KR960012419A - 시료검사장치에 있어서의 시료반송방법 및 시료반송장치 - Google Patents
시료검사장치에 있어서의 시료반송방법 및 시료반송장치 Download PDFInfo
- Publication number
- KR960012419A KR960012419A KR1019950023964A KR19950023964A KR960012419A KR 960012419 A KR960012419 A KR 960012419A KR 1019950023964 A KR1019950023964 A KR 1019950023964A KR 19950023964 A KR19950023964 A KR 19950023964A KR 960012419 A KR960012419 A KR 960012419A
- Authority
- KR
- South Korea
- Prior art keywords
- sample
- inspection apparatus
- sample carrying
- carrying device
- carrying method
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/859—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector involving monitoring, e.g. feedback loop
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01039—Yttrium [Y]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S209/00—Classifying, separating, and assorting solids
- Y10S209/922—Miscellaneous feed conveyors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S209/00—Classifying, separating, and assorting solids
- Y10S209/939—Video scanning
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Wire Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25603294A JP3245507B2 (ja) | 1994-09-27 | 1994-09-27 | 試料検査装置における試料搬送方法及び試料搬送装置 |
JP94-271909 | 1994-09-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960012419A true KR960012419A (ko) | 1996-04-20 |
KR100196457B1 KR100196457B1 (ko) | 1999-06-15 |
Family
ID=17286976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950023964A KR100196457B1 (ko) | 1994-09-27 | 1995-08-03 | 부분 tert-부톡시화 폴리(p-히드록시스티렌)의 제조방법 |
Country Status (4)
Country | Link |
---|---|
US (1) | US5772040A (ko) |
JP (1) | JP3245507B2 (ko) |
KR (1) | KR100196457B1 (ko) |
TW (1) | TW414365U (ko) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000118681A (ja) * | 1998-10-19 | 2000-04-25 | Shinkawa Ltd | トレイ搬送装置及び方法 |
US6563904B2 (en) * | 2000-12-01 | 2003-05-13 | Fmc Technologies, Inc. | Apparatus and method for detecting and removing undesirable material from workpieces |
DE10210033A1 (de) * | 2002-03-07 | 2003-10-02 | Agro Federkernproduktion Ek | Verfahren zur Herstellung eines Federkerns und Vorrichtung zur Durchführung des Verfahrens |
FR2856088B1 (fr) * | 2003-06-11 | 2005-09-09 | Cie Du Sol | Outil de fraisage pour la realisation de tranchees, permettant un changement rapide de la tete de coupe |
US7232070B2 (en) * | 2004-06-10 | 2007-06-19 | Lockheed Martin Corporation | Chemical/biological hazard trigger with automatic mail piece tagging system and method |
DE602005021549D1 (de) * | 2005-03-30 | 2010-07-08 | Freescale Semiconductor Inc | Verfahren und einrichtung zum senden einer sequenz von übertragungs-bursts |
KR100909944B1 (ko) * | 2007-08-02 | 2009-07-29 | 이용원 | 실체 현미경을 이용한 렌즈 검사 시스템 |
JP5680005B2 (ja) * | 2012-02-24 | 2015-03-04 | 株式会社東芝 | コネクタの嵌合状態を検査する検査方法および検査装置、並びにコネクタを有する電気機器の組立方法 |
KR101326098B1 (ko) | 2013-01-21 | 2013-11-06 | 주식회사 아이비에스 | 와이어 본딩 검사방법 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3623603A (en) * | 1967-08-31 | 1971-11-30 | Western Electric Co | Magnetic identification and separation of small parts |
DE2726454B2 (de) * | 1977-06-11 | 1979-08-23 | Hoesch Werke Ag, 4600 Dortmund | Verfahren zum Kennzeichnen von bewegten Tafeln und Bändern |
DE3325125C1 (de) * | 1983-07-12 | 1985-02-14 | Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch | Anordnung zur Markierung von Fehlstellen an schnell laufenden Materialbahnen |
