KR950701093A - 포지형 폴리이미드패턴의 형성방법(a method of forming positive polyimide patterns) - Google Patents
포지형 폴리이미드패턴의 형성방법(a method of forming positive polyimide patterns)Info
- Publication number
- KR950701093A KR950701093A KR1019940703469A KR19940703469A KR950701093A KR 950701093 A KR950701093 A KR 950701093A KR 1019940703469 A KR1019940703469 A KR 1019940703469A KR 19940703469 A KR19940703469 A KR 19940703469A KR 950701093 A KR950701093 A KR 950701093A
- Authority
- KR
- South Korea
- Prior art keywords
- forming positive
- positive polyimide
- polyimide patterns
- patterns
- forming
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0387—Polyamides or polyimides
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/107—Polyamide or polyurethane
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1630293 | 1993-02-03 | ||
JP06389493A JP3319004B2 (ja) | 1993-02-03 | 1993-03-23 | ポジ型ポリイミドパターンの形成方法 |
JP9013093A JP3303416B2 (ja) | 1993-04-16 | 1993-04-16 | 感光性ポリイミド前駆体用現像液 |
PCT/JP1994/000104 WO1994018607A1 (en) | 1993-02-03 | 1994-01-26 | Process for forming positive polyimide pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950701093A true KR950701093A (ko) | 1995-02-20 |
Family
ID=27281344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940703469A KR950701093A (ko) | 1993-02-03 | 1994-10-01 | 포지형 폴리이미드패턴의 형성방법(a method of forming positive polyimide patterns) |
Country Status (3)
Country | Link |
---|---|
US (1) | US5614354A (ko) |
KR (1) | KR950701093A (ko) |
WO (1) | WO1994018607A1 (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR19990037527A (ko) | 1997-10-31 | 1999-05-25 | 후지쯔 가부시끼가이샤 | 폴리이미드계 감광성 수지조성물용 현상액 |
US6887916B2 (en) | 2000-12-28 | 2005-05-03 | Kimberly-Clark Worldwide, Inc. | Materials having controlled shrinkage and patterns and methods of making same |
US7499125B2 (en) * | 2004-01-28 | 2009-03-03 | Kent State University | Method of fabricating electro-optical devices with polymer-stabilized liquid crystal molecules |
KR100764375B1 (ko) * | 2005-12-15 | 2007-10-08 | 주식회사 하이닉스반도체 | 반도체 소자의 하드마스크용 고분자 및 이를 함유하는조성물 |
TWI754734B (zh) * | 2017-03-29 | 2022-02-11 | 日商富士軟片股份有限公司 | 感光性樹脂組成物、硬化膜、積層體、硬化膜的製造方法及半導體裝置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2092164B (en) * | 1980-12-17 | 1984-12-05 | Hitachi Ltd | Loght or radiation-sensitive polymer composition |
JPS57168942A (en) * | 1981-04-13 | 1982-10-18 | Hitachi Ltd | Photosensitive polymer composition |
EP0119719B1 (en) * | 1983-03-03 | 1987-05-06 | Toray Industries, Inc. | Radiation sensitive polymer composition |
JPS59160139A (ja) * | 1983-03-04 | 1984-09-10 | Hitachi Ltd | 感光性重合体組成物 |
EP0188205B1 (de) * | 1985-01-15 | 1988-06-22 | Ciba-Geigy Ag | Polyamidester-Fotoresist-Formulierungen gesteigerter Empfindlichkeit |
DE3683464D1 (de) * | 1985-12-05 | 1992-02-27 | Ibm | Photoresistzusammensetzungen mit vermindertem loesungsgrad in basischen entwicklern, auf basis von durch diazochinon sensibilisierter polyamidsaeure. |
JPS62145239A (ja) * | 1985-12-19 | 1987-06-29 | Mitsubishi Electric Corp | ポジ型感光性耐熱材料 |
US4830953A (en) * | 1986-08-18 | 1989-05-16 | Ciba-Geigy Corporation | Radiation-sensitive coating composition with polyazide and polyimide and process of photo-crosslinking the coating |
JPS6461747A (en) * | 1987-09-01 | 1989-03-08 | Mitsubishi Electric Corp | Positive type photosensitive heat-resisting material |
JP2625910B2 (ja) * | 1988-06-23 | 1997-07-02 | 東レ株式会社 | ポリイミド積層膜の製造方法 |
US4877718A (en) * | 1988-09-26 | 1989-10-31 | Rennsselaer Polytechnic Institute | Positive-working photosensitive polyimide operated by photo induced molecular weight changes |
DE3837612A1 (de) * | 1988-11-05 | 1990-05-23 | Ciba Geigy Ag | Positiv-fotoresists von polyimid-typ |
JPH02186350A (ja) * | 1989-01-12 | 1990-07-20 | Fujitsu Ltd | 感光性樹脂およびパターン形成方法 |
US5238784A (en) * | 1989-11-30 | 1993-08-24 | Sumitomo Bakelite Company Limited | Photosensitive resin composition with polyamic acid polymer |
US5114826A (en) * | 1989-12-28 | 1992-05-19 | Ibm Corporation | Photosensitive polyimide compositions |
JPH0415226A (ja) * | 1990-05-10 | 1992-01-20 | Chisso Corp | ヒドロキシフェニル基を有する感光性耐熱重合体 |
JP2828736B2 (ja) * | 1990-05-29 | 1998-11-25 | 住友ベークライト株式会社 | ポジ型感光性樹脂組成物 |
DE69128187T2 (de) * | 1990-09-28 | 1998-03-26 | Toshiba Kawasaki Kk | Fotoempfindliche Harzzusammensetzung zum Herstellen eines Polyimidfilmmusters und Verfahren zum Herstellen eines Polyimidfilmmusters |
-
1994
- 1994-01-26 US US08/692,337 patent/US5614354A/en not_active Expired - Fee Related
- 1994-01-26 WO PCT/JP1994/000104 patent/WO1994018607A1/ja not_active Application Discontinuation
- 1994-10-01 KR KR1019940703469A patent/KR950701093A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
US5614354A (en) | 1997-03-25 |
WO1994018607A1 (en) | 1994-08-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |