KR910006708B1 - Oxide piezo-electric material - Google Patents

Oxide piezo-electric material Download PDF

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KR910006708B1
KR910006708B1 KR1019880015511A KR880015511A KR910006708B1 KR 910006708 B1 KR910006708 B1 KR 910006708B1 KR 1019880015511 A KR1019880015511 A KR 1019880015511A KR 880015511 A KR880015511 A KR 880015511A KR 910006708 B1 KR910006708 B1 KR 910006708B1
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oxide
piezoelectric material
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정현진
김현재
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한국과학기술원
전학제
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    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/49—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates
    • C04B35/491—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates containing also titanium oxides or titanates based on lead zirconates and lead titanates, e.g. PZT

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Abstract

An oxide piezoelectric material is produced by mixing a basic component of xPb(Al2/3W1/3)O-y PbZrO3-zPbTiO3 [X= 0.01-0.3; y=0.198-0.903; z=0.048- 0.702; x+y+z=1 with 0.1-0.5 wt.% Cr2O3, 0.1-1.0 wt.% MnO2 and 0.1-0.5 wt.% NiO, ball-milling the mixt., firing and recrushing it by the ball mill to produce a synthetic powder, pressure-forming the powder contg. an additive, and calcining it. The piezoelectric material has a high dielectric constant, and is useful for signal transducers.

Description

산화물 압전재료Oxide Piezoelectric Materials

제1도는 본 발명 산화물 압전재료의 조성비를 보인 Pb(Al2/3W1/3)O-PbZrO3-PbTiO33원계도.1 is a Pb (Al 2/3 W 1/3 ) O-PbZrO 3 -PbTiO 3 ternary diagram showing the composition ratio of the oxide piezoelectric material of the present invention.

제2도는 본 발명에 속하는 산화물 압전재료의 첨가량에 따른 압전특성의 변화를 보인 그래프.2 is a graph showing a change in piezoelectric properties according to the amount of oxide piezoelectric material added to the present invention.

본 발명은 산화물 압전재료에 관한 것으로, 특히 Pb(Al2/3W1/3)O3-PbZrO3-PbTiO33원계를 기본조성으로 하여 높은 유전상수 및 전기기계결합계수와 낮은 기계품질계수를 갖는 신규한 압전자기물질로서 신호수전조자등에 적합한 산화물 압전재료에 관한 것이다.The present invention, in particular, Pb (Al 2/3 W 1/3) O 3 -PbZrO 3 -PbTiO 3 to the source system 3 to the basic composition of high dielectric constant and electromechanical coupling factor and low mechanical quality factor of the piezoelectric oxide material The present invention relates to an oxide piezoelectric material suitable for a signal transformer and the like as a novel piezoelectric material having

최근 산화물 압전재료를 이용한 초음파진동자 및 음향필터를 비롯하여 각종 전자부품이 개발되고 있다. 이와 같은 각종 부품의 제작용으로 사용되는 소재로는 PbZrO3-PbTiO3의 2원계가 널리 알려져 있으며, 특히 PbZrO3-PbTiO3에 Nb2O5나 WO3등의 첨가물을 첨가하여 압전특성의 개선을 시도하고 있으나[F.Kulcsar : J.Am.Ceram Sic, 42 (5959)343], 실제에 있어서 상기의 조성을 갖는 산화물 압전재료는 전기기계결합계수가 50%정도에 불과하여 그 특성이 양호하지 못할 뿐아니라, 유전상수(K33 T) 역시 900을 넘지 못하며, 또한 기계적품질계수(Qm)도 높게 나타남에 따라 신호수전소자인 수중청음기(Hydro-phone), 포노픽업(Phonopickup), 음향탐지기 (Sound detector), 가속도계(Accelerometer), 지연선(Delay line), 유동검출기 (Flow detector) 및 유량계(Flowmeter)등에의 사용이 부적합한 문제점이 있다.Recently, various electronic components including ultrasonic vibrators and acoustic filters using oxide piezoelectric materials have been developed. PbZrO 3 -PbTiO 3 binary system is widely known as a material used for manufacturing such various parts, and in particular, PbZrO 3 -PbTiO 3 is added to Nb 2 O 5 or WO 3 to improve piezoelectric properties. [F.Kulcsar: J.Am.Ceram Sic, 42 (5959) 343], however, in practice, oxide piezoelectric materials having the above composition have only about 50% of electromechanical coupling coefficients, and thus their characteristics are not good. In addition, the dielectric constant (K 33 T ) does not exceed 900, and the mechanical quality factor (Qm) is also high. Sound detectors, accelerometers, delay lines, flow detectors and flowmeters are not suitable for use.

따라서, 이와 같은 신호수전소자의 용도에 따른 여러압전특성을 개선하기 위하여 Pb(Mg1/3Nb3/2)O3-PbZrO3-PbTiO3를 비롯한 여러 3원계의 조성이 개발되었으나 [H.Banno : Jpn.J.Appl.Phys. 6(1976)954], 이같은 3원계조성의 압전재료 역시 대체로 전기기계결합계수가 낮거나, 기계적품질계수 또는 유전상수의 값이 낮게 나타남에 따라 신호수전용 소자로서의 용도에는 부적합한 실정이다.Therefore, in order to improve the various piezoelectric characteristics according to the use of such a signal receiving device, various ternary systems including Pb (Mg 1/3 Nb 3/2 ) O 3 -PbZrO 3 -PbTiO 3 have been developed. Banno: Jpn.J.Appl.Phys. 6 (1976) 954], such piezoelectric materials of ternary composition are also unsuitable for use as signal transceiving devices due to low electromechanical coupling coefficients or low mechanical quality coefficients or dielectric constants.

특히, 이러한 신호수전용 소자는 외부로부터의 미약한 전기적 신호에 대응하여 가급적 전기적으로 큰 신호를 발생하여야 하므로 높은 유전율과 낮은 기계적품질계수가 요구되며, 또한 전기기계변환효율인 전기기계결합계수가 높아야 하는 특성이 있다.In particular, since the signal receiving device must generate a large signal as much as possible in response to a weak electrical signal from the outside, high dielectric constant and low mechanical quality coefficient are required, and electromechanical coupling coefficient, which is an electromechanical conversion efficiency, must be high. There is a characteristic.

왜냐하면, 만일 변환효율이 낮을 경우 소자가 기계적 신호를 전기적 신호로 변환시킬 때 소자의 내부열을 발생하여 에너지의 손실을 초래하기 때문이다.This is because, if the conversion efficiency is low, when the device converts a mechanical signal into an electrical signal, internal heat of the device is generated to cause a loss of energy.

따라서, 본 발명은 상기한 바와 같은 신호수전소자에 접합한 높은 전기기계결합계수 및 높은 유전상수를 보유함과 더불어 신호대역폭이 넓은 저기계품질계수를 갖는 신규한 산화물 압전재료를 제공하는데 그 목적이 있다.Accordingly, an object of the present invention is to provide a novel oxide piezoelectric material having a high electromechanical coupling coefficient and a high dielectric constant bonded to a signal receiving element as described above, and a low mechanical quality coefficient having a wide signal bandwidth. have.

이와 같은 본 발명 산화물 압전재료는 기본적으로 Pb(Al2/3W1/3)O-PbZrO3-PbTiO3의 3원계를 이루어진다.Such oxide piezoelectric material of the present invention basically constitutes a ternary system of Pb (Al 2/3 W 1/3 ) O-PbZrO 3 -PbTiO 3 .

본 발명 재료의 성분 및 조성비를 구체적으로 나타내면,When the component and the composition ratio of the material of the present invention are specifically shown,

xPb(Al2/3W1/3)O-yPbZrO3-zPbTiO3 xPb (Al 2/3 W 1/3 ) O-yPbZrO 3 -zPbTiO 3

x=0.01-0.3x = 0.01-0.3

y=0.198-0.903y = 0.198-0.903

z=0.048-0.702z = 0.048-0.702

(단, x+y+x=1)(Where x + y + x = 1)

으로 표시되는 산화물 압전재료로서, 특히 위와 같은 조성에 첨가물로서 Cr2O3, NiO 및 MnO2중 어느하나의 산화물을 0.1-1중량% 함유물을 특징으로 하는 산화물 압전재료인 바, 이와 같은 본 발명의 산화물 압전재료는 다음과 같은 일반적인 산화물 혼합방법을 통해 용이하게 제조되어진다.The oxide piezoelectric material represented by the above is an oxide piezoelectric material characterized by containing 0.1-1% by weight of an oxide of any one of Cr 2 O 3 , NiO and MnO 2 as an additive to the above composition. The oxide piezoelectric material of the present invention is easily manufactured through the following general oxide mixing method.

