KR960006358U - 프로세스 쿨링워터를 이용한 디스크 쿨링장치 - Google Patents

프로세스 쿨링워터를 이용한 디스크 쿨링장치

Info

Publication number
KR960006358U
KR960006358U KR2019940017277U KR19940017277U KR960006358U KR 960006358 U KR960006358 U KR 960006358U KR 2019940017277 U KR2019940017277 U KR 2019940017277U KR 19940017277 U KR19940017277 U KR 19940017277U KR 960006358 U KR960006358 U KR 960006358U
Authority
KR
South Korea
Prior art keywords
disk
cooling water
cooling system
cooling
water
Prior art date
Application number
KR2019940017277U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940017277U priority Critical patent/KR960006358U/ko
Publication of KR960006358U publication Critical patent/KR960006358U/ko

Links

KR2019940017277U 1994-07-12 1994-07-12 프로세스 쿨링워터를 이용한 디스크 쿨링장치 KR960006358U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940017277U KR960006358U (ko) 1994-07-12 1994-07-12 프로세스 쿨링워터를 이용한 디스크 쿨링장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940017277U KR960006358U (ko) 1994-07-12 1994-07-12 프로세스 쿨링워터를 이용한 디스크 쿨링장치

Publications (1)

Publication Number Publication Date
KR960006358U true KR960006358U (ko) 1996-02-17

Family

ID=60665983

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940017277U KR960006358U (ko) 1994-07-12 1994-07-12 프로세스 쿨링워터를 이용한 디스크 쿨링장치

Country Status (1)

Country Link
KR (1) KR960006358U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100576813B1 (ko) * 1999-10-12 2006-05-10 삼성전자주식회사 반도체 노광 공정용 레티클의 먼지 제거 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100576813B1 (ko) * 1999-10-12 2006-05-10 삼성전자주식회사 반도체 노광 공정용 레티클의 먼지 제거 장치

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Legal Events

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