KR950003229A - Manufacturing Method of Carbon / Carbon Composites - Google Patents

Manufacturing Method of Carbon / Carbon Composites Download PDF

Info

Publication number
KR950003229A
KR950003229A KR1019930012384A KR930012384A KR950003229A KR 950003229 A KR950003229 A KR 950003229A KR 1019930012384 A KR1019930012384 A KR 1019930012384A KR 930012384 A KR930012384 A KR 930012384A KR 950003229 A KR950003229 A KR 950003229A
Authority
KR
South Korea
Prior art keywords
support plate
carbon
molded body
ceramic
fiber molded
Prior art date
Application number
KR1019930012384A
Other languages
Korean (ko)
Other versions
KR960004374B1 (en
Inventor
오세민
박양덕
이규동
Original Assignee
조말수
포항종합제철 주식회사
백덕현
재단법인산업과학기술연구소
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 조말수, 포항종합제철 주식회사, 백덕현, 재단법인산업과학기술연구소 filed Critical 조말수
Priority to KR1019930012384A priority Critical patent/KR960004374B1/en
Publication of KR950003229A publication Critical patent/KR950003229A/en
Application granted granted Critical
Publication of KR960004374B1 publication Critical patent/KR960004374B1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber

Abstract

본 발명은 항공기 브레이크, 로켓노즐, 우주왕복선의 내열구조재 등에 사용되는 탄소/탄소 복합재료의 제조방법에 관한것으로, 강화재로서 탄화처리과정을 거치지 않은 안정화(불융화) 섬유를 사용함으로써, 제조원가가 낮으면서 물리적 특성이 우수한 탄소/탄소 복합재료를 제조하고자 하는데, 그 목적이 있다.The present invention relates to a method for producing a carbon / carbon composite material used in aircraft brakes, rocket nozzles, heat-resistant structural materials of space shuttles, etc., by using a stabilized (unfinished) fiber that has not undergone a carbonization process as a reinforcing material, the production cost is low In order to manufacture a carbon / carbon composite material having excellent physical properties, the purpose is to.

본 발명은 안정화 섬유 성형체를 흑연지지판과 세라믹 지지판 사이에 삽입하고 고정시키는 단계; 안정화 섬유 성형체가 고정된 상기 지지대를 반응관에 장입하고 불활성 분위기중에서 5∼200℃/분의 승온속도로 유도가열하여 900∼1400℃의 온도에서 탄화수소 기체를 2∼100vol.%의 농도로 유입시키면서 1∼5시간 유지시킨 후 냉각시키는 1차 화학증착 반응 단계; 및 냉각된 지지대로부터 세라믹 지지판을 제거한 후 상기 1차 화학증착 반응과 동일한 조건으로 2차 증착반응시키는 단계를 포함하여 구성되는 탄소/탄소 복합재료의 제조방법을 그 요지로 한다.The present invention comprises the steps of inserting and fixing the stabilized fiber molded body between the graphite support plate and the ceramic support plate; The support on which the stabilizing fiber molded body was fixed was charged into a reaction tube, and induction heating was performed at an elevated temperature rate of 5 to 200 ° C / min in an inert atmosphere while introducing hydrocarbon gas at a concentration of 2 to 100 vol.% At a temperature of 900 to 1400 ° C. A primary chemical vapor deposition step of cooling after maintaining for 1 to 5 hours; And removing the ceramic support plate from the cooled support, and then performing a secondary deposition reaction under the same conditions as the first chemical vapor deposition reaction.

Description

탄소/탄소 복합재료의 제조방법Manufacturing Method of Carbon / Carbon Composites

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

Claims (3)