즉, 먼저 PbO, TiO2, ZrO2, Al2O3, WO3. Cr2O3, NiO 및 MnO2등의 산화물을 적정비율로 정확히 계량하여 알루미나볼밀을 이용하여 혼합 및 분쇄를 행한다. 한편, 이때 사용되는 원료는 가열에 의해 용이하게 산화물로 전환하는 화합물 즉, 수산화물 및 탄산염 등이 포함된 원료화합물도 가능하다. 상기 볼밀링(Ball milling)이 완료된 혼합물은 800-900℃에서 하소된 뒤 다시 볼밀에 의해 재분쇄되어 합성분말로 만들어지며, 이후 이 분말은 물이나 PVA수용액 등의 결합제 첨가하에 1ton/cm2의 압력에서 가압성형된 다음 1100-1200℃의 온도로 소결이 행해진다. 이와 같은 소결시에는 낮은 휘발온도(약 880℃)를 갖는 PbO의 휘발에 따른 압전특성의 저하를 방지하기 위하여 소결은 밀폐용기내에서 수행된다.That is, firstly PbO, TiO 2 , ZrO 2 , Al 2 O 3 , WO 3 . Oxides such as Cr 2 O 3 , NiO, and MnO 2 are accurately weighed at an appropriate ratio, and mixed and ground using an alumina ball mill. Meanwhile, the raw material used at this time may be a raw material compound containing a compound which is easily converted into an oxide by heating, that is, a hydroxide, a carbonate, and the like. The ball milling (Ball milling) mixture is calcined at 800-900 ℃ and then re-milled by a ball mill to make a synthetic powder, after which the powder of 1ton / cm 2 under the addition of a binder such as water or PVA aqueous solution It is press molded at pressure and then sintered at a temperature of 1100-1200 ° C. In such sintering, sintering is performed in a sealed container in order to prevent degradation of the piezoelectric properties due to volatilization of PbO having a low volatilization temperature (about 880 ° C.).

이와 같이 하여 제조된 소결체는 일반적인 방법에 의하여 양면에 전극이 형성되는 바, 900-110℃정도의 실리콘 유내에서 그 전극에 직류전개 35kV/cm을 30분간 인가함에 따라 분극이 행해진다.In the sintered body thus prepared, electrodes are formed on both surfaces by a general method, and polarization is performed by applying DC development 35kV / cm to the electrode for 30 minutes in a silicon oil at about 900-110 ° C.

이와 같은 제조공정을 통하여, 종래의 PbZrO3-PbTiO32원계 혹은 Pb(Mg1/3Nb2/3)O-PbZrO3-PbTiO33원계 압전재료와는 상이한 조성을 갖는 재료로서 우수한 압전특성을 구비한 산화물 압전재료가 용이하게 얻어진다.Thus through the same manufacturing process, prior PbZrO 3 -PbTiO 3 excellent piezoelectric characteristics as a material having alloy or Pb (Mg 1/3 Nb 2/3) O -PbZrO 3 -PbTiO 3 3 alloy has a different composition and a piezoelectric material The oxide piezoelectric material provided is easily obtained.

제 1도는 본 발명 산화물 압전재료의 조성비를 보인 Pb(Al2/3W1/3)O3-PbZrO3-PbTiO33원계도로서 A, B, C, D, E 및 F로 둘러쌓인 다각형내의 빗금친 부분은 본 발명 산화물 성분의 조성범위를 나타낸다.1 is a Pb (Al 2/3 W 1/3 ) O 3 -PbZrO 3 -PbTiO 3 ternary diagram showing the composition ratio of the oxide piezoelectric material of the present invention, polygonal surrounded by A, B, C, D, E and F The hatched portion in the figure indicates the composition range of the oxide component of the present invention.

