KR950011892A - 탱크실을 가진 블록밸브 - Google Patents
탱크실을 가진 블록밸브 Download PDFInfo
- Publication number
- KR950011892A KR950011892A KR1019940025436A KR19940025436A KR950011892A KR 950011892 A KR950011892 A KR 950011892A KR 1019940025436 A KR1019940025436 A KR 1019940025436A KR 19940025436 A KR19940025436 A KR 19940025436A KR 950011892 A KR950011892 A KR 950011892A
- Authority
- KR
- South Korea
- Prior art keywords
- valve
- tank chamber
- gas supply
- outlet
- block valve
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/44—Details of seats or valve members of double-seat valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
- F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
- F16K11/22—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members with an actuating member for each valve, e.g. interconnected to form multiple-way valves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85978—With pump
- Y10T137/86083—Vacuum pump
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87877—Single inlet with multiple distinctly valved outlets
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Valve Housings (AREA)
- Multiple-Way Valves (AREA)
Abstract
반도체 제조장치 등의 가스의 공급배관로, 특히 블록밸브가 설치된 배관로내의 잔류가스를 신속하고 원활하게 뽑아낼 수 있도록 한 탱크실을 가진 블록밸브를 제공하는 것이다.
탱크실을 가진 블록밸브를, 입구(6a) 및 출구(6b)를 보유하는 가스공급통로 (6)와, 가스공급통로(6)에 연통상태로 접속되고. 출구(7a)를 보유하는 분기통로 (7)와, 분기통로(7)의 도중에 형성된 탱크실(7) 등을 구비한 몸체(1)와. 몸체(1)에 설치되어, 분기통로(7)가 접속된 부분보다도 하류측의 가스공급통로(6)를 개폐하는 제 1밸브(2)와. 몸체(1)에 설치되어, 탱크실(8)보다도 상류측의 분기통로(7)를 개폐하는 제 2밸브(3)로 구성한다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 실시예에 관한 탱크실을 가진 블록밸브의 정면도,
제2도는 탱크실을 가진 블록밸브의 평면도,
제3도는 탱크실을 가진 블록밸브의 일부단면 정면도,
제4도는 탱크실을 가진 블록밸브의 일부단면 좌측면도.
Claims (7)
- 입구(6a) 및 출구(6b)를 보유하는 가스공급통로(6)와, 가스공급통로(6)에 분기형상으로 접속된 출구 (7a)를 보유하는 분기통로(7)와, 분기통로(7)의 도중에 형성된 탱크실(8)을 구비한 몸체 (1)와, 몸체(1)에 설치되며, 가스공급통로(6)의 하류측을 개폐하는 제 1 밸브(2)차, 몸체(1)에 설치되며, 분기통로(7)의 상류측을 개폐하는 제 2밸브(3)로 구성된 것을 특징으로 하는 탱크실을 가진 블록밸브.
- 제 1항에 있어서, 제 1밸브(1)에 의하여, 출구(6b)와 분기통로(7)의 접속부분 사이의 가스공급통로 (6)를 개폐하도록 한 것을 특징으로 하는 탱크실을 가진 블록밸브.
- 제 1항 또는 제 2항에 있어서, 제 2밸브(3)에 의하여, 가스공급통로(6)의 접속부분과 탱크실(8) 사이의 분기통로(7)를 개폐하도록 한 것을 특징으로 하는 탱크실을 가진 블록밸브.
- 제 1항에 있어서, 가스공급통로(6)의 가스출구(6b)측으로 제 1이음매(4)를, 또, 분기통로(7)의 출구 (7a)측으로 제 2이음매(5)를 각각 설치하도록 한 것을 특징으로 하는 탱크실을 가진 블록밸브
- 제 1항 또는 제 4항에 있어서, 제 1밸브(2) 및 제 2밸브(3)를 다이렉트터치식의 메탈다이민프램밸브로 한 것을 특징으로 하는 탱크실을 가진 블록밸브.
- 제 1항에 있어서, 다이렉트터치식의 메탈다이어프램밸브를 공기압작동식, 전동식 또는 수동식 중 어느 것으로 한 것을 특징으로 하는 탱크실을 가진 블록밸브.
