KR960026286A - 선형 모터 - Google Patents

선형 모터 Download PDF

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Publication number
KR960026286A
KR960026286A KR1019950045973A KR19950045973A KR960026286A KR 960026286 A KR960026286 A KR 960026286A KR 1019950045973 A KR1019950045973 A KR 1019950045973A KR 19950045973 A KR19950045973 A KR 19950045973A KR 960026286 A KR960026286 A KR 960026286A
Authority
KR
South Korea
Prior art keywords
pressure
cooling medium
members
coil
linear motor
Prior art date
Application number
KR1019950045973A
Other languages
English (en)
Other versions
KR100375189B1 (ko
Inventor
유타카 하야시
Original Assignee
오노 시게오
니콘 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 오노 시게오, 니콘 가부시키가이샤 filed Critical 오노 시게오
Publication of KR960026286A publication Critical patent/KR960026286A/ko
Application granted granted Critical
Publication of KR100375189B1 publication Critical patent/KR100375189B1/ko

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
    • H02K9/197—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil in which the rotor or stator space is fluid-tight, e.g. to provide for different cooling media for rotor and stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Toxicology (AREA)
  • Public Health (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Epidemiology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Motor Or Generator Cooling System (AREA)

Abstract

본 발명은 선형 모터는 상대적으로 이동하기 위한 두개의 부재와, 가동부재의 부재중 하나에 장착된 코일과, 가동두개의 부재 중 다른 하나에 장착된 자석과, 가동코일을 둘러싸는 외부튜부내의 순환 배관을 통해 냉각매체를 순환하기 위한 순환 펌프와, 가동냉각매체의 압력을 검출하기 위한 압력 검출 장치와, 가동압력 검축 장치로부터 검출되 압력값에 근거해서 가동순환 펌프의 작동을 제어하기 위한 제어 시스템을 포함한다.

Description

선형 모터.
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명의 실시예에 따른 선형 모터를 도시하는 블럭 다이어그램, 제4도는 제3도의 Ⅳ-Ⅳ선을 따라 취한 단면도.

Claims (4)

  1. 상대적으로 이동하기 위한 두개의 부재와, 상기 두개의 부재 중 하나에 장착된 코일과, 상기 두개의 부재 중 다른 하나에 장착된 자석과, 상기 코일을 둘러싸는 외부튜브내의 순환 배관을 통해 냉각매체를 순환하기 위한 순환 펌프와, 상기 냉각매체의 압력을 검출하기 위한 압력 검출 장치와, 상기 압력 검출 장치로부터 검출된 압력값에 근거해서 상기 순환 펌프의 작동을 제어하기 위한 제어 시스템을 포함하는 것을 특징으로 하는 선형 모터.
  2. 제1항에 있어서, 상기 두개의 부재 중 하나가 고정되고 상기 선형 모터는 상기 코일이 상기 고정 부재에 장착되어 있는 가동 자석형인 것을 특징으로 하는 선형 모터.
  3. 예정된 온도를 갖도록 냉각매체를 제어 하는 단계와, 상기 예정된 온도를 가진 상기 냉각매체를 선형 모터내로 흐려보내는 단계와, 상기 냉각매체의 압력을 측정하는 단계와, 측정된 압력에 근거해서 상기 냉각 매체의 유속을 규제하는 단계를 포함하여, 상기 냉각 매체의 압력이 예정된 값과 동등하거나 적게되도록 유지되는 것을 특징으로 하는 선형 모터의 냉각 방법.
  4. 상대적으로 이동하기 위한 두개의 부재를 가진 스테이지와, 상기 스테이지상에 배치된 마스크 또는 광감성 물질과, 상기 두개의 부재 중 하나에 장착된 코일과, 상기 두개의 부재 중 다른 하나에 장착된 자석과, 상기 코일을 둘러싸는 외부튜브내의 순환 배관을 통해 냉각매체를 순환하기 위한 순환 펌프와, 상기 냉객매체의 압력을 검출하기 위한 압력 검출 장치와, 상기 압력 검출 장치로 부터 검출된 압력값에 근거해서 상기 순환 펌프의 작동을 제어하기 위한 제어 시스템을 포함하는 것을 특징으로 하는 노광 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950045973A 1994-12-14 1995-12-01 선형모터 KR100375189B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-310501 1994-12-14
JP31050194A JP3475973B2 (ja) 1994-12-14 1994-12-14 リニアモータ、ステージ装置、及び露光装置

Publications (2)

Publication Number Publication Date
KR960026286A true KR960026286A (ko) 1996-07-22
KR100375189B1 KR100375189B1 (ko) 2003-03-19

