되는 상태예시도.1 is a view illustrating a state in which a shutter of the present invention is installed and used in an exposure apparatus, FIG. 2 is a cross sectional view of a combination of a shutter of the present invention, FIG. 3 is a sectional view taken along line AA of an exposure apparatus of the present invention, and FIG. 4 is a BB line of an exposure apparatus of the present invention. Sectional drawing, FIG. 5 (a) (b) (c) is an operation state of the exposure apparatus of this invention, and FIG.

Claims (7)

제1지지체(20)와 제2지지체(22)를 상부에 상호 대향되게 구비하면서, 빛이 통과 할 수 있도록된 윈도우(16)를 구비하고 있는 하부프레임(18)과, 상기 하부 프레임(18)의 윈도우(16)상에 위치하면서 상기 제1지지체(20)와 제2지지체(22)에 원한(26)에 구비된 축(30)이 회전되도록 결합되되, 이 원판(26)의 외주에 고정 설피되면서 광원(4)으로부터 비추어지는 빛을 통과 시키거나 차단시키는 블레이트(28)와, 상기 제2지지체(22)에 결합되어 있는 축(30)에 회전동력을 전달하는 모타(34)가 결합되어 설치된 것을 특징으로 하는 노광장치용 셔터.A lower frame 18 having a window 16 through which light can pass while having a first support 20 and a second support 22 opposed to each other, and the lower frame 18. Located on the window 16 of the first support 20 and the second support 22 is coupled to the shaft 30 provided in the grudge 26 to be rotated, fixed to the outer periphery of the disc 26 While being installed, the blades 28 for passing or blocking the light emitted from the light source 4 and the motor 34 for transmitting rotational power to the shaft 30 coupled to the second support 22 are coupled. Shutter for an exposure apparatus, characterized in that installed. 제1항에 있어서, 상기 모타(34)에 외측에 플레이트(40)가 부착 설치되되, 이 플레이트(40)에 제1센서(42)와 제2센서(44)가 부착설치되어, 동시에 상기 플레이트(40)를 회전되게 관통하는 모타(34)의 축(36)에 칼라(48)가 결합되는데. 이 칼라(48)의 외주에 상기 제1센서(42)와 제2센서(44)에 감지되도록 된 돌기(46)가 형성되어진 것을 특징으로 하는 노광장치용 셔터.The plate 40 is attached to the outside of the motor 34, the first sensor 42 and the second sensor 44 is attached to the plate 40, at the same time the plate The collar 48 is coupled to the shaft 36 of the motor 34 which penetrates the 40. Shutter for the exposure apparatus, characterized in that the projection (46) to be detected by the first sensor 42 and the second sensor 44 is formed on the outer periphery of the collar (48). 제1항에 있어서, 상기 원판(26)이 한쌍을 이루면서 상호 대칭되게 설치되되, 이 원판(26)의 내측에 연결봉(24)이 고정 설치되고, 동시에 상기 원한(26)의 외주에 결합 설치되는 블레이드(28)가 광원(4)으로 부터 비추어지는 빛이 통과 할 수 있도록 상호 대칭되게 이격되어 한쌍을 이루며 설치된 것을 특징으로 하는 노광장치용 셔터.According to claim 1, wherein the disc 26 is installed in a pair symmetrical with each other, the connecting rod 24 is fixedly installed on the inner side of the disc 26, at the same time coupled to the outer periphery of the disc 26 Shutter for the exposure apparatus, characterized in that the blade 28 is installed in pairs spaced apart from each other symmetrically so that the light from the light source (4) can pass. 제3항에 있어서, 상기 원판(26)의 외주에 블레이드(28)에 무게에 달하는 원판(26)을 일부 제거시킨 절취부(27)가 형성된 것을 특징으로 하는 노광장치용 셔터.4. An exposure apparatus shutter according to claim 3, wherein a cutout portion (27) is formed on the outer circumference of the disc (26) to partially remove the disc (26) weighing the blade (28). 제1항 내지 제4항에 있어서, 상기 하부 프레임(18)의 상부에 관통공(54)을 구비하고 있는 하우징(50)이 장착되는데. 이 하우징(50)의 상부 선단부에 광원(4)으로부터 비추어지는 빛을 굴절시켜 관통공(54)으로 유도시키기는 제3반사경(52)이 설치된 것을 특징으로 하는 노광장치용 셔터.The housing (50) according to any one of claims 1 to 4, wherein a housing (50) having a through hole (54) is mounted on the lower frame (18). A shutter for an exposure apparatus, characterized in that a third reflector (52) is provided at an upper end of the housing (50) to refract light emitted from the light source (4) to guide the through hole (54). 제5항에 있어서, 상기 하우징(50)의 일측에 커넥터(58)가 결합되어 설치되되, 이 커넥터(58)에 상기 하우징(50)에 형성된 관통공(54)과 일치되게 관통공(60)을 형성하면서 이 관통공(60)이 선단부에 광섬유(62)를 결합하며 설치된 것을 특징으로하는 노광장치용 셔터.According to claim 5, The connector 58 is coupled to one side of the housing 50 is installed, the through hole 60 to match the through hole 54 formed in the housing 50 to the connector 58 A shutter for an exposure apparatus, characterized in that the through hole (60) is installed while coupling the optical fiber (62) to the distal end. 제5항에 있어서, 상기 하우징(50)의 관통공(54)에 렌즈(56)가 설치된 것을 특징으로하는 노광장치용 셔터.A shutter for an exposure apparatus according to claim 5, wherein a lens (56) is provided in a through hole (54) of said housing (50).
KR1019950008492A 1995-04-12 1995-04-12 Shutter for exposure of light KR0153455B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950008492A KR0153455B1 (en) 1995-04-12 1995-04-12 Shutter for exposure of light

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950008492A KR0153455B1 (en) 1995-04-12 1995-04-12 Shutter for exposure of light

Publications (2)

Publication Number Publication Date
KR960038472A true KR960038472A (en) 1996-11-21
KR0153455B1 KR0153455B1 (en) 1998-12-01

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ID=19411975

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950008492A KR0153455B1 (en) 1995-04-12 1995-04-12 Shutter for exposure of light

Country Status (1)

Country Link
KR (1) KR0153455B1 (en)

Also Published As

Publication number Publication date
KR0153455B1 (en) 1998-12-01

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