KR930002918B1 - Color filter and making method of lcd - Google Patents

Color filter and making method of lcd Download PDF

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Publication number
KR930002918B1
KR930002918B1 KR1019890010047A KR890010047A KR930002918B1 KR 930002918 B1 KR930002918 B1 KR 930002918B1 KR 1019890010047 A KR1019890010047 A KR 1019890010047A KR 890010047 A KR890010047 A KR 890010047A KR 930002918 B1 KR930002918 B1 KR 930002918B1
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South Korea
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filter
forming
color filter
black matrix
liquid crystal
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KR1019890010047A
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Korean (ko)
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KR910003405A (en
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최동욱
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삼성전자 주식회사
김광호
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements

Abstract

The method comprises (a) coating the glass substrate (1) with dyeable photosensitive resin by a rotational coating method, (b) forming a black matrix (2) pattern on the above resin, (c) forming a separation film (3) for dyeing thereon, (d) forming a red filter (4), a green filter (5) and a blue filter (6) thereon, (e) forming a transparent resin film (7) on the pattern of the completed color filters (4,5,6), and (f) forming a transparent conductive film (8) thereon. In the process the coating thickness of photosensitive resin is 0.5-1.0 μm.

Description

액정 디스플레이용 컬러필터와 그 제조방법Color filter for liquid crystal display and its manufacturing method

제 1 도는 액정디스플레이용 컬러필터의 평면을 보인 도면.1 is a plan view of a color filter for a liquid crystal display.

제 2 도는 종래의 액정디스플레이용 컬러필터의 일부분을 보인 단면도.2 is a cross-sectional view showing a part of a conventional color filter for a liquid crystal display.

제 3 도는 본 발명에 따라 제작된 액정 디스플레이용 컬러필터의 일부분을 보인 단면도.3 is a cross-sectional view showing a part of a color filter for a liquid crystal display manufactured according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 유기기판 2 : 블랙매트릭스1 organic substrate 2 black matrix

3 : 염색분리막 4 : 적색필터3: dye separation membrane 4: red filter

5 : 녹색필터 6 : 청색필터5: green filter 6: blue filter

7 : 투명수지막 8 : 투명도전막7: transparent resin film 8: transparent conductive film

본 발명은 액정디스플레이용 컬러필터와 그 제조방법에 관한 것으로서, 보다 상세하게는 필터격자 사이에 누설광을 차단하기 위해 설치하는 블랙매트릭스(Black Matrix)를 보다 간단하게 제작할 수 있는 액정디스플레이용 컬러필터와 그 제조방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter for a liquid crystal display and a manufacturing method thereof, and more particularly, to a color filter for a liquid crystal display that can more easily produce a black matrix provided to block leakage light between filter grids. And to a method of manufacturing the same.

일반적으로 액정 디스플레이용 컬러필터의 평면은 제 1 도에 도시된 바와 같으며, 그 단면은 제 2 도와 같은 구성을 가진바 이를 간단히 설명하면 다음과 같다.In general, the plane of the color filter for a liquid crystal display is as shown in FIG. 1, the cross section of which has the same configuration as that of FIG.

즉 유리기판(1)상에 광(光)차단용 크롬(Cr)막을 전자선 증착(E-beam Evaporation) 또는 스퍼터(sputter)등의 진공증착 설비를 이용하여 형성한후 감광재도포, 마스크노광, 현상, 습식식각 등의 방법을 사용하여 블랙매트릭스(2)를 형성시킨다. 상기 제작된 샘플위에 필터 패턴용 감광수지를 도포하고 마스크노광하여 소정의 분광특성을 갖는 염로로 염색하여 적색필터(4)를 형성시키고 녹색필터(5) 패턴 염색시 먼저 염색된 적색필터가 동시에 염색되는 것을 방지하기 위하여 적색필터상에 보호막 패턴을 형성한다. 그리고 적색필터와 동일한 방법으로 녹색필터(5)를 형성하고 녹색필터 보호막 패턴을 형성한다. 또한 청색필터(6)를 상기와 동일한 방법으로 형성하고 불필요하게된 적색, 녹색필터 보호막 패턴을 제거한다.That is, a photo-blocking chromium (Cr) film is formed on the glass substrate 1 using vacuum deposition equipment such as E-beam evaporation or sputtering, and then photosensitive material coating, mask exposure, The black matrix 2 is formed using methods such as development and wet etching. Applying the photoresist for the filter pattern on the fabricated sample and mask exposure to dye with a salt having a predetermined spectral characteristics to form a red filter (4), the first dyed red filter is dyed at the same time when the green filter (5) pattern A protective film pattern is formed on the red filter to prevent it from being formed. The green filter 5 is formed in the same manner as the red filter, and the green filter passivation pattern is formed. In addition, the blue filter 6 is formed in the same manner as described above, and the unnecessary red and green filter protective film patterns are removed.