- 제 1 항에 있어서, 분기통로(7)의 출구(7a)측으로 배기하므로, 탱크실(8)내를 항상 소정의 진공상태로 유지하도록 한 것을 특징으로 하는 탱크실을 가진 블록밸브.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26869093A JP3361162B2 (ja) | 1993-10-27 | 1993-10-27 | タンク室付ブロックバルブ |
JP93-268690 | 1993-10-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950011892A true KR950011892A (ko) | 1995-05-16 |
KR0170018B1 KR0170018B1 (ko) | 1999-03-30 |
Family
ID=17462036
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940025436A KR0170018B1 (ko) | 1993-10-27 | 1994-10-05 | 탱크실을 가진 블록밸브 |
Country Status (8)
Country | Link |
---|---|
US (1) | US5469885A (ko) |
EP (1) | EP0651189B1 (ko) |
JP (1) | JP3361162B2 (ko) |
KR (1) | KR0170018B1 (ko) |
CA (1) | CA2134425C (ko) |
DE (1) | DE69408626T2 (ko) |
SG (1) | SG45143A1 (ko) |
TW (1) | TW273589B (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102243713B1 (ko) | 2020-11-30 | 2021-04-26 | 주식회사 대성이노텍 | 목재 및 합판의 방염처리장치 |
KR102243715B1 (ko) | 2020-11-30 | 2021-04-26 | 주식회사 대성이노텍 | 목재 및 합판의 방염분사장치 |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3299048B2 (ja) * | 1994-08-30 | 2002-07-08 | 株式会社フジキン | 三方切換制御器 |
DE19540771A1 (de) | 1995-11-02 | 1997-05-07 | Hertz Inst Heinrich | Gaseinlaßvorrichtung für eine Beschichtungsanlage |
US5868126A (en) * | 1996-08-12 | 1999-02-09 | The Coleman Company, Inc. | LPG canister connector for combustion appliance |
CA2194598A1 (en) | 1996-08-12 | 1998-02-12 | Norris R. Long | Lpn canister connector for combustion appliance |
US6041817A (en) * | 1998-08-21 | 2000-03-28 | Fairchild Semiconductor Corp. | Processing system having vacuum manifold isolation |
US6161576A (en) * | 1999-06-23 | 2000-12-19 | Mks Instruments, Inc. | Integrated turbo pump and control valve system |
DE19929519A1 (de) * | 1999-06-28 | 2001-01-04 | Pfeiffer Vacuum Gmbh | Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage |
US6817381B2 (en) * | 1999-08-24 | 2004-11-16 | Tokyo Electron Limited | Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus |
US6223770B1 (en) * | 1999-09-29 | 2001-05-01 | Lsi Logic Corporation | Vacuum valve interface |
US6129108A (en) * | 1999-12-03 | 2000-10-10 | United Semiconductor Corp | Fluid delivering system |
US7264013B2 (en) | 2005-05-13 | 2007-09-04 | Air Products And Chemicals, Inc. | Enhanced purge effect in gas conduit |
JP4499012B2 (ja) * | 2005-09-30 | 2010-07-07 | シーケーディ株式会社 | 複合流体制御ユニット |
CN201344287Y (zh) * | 2008-10-20 | 2009-11-11 | 温晋轩 | 连续式抽真空设备的真空阀 |
CN101397986B (zh) * | 2008-11-25 | 2010-10-13 | 温晋轩 | 多功能抽空真空设备 |
CN101639132A (zh) * | 2009-08-27 | 2010-02-03 | 青岛子鹤工贸有限公司 | 混合气体阀 |
JP5788685B2 (ja) * | 2011-02-09 | 2015-10-07 | Ckd株式会社 | 薬液供給ユニット |
CN106568630B (zh) * | 2016-10-28 | 2020-02-21 | 核工业北京地质研究院 | 一种全金属小体积容器及其体积测定***、方法 |
WO2018097963A1 (en) * | 2016-11-22 | 2018-05-31 | Parker-Hannifin Corporation | Ultra-low carryover solenoid valve |
CN107701788A (zh) * | 2017-08-15 | 2018-02-16 | 叶子建 | 一种可控性较强的蓄水池控制阀门 |
CN109854784A (zh) * | 2018-12-06 | 2019-06-07 | 成都华科阀门制造有限公司 | 一种基于工业使用的气体采集装置 |
WO2022080933A1 (ko) * | 2020-10-15 | 2022-04-21 | 삼성전자주식회사 | 가스압력조절장치 및 이를 갖는 조리기기 |
US20220390028A1 (en) * | 2021-06-02 | 2022-12-08 | Brandon William Cole | Double Flow Rate Gas Solenoid Valve |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR783370A (fr) * | 1934-12-27 | 1935-07-11 | Robinet | |
US3206159A (en) * | 1961-09-29 | 1965-09-14 | American Radiator & Standard | Vacuum-operated valve |
FR2043936A5 (ko) * | 1969-05-02 | 1971-02-19 | Dubois Roger | |
