KR960020591U - 트랜스퍼 로보트 시스템의 제어장치 - Google Patents
트랜스퍼 로보트 시스템의 제어장치Info
- Publication number
- KR960020591U KR960020591U KR2019940033008U KR19940033008U KR960020591U KR 960020591 U KR960020591 U KR 960020591U KR 2019940033008 U KR2019940033008 U KR 2019940033008U KR 19940033008 U KR19940033008 U KR 19940033008U KR 960020591 U KR960020591 U KR 960020591U
- Authority
- KR
- South Korea
- Prior art keywords
- transfer robot
- control system
- robot system
- control
- transfer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940033008U KR200173902Y1 (ko) | 1994-12-06 | 1994-12-06 | 트랜스퍼 로보트 시스템의 제어장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940033008U KR200173902Y1 (ko) | 1994-12-06 | 1994-12-06 | 트랜스퍼 로보트 시스템의 제어장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960020591U true KR960020591U (ko) | 1996-07-18 |
KR200173902Y1 KR200173902Y1 (ko) | 2000-04-01 |
Family
ID=19400501
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940033008U KR200173902Y1 (ko) | 1994-12-06 | 1994-12-06 | 트랜스퍼 로보트 시스템의 제어장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200173902Y1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100765057B1 (ko) | 2006-10-19 | 2007-10-09 | 현대제철 주식회사 | 연속압연 중의 트라프 감시제어 시스템 및 방법 |
-
1994
- 1994-12-06 KR KR2019940033008U patent/KR200173902Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200173902Y1 (ko) | 2000-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20081125 Year of fee payment: 10 |
|
EXPY | Expiration of term |