KR890003018A - 칩실장 장치 - Google Patents

칩실장 장치 Download PDF

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Publication number
KR890003018A
KR890003018A KR1019880008217A KR880008217A KR890003018A KR 890003018 A KR890003018 A KR 890003018A KR 1019880008217 A KR1019880008217 A KR 1019880008217A KR 880008217 A KR880008217 A KR 880008217A KR 890003018 A KR890003018 A KR 890003018A
Authority
KR
South Korea
Prior art keywords
chip
pushing
stage
mount device
chip mount
Prior art date
Application number
KR1019880008217A
Other languages
English (en)
Other versions
KR910006372B1 (ko
Inventor
미쓰아끼 후지히라
마사노리 니시구찌
Original Assignee
나까하라 쯔네오
스미도모덴기고오교오 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 나까하라 쯔네오, 스미도모덴기고오교오 가부시기가이샤 filed Critical 나까하라 쯔네오
Publication of KR890003018A publication Critical patent/KR890003018A/ko
Application granted granted Critical
Publication of KR910006372B1 publication Critical patent/KR910006372B1/ko

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Die Bonding (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

내용 없음

Description

칩실장 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제 1 도는 본 발명의 실시예에 관한 칩실장 장치의 일부 파단 측면도. 제 2 도는 위치결정시의 패턴을 도시한 도면.

Claims (1)

  1. 밀어올리는 스테이지에 지지되고 칩고정 테이프상의 칩을 밀어올리는 핀과, 밀어올려진 칩을 진공흡착에 의하여 픽업하는 콜리트와, 상기 칩고정테이프 상의 칩의 중심부를 상기 밀어올리는 핀의 선단부와 일치시키기 위하여 상기 밀어올리는 스테이지에 대한 칩의 위치를 패턴인식에 의해서 검지하는 모니터수단과, 상기 밀어올리는 스테이지로부터 출사되어서 상기 모니터수단에 입사하도록 광을 발생함으로써 당해 밀어올리는 스테이지에 대한 칩의 외형을 상기 모니터수단에 비추는 광원을 갖춘 것을 특징으로 하는 칩실장 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019880008217A 1987-07-09 1988-07-02 칩실장장치 KR910006372B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62171616A JPS6415000A (en) 1987-07-09 1987-07-09 Chip packaging device
JP62-171616 1987-07-09

Publications (2)

Publication Number Publication Date
KR890003018A true KR890003018A (ko) 1989-04-12
KR910006372B1 KR910006372B1 (ko) 1991-08-21

Family

ID=15926473

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880008217A KR910006372B1 (ko) 1987-07-09 1988-07-02 칩실장장치

Country Status (2)

Country Link
JP (1) JPS6415000A (ko)
KR (1) KR910006372B1 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2800396B2 (ja) * 1990-10-09 1998-09-21 松下電器産業株式会社 チップの観察装置
JP2010045296A (ja) * 2008-08-18 2010-02-25 Ueno Seiki Kk 突上げ装置の突上げステージ
JP2012508460A (ja) * 2008-11-12 2012-04-05 エセック アーゲー フォイルからの半導体チップの剥離及び取外し方法
JP5596929B2 (ja) * 2009-02-12 2014-09-24 富士機械製造株式会社 突き上げピンの位置決め方法およびその方法を用いた電子部品供給装置

Also Published As

Publication number Publication date
KR910006372B1 (ko) 1991-08-21
JPS6415000A (en) 1989-01-19

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Payment date: 19950818

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