이와같이 제작된 색필터의 패턴상에 필터 표면의 평탄화와 보호를 위해 투명수지막(7)인 보호층을 형성하고 전극용 투명도전막(8)을 상기 투명수지막(7)위에 형성하여 컬러필터를 제조한다.A protective layer, which is a transparent resin film 7, is formed on the pattern of the color filter fabricated as described above, and the transparent conductive film 8 for electrodes is formed on the transparent resin film 7 to form a color filter. Manufacture.

상기한 바와같이 컬러필터를 제작하는데 있어 대두된 문제점은, 첫째, 블랙매트릭스 제작에 크롬(Cr)막을 사용하였기 때문에 값비싼 전자선 증착(E-beam Evaporation) 또는 스퍼터(sputter)등의 진공증착설비를 필요로 하였다.As mentioned above, a problem that arises in manufacturing a color filter is, firstly, because a chromium (Cr) film is used to manufacture a black matrix, expensive vapor deposition equipment such as E-beam evaporation or sputter is used. It was necessary.

둘째, 크롬(Cr)막의 제조가격이 비싸며 금속막의 특성상 반사광에 의한 콘트라스트(Cnotrast)의 저하를 피할 수 없었다.Second, the manufacturing cost of the chromium (Cr) film is expensive and the decrease of contrast due to the reflected light cannot be avoided due to the characteristics of the metal film.

따라서, 본 발명의 목적은 유기 염색막으로 블랙매트릭스를 형성함으로써 제조비용을 절감시킬 수 있는 액정디스플레이용 컬러필터를 제공하는데 있다.Accordingly, an object of the present invention is to provide a color filter for a liquid crystal display that can reduce the manufacturing cost by forming a black matrix with an organic dye film.

본 발명의 다른 목적은 반사율이 거의 없는 블랙매트릭스를 형성할 수 있는 액정 디스플레이용 컬러필터를 제공하는데 있다.Another object of the present invention is to provide a color filter for a liquid crystal display capable of forming a black matrix having almost no reflectance.

상기한 목적을 달성하기 위해서 본 발명에 따른 컬리필터는 제 3 도에 도시된 바와같이, 유리기판 상에 유기염색막으로 된 블랙매트릭스를 형성하고 상기 블랙매트릭스가 설치된 기판전면에 염색분리막을 형성하며, 상기 염색분리막상에 적색필터, 녹색필터, 청색필터의 색필터를 각각 형성하고 상기 색필터의 패턴상에 투명수지막과 투명도전막을 차례로 형성하여 구성되는 것을 특징으로 한다.In order to achieve the above object, the curling filter according to the present invention forms a black matrix made of an organic dye film on a glass substrate as shown in FIG. 3, and forms a dye separator on the entire surface of the substrate on which the black matrix is installed. And a color filter of a red filter, a green filter, and a blue filter on the dye separation layer, respectively, and a transparent resin film and a transparent conductive film are sequentially formed on the pattern of the color filter.

본 발명의 또 다른 목적은 상기한 액정디스플레이용 컬러필터의 구조를 제조하는데 가장 적합한 액정디스플레이용 컬러필터의 제조방법을 제공하는데 있다.Still another object of the present invention is to provide a method of manufacturing a color filter for a liquid crystal display, which is most suitable for manufacturing the structure of the color filter for a liquid crystal display.

