KR950019718A - Measuring method of gas sensor and relative resistance value of gas sensor - Google Patents

Measuring method of gas sensor and relative resistance value of gas sensor Download PDF

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Publication number
KR950019718A
KR950019718A KR1019930028107A KR930028107A KR950019718A KR 950019718 A KR950019718 A KR 950019718A KR 1019930028107 A KR1019930028107 A KR 1019930028107A KR 930028107 A KR930028107 A KR 930028107A KR 950019718 A KR950019718 A KR 950019718A
Authority
KR
South Korea
Prior art keywords
gas sensor
gas
resistance
resistance value
thin film
Prior art date
Application number
KR1019930028107A
Other languages
Korean (ko)
Inventor
박철
박영우
Original Assignee
이헌조
엘지전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이헌조, 엘지전자 주식회사 filed Critical 이헌조
Priority to KR1019930028107A priority Critical patent/KR950019718A/en
Priority to KR2019940022721U priority patent/KR970002374Y1/en
Publication of KR950019718A publication Critical patent/KR950019718A/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A40/00—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production
    • Y02A40/10—Adaptation technologies in agriculture, forestry, livestock or agroalimentary production in agriculture
    • Y02A40/25—Greenhouse technology, e.g. cooling systems therefor

Abstract

본 발명은 가스센서 및 그 가스센서의 상대저항값 측정방법에 관한 것으로, 종래의 세라믹 센서들은 환원성가스에 대하여 주로 반응을 하고, 또한 박막화 하였을 때에 벌크에 비하여 감도가 떨어지고, 고온에서 구동하기 때문에 실리콘소자와의 집적화가 곤란하며, 특수한 방법으로 집적화를 시킬 수는 있으나 공정이 복잡하여 생산단가가 을라가는 문제점이 있고, 유기박막의 가스센서는 약하게 나마 주위의 산소와 결합하여 전기저항치가 불안정하게 변화하고, 온도를 올리고 내리는 과정이 반복이 됨에 따라 산소의 흡착 정도가 균일하지 아니하며 초기 저항치가 계속하여 변화하므로서 기준저항치가 가스의 절대농도를 대응비교할 때에 불확실한 값이 측정이 될 수가 있는 문제점이 있었다. 본 발명은 이러한 문제점을 해결하기 위하여 구리 프탈로시아닌 박막을 열 승화법에 의하여 제작하고, 절대 저항값을 상대 저항치로 환산하여 계산을 한 후 이를 다시 가스농도로 환원하여 가스의 농도를 측정함으로써, 가스농도측정의 재현성을 향상시키도록 한 가스센서 및 그 가스센서의 상대저항값 측정방법을 창안한 것이다.The present invention relates to a gas sensor and a method of measuring the relative resistance value of the gas sensor, conventional ceramic sensors mainly react with reducing gas, and when compared to the bulk when the thin film is less sensitive than the bulk, because silicon is driven at high temperature It is difficult to integrate with the device, and it can be integrated by a special method, but there is a problem that the production cost is reduced due to the complicated process. The gas sensor of the organic thin film is weakly combined with oxygen around, so that the electrical resistance is unstable. As the process of raising and lowering the temperature is repeated, the degree of adsorption of oxygen is not uniform and the initial resistance is continuously changed, so there is a problem that an uncertain value can be measured when the reference resistance corresponds to the absolute concentration of the gas. In order to solve this problem, the present invention produces a copper phthalocyanine thin film by thermal sublimation method, converts the absolute resistance value into a relative resistance value, calculates it, reduces it to a gas concentration, and then measures the gas concentration. The invention provides a gas sensor and a method of measuring the relative resistance of the gas sensor to improve the reproducibility of the measurement.

Description

가스센서 및 그 가스센서의 상대저항값 측정방법Measuring method of gas sensor and relative resistance value of gas sensor

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명 가스센서의 구조도,1 is a structural diagram of the gas sensor of the present invention,

제2도는 본 발명 가스센서의 알루미나기판 세부구조도.2 is a detailed structural diagram of the alumina substrate of the gas sensor of the present invention.

Claims (2)

기판상에 빗살무늬형태의 전극이 형성되고, 상기 전극위에 구리 프랄로시아닌박막이 형성되고, 상기 전극(2)이 외부로 연결되는 외부도선(5)과 접착제로 접착되어 구성된 센서부의 기판과, 다른기판위에 히터(7)가 형성되고, 상기 히터(7)가 외부로 연결되는 은세선(8)과 접착제로 접차되어 구성된 히터부의 기판이 접착제로 접착되어 구성된 것을 특징으로 하는 가스센서A substrate having a comb-pattern-shaped electrode is formed on the substrate, a copper pralocyanine thin film is formed on the electrode, and the substrate of the sensor unit formed by adhering an external conductor 5 to which the electrode 2 is connected to the outside and an adhesive; The gas sensor is characterized in that the heater 7 is formed on another substrate, and the substrate of the heater part formed by contacting the silver wire 8 to which the heater 7 is connected to the outside with an adhesive is bonded with an adhesive. 가스센서의 온도를 90℃로 유지하며 초기저항(Ro)을 측정하는 단계와, 산화질소가스(NO2)를 흘려 그 가스에 반응하는 변화저항(Rt)을 측정하는 단계와, 초기저항에 대한 비저항(Rr)을 계산하는 단계와,상기 비저항을 가스농도로 환산하는 단계와, 센서를 오버 히팅(Over Heating)하여 흡착한 산화질소가스(NO2)를 제거하는 단계로 진행하는 것을 특징으로 하는 가스센서의 상대저항값 측정방법.Measuring the initial resistance (Ro) while maintaining the temperature of the gas sensor at 90 ° C; measuring the change resistance (Rt) reacting to the gas by flowing nitric oxide gas (NO 2 ); Calculating a specific resistance (Rr), converting the specific resistance into a gas concentration, and overheating the sensor to remove the adsorbed nitric oxide gas (NO 2 ). Relative resistance measurement method of gas sensor. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930028107A 1993-12-16 1993-12-16 Measuring method of gas sensor and relative resistance value of gas sensor KR950019718A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019930028107A KR950019718A (en) 1993-12-16 1993-12-16 Measuring method of gas sensor and relative resistance value of gas sensor
KR2019940022721U KR970002374Y1 (en) 1993-12-16 1994-09-03 Opening and shutting device in greenhouse

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930028107A KR950019718A (en) 1993-12-16 1993-12-16 Measuring method of gas sensor and relative resistance value of gas sensor

Publications (1)

Publication Number Publication Date
KR950019718A true KR950019718A (en) 1995-07-24

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Application Number Title Priority Date Filing Date
KR1019930028107A KR950019718A (en) 1993-12-16 1993-12-16 Measuring method of gas sensor and relative resistance value of gas sensor
KR2019940022721U KR970002374Y1 (en) 1993-12-16 1994-09-03 Opening and shutting device in greenhouse

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR2019940022721U KR970002374Y1 (en) 1993-12-16 1994-09-03 Opening and shutting device in greenhouse

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230073705A (en) 2021-11-19 2023-05-26 한국전자기술연구원 Optical ionization gas sensor electrode and gas detection divice having the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230073705A (en) 2021-11-19 2023-05-26 한국전자기술연구원 Optical ionization gas sensor electrode and gas detection divice having the same

Also Published As

Publication number Publication date
KR970002374Y1 (en) 1997-03-21
KR950016194U (en) 1995-07-20

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