다음, 제 2도는 본 발명에 속하는 산화물 압전재료에 있어서 하나의 원료성분을 구성하는 Pb(AlW)O2의 첨가량 변화에 따른 전기기계결합계수(Kr), 기계적품질계수 (Qm) 및 유전상수의 거동을 보인 그래프이다. 제 2도의 그래프에 나타난 바와 같이 본 발명에 있어서, Pb(AlW)O3의 함량을 적절히 선택함에 따라 제반압전상수의 값을 향상시킬 수 있으며, 또한 CrO3나MnO2및 NiO와 같은 첨가물의 미량첨가에 의해 전기기계결합계의 값을 크게 저하시키지 않은 채 유전율 및 기계품질계수를 변화시킬 수 있으므로 각종 진동자 및 음향필터의 소재로서 사용가능할 뿐만아니라 높은 전기기계결합계수 및 맞은 기계품질계수가 요구되는 신호수전소자에 적합하다.Next, FIG. 2 shows the electromechanical coupling coefficient (Kr), mechanical quality coefficient (Qm) and dielectric constant according to the addition amount of Pb (AlW) O 2 constituting one raw material component in the oxide piezoelectric material according to the present invention. This is a graph showing the behavior. In the present invention, as shown in the graph of FIG. 2, by appropriately selecting the content of Pb (AlW) O 3 it is possible to improve the value of the overall piezoelectric constant, and also a trace amount of additives such as CrO 3 , MnO 2 and NiO It is possible to change the dielectric constant and mechanical quality coefficient without significantly reducing the value of the electromechanical coupling system, so that it can be used as a material for various vibrators and acoustic filters, and also high electromechanical coupling coefficient and correct mechanical quality coefficient are required. Suitable for signal receiving element.

이하, 본 발명의 실시예는 다음과 같다.Hereinafter, embodiments of the present invention are as follows.

xPb(Al2/3W1/3)O-yPbTiO3-zPbTiO33원계에 있어서,In xPb (Al 2/3 W 1/3) O -yPbTiO 3 -zPbTiO 3 3 alloy,

x=0.01-0.3x = 0.01-0.3

y=0.198-0.903y = 0.198-0.903

z=0.048-0.702z = 0.048-0.702

x+y+x=1x + y + x = 1

의 조성범위가 되도록 PbO, TiO2, ZrO2, Al2O3, WO3. Cr2O3, NiO 및 MnO2등의 산화물을 각 몰비에 따라 10-4g 까지 정확히 계량하여 알루미나볼밀중에서 혼합분쇄하였다. 다음 혼합물 완료된 시료는 800-900℃에서 하소를 한 후 볼밀에서 재분쇄하여 그 분쇄된 분말에 물 또는 PVA수용액 등의 결합제를 미량첨가하여 1ton/cm2의 압력으로 가압성형한 후 1100-1200℃의 온도에서 소결하였다. 소결시 조성성분중 하나인 PbO가 휘발온도(약 880℃)가 낮아서 정확한 화학적등량을 이루지 못하여 압전특성의 저하를 초래할 염려가 있으므로 실시조성과 동일한 조성의 분말을 PbO의 휘발억제용 분위기분말로 하여 밀폐된 용기내에서 행하였으며, 이때 최고온도에서의 유지시간은 1시간으로 하였다.PbO, TiO 2 , ZrO 2 , Al 2 O 3 , WO 3 to have a composition range of. Oxides such as Cr 2 O 3 , NiO, and MnO 2 were accurately weighed to 10 −4 g according to the molar ratio, and mixed and ground in an alumina ball mill. Next, the mixed sample was calcined at 800-900 ° C., and then pulverized in a ball mill, and the resultant powder was press-molded at a pressure of 1ton / cm 2 with a small amount of a binder such as water or PVA solution, and pressurized at 1100-1200 ° C. Sintered at a temperature of. PbO, one of the components during sintering, has a low volatilization temperature (about 880 ° C), so it may not be able to achieve accurate chemical equivalence, which may lead to deterioration of piezoelectric properties. In a closed container, the holding time at the highest temperature was 1 hour.

소결이 완료된 성형소결체는 직경 15mm, 두께 1mm의 원판상으로 가공한 후, 양면에 전극에 형성하여 이 전극에 직류전계 35kV/cm을 약 90-110℃의 실리콘유 내에서 30분간 인가하여 분극을 하였다.After sintering, the molded sintered body is processed into a disk having a diameter of 15 mm and a thickness of 1 mm, and formed on electrodes on both sides, and a DC electric field of 35 kV / cm is applied to the electrode for 30 minutes in a silicone oil of about 90-110 ° C. for polarization. It was.

분극이 완료된 시편에 대해 IER, STD(Proc. of the IRE 1961, P1161-1169)에 따라 전기기계결합계수(Kp), 기계품질계수(Qm) 및 주파수정수(Frequency Constant) 등을 측정하였는 바, 조성비를 달리하는 각 소결체의 측정결과는 아래의 표 1과 같다.The electromechanical coupling coefficient (Kp), mechanical quality coefficient (Qm) and frequency constant (Frequency Constant) were measured according to IER, STD (Proc. Of the IRE 1961, P1161-1169) for the polarized specimens. Measurement results of each sintered body having a different composition ratio are shown in Table 1 below.

