KR900015357A - 절연 게이트 트랜지스터용 mos 파일럿 구조체 - Google Patents

절연 게이트 트랜지스터용 mos 파일럿 구조체

Info

Publication number
KR900015357A
KR900015357A KR1019900004075A KR900004075A KR900015357A KR 900015357 A KR900015357 A KR 900015357A KR 1019900004075 A KR1019900004075 A KR 1019900004075A KR 900004075 A KR900004075 A KR 900004075A KR 900015357 A KR900015357 A KR 900015357A
Authority
KR
South Korea
Prior art keywords
mos
insulated gate
gate transistor
pilot structure
pilot
Prior art date
Application number
KR1019900004075A
Other languages
English (en)
Other versions
KR0155991B1 (ko
Inventor
나라얀 패탄아약 데바
자안트 베리가 반트발
Original Assignee
제네럴 일렉트릭 컴패니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 제네럴 일렉트릭 컴패니 filed Critical 제네럴 일렉트릭 컴패니
Publication of KR900015357A publication Critical patent/KR900015357A/ko
Application granted granted Critical
Publication of KR0155991B1 publication Critical patent/KR0155991B1/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/92Capacitors having potential barriers
    • H01L29/94Metal-insulator-semiconductors, e.g. MOS
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1095Body region, i.e. base region, of DMOS transistors or IGBTs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70Bipolar devices
    • H01L29/72Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395Vertical transistors, e.g. vertical IGBT

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Thyristors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
KR1019900004075A 1989-03-27 1990-03-27 절연 게이트 트랜지스터용 mos 파일럿 구조체 KR0155991B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US329034 1989-03-27
US07/329,034 US4980740A (en) 1989-03-27 1989-03-27 MOS-pilot structure for an insulated gate transistor

Publications (2)

Publication Number Publication Date
KR900015357A true KR900015357A (ko) 1990-10-26
KR0155991B1 KR0155991B1 (ko) 1998-10-15

Family

ID=23283585

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900004075A KR0155991B1 (ko) 1989-03-27 1990-03-27 절연 게이트 트랜지스터용 mos 파일럿 구조체

Country Status (5)

Country Link
US (1) US4980740A (ko)
EP (1) EP0390485B1 (ko)
JP (1) JP3154480B2 (ko)
KR (1) KR0155991B1 (ko)
DE (1) DE69021915T2 (ko)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2833610B2 (ja) * 1991-10-01 1998-12-09 株式会社デンソー 絶縁ゲート型バイポーラトランジスタ
GB9207849D0 (en) * 1992-04-09 1992-05-27 Philips Electronics Uk Ltd A semiconductor device
JPH06169089A (ja) * 1992-05-07 1994-06-14 Nec Corp 縦型mosfetの製造方法
GB9222455D0 (en) * 1992-10-26 1992-12-09 Philips Electronics Uk Ltd A current sensing circuit
DE4315178A1 (de) * 1993-05-07 1994-11-10 Abb Management Ag IGBT mit selbstjustierender Kathodenstruktur sowie Verfahren zu dessen Herstellung
EP0704889A3 (de) 1994-09-29 1998-10-21 Siemens Aktiengesellschaft Leistungshalbleiterbauelement mit monolithisch integriertem Messwiderstand und Verfahren zu dessen Herstellung
DE19500588A1 (de) * 1995-01-11 1996-07-18 Abb Management Ag Bipolartransistor mit isolierter Steuerelektrode (IGBT) und dreidimensionaler MOS Struktur
KR100206555B1 (ko) * 1995-12-30 1999-07-01 윤종용 전력용 트랜지스터
US6180966B1 (en) 1997-03-25 2001-01-30 Hitachi, Ltd. Trench gate type semiconductor device with current sensing cell
KR100256109B1 (ko) * 1997-05-07 2000-05-01 김덕중 전력 반도체 장치
US6121089A (en) * 1997-10-17 2000-09-19 Intersil Corporation Methods of forming power semiconductor devices having merged split-well body regions therein
AU2001238081A1 (en) * 2000-02-10 2001-08-20 International Rectifier Corporation Vertical conduction flip-chip device with bump contacts on single surface
DE102009028049B3 (de) * 2009-07-28 2011-02-24 Infineon Technologies Ag Leistungshalbleiterbauelement mit Potenzialsonde, Leistungshalbleiteranordnung mit einem eine Potenzialsonde aufweisenden Leistungshalbleiterbauelement und Verfahren zum Betrieb eines Leistungshalbleiterbauelements mit einer Potenzialsonde
CN113097300A (zh) * 2019-12-23 2021-07-09 华润微电子(重庆)有限公司 一种功率器件及其制作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4705759B1 (en) * 1978-10-13 1995-02-14 Int Rectifier Corp High power mosfet with low on-resistance and high breakdown voltage
US4816892A (en) * 1982-02-03 1989-03-28 General Electric Company Semiconductor device having turn-on and turn-off capabilities
US4811072A (en) * 1982-09-24 1989-03-07 Risberg Robert L Semiconductor device
IE55753B1 (en) * 1983-09-06 1991-01-02 Gen Electric Power semiconductor device with main current section and emulation current section
JP2552880B2 (ja) * 1986-11-12 1996-11-13 シリコニックス・インコーポレイテッド 垂直dmosセル構造
JP2511018B2 (ja) * 1987-02-26 1996-06-26 株式会社東芝 絶縁ゲ−ト型サイリスタの電極配線構造
JP2513665B2 (ja) * 1987-02-26 1996-07-03 株式会社東芝 絶縁ゲ−ト型サイリスタ
US4823176A (en) * 1987-04-03 1989-04-18 General Electric Company Vertical double diffused metal oxide semiconductor (VDMOS) device including high voltage junction exhibiting increased safe operating area
US4857977A (en) * 1987-08-24 1989-08-15 General Electric Comapny Lateral metal-oxide-semiconductor controlled triacs
JPH0777262B2 (ja) * 1988-04-19 1995-08-16 日本電気株式会社 縦型電界効果トランジスタ

Also Published As

Publication number Publication date
KR0155991B1 (ko) 1998-10-15
EP0390485A2 (en) 1990-10-03
EP0390485B1 (en) 1995-08-30
DE69021915T2 (de) 1996-04-25
US4980740A (en) 1990-12-25
JPH0316268A (ja) 1991-01-24
EP0390485A3 (en) 1991-04-24
JP3154480B2 (ja) 2001-04-09
DE69021915D1 (de) 1995-10-05

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