KR890017185A - 기판용 다층보호피복, 이러한 피복의 플라즈마 증착에 의한 기판의 보호방법. 이에 의해 얻어진 피복 및 그의 용도 - Google Patents

기판용 다층보호피복, 이러한 피복의 플라즈마 증착에 의한 기판의 보호방법. 이에 의해 얻어진 피복 및 그의 용도 Download PDF

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KR890017185A
KR890017185A KR1019890006300A KR890006300A KR890017185A KR 890017185 A KR890017185 A KR 890017185A KR 1019890006300 A KR1019890006300 A KR 1019890006300A KR 890006300 A KR890006300 A KR 890006300A KR 890017185 A KR890017185 A KR 890017185A
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substrate
coating
layer
protecting
nitrogen
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고티에르 마리
꼬레 프랑소와
보네 끌로드
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레르 리뀌드, 소시에떼 아노뉨 뿌르 레뛰드 에 렉스쁠로 와따씨옹 데 프로세데 죠르쥬 끌로드
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Publication of KR890017185A publication Critical patent/KR890017185A/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3441—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising carbon, a carbide or oxycarbide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3482—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising silicon, hydrogenated silicon or a silicide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/308—Oxynitrides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31507—Of polycarbonate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

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  • Plasma & Fusion (AREA)
  • Laminated Bodies (AREA)
  • Chemical Vapour Deposition (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)
  • Compression Or Coding Systems Of Tv Signals (AREA)
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Abstract

내용 없음

Description

기판용 다층보호피복, 이러한 피복의 플라즈마 증착에 의한 기판의 보호방법. 이에 의해 얻어진 피복 및 그의 용도
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
본도면은 본 발명의 공정을 수행하기 위한 장치의 1태양을 도시한 개략적인 단면도이다.

Claims (18)

  1. 주로 실리콘, 탄소, 질소, 산소 및 수소로 이루어지고, 기판상에 부착된 적어도 2개의 층으로 구성되며, 기판상에 부착된 2개의 층 중에서 제 1층이 하기식을 가짐을 특징으로 하는 기판용 디층피복.
    SiCx Ny Oz Ht
    (식중, X = 0.- 0.5 ; Y = 0 - 0.15 ; Z = 0.4 - 1 ; t= 0.6 - 1.2)
  2. 제 1 항에 있어서, Z = 0.6 - 0.8인 피복.
  3. 제 2 항에 있어서, 하기 식을 가지며, 제 1 층위에 부착된 제 2층을 포함하는 피복
    Si Cx' Ny' Oz' Ht'
    (식중 X' = 0.-5 ; Y' = 0.3 - 0.8 ; Z' = 1.3 - 2.5 ; t' = 0.5 - 1.2 ; 및 특히 X' = 0.3 - 1 ; Y' = 0.5 - 0.8 ; Z' = 1.3 - 2 ; t' = 0.6 - 1)
  4. 제 1 항에 있어서, 제 1층의 두께가 1 - 30mm인 피복.
  5. 제 4 항에 있어서, 제 1층의 두께가 5 - 80mm인 피복.
  6. 적어도 기판에 대하여 마이크로웨이브 플라즈마에 의한 전처리를 수행하는 단계. 전 처리된 기판의 표면을 실리콘의 가스상 전구체의 존재하에 마미크로웨이브 플라즈마에 노출시켜 제 1 층을 부착시키는 단계. 제 1 층이 제공된 기판에 대하여 플라즈마와 후 - 방전 중에서 선택된 어느 하나의 상태의 질소 및 실리콘의 가스상 전구체의 존재하에 마이크로웨이브 플라즈마로 처리하여 제 2층을 부착시키는 단계로 이루어짐을 특징으로 하여 실리콘, 탄소, 질소, 산소 및 수소로 주로 이루어진 다층피복의 부착에 의하여 기판을 보호하는 방법.
  7. 제 6항에 있어서, 전처리를 O2및 NH3플라즈마 중에서 선택된 어느하나에 의해 수행하는 방법.
  8. 제 6항에 있어서, 질소 전구체를 질소와 암모니아 중에서 선택하는 방법.
  9. 제 6항에 있어서, 제 2층을 부착시키는 경우, 플라즈마와 후방전중에서 선택된 어느 하나의 상태의 O2, N2, CH4CO2및 C2H4중에서 선택된 어느 하나를 추가로 도입시키는 것을 포함하는 방법.
  10. 제 6 항에 있어서, 실리콘의 전구체가 실란인 방법.
  11. 제10항에 있어서, 실란이 SiH4, Si2 H6및 Si3 Hg중에서 선택되는 방법.
  12. 제 6 항에 있어서, 기판이 폴리카르보네이트, 폴리메틸메타크릴레이트, 폴리스티렐-아크릴로니트릴 및 폴리스티렌 결정, 폴리이미드, 폴리에스테르, 폴리아미드, 폴리비닐클로라이드 중에서 선택된 중합체, 유리, 실리콘 및 알루미늄인 방법.
  13. 제 6 항에 있어서, 압력이 약 13.3 ×102pa이하인 방법.
  14. 제 6 항에 있어서, 압력이 약 0.665 ×102pa이하인 방법.
  15. 제 6 항에 있어서 따른 방법에 의해 수득할 수 있는 기판용 피복.
  16. 창 및 스크린을 보호하기 위한 제 1 항에 따른 피복의 용도.
  17. 창유리, 렌즈유리 및 안경유리중에서 선택된 어느하나를 보호하기 위한 제 1항에 따른 피복의 용도.
  18. 대전전하로부터 기판을 보호하기 위한 제 1 항에 따른 피복의 용도.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890006300A 1988-05-11 1989-05-11 기판용 다층보호피복, 이러한 피복의 플라즈마 증착에 의한 기판의 보호방법. 이에 의해 얻어진 피복 및 그의 용도 KR890017185A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8806369A FR2631346B1 (fr) 1988-05-11 1988-05-11 Revetement protecteur multicouche pour substrat, procede de protection de substrat par depot par plasma d'un tel revetement, revetements obtenus et leurs applications
FR8806369 1988-05-11

