KR960015604U - 가스 세정기용 여과기 박스 - Google Patents
가스 세정기용 여과기 박스Info
- Publication number
- KR960015604U KR960015604U KR2019940028228U KR19940028228U KR960015604U KR 960015604 U KR960015604 U KR 960015604U KR 2019940028228 U KR2019940028228 U KR 2019940028228U KR 19940028228 U KR19940028228 U KR 19940028228U KR 960015604 U KR960015604 U KR 960015604U
- Authority
- KR
- South Korea
- Prior art keywords
- gas scrubber
- strainer box
- strainer
- box
- scrubber
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0013—Modules
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940028228U KR960015604U (ko) | 1994-10-27 | 1994-10-27 | 가스 세정기용 여과기 박스 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940028228U KR960015604U (ko) | 1994-10-27 | 1994-10-27 | 가스 세정기용 여과기 박스 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960015604U true KR960015604U (ko) | 1996-05-17 |
Family
ID=60847556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940028228U KR960015604U (ko) | 1994-10-27 | 1994-10-27 | 가스 세정기용 여과기 박스 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960015604U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020059990A (ko) * | 2001-01-09 | 2002-07-16 | 추선규 | 가스 세정 장치 |
-
1994
- 1994-10-27 KR KR2019940028228U patent/KR960015604U/ko not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020059990A (ko) * | 2001-01-09 | 2002-07-16 | 추선규 | 가스 세정 장치 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |