KR960006302U - 반도체 공정용 화학 증착 장치의 반응용기 - Google Patents

반도체 공정용 화학 증착 장치의 반응용기

Info

Publication number
KR960006302U
KR960006302U KR2019940017350U KR19940017350U KR960006302U KR 960006302 U KR960006302 U KR 960006302U KR 2019940017350 U KR2019940017350 U KR 2019940017350U KR 19940017350 U KR19940017350 U KR 19940017350U KR 960006302 U KR960006302 U KR 960006302U
Authority
KR
South Korea
Prior art keywords
vapor deposition
reaction vessel
chemical vapor
deposition apparatus
semiconductor process
Prior art date
Application number
KR2019940017350U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940017350U priority Critical patent/KR960006302U/ko
Publication of KR960006302U publication Critical patent/KR960006302U/ko

Links

KR2019940017350U 1994-07-13 1994-07-13 반도체 공정용 화학 증착 장치의 반응용기 KR960006302U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940017350U KR960006302U (ko) 1994-07-13 1994-07-13 반도체 공정용 화학 증착 장치의 반응용기

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940017350U KR960006302U (ko) 1994-07-13 1994-07-13 반도체 공정용 화학 증착 장치의 반응용기

Publications (1)

Publication Number Publication Date
KR960006302U true KR960006302U (ko) 1996-02-17

Family

ID=60665924

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940017350U KR960006302U (ko) 1994-07-13 1994-07-13 반도체 공정용 화학 증착 장치의 반응용기

Country Status (1)

Country Link
KR (1) KR960006302U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application