DE2408208A1 (de) * | 1974-02-21 | 1975-09-11 | Hansa Metallwerke Ag | Mischbatterie fuer kalt- und warmwasser mit zwei drucktastenventilen |
US4714091A (en) * | 1985-06-10 | 1987-12-22 | Emcore, Inc. | Modular gas handling apparatus |
JPH0251671A (ja) * | 1988-08-12 | 1990-02-21 | Motoyama Seisakusho:Kk | メタルダイヤフラム弁 |
US5137047A (en) * | 1990-08-24 | 1992-08-11 | Mark George | Delivery of reactive gas from gas pad to process tool |
US5224513A (en) * | 1991-06-04 | 1993-07-06 | Cselt - Centro Studi E Laboratori Telecomunicazioni S.P.A. | Device for introducing reagents into an organometallic vapor phase deposition apparatus |
US5145152A (en) * | 1991-07-09 | 1992-09-08 | Smc Corporation | High-vacuum valves |
US5273075A (en) * | 1993-03-25 | 1993-12-28 | Itt Corporation | Diverter valve |
-
1993
- 1993-10-27 JP JP26869093A patent/JP3361162B2/ja not_active Expired - Fee Related
-
1994
- 1994-09-10 TW TW83108379A patent/TW273589B/zh active
- 1994-10-05 KR KR1019940025436A patent/KR0170018B1/ko not_active IP Right Cessation
- 1994-10-21 US US08/326,852 patent/US5469885A/en not_active Expired - Fee Related
- 1994-10-24 DE DE69408626T patent/DE69408626T2/de not_active Expired - Fee Related
- 1994-10-24 SG SG1996000414A patent/SG45143A1/en unknown
- 1994-10-24 EP EP19940307785 patent/EP0651189B1/en not_active Expired - Lifetime
- 1994-10-26 CA CA 2134425 patent/CA2134425C/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102243713B1 (ko) | 2020-11-30 | 2021-04-26 | 주식회사 대성이노텍 | 목재 및 합판의 방염처리장치 |
KR102243715B1 (ko) | 2020-11-30 | 2021-04-26 | 주식회사 대성이노텍 | 목재 및 합판의 방염분사장치 |
Also Published As
Publication number | Publication date |
---|---|
JP3361162B2 (ja) | 2003-01-07 |
KR0170018B1 (ko) | 1999-03-30 |
EP0651189B1 (en) | 1998-02-25 |
SG45143A1 (en) | 1998-01-16 |
DE69408626D1 (de) | 1998-04-02 |
DE69408626T2 (de) | 1998-11-05 |
CA2134425A1 (en) | 1995-04-28 |
TW273589B (ko) | 1996-04-01 |
US5469885A (en) | 1995-11-28 |
JPH07119844A (ja) | 1995-05-12 |
CA2134425C (en) | 1998-03-31 |
EP0651189A3 (en) | 1995-09-20 |
EP0651189A2 (en) | 1995-05-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR950011892A (ko) | 탱크실을 가진 블록밸브 | |
EP0401989A3 (en) | A one way air admittance valve | |
KR20150016911A (ko) | 밸브 조립체 및 배기 가스 시스템 | |
DE3366493D1 (en) | Back flow preventer, especially for water supply conduits | |
IL165307A0 (en) | Shut-off fitting | |
DK0724694T3 (da) | Ventilkammervæg med satellitventilsæde | |
ATE106131T1 (de) | Absperrvorrichtung für eine gasleitung. | |
ES8204113A1 (es) | Una valvula mezcladora perfeccionada | |
KR950033119A (ko) | 밸브 | |
KR960001569A (ko) | 유체 유동 제어 밸브 | |
TR200002151A2 (tr) | Araç gaz yakıt tankı için çoklu valf. | |
DE60011258D1 (de) | Vorrichtung für behälter | |
ATE332465T1 (de) | Mehrwegventilanordnung | |
JPS6039627Y2 (ja) | ガス供給設備 | |
RU95108305A (ru) | Клапан отсечной | |
JP2023046715A5 (ko) | ||
JPS6196268A (ja) | 内部に貫通部を有する環状流路の閉塞弁装置 | |
FR2308850A1 (fr) | Robinet a gaz | |
ATE261077T1 (de) | Absperrventil für einen abgasbehälter | |
SE9303679D0 (sv) | Ventilanordning | |
JPS57193709A (en) | Muffler for automobile engine | |
ATE22978T1 (de) | Absperrorgan fuer doppelrohre. | |
NZ337339A (en) | Flush system | |
KR970044268A (ko) | 자동차의 머플러 | |
DE10344866A1 (de) | Einlinientankentlüftungsventil mit Roll-Over-Funktion |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20030822 Year of fee payment: 6 |
|
LAPS | Lapse due to unpaid annual fee |