상기한 목적을 달성하기 위해서 본 발명에 따른 컬러필터의 제조방법은 유리기판상에 염색가능한 젤라틴 또는 카제인등의 중크롬산 암모늄염 혼합용액과 같은 감광성수지를 회전도포한 후 마스크노광등의 방법을 사용하여 블랙매트릭스를 제작하는 공정을 포함하는 것을 특징으로 하고 있다.In order to achieve the above object, the method of manufacturing a color filter according to the present invention is a black matrix by using a method such as mask exposure after rotating a photosensitive resin, such as a mixed solution of ammonium dichromate salt such as gelatin or casein, which can be dyed on a glass substrate. It characterized in that it comprises a step of producing a.

다음은 상기한 본 발명의 액정디스플레이용 컬러필터를 제조하는 방법을 상세히 설명한 것으로 본 발명에 의한 액정디스플레이용 컬러필터의 제조방법은 대체로 6개의 공정으로 나누어지는데 이를 한공정씩 나누어 설명한다.Next, the method for manufacturing the color filter for the liquid crystal display according to the present invention will be described in detail. The method for manufacturing the color filter for the liquid crystal display according to the present invention is generally divided into six processes.

제 1 공정은 블랙매트릭스로 사용되는 염색 가능한 감광성수지를 유리기판(1)상에 코팅(coating)하는 공정으로서 유리기판(1)상에 염색가능한 젤라틴 또는 카제인등의 중크롬산 암모늄염 혼합용액과 같은 감광성 수지를 0.5∼1.0㎛의 두께로 회전도포시켜 감광성수지막을 유리기판(1)상에 형성한다. 여기서 감광성 수지막의 두께가 0.5㎛ 보다 얇으면 누설광을 효과적으로 차단시키지 못하며, 1.0㎛보다 두꺼워지면 광차단 효과는 동일하면서도 감광성 수지막만 두꺼워져서 다음막의 도포시 균일한 코팅(coating)이 어렵기 때문에 바람직하지 못하다.The first step is a step of coating a dyeable photosensitive resin used as a black matrix on a glass substrate (1), and a photosensitive resin such as a mixed solution of ammonium dichromate salt such as gelatin or casein, which can be dyed on the glass substrate (1). Is rotated to a thickness of 0.5 to 1.0 mu m to form a photosensitive resin film on the glass substrate (1). If the thickness of the photosensitive resin film is thinner than 0.5 μm, the leakage light cannot be effectively blocked. If the thickness of the photosensitive resin film is thicker than 1.0 μm, the light blocking effect is the same, but only the photosensitive resin film is thickened. Not desirable

제 2 공정은 제 1 공정에서 형성된 감광성 수지막에 블랙매트릭스(2)패턴을 형성하는 공정으로서 상기 제 1 공정에서 형성된 감광성 수지막위에 소정의 블랙매트릭스 패턴마스크를 개재시켜 50-100mJ/㎠의 에너지로 자외선 노광한다. 노광된 막은 40∼50℃의 온수로 현상하고, 건조시킨 다음 소정의 분광특성을 갖는 흑색염료용액에 침적시켜 감광성수지 패턴을 염색하여 블랙매트릭스(2) 패턴을 형성한다. 염색이 완료된 블랙매트릭스(2)는 실온의 온수로 수세한 후 150∼200℃의 고온에서 건조하여 막(膜)내의 수분을 완전히 제거시킨다.The second step is a step of forming a black matrix (2) pattern on the photosensitive resin film formed in the first step, the energy of 50-100mJ / ㎠ by interposing a predetermined black matrix pattern mask on the photosensitive resin film formed in the first step Ultraviolet light exposure. The exposed film is developed with hot water at 40 to 50 ° C., dried, and then immersed in a black dye solution having a predetermined spectral characteristic to dye the photosensitive resin pattern to form a black matrix (2) pattern. The dyed black matrix (2) is washed with warm water at room temperature and dried at a high temperature of 150 to 200 ℃ to completely remove the moisture in the film (膜).

제 3 공정은 제 2 공정에서 얻어진 샘플위에 염색분리막(3)을 형성하는 공정으로서, 상기 제 2 공정에서 얻어진 샘플위에 색필터(4)(5)(6)를 형성할 때 블랙매트릭스(2)가 염색되는 것을 방지하기 위하여 상기 블랙매트릭스(2)가 설치된 기판(1) 전면에 투명한 에폭시 또는 폴리이미드수지를 피복하여 염색분리막(3)을 형성한다.The third step is a step of forming the dye separation membrane 3 on the sample obtained in the second step, and when forming the color filter (4) (5) (6) on the sample obtained in the second step, the black matrix (2) In order to prevent dyeing, the dye separation membrane 3 is formed by coating a transparent epoxy or polyimide resin on the entire surface of the substrate 1 on which the black matrix 2 is installed.

제 4 공정은 제 3 공정에서 얻어진 샘플위에 적색필터(4), 녹색필터(5), 및 청색필터(6)를 순차적으로 형성하는 공정으로서, 상기 염색분리막(3)상에 소정의 분광특성을 나타내도록 적색수지를 회전 도포시키고, 그 위에 감광재를 도포하여 마스크노광하고 감광재와 적색수지를 현상하여 적색필터의 패턴을 형성시키고 감광제를 제거하여 적색필터(4)를 형성한다. 그리고, 녹색, 청색수지를 사용하여 상기 적색필터(4)제작과 동일한 방법으로 반복실시하여 녹색필터(5)와 청색필터(6)를 형성한다.The fourth step is a step of sequentially forming the red filter (4), the green filter (5), and the blue filter (6) on the sample obtained in the third step, the predetermined spectral characteristics on the dye separation membrane (3) The red resin is rotated and coated, and a photosensitive material is applied on the mask to expose the mask, the photosensitive material and the red resin are developed to form a pattern of the red filter, and the photosensitive agent is removed to form the red filter 4. Then, the green filter 5 and the blue filter 6 are formed by repeating the green and blue resins in the same manner as the manufacturing of the red filter 4.

제 5 공정은 투명수지막(7)을 형성하는 공정으로서, 상기 제4공정에서 완성된 색필터(4)(5)(6)의 패턴상에 필터표면의 평탄화를 기하기 위해 염색분리막(3)과 동일한 방법으로 투명한 에폭시 또는 폴리이미드수지를 피복하여 투명수지막(7)을 형성한다.The fifth step is a step of forming the transparent resin film 7, wherein the dye separation membrane 3 is used to planarize the surface of the filter on the pattern of the color filters 4, 5 and 6 completed in the fourth step. The transparent resin film 7 is formed by coating the transparent epoxy or polyimide resin in the same manner as above.

제 6 공정은 마지막 공정으로서, 상기 공정에 의하여 제작된 샘플위에 전극용 투명도전막(8)을 형성함으로써 최종적으로 제 3 도에 도시된 바와같은 액정디스플레이용 컬러필터를 완성한다.The sixth step is the last step, by forming the transparent conductive film 8 for the electrode on the sample produced by the above step, finally completing the color filter for the liquid crystal display as shown in FIG.

상기한 바와같은 제조공정을 거쳐 제조된 액정디스플레이용 컬러필터의 장점은, 첫째, 종래의 블랙매트릭스 패턴을 제작할 때 크롬(Cr)막을 형성하기 위해 필요로 했던 전자선증착(E-beam Evaporation) 또는 스퍼터(sputter)등의 진공증착설비를 필요로 하지 않게 되며 적색, 녹색, 청색필터 패턴을 제작하는 것과 동일한 방법으로 블랙 매트릭스 패턴을 제작할 수 있다.Advantages of the color filter for the liquid crystal display manufactured through the manufacturing process as described above, first, e-beam evaporation or sputtering required to form a chromium (Cr) film when manufacturing a conventional black matrix pattern. No need for vacuum deposition equipment such as a sputter, and the black matrix pattern can be manufactured in the same way as the red, green, and blue filter patterns.

둘째, 블랙매트릭스 패턴을 제작할때 크롬(Cr)막 대신에 염색가능한 감광성 수지막을 사용하여 감광성 수지 패턴을 형성하고 바로 염색공정만 추가되기 때문에 값싸게 제조할 수 잇다.Second, when the black matrix pattern is manufactured, a photosensitive resin pattern is formed using a dyeable photosensitive resin film instead of a chromium (Cr) film, and only a dyeing process is immediately added, thereby making it cheaper to manufacture.

세째, 종래의 블랙매트릭스로 사용되었던 크롬(Cr)막은 금속막 특성상 반사광을 피할 수 없었으나, 본 발명에 의한 유기 염색막은 입사광을 효과적으로 흡수하여 반사광을 발생시키지 않기 때문에 반사광에 의한 콘트라스트(contrast)의 저하를 방지할 수 있다.Third, the chromium (Cr) film used as a conventional black matrix could not avoid the reflected light due to the characteristics of the metal film, but the organic dye film according to the present invention effectively absorbs the incident light and does not generate the reflected light. The fall can be prevented.

Claims (5)

유리기판(1), 블랙매트릭스(2), 염색분리막(3), 적색필터(4), 녹색필터(5), 청색필터(6), 투명수지막(7), 투명도전막(8)을 구비하여 된 액정디스플레이용 컬러필터에 있어서, 상기 블랙매트릭스(2)를 유기 염색막으로 형성하고 상기 블랙매트릭스(2)가 형성된 유리기판(1)과 적, 녹, 청색필터(4)(5)(6)사이에 염색분리막(3)을 형성하여 구성됨을 특징으로 하는 액정디스플레이용 컬러필터.A glass substrate (1), black matrix (2), dye separation membrane (3), red filter (4), green filter (5), blue filter (6), transparent resin film (7), transparent conductive film (8) In the color filter for liquid crystal display, the black matrix (2) is formed of an organic dye film, and the glass substrate (1) on which the black matrix (2) is formed and the red, green, and blue filters (4) (5) ( 6) Color filter for liquid crystal display, characterized in that formed by forming a dye separation membrane (3) between. 블랙매트릭스(2)로 사용되는 염색가능한 감광성수지를 유리기판(1)상에 코팅하는 제 1 공정과, 상기 제 1 공정에서 형성된 감광성 수지막에 블랙매트릭스(2)패턴을 형성하는 제 2 공정과, 상기 제 2 공정에서 얻어진 샘플위에 염색분리막(3)을 형성하는 제 3 공정과, 상기 제 3 공정에서 얻어진 샘플위에 적색필터(4), 녹색필터(5) 및 청색필터(6)를 각각 형성하는 제 4 공정과, 상기 제 4 공정에서 완성되 색필터(4)(5)(6)의 패턴상에 투명수지막(7)을 형성하는 제 5 공정과, 상기 공정에 의하여 제작된 샘플위에 전극용 투명도전막(8)을 형성하는 제 6 공정으로 이루어지는 것을 특징으로 하는 액정디스플레이용 컬러필터의 제조방법.A first step of coating the dyeable photosensitive resin used as the black matrix (2) on the glass substrate (1), and a second step of forming the black matrix (2) pattern on the photosensitive resin film formed in the first step; And a third step of forming the dye separation membrane 3 on the sample obtained in the second step, and a red filter 4, a green filter 5 and a blue filter 6 on the sample obtained in the third step, respectively. A fourth step of forming a transparent resin film 7 on the patterns of the color filters 4, 5 and 6 completed in the fourth step, and an electrode on the sample produced by the step. A sixth step of forming a transparent conductive film (8) for use, characterized in that the manufacturing method of the color filter for liquid crystal display. 제 2 항에 있어서, 상기 제 1 공정은 유리기판(1)상에 염색가능한 감광성 수지를 회전도포방법을 이용하여 코팅하는 것을 특징으로 하는 액정 디스플레이용 컬러필터의 제조방법.The method of manufacturing a color filter for a liquid crystal display according to claim 2, wherein the first step is to coat a photosensitive resin that can be dyed on the glass substrate (1) by using a rotary coating method. 제 2 항 또는 제 3 항에 있어서, 상기 유리기판(1)상에 코팅된 감광성 수지막에 블랙매트릭스(2)패턴을 형성할 때 염색공정을 포함하는 것을 특징으로 하는 액정 디스플레이용 컬러필터의 제조방법.The color filter for liquid crystal display according to claim 2 or 3, further comprising a dyeing process for forming a black matrix (2) pattern on the photosensitive resin film coated on the glass substrate (1). Way. 제 4 항에 있어서, 상기 감광성수지막의 두께를 0.5∼1.0㎛로 도포함을 특징으로하는 액정디스플레이용 컬러필터의 제조방법.5. The method of manufacturing a color filter for liquid crystal display according to claim 4, wherein the photosensitive resin film is coated with a thickness of 0.5 to 1.0 mu m.
KR1019890010047A 1989-07-14 1989-07-14 Color filter and making method of lcd KR930002918B1 (en)

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