KR930012636A - 열팽창을 규정(define)시킨 세라믹 복합재 - Google Patents
열팽창을 규정(define)시킨 세라믹 복합재 Download PDFInfo
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- KR930012636A KR930012636A KR1019920017540A KR920017540A KR930012636A KR 930012636 A KR930012636 A KR 930012636A KR 1019920017540 A KR1019920017540 A KR 1019920017540A KR 920017540 A KR920017540 A KR 920017540A KR 930012636 A KR930012636 A KR 930012636A
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
- C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
- C04B35/5935—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/15—Ceramic or glass substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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Abstract
이 발명은 전자구성부품의 기재로서 사용되는 열팽창을 규정시킨 세라믹복합재에 관한 것이다.
이 세라믹복합재의 열팽창계수는 실리콘의 열팽창계수에 대응된다. 그 세라믹복합재는 적어도 두결정상을 구성하되 하나의 결정 Si3N4상 이외에 둘째 결정상과 각각의 또다른 결정상을 각각 카바이드, 옥사이드 및 주기율표 4~6의 아족의 천이금속 니트리드, 알루미늄옥사이도, 보론 니트리드 및 알류미늄 니트리드로 구성되는 그룹에서 선택된 물질을 구비한다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 온도 900℃에서 전자회로에 쓰이는 시판용 실리콘의 열팽창계수와 비교한 본 발명의 실시예1의 새로운 세라믹복합재의 열팽창계수의 그라프를 나타낸다.
Claims (10)
- 전자구성부품을 기재로서 실리콘의 열팽창계수에 대응되는 열팽창계수를 가진 세라믹 복합재.
- 제1항에 있어서, 적어도 두결정상을 구성하되, 하나의 Si2N4상 이외에 둘째 결정상과 각각의 또다른 결정상 각각은 카바이드, 옥사이드 및 주기율표 4~6아족 천이금속의 니트리드, 알루미늄 옥사이드, 보론 니트리드 및 알루미늄 니트리드로 구성되는 그룹에서 선택된 물질로 구성함을 특징으로하는 세라믹 복합재.
- 제2항에 있어서, 둘째 결정상과 또다른 결정상은 알루미늄 옥사이드, 보론 니트리드 또는 알루미늄 니트리드를 구성함을 특징으로하는 세라믹복합재.
- 전자구성부품용 기재로서, 실리쿤니트리드 94.9-27 vol%, 카바이드, 옥사이드 및 천이금속 니트리드, 알루미늄옥사이드, 보론니트리드 및 알루미늄 니트리드로 구성되는 구룹에서 선택된 적어도 하나의 물질 5-65vol%, 적어도 하나의 소결첨가제(sintering additive)0.1-8vol%를 포함하는 세라믹 복합재.
- 전자구성부품용기재로서 실리콘니트리드 95-65vol%, 알루미늄옥사이드, 보론니트리드 및 알루미늄 니트리드로 구성되는 그룹에서 선택된 적어도 하나의 물질5-30vol%, 적어도 하나의 소결첨가제 1-5%를 포함하는 세라믹 복합재.
- 전자구성부품을 기재로서, 실리콘 니트리드 83.5-80vol% 티타늄 니트리드 14-15vol%, 적어도 하나의 소결 첨가제 2.5-5vol%를 포함하는 세라믹복합재.
- 전자구성부품용 기재로서 실리콘니트리드로, 카바이드, 옥사이드및 천이금속 니트리드, 알루미늄 옥사이드, 보론니트리드 및 알루미늄 니트리드로 구성되는 그룹에서 선택된 적어도 하나의 물질과, 입자크기 10㎛미만의 분말로서 소결조제를 혼합시켜, 얻어진 혼합물을 성형시켜, 그 성형체를 그다음 질소함유대기압, 온도 1600℃~1950℃에서 소결시킨을 특징으로하는 세라믹 복합재의 제조방법.
- 기계적응력 측정용 저너자구성부품에서 청구범위 제1항 내지 제6항중 어느한항의 세라믹 복합재사용.
- 압력센서에 있어서 청구범위 제1항 내지 제6항중 어느한항의 세라믹 복합재사용.
- 칩(chip)과 기재를 납땜(soldering)에 의해 접속하는 전자구성부품에 있어서 청구범위 제1항 내지 제6항중 어느 한항의 세라믹복합재사용.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEP4142412.3 | 1991-12-20 | ||
DE4142412A DE4142412A1 (de) | 1991-12-20 | 1991-12-20 | Keramischer verbundwerkstoff mit definierter thermischer ausdehnung |
Publications (1)
Publication Number | Publication Date |
---|---|
KR930012636A true KR930012636A (ko) | 1993-07-20 |
Family
ID=6447777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019920017540A KR930012636A (ko) | 1991-12-20 | 1992-09-25 | 열팽창을 규정(define)시킨 세라믹 복합재 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0548802A1 (ko) |
JP (1) | JPH05330920A (ko) |
KR (1) | KR930012636A (ko) |
DE (1) | DE4142412A1 (ko) |
TW (1) | TW203599B (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4425312A1 (de) * | 1994-07-18 | 1996-01-25 | Bayer Ag | Sinterwerkstoffe auf Basis von Si¶3¶N¶4¶/BN sowie Verfahren zu ihrer Herstellung |
DE4435182C2 (de) * | 1994-09-30 | 1997-08-14 | Fraunhofer Ges Forschung | Verfahren zur Herstellung eines hoch- und verschleißfesten BN-enthaltenden Si¶3¶N¶4¶-Werkstoffs, der Werkstoff und seine Verwendung |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5626770A (en) * | 1979-08-06 | 1981-03-14 | Sumitomo Electric Industries | Ceramic material for gaassic |
JPS6060983A (ja) * | 1983-09-08 | 1985-04-08 | 株式会社デンソー | セラミックヒ−タ及びその製造方法 |
DE3614141A1 (de) * | 1985-06-19 | 1988-04-28 | Hitachi Metals Ltd | Leitfaehiger siliciumnitrid-sinterkoerper und verfahren zu seiner herstellung |
JPS6230663A (ja) * | 1985-08-02 | 1987-02-09 | 株式会社日立製作所 | 電子回路基板用材料 |
DE3623928A1 (de) * | 1986-07-16 | 1988-01-21 | Wabco Westinghouse Steuerung | Einrichtung zum abdichten zweier relativ gegeneinander bewegbarer maschinenteile, insbesondere zum abdichten des kolbens eines arbeitszylinders |
-
1991
- 1991-12-20 DE DE4142412A patent/DE4142412A1/de not_active Withdrawn
-
1992
- 1992-07-21 TW TW081105777A patent/TW203599B/zh active
- 1992-09-25 KR KR1019920017540A patent/KR930012636A/ko not_active Application Discontinuation
- 1992-12-17 JP JP4354701A patent/JPH05330920A/ja active Pending
- 1992-12-17 EP EP92121477A patent/EP0548802A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP0548802A1 (de) | 1993-06-30 |
TW203599B (ko) | 1993-04-11 |
JPH05330920A (ja) | 1993-12-14 |
DE4142412A1 (de) | 1993-06-24 |
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