US4851902A (en) * | 1986-10-29 | 1989-07-25 | Electroplating Engineers Of Japan, Limited | Auatomatic inspection system for IC lead frames and visual inspection method thereof |
DE3638430A1 (de) * | 1986-11-11 | 1988-05-19 | Multitest Elektronische Syst | Vorrichtung zum testen und sortieren von elektronischen bauelementen, insbesondere ic's |
JPH01249181A (ja) * | 1988-03-31 | 1989-10-04 | Tdk Corp | チップ部品自動外観選別機における部品仕分け方法 |
US4926118A (en) * | 1988-02-22 | 1990-05-15 | Sym-Tek Systems, Inc. | Test station |
US5168218A (en) * | 1990-06-01 | 1992-12-01 | Rich Donald S | Tray-to-tray circuit package handler |
JP2921937B2 (ja) * | 1990-07-18 | 1999-07-19 | 東京エレクトロン株式会社 | Ic検査装置 |
JP2981942B2 (ja) * | 1991-12-02 | 1999-11-22 | 株式会社新川 | ボンデイングワイヤ検査方法 |
-
1994
- 1994-09-27 JP JP25603294A patent/JP3245507B2/ja not_active Expired - Fee Related
-
1995
- 1995-08-03 KR KR1019950023964A patent/KR100196457B1/ko not_active IP Right Cessation
- 1995-09-26 US US08/533,685 patent/US5772040A/en not_active Expired - Fee Related
-
1996
- 1996-02-24 TW TW088212728U patent/TW414365U/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP3245507B2 (ja) | 2002-01-15 |
JPH0897264A (ja) | 1996-04-12 |
US5772040A (en) | 1998-06-30 |
KR100196457B1 (ko) | 1999-06-15 |
TW414365U (en) | 2000-12-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0703456A3 (en) | Method and device for automatic analysis of a sample | |
DE69516366T2 (de) | Messverfahren und Messvorrichtung | |
DE19781229T1 (de) | Elektrochemische Testvorrichtung und diesbezügliche Verfahren | |
DE69841864D1 (de) | Testvorrichtung und Verfahren zum Nachweis von Restanalyten in Proben | |
KR100309483B1 (ko) | 기체분석방법및장치 | |
DE69520850T2 (de) | Verfahren und Vorrichtung zum Messen von Urinbestandteilen | |
NO983329L (no) | FremgangsmÕte og apparat for inaktivering av forurensninger i biologisk fluid | |
FI924716A0 (fi) | Menetelmä ja laitteisto näytteen analysoimiseksi | |
DE69125797T2 (de) | Analyseverfahren und -vorrichtung für flüssige Proben | |
UA26935C2 (uk) | Пристрій та спосіб для відбору проб матеріалу | |
BR9608705A (pt) | Método e aparelho para retirar amostra | |
KR950702724A (ko) | 물리량 해석방법 및 그 장치 | |
KR950702307A (ko) | 라만 분석 장치 및 방법(raman analysis apparatus and methods) | |
KR960012419A (ko) | 시료검사장치에 있어서의 시료반송방법 및 시료반송장치 | |
NO984062L (no) | Fremgangsmåte og anordning for undersøkelse av flytende gjenstander | |
EP0772840A4 (en) | MONITORING DEVICE AND METHOD | |
EE9800274A (et) | Meetod ja seade proovi paigutamiseks kapillaarsesse elektroforeesi seadmesse | |
DE69509771D1 (de) | Testvorrichtung und -verfahren | |
NO983730D0 (no) | Metode og apparatur for analyse | |
NO963922L (no) | Fremgangsmåte ved isokinetisk fluidprövetaking og anordning for bruk ved fremgangsmåtens utförelse | |
DE69217703D1 (de) | Verfahren und Vorrichtung zum Analysieren von Probenlösungen | |
NO991275D0 (no) | FremgangsmÕte og anordning for inspeksjon av en gjenstand | |
FI972083A0 (fi) | Menetelmä ja laite elektronisten komponenttien testaamiseen | |
GB9507473D0 (en) | Method and apparatus for measuring contamination | |
KR970003752A (ko) | 반도체장치와 그 검사방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
G170 | Re-publication after modification of scope of protection [patent] | ||
FPAY | Annual fee payment |
Payment date: 20020124 Year of fee payment: 6 |
|
LAPS | Lapse due to unpaid annual fee |