[표 1]TABLE 1

각 조성에 따른 압전 및 유전특성Piezoelectric and Dielectric Properties According to Each Composition

Figure kpo00001
Figure kpo00001

위의 표 1에서 F.T는 소결온도이고, K33 T는 1KHz의 주파수로, 25℃에서 측정한 시편의 유전율을 나타낸다. 표 1에서 알 수 있는 바와 같이 Pb(AlW)O3가 3-10몰% 첨가될때 전기기계결합계수(Kr) 및 유전상수(K33 T)가 높고, 기계품질계수 (Qm)가 100구분인 우수한 특성을 보였다.In Table 1 above, FT is the sintering temperature, and K 33 T is the frequency of 1KHz, and represents the dielectric constant of the specimen measured at 25 ° C. As can be seen from Table 1, when Pb (AlW) O 3 is added to 3-10 mol%, the electromechanical coefficient (Kr) and the dielectric constant (K 33 T ) are high, and the mechanical quality coefficient (Qm) is 100 parts. Excellent properties

한편, 본 발명의 Pb(AlW)O-PbZrO3-PbTiO33원계 압전재료는 종래의 PbZrO3-PbTiO32원계에 비해 상당히 넓은 범위에 걸쳐 우수한 압전특성을 보유하는 바, 2원계인 PbZrO3-PbTiO3계와 본 발명의 3원계Pb(AlW)O3-PbZrO3-PbTiO3계와의 압전특성을 비교하면 아래의 표 2와 같다.On the other hand, Pb (AlW) O-PbZrO 3 -PbTiO 3 ternary system of the present invention, the piezoelectric material is a conventional PbZrO 3 -PbTiO 3 2 alloy considerably bar, 2 won PbZrO sealed to retain an excellent piezoelectric characteristics over a wide range relative to three comparing the -PbTiO 3 system and the piezoelectric properties of the ternary Pb (AlW) O 3 -PbZrO 3 -PbTiO 3 system of the present invention shown in Table 2 below.

[표 2]TABLE 2

PZT조성과 Pb(AlW)O3-PZT조성과의 특성비교Comparison of PZT Composition with Pb (AlW) O 3 -PZT Composition

Figure kpo00002
Figure kpo00002

위의 표 2에서 2원계인 PbZrO3-PbTiO3계인 경우 우수한 압전 특성을 나타내는 범위가 MPB지역에 국한되는 반면에 본 발명 조성의 경우는 상당히 넓은 조성범위에서 우수한 특성을 갖는 소재로서 소결체를 얻는데 용이함을 나타내고 있다. 다시 말하면, 참고 예1 및 참고 예2에서 보는 바와 같이 2원계조성의 경우 한점에 국한하여 비교적 우수한 특성을 나타내지만, 본 발명의 실시예에 의하면 실시 예18-실시 예20, 그리고 실시 예36-실시 예39까지등 넓은 영역에 걸쳐 압전특성이 개선되었음을 관찰할 수 있다.In Table 2 above, in the case of PbZrO 3 -PbTiO 3, which is binary, the range of excellent piezoelectric properties is limited to the MPB region, while the composition of the present invention is easy to obtain a sintered body as a material having excellent characteristics in a fairly wide composition range. Indicates. In other words, as shown in Reference Example 1 and Reference Example 2, the binary gradation composition shows a relatively excellent characteristic limited to one point, but according to the embodiment of the present invention, the embodiments 18-20 and 36- It can be observed that the piezoelectric properties were improved over a wide range up to Example 39.

특히, 본 발명의 3월계 산화물중 하나인 Pb(AlW)O3에는 Al이 함유되어 있어 볼밀에서의 원료혼합 및 분쇄가 정중에 유입가능한 Al2O3의 영향을 거의 받지 않게 되므로 소정의 압전특성을 구비한 소결체의 제조가 용이하다.Particularly, Pb (AlW) O 3 , which is one of the March-based oxides of the present invention, contains Al, so that raw material mixing and grinding in a ball mill are hardly influenced by Al 2 O 3 , which can be introduced in a medium. It is easy to manufacture a sintered compact having a structure.

본 발명의 Pb(AlW)O3-PbZrO3-PbTiO33원계에서는 첨가물로서 Cr2o3, MnO2및 NiO산화물중의 하나가 첨가됨으로써 압전특성이 개선되는 바 이들 첨가물의 첨가에 따른 압전 특성의 변화는 아래의 표 3에 나타나 있다.In the Pb (AlW) O 3 -PbZrO 3 -PbTiO 3 ternary system of the present invention, piezoelectric properties are improved by adding one of Cr 2 o 3 , MnO 2, and NiO oxides as additives. The change in is shown in Table 3 below.

[표 3]TABLE 3

참가물 종류 및 첨가량에 따른 특성의 변화Changes in Characteristics According to Participation Types and Additions

Figure kpo00003
Figure kpo00003

양호한 압전특성을 나타낸 첨가물의 조성범위는 Cr2O3의 경우 0.1-0.5중량%, MnO2는 0.1-1.0중량%, NiO는 0.1-0.5중량%이었으며, 이 범위밖의 첨가량은 소결성의 저하와 압전특성의 저하를 초래하였다.The composition range of additives showing good piezoelectric properties was 0.1-0.5% by weight for Cr 2 O 3 , 0.1-1.0% by weight for MnO 2 , and 0.1-0.5% by weight for NiO. It caused the deterioration of properties.

위의 표 3에서 알 수 있는 바와 같이, Cr2O3나 MnO2및 NiO와 같은 첨가물을 미량첨가함에 따라 전기기계결합계수의 큰 저하없이 유전율 및 기계품질계수를 변화시킬 수 있으므로 소자의 용도에 적합한 특성을 갖는 소결체를 얻을 수 있다.As can be seen in Table 3 above, by adding additives such as Cr 2 O 3 or MnO 2 and NiO, the dielectric constant and mechanical quality coefficient can be changed without a significant drop in the electromechanical coupling coefficient. A sintered body having suitable characteristics can be obtained.

한편, 제 1도의 3원계도에 표시된 본 발명의 조성범위를 나타내는 다각형의 A점은 실시 예47, B점은 실시 예48, C점은 실시 예46, D점은 실시 예3, E점은 실시 예1, F점은 실시 예2를 각각 나타내며, 제 2도는 실시 예24 내지 실시 예32까지 Pb(AlW)O3의 조성비변화에 따른 특성의 변화를 보인 것으로, 이와 같은 거동은 실시 예6 내지 실시 예14, 실시 예15 내지 실시 예30 및 실시 예33 내지 실시 예44까지의 범위에서도 동일한 경향을 보였다.On the other hand, the point A of the polygon representing the composition range of the present invention shown in the ternary diagram of FIG. 1 is Example 47, the point B is Example 48, the point C is Example 46, the point D is Example 3, and the point E is Example 1 and point F represent Example 2, respectively, and FIG. 2 shows the change of characteristics according to the composition ratio change of Pb (AlW) O 3 from Examples 24 to 32. The same tendency was observed in the ranges from 14 to 14, 15 to 30, and 33 to 44.

Claims (4)

xPb(Al2/3W1/3)O3-yPbZrO3-zPbTiO3계를 기본조성으로 하고,xPb (Al 2/3 W 1/3 ) O 3 -yPbZrO 3 -zPbTiO 3 system as basic composition, x=0.01-0.3x = 0.01-0.3 y=0.198-0.903y = 0.198-0.903 z=0.048-0.702z = 0.048-0.702 (단, x+y+z=1)(Where x + y + z = 1) 의 조성범위를 갖는 산화물 압전재료.Oxide piezoelectric material having a composition range of. 제1항에 있어서, 첨가물로서 Cr2O3가 0.1-0.5중량% 함유된 산화물 압전재료.The oxide piezoelectric material according to claim 1, wherein 0.1 to 0.5% by weight of Cr 2 O 3 is contained as an additive. 제1항에 있어서, 첨가물로서 MnO2가 0.1-1.0중량% 함유된 산화물 압전재료.The oxide piezoelectric material according to claim 1, wherein 0.1-1.0 wt% of MnO 2 is contained as an additive. 제1항에 있어서, 첨가물로서 NiO가 0.1-0.5중량% 함유된 산화물 압전재료.The oxide piezoelectric material according to claim 1, wherein the additive contains 0.1-0.5% by weight of NiO.
KR1019880015511A 1988-11-24 1988-11-24 Oxide piezo-electric material KR910006708B1 (en)

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