KR910001468A - Ultraviolet Photoresist Planarization Process Method - Google Patents
Ultraviolet Photoresist Planarization Process Method Download PDFInfo
- Publication number
- KR910001468A KR910001468A KR1019890008303A KR890008303A KR910001468A KR 910001468 A KR910001468 A KR 910001468A KR 1019890008303 A KR1019890008303 A KR 1019890008303A KR 890008303 A KR890008303 A KR 890008303A KR 910001468 A KR910001468 A KR 910001468A
- Authority
- KR
- South Korea
- Prior art keywords
- planarization process
- photoresist
- process method
- pattern material
- ultraviolet photoresist
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도는 패턴물질 상부에 포토레지스트를 도포한 상태의 단면도,1 is a cross-sectional view of the photoresist is applied on the pattern material,
제3도는 제1도 공정후 본발명에 의한 경화공정을 실시하여 평탄화 정도를 나타낸 단면도,3 is a cross-sectional view showing the degree of planarization by performing a curing process according to the present invention after the process of FIG.
제4도는 평탄 계수를 나타내기 위한 단면도.4 is a cross-sectional view for showing the flatness coefficient.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019890008303A KR910006043B1 (en) | 1989-06-16 | 1989-06-16 | Method for flatting photoresists with ultraviolet rays |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019890008303A KR910006043B1 (en) | 1989-06-16 | 1989-06-16 | Method for flatting photoresists with ultraviolet rays |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910001468A true KR910001468A (en) | 1991-01-30 |
KR910006043B1 KR910006043B1 (en) | 1991-08-12 |
Family
ID=19287157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890008303A KR910006043B1 (en) | 1989-06-16 | 1989-06-16 | Method for flatting photoresists with ultraviolet rays |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR910006043B1 (en) |
-
1989
- 1989-06-16 KR KR1019890008303A patent/KR910006043B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR910006043B1 (en) | 1991-08-12 |
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