KR940027598U - Improved mask for semiconductor gym equipment - Google Patents
Improved mask for semiconductor gym equipmentInfo
- Publication number
- KR940027598U KR940027598U KR2019930009175U KR930009175U KR940027598U KR 940027598 U KR940027598 U KR 940027598U KR 2019930009175 U KR2019930009175 U KR 2019930009175U KR 930009175 U KR930009175 U KR 930009175U KR 940027598 U KR940027598 U KR 940027598U
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor
- improved mask
- gym equipment
- gym
- equipment
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70633—Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930009175U KR0116281Y1 (en) | 1993-05-29 | 1993-05-29 | Mask for semiconductor process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930009175U KR0116281Y1 (en) | 1993-05-29 | 1993-05-29 | Mask for semiconductor process |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940027598U true KR940027598U (en) | 1994-12-10 |
KR0116281Y1 KR0116281Y1 (en) | 1998-04-18 |
Family
ID=19356079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930009175U KR0116281Y1 (en) | 1993-05-29 | 1993-05-29 | Mask for semiconductor process |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0116281Y1 (en) |
-
1993
- 1993-05-29 KR KR2019930009175U patent/KR0116281Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0116281Y1 (en) | 1998-04-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69401534D1 (en) | Respiratory protection equipment | |
KR940027598U (en) | Improved mask for semiconductor gym equipment | |
KR940002772U (en) | Easy-to-twist athletic equipment | |
KR970045362U (en) | Semiconductor exposure equipment | |
KR950007353U (en) | Semiconductor manufacturing equipment | |
KR950008204U (en) | Wearable Fitness Equipment | |
KR950000515U (en) | Leg exercise equipment | |
KR940022069U (en) | Fitness equipment | |
KR940022066U (en) | General fitness equipment | |
KR960004091U (en) | Sports equipment | |
KR940000470U (en) | Tennis practice equipment | |
KR950009983U (en) | Exposure equipment | |
KR940026252U (en) | Stepping leg exercise equipment | |
KR960010029U (en) | Fitness equipment | |
KR950009967U (en) | Shadow Mask Forming Equipment | |
KR940005163U (en) | Sports equipment | |
KR950005715U (en) | Fitness equipment | |
KR940022072U (en) | Fitness equipment | |
FI932152A (en) | fitness Equipment | |
KR950015642U (en) | Wafer printing exposure equipment | |
KR970045365U (en) | Semiconductor exposure equipment | |
KR970045371U (en) | Semiconductor exposure equipment | |
KR970025109U (en) | Semiconductor exposure equipment | |
KR970019155U (en) | Semiconductor exposure equipment | |
KR980004650U (en) | Semiconductor exposure equipment |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application | ||
J2X1 | Appeal (before the patent court) |
Free format text: APPEAL AGAINST DECISION TO DECLINE REFUSAL |
|
B701 | Decision to grant | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20061215 Year of fee payment: 10 |
|
LAPS | Lapse due to unpaid annual fee |