KR940013650U - 에트모스캔(atmoscan)튜브 - Google Patents

에트모스캔(atmoscan)튜브

Info

Publication number
KR940013650U
KR940013650U KR2019920021327U KR920021327U KR940013650U KR 940013650 U KR940013650 U KR 940013650U KR 2019920021327 U KR2019920021327 U KR 2019920021327U KR 920021327 U KR920021327 U KR 920021327U KR 940013650 U KR940013650 U KR 940013650U
Authority
KR
South Korea
Prior art keywords
atmoscan tube
atmoscan
tube
Prior art date
Application number
KR2019920021327U
Other languages
English (en)
Other versions
KR950007919Y1 (ko
Inventor
김용화
임관택
김성철
방철원
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR92021327U priority Critical patent/KR950007919Y1/ko
Publication of KR940013650U publication Critical patent/KR940013650U/ko
Application granted granted Critical
Publication of KR950007919Y1 publication Critical patent/KR950007919Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
KR92021327U 1992-11-02 1992-11-02 에트모스캔(atmoscan)튜브 KR950007919Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92021327U KR950007919Y1 (ko) 1992-11-02 1992-11-02 에트모스캔(atmoscan)튜브

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92021327U KR950007919Y1 (ko) 1992-11-02 1992-11-02 에트모스캔(atmoscan)튜브

Publications (2)

Publication Number Publication Date
KR940013650U true KR940013650U (ko) 1994-06-25
KR950007919Y1 KR950007919Y1 (ko) 1995-09-25

Family

ID=19343085

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92021327U KR950007919Y1 (ko) 1992-11-02 1992-11-02 에트모스캔(atmoscan)튜브

Country Status (1)

Country Link
KR (1) KR950007919Y1 (ko)

Also Published As

Publication number Publication date
KR950007919Y1 (ko) 1995-09-25

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