Family

ID=18005990

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950045973A KR100375189B1 (ko) 1994-12-14 1995-12-01 선형모터

Country Status (3)

Country Link
US (1) US5770899A (ko)
JP (1) JP3475973B2 (ko)
KR (1) KR100375189B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100223370B1 (ko) * 1996-12-19 1999-10-15 윤종용 이동 통신시스템에서 채널 절환 방법

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10127035A (ja) * 1996-10-16 1998-05-15 Canon Inc リニアモータおよびこれを用いたステージ装置ならびに露光装置
US6084319A (en) * 1996-10-16 2000-07-04 Canon Kabushiki Kaisha Linear motor, and stage device and exposure apparatus provided with the same
JPH11307430A (ja) 1998-04-23 1999-11-05 Canon Inc 露光装置およびデバイス製造方法ならびに駆動装置
JP4088728B2 (ja) * 1998-07-09 2008-05-21 株式会社ニコン 平面モータ装置、駆動装置及び露光装置
TW588222B (en) * 2000-02-10 2004-05-21 Asml Netherlands Bv Cooling of voice coil motors in lithographic projection apparatus
JP3832556B2 (ja) * 2000-02-25 2006-10-11 株式会社安川電機 キャンド・リニアモータ
CN1327294A (zh) * 2000-06-05 2001-12-19 杨泰和 具有封闭型冷却结构的回转电机
JP2002064968A (ja) * 2000-08-21 2002-02-28 Nippon Thompson Co Ltd 可動コイル型リニアモータを内蔵したスライド装置
US6515381B1 (en) 2000-09-13 2003-02-04 Nikon Corporation Cantilever stage
JP2002186242A (ja) * 2000-12-14 2002-06-28 Nikon Corp 電磁アクチュエータ装置、ステージ装置、露光装置及びデバイス
JP4689058B2 (ja) * 2001-02-16 2011-05-25 キヤノン株式会社 リニアモータ、ステージ装置および露光装置ならびにデバイス製造方法
US20050088634A1 (en) * 2002-03-15 2005-04-28 Nikon Corporation Exposure system and device production process
US20050151429A1 (en) * 2002-08-21 2005-07-14 Yasuji Taketsuna Motor for vehicle
US20040100154A1 (en) * 2002-11-26 2004-05-27 Rahman Khwaja M. Concentrated winding electric motor having optimized winding cooling and slot fill
US20040244963A1 (en) * 2003-06-05 2004-12-09 Nikon Corporation Heat pipe with temperature control
US20050057102A1 (en) * 2003-09-11 2005-03-17 Nikon Corporation Holding member, coolant, cooling method and cooling device, linear motor device, stage device, and exposure apparatus
NZ547208A (en) * 2003-10-28 2009-10-30 Ibex Ind Ltd Powered hand tool
US7288864B2 (en) * 2004-03-31 2007-10-30 Nikon Corporation System and method for cooling motors of a lithographic tool
JP4765937B2 (ja) * 2004-10-01 2011-09-07 株式会社ニコン リニアモータ、ステージ装置、及び露光装置
JP2007123295A (ja) * 2005-10-24 2007-05-17 Canon Inc 露光装置
US20080073563A1 (en) * 2006-07-01 2008-03-27 Nikon Corporation Exposure apparatus that includes a phase change circulation system for movers
US7916267B2 (en) * 2006-08-29 2011-03-29 Asml Netherlands B.V. Lithographic apparatus, and motor cooling device
US7576459B2 (en) * 2006-09-25 2009-08-18 Honeywell International Inc. Electric machine with fluid supply control system
US8068208B2 (en) 2006-12-01 2011-11-29 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for improving immersion scanner overlay performance
DE102010004642B4 (de) * 2010-01-13 2012-09-27 Integrated Dynamics Engineering Gmbh Magnetaktor sowie Verfahren zu dessen Montage
DE202012100266U1 (de) * 2012-01-26 2012-02-23 Elha-Maschinenbau Liemke Kg Vertikal-Drehmaschine
US10931170B2 (en) * 2017-05-10 2021-02-23 Hamilton Sundstrand Corporation Motor cooling utilizing cabin air

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3675056A (en) * 1971-01-04 1972-07-04 Gen Electric Hermetically sealed dynamoelectric machine
JPH0641381A (ja) * 1991-03-18 1994-02-15 Kuraray Co Ltd 樹脂組成物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100223370B1 (ko) * 1996-12-19 1999-10-15 윤종용 이동 통신시스템에서 채널 절환 방법

Also Published As

Publication number Publication date
JP3475973B2 (ja) 2003-12-10
US5770899A (en) 1998-06-23
JPH08167554A (ja) 1996-06-25
KR100375189B1 (ko) 2003-03-19

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