KR950011892A - 탱크실을 가진 블록밸브 - Google Patents

탱크실을 가진 블록밸브 Download PDF

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Publication number
KR950011892A
KR950011892A KR1019940025436A KR19940025436A KR950011892A KR 950011892 A KR950011892 A KR 950011892A KR 1019940025436 A KR1019940025436 A KR 1019940025436A KR 19940025436 A KR19940025436 A KR 19940025436A KR 950011892 A KR950011892 A KR 950011892A
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KR
South Korea
Prior art keywords
valve
tank chamber
gas supply
outlet
block valve
Prior art date
Application number
KR1019940025436A
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English (en)
Other versions
KR0170018B1 (ko
Inventor
류우타로오 니시무라
Original Assignee
키요하라 마사코
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Application filed by 키요하라 마사코 filed Critical 키요하라 마사코
Publication of KR950011892A publication Critical patent/KR950011892A/ko
Application granted granted Critical
Publication of KR0170018B1 publication Critical patent/KR0170018B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/44—Details of seats or valve members of double-seat valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Multiple-Way Valves (AREA)

Abstract

반도체 제조장치 등의 가스의 공급배관로, 특히 블록밸브가 설치된 배관로내의 잔류가스를 신속하고 원활하게 뽑아낼 수 있도록 한 탱크실을 가진 블록밸브를 제공하는 것이다.
탱크실을 가진 블록밸브를, 입구(6a) 및 출구(6b)를 보유하는 가스공급통로 (6)와, 가스공급통로(6)에 연통상태로 접속되고. 출구(7a)를 보유하는 분기통로 (7)와, 분기통로(7)의 도중에 형성된 탱크실(7) 등을 구비한 몸체(1)와. 몸체(1)에 설치되어, 분기통로(7)가 접속된 부분보다도 하류측의 가스공급통로(6)를 개폐하는 제 1밸브(2)와. 몸체(1)에 설치되어, 탱크실(8)보다도 상류측의 분기통로(7)를 개폐하는 제 2밸브(3)로 구성한다.

Description

탱크실을 가진 블록밸브
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 실시예에 관한 탱크실을 가진 블록밸브의 정면도,
제2도는 탱크실을 가진 블록밸브의 평면도,
제3도는 탱크실을 가진 블록밸브의 일부단면 정면도,
제4도는 탱크실을 가진 블록밸브의 일부단면 좌측면도.

Claims (7)

  1. 입구(6a) 및 출구(6b)를 보유하는 가스공급통로(6)와, 가스공급통로(6)에 분기형상으로 접속된 출구 (7a)를 보유하는 분기통로(7)와, 분기통로(7)의 도중에 형성된 탱크실(8)을 구비한 몸체 (1)와, 몸체(1)에 설치되며, 가스공급통로(6)의 하류측을 개폐하는 제 1 밸브(2)차, 몸체(1)에 설치되며, 분기통로(7)의 상류측을 개폐하는 제 2밸브(3)로 구성된 것을 특징으로 하는 탱크실을 가진 블록밸브.
  2. 제 1항에 있어서, 제 1밸브(1)에 의하여, 출구(6b)와 분기통로(7)의 접속부분 사이의 가스공급통로 (6)를 개폐하도록 한 것을 특징으로 하는 탱크실을 가진 블록밸브.
  3. 제 1항 또는 제 2항에 있어서, 제 2밸브(3)에 의하여, 가스공급통로(6)의 접속부분과 탱크실(8) 사이의 분기통로(7)를 개폐하도록 한 것을 특징으로 하는 탱크실을 가진 블록밸브.
  4. 제 1항에 있어서, 가스공급통로(6)의 가스출구(6b)측으로 제 1이음매(4)를, 또, 분기통로(7)의 출구 (7a)측으로 제 2이음매(5)를 각각 설치하도록 한 것을 특징으로 하는 탱크실을 가진 블록밸브
  5. 제 1항 또는 제 4항에 있어서, 제 1밸브(2) 및 제 2밸브(3)를 다이렉트터치식의 메탈다이민프램밸브로 한 것을 특징으로 하는 탱크실을 가진 블록밸브.
  6. 제 1항에 있어서, 다이렉트터치식의 메탈다이어프램밸브를 공기압작동식, 전동식 또는 수동식 중 어느 것으로 한 것을 특징으로 하는 탱크실을 가진 블록밸브.
  7. 제 1 항에 있어서, 분기통로(7)의 출구(7a)측으로 배기하므로, 탱크실(8)내를 항상 소정의 진공상태로 유지하도록 한 것을 특징으로 하는 탱크실을 가진 블록밸브.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940025436A 1993-10-27 1994-10-05 탱크실을 가진 블록밸브 KR0170018B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP26869093A JP3361162B2 (ja) 1993-10-27 1993-10-27 タンク室付ブロックバルブ
JP93-268690 1993-10-27

Publications (2)

Publication Number Publication Date
KR950011892A true KR950011892A (ko) 1995-05-16
KR0170018B1 KR0170018B1 (ko) 1999-03-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940025436A KR0170018B1 (ko) 1993-10-27 1994-10-05 탱크실을 가진 블록밸브

Country Status (8)

Country Link
US (1) US5469885A (ko)
EP (1) EP0651189B1 (ko)
JP (1) JP3361162B2 (ko)
KR (1) KR0170018B1 (ko)
CA (1) CA2134425C (ko)
DE (1) DE69408626T2 (ko)
SG (1) SG45143A1 (ko)
TW (1) TW273589B (ko)

Cited By (2)

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Publication number Priority date Publication date Assignee Title
KR102243713B1 (ko) 2020-11-30 2021-04-26 주식회사 대성이노텍 목재 및 합판의 방염처리장치
KR102243715B1 (ko) 2020-11-30 2021-04-26 주식회사 대성이노텍 목재 및 합판의 방염분사장치

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JP4499012B2 (ja) * 2005-09-30 2010-07-07 シーケーディ株式会社 複合流体制御ユニット
CN201344287Y (zh) * 2008-10-20 2009-11-11 温晋轩 连续式抽真空设备的真空阀
CN101397986B (zh) * 2008-11-25 2010-10-13 温晋轩 多功能抽空真空设备
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JP5788685B2 (ja) * 2011-02-09 2015-10-07 Ckd株式会社 薬液供給ユニット
CN106568630B (zh) * 2016-10-28 2020-02-21 核工业北京地质研究院 一种全金属小体积容器及其体积测定***、方法
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Publication number Priority date Publication date Assignee Title
KR102243713B1 (ko) 2020-11-30 2021-04-26 주식회사 대성이노텍 목재 및 합판의 방염처리장치
KR102243715B1 (ko) 2020-11-30 2021-04-26 주식회사 대성이노텍 목재 및 합판의 방염분사장치

Also Published As

Publication number Publication date
JP3361162B2 (ja) 2003-01-07
KR0170018B1 (ko) 1999-03-30
EP0651189B1 (en) 1998-02-25
SG45143A1 (en) 1998-01-16
DE69408626D1 (de) 1998-04-02
DE69408626T2 (de) 1998-11-05
CA2134425A1 (en) 1995-04-28
TW273589B (ko) 1996-04-01
US5469885A (en) 1995-11-28
JPH07119844A (ja) 1995-05-12
CA2134425C (en) 1998-03-31
EP0651189A3 (en) 1995-09-20
EP0651189A2 (en) 1995-05-03

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