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KR890017185A true KR890017185A (ko) 1989-12-15

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US (1) US5116665A (ko)
EP (1) EP0345107B1 (ko)
JP (1) JPH0230764A (ko)
KR (1) KR890017185A (ko)
AT (1) ATE72544T1 (ko)
DE (1) DE68900824D1 (ko)
DK (1) DK228689A (ko)
ES (1) ES2038834T3 (ko)
FI (1) FI892268A (ko)
FR (1) FR2631346B1 (ko)
NO (1) NO891902L (ko)

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FR2661688B1 (fr) * 1990-05-02 1992-07-17 Air Liquide Revetement multicouche pour substrat polycarbonate et procede d'elaboration d'un tel revetement.
FR2664294B1 (fr) * 1990-07-06 1992-10-23 Plasmametal Procede de metallisation d'une surface.
JP2874298B2 (ja) * 1990-07-24 1999-03-24 日本板硝子株式会社 磁気記録媒体およびその製造方法
US5234748A (en) * 1991-06-19 1993-08-10 Ford Motor Company Anti-reflective transparent coating with gradient zone
DE4404690A1 (de) * 1994-02-15 1995-08-17 Leybold Ag Verfahren zur Erzeugung von Sperrschichten für Gase und Dämpfe auf Kunststoff-Substraten
FR2741328B1 (fr) * 1995-11-20 1997-12-19 Commissariat Energie Atomique Boite de stockage d'un objet destine a etre protege d'une contamination physico-chimique
FR2756663B1 (fr) * 1996-12-04 1999-02-26 Berenguer Marc Procede de traitement d'un substrat semi-conducteur comprenant une etape de traitement de surface
US5879775A (en) * 1996-12-12 1999-03-09 Eastman Kodak Compnay Protective inorganic and DLC coatings for plastic media such as plastic cards
EP0848083A3 (en) * 1996-12-12 2001-03-07 Eastman Kodak Company Protective inorganic and dlc coatings and method for making same at or close to room temperature
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ES2038834T3 (es) 1993-08-01
FR2631346B1 (fr) 1994-05-20
FI892268A (fi) 1989-11-12
FR2631346A1 (fr) 1989-11-17
EP0345107A1 (fr) 1989-12-06
FI892268A0 (fi) 1989-05-10
EP0345107B1 (fr) 1992-02-12
DE68900824D1 (de) 1992-03-26
JPH0230764A (ja) 1990-02-01
NO891902L (no) 1989-11-13
ATE72544T1 (de) 1992-02-15
US5116665A (en) 1992-05-26
NO891902D0 (no) 1989-05-10
DK228689D0 (da) 1989-05-10
DK228689A (da) 1989-11-13

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