탄소/탄소 복합재료를 제조하는 방법에 있어서, 안정화 섬유 성형체를 흑연지지판과 세라믹 지지판 사이에 삽입하고 고정시키는 단계; 안정화 섬유 성형체가 고정된 상기 지지대를 반응관에 장입하고 불활성 분위기 중에서 5∼200℃/분의 승온속도로 900∼1400℃의 온도에서 탄화수소 기체를 2∼100vol.%의 농도로 유입시키면서 1∼5시간 유지시킨 후 냉각시키는 1차화학증착 반응 단계; 및 냉각된 지지대로부터 세라믹 지지판을 제거한 후 섬유성형체가 부착된 흑연지지판을 다시 반응관에 넣고 불활성 분위기중에서 5∼200℃/분의 승온속도로 유도가열하여 9001∼1400℃의 온도에서 탄화수소 기체를2∼100vol.%의 농도로 유입시킨후 냉각시키는 2차 화학 증착 반응 단계를 포함하여 구성됨을 특징으로 하는 탄소/탄소 복합재료의 제조방법.CLAIMS 1. A method of manufacturing a carbon / carbon composite material, the method comprising: inserting and fixing a stabilized fiber molded body between a graphite support plate and a ceramic support plate; The support on which the stabilizing fiber molded body was fixed was charged into a reaction tube, and the hydrocarbon gas was introduced at a concentration of 2 to 100 vol.% At a temperature of 900 to 1400 ° C. at an elevated temperature rate of 5 to 200 ° C./min in an inert atmosphere. Primary chemical vapor deposition step of cooling after maintaining for a time; After removing the ceramic support plate from the cooled support, the graphite support plate to which the fibrous body is attached is put back into the reaction tube, and induction heating is performed at an elevated temperature rate of 5 to 200 ° C./min in an inert atmosphere to produce hydrocarbon gas at a temperature of 9001 to 1400 ° C. 2 Method for producing a carbon / carbon composite material comprising a secondary chemical vapor deposition step of cooling after flowing to a concentration of ~ 100vol.%. 제1항에 있어서, 안정화 섬유 성형체가 레이욘, 폴리아크릴로니트릴 및 핏치로 이루어진 그룹중에서 선택된 하나의 원료로부터 제조된 것임을 특징으로 하는 탄소/탄소 복합재료의 제조방법.The method of claim 1, wherein the stabilizing fiber molded body is made from a raw material selected from the group consisting of rayon, polyacrylonitrile, and pitch. 제1항 또는 제2항에 있어서, 세라믹 지지판이 알루미나, 지르코니아, 실리콘 카바이드, 및 실리콘 나이트라이드로 이루어진 세라믹 그룹으로부터 선택된 하나의 세라믹으로 제조된 것임을 특징으로 하는 탄소/탄소 복합재료의 제조방법.The method of claim 1 or 2, wherein the ceramic support plate is made of one ceramic selected from a ceramic group consisting of alumina, zirconia, silicon carbide, and silicon nitride. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019930012384A 1993-07-02 1993-07-02 Process for the preparation of composite materials of carbon/carbon KR960004374B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019930012384A KR960004374B1 (en) 1993-07-02 1993-07-02 Process for the preparation of composite materials of carbon/carbon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930012384A KR960004374B1 (en) 1993-07-02 1993-07-02 Process for the preparation of composite materials of carbon/carbon

Publications (2)

Publication Number Publication Date
KR950003229A true KR950003229A (en) 1995-02-16
KR960004374B1 KR960004374B1 (en) 1996-04-02

Family

ID=19358588

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930012384A KR960004374B1 (en) 1993-07-02 1993-07-02 Process for the preparation of composite materials of carbon/carbon

Country Status (1)

Country Link
KR (1) KR960004374B1 (en)

Also Published As

Publication number Publication date
KR960004374B1 (en) 1996-04-02

Similar Documents

Publication Publication Date Title
US6291058B1 (en) Composite material with ceramic matrix and SiC fiber reinforcement, method for making same
US5350545A (en) Method of fabrication of composites
US20090214781A1 (en) Cvi followed by coal tar pitch densification by vpi
US6410088B1 (en) CVI (chemical vapor infiltration) densification of porous structures
FR2564110B1 (en) PROCESS FOR PRODUCING VAPO-DEPOSITED CARBON FIBERS FROM METHANE
CN109942818A (en) A kind of high-purity polydimethylsiloxane pre-ceramic materials and preparation method thereof
Liu et al. Carbon-fiber-reinforced C-SiC binary matrix composites
JP2944838B2 (en) Method for manufacturing ceramic matrix composite material member
Vaidyaraman et al. Forced flow-thermal gradient chemical vapor infiltration (FCVI) for fabrication of carbon/carbon
GB2236540A (en) Boron nitride coated fibres
US6129887A (en) Process to produce silicon carbide fibers using a controlled concentration of boron oxide vapor
Veltri et al. Chemical vapor deposited SiC matrix composites
JPH1059795A (en) Carbon fiber reinforced carbon composite material crucible for pulling up semiconductor single crystal
US3811927A (en) Process for vapor deposition on glassy-carbon substrate
Dupel et al. Pulse chemical vapour deposition and infiltration of pyrocarbon in model pores with rectangular cross-sections: Part I Study of the pulsed process of deposition
KR950003229A (en) Manufacturing Method of Carbon / Carbon Composites
US20100078839A1 (en) Pitch densification of carbon fiber preforms
EP0674607B1 (en) Amorphous boron carbide coating
US20170165626A1 (en) Element for Injecting Fuel into a Regenerator of a Fluid Catalytic Cracking Unit
US5523035A (en) Process for producing carbonaceous material
JP4358313B2 (en) Seed chuck for semiconductor single crystal pulling equipment
US6241923B1 (en) Process for the production of carbon fibers
US5064915A (en) Production of infusible polycarbosilanes convertible into silicon carbide ceramics
JPS63295476A (en) Production of carbon fiber reinforced carbonaceous material
US3716332A (en) Carbonization of wool

Legal Events

Date Code Title Description
A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20040401

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee