KR20240048696A - Microfluidic pump by means of porous membrane - Google Patents
Microfluidic pump by means of porous membrane Download PDFInfo
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- 239000012528 membrane Substances 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 9
- 230000008569 process Effects 0.000 claims description 6
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- 238000012546 transfer Methods 0.000 claims description 5
- 239000011148 porous material Substances 0.000 claims description 4
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- 238000000576 coating method Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 abstract description 17
- 238000002032 lab-on-a-chip Methods 0.000 abstract description 11
- 238000005370 electroosmosis Methods 0.000 abstract description 5
- 238000012123 point-of-care testing Methods 0.000 abstract description 4
- 238000003745 diagnosis Methods 0.000 abstract description 3
- 238000012377 drug delivery Methods 0.000 abstract description 2
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
- B01D61/427—Electro-osmosis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Urology & Nephrology (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
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Abstract
본 발명은 전기 삼투(electro-osmosis)현상을 이용한 미소 유체 펌프(microfluidic pump)에 관한 것으로서 더욱 상세하게 설명하면, 전극과 다공성 멤브레인을 이용하여 랩온어칩 디바이스 상에 설치된 유로에 유체가 흐를 수 있도록 하는 미소 유체 펌프에 관한 발명이다.
본 발명에 따른 미소 유체 펌프를 이용하면 별도의 기계적 장치 없이도 필요한 만큼의 유체를 정확하게 목적하는 장소로 이송시킬 수 있으며, 신속진단, 현장 검사(point-of-care test, POCT), 랩온어칩과 같은 분야에서 미소량의 유체를 이송하는 펌프로 또는 약물 전달 등의 목적으로 사용될 수 있다.The present invention relates to a microfluidic pump using the electro-osmosis phenomenon. To be described in more detail, the present invention relates to a microfluidic pump using an electrode and a porous membrane to allow fluid to flow in a flow path installed on a lab-on-a-chip device. This is an invention regarding a microfluidic pump.
By using the microfluidic pump according to the present invention, the required amount of fluid can be accurately transported to the desired location without a separate mechanical device, and can be used for rapid diagnosis, point-of-care test (POCT), lab-on-a-chip, and In the same field, it can be used as a pump to transport a small amount of fluid or for drug delivery purposes.
Description
본 발명은 전기 삼투(electro-osmosis)현상을 이용한 미소 유체 펌프(microfluidic pump)에 관한 것으로서 더욱 상세하게 설명하면, 전극과 다공성 멤브레인을 이용하여 랩온어칩 디바이스 상에 설치된 유로에 유체가 흐를 수 있도록 하는 미소 유체 펌프에 관한 발명이다.The present invention relates to a microfluidic pump using the electro-osmosis phenomenon. To be described in more detail, the present invention relates to a microfluidic pump using an electrode and a porous membrane to allow fluid to flow in a flow path installed on a lab-on-a-chip device. This is an invention regarding a microfluidic pump.
랩온어칩(lab-on-a-chip) 디바이스는 반도체, 나노 기술, 생명공학 등에서 유래하는 다양한 실험 및 분석을 작은 칩(chip) 위에서 수행할 수 있도록 만든 장치이다.A lab-on-a-chip device is a device that allows various experiments and analyzes from semiconductors, nanotechnology, biotechnology, etc. to be performed on a small chip.
최근에는 랩온어칩 디바이스는 바이오칩의 형태로도 발전하고 있다. 바이오칩은 여러 개의 생화학적인 반응을 수행할 수 있는 축소된 실험실을 의미한다. Recently, lab-on-a-chip devices are also developing in the form of biochips. A biochip is a miniature laboratory that can perform multiple biochemical reactions.
바이오칩은 질병의 진단부터 범죄의 수사에 이르기 까지 다양한 목적을 가지고 생물학적인 분석을 할 수 있도록 한다. 이를 활용하면 극미량의 시료나 샘플만으로도 시험 분석을 신속하게 진행할 수 있어 새로운 진단 및 분석 장치로서 집중적으로 연구 개발 되고 있다.Biochips enable biological analysis for a variety of purposes, from disease diagnosis to crime investigation. Using this, testing and analysis can be conducted quickly with only a very small amount of samples or specimens, so it is being intensively researched and developed as a new diagnostic and analysis device.
이러한 랩온어칩 디바이스는 매우 작은 양의 시료를 사용하므로 종래의 고전적인 분석 방법에 비하여 1회당 분석 비용을 낮출 수 있고 시료를 매우 빠른 속도로 가열이나 냉각 할 수 있으므로 빠른 응답을 얻을 수 있는 장점이 있다. These lab-on-a-chip devices use a very small amount of sample, so they can lower the cost per analysis compared to conventional classical analysis methods, and have the advantage of obtaining a quick response because the sample can be heated or cooled at a very high rate. there is.
한편 랩온어칩 디바이스에는 여러가지 단점도 존재한다.Meanwhile, lab-on-a-chip devices also have several drawbacks.
예를 들어 유체의 이송이나 반응 과정에서 모세관 현상이나 표면 장력 등의 영향을 쉽게 받기도 하고 원하지 않는 부수적 화학 반응 등이 방해 요소로 작용하는데 이는 모두 미소량의 유체를 사용하기 때문이다.For example, during the transfer or reaction process of fluid, it is easily affected by capillary action or surface tension, and unwanted side chemical reactions act as interference factors, all because a very small amount of fluid is used.
특히, 이러한 방해 요소들은 유체의 흐름에도 매우 큰 영향을 미치므로 매우 작은 양의 유체를 정확하게 필요한 만큼 이송하는 것은 기술적으로 매우 어렵고 해결하기에 매우 까다로운 문제이다.In particular, these interfering factors have a very large impact on the flow of fluid, so transporting a very small amount of fluid exactly as needed is technically very difficult and a very difficult problem to solve.
일반적으로는 일정한 부피를 정확하게 밀어 낼 수 있는 시린지 펌프나, 매우 작은 압력이나 진공를 발생시킬 수 있는 압력 조절기를 이용하여 랩온어칩 디바이스 위에 유체의 흐름을 발생시키는 방법이 널리 사용되고는 있지만, 이러한 방식에서는 디바이스 보다도 몇 백배나 큰 부대 설비를 갖추어야 한다.In general, methods of generating a flow of fluid over a lab-on-a-chip device using a syringe pump that can accurately push a certain volume or a pressure regulator that can generate a very small pressure or vacuum are widely used, but in this method, It must be equipped with auxiliary facilities that are hundreds of times larger than the device.
따라서 표면 탄성파(surface acoustic wave), 모세관 흐름(capillary flow)현상 및 전기 동역학(electrokinetic)적 현상인 전기삼투(electroosmosis)와 전기 습윤(electrowetting) 현상을 이용하여 랩온어칩 디바이스 자체에 유체의 흐름을 발생시킬 수 있는 메카니즘을 포함시키려는 노력이 있어 왔다.Therefore, the flow of fluid in the lab-on-a-chip device itself is achieved using surface acoustic waves, capillary flow phenomena, and electrokinetic phenomena such as electroosmosis and electrowetting. There have been efforts to include mechanisms that could cause this to occur.
그러나 작은 칩 위에 복잡한 부대 설비가 필요없는 유체 이송 메카니즘을 구현하기 위해서는 증착, 패터닝 및 에칭 등 멤스(MEMS, microelectromechanical systems)에 기반한 기법을 사용하거나, 모세관 흐름에 기반한 측방 유동 면역 분석(lateral flow immunoassay) 처럼 한쪽 방향의 흐름 만을 이용해야 한다.However, in order to implement a fluid transport mechanism on a small chip without the need for complex auxiliary equipment, techniques based on MEMS (microelectromechanical systems) such as deposition, patterning, and etching must be used, or lateral flow immunoassay based on capillary flow. As such, only one-directional flow should be used.
본 발명에서는 상기한 종래 기술의 문제점을 해결하기 위해 복잡한 부대 설비 없이도 랩온어칩 디바이스 상에 설치된 유로에 미소량의 유체를 정확한 양으로 이송할 수 있는 펌프를 제공하고자 한다.In order to solve the problems of the prior art described above, the present invention seeks to provide a pump that can transport a small amount of fluid in a precise amount to a flow path installed on a lab-on-a-chip device without complicated auxiliary equipment.
본 발명에서는 상기한 과제를 해결하기 위한 수단으로서 다공성 멤브레인과 상기 멤브레인에 밀접하게 접촉하는 2개 이상의 전극과, 상기 2개 이상의 전극에 일정한 전압을 가하여 다공성 멤브레인의 기공을 통하여 물을 토출하는 펌프를 포함 하는 것을 특징으로 한다.In the present invention, as a means to solve the above problem, a porous membrane, two or more electrodes in close contact with the membrane, and a pump that discharges water through the pores of the porous membrane by applying a constant voltage to the two or more electrodes It is characterized by including.
본 발명의 바람직한 특징 중 하나는 상기 다공성 멤브레인이 상기 기재위에 코팅된 후 고분자 상전이 공정을 거쳐서 형성되는 것이다.One of the preferred features of the present invention is that the porous membrane is coated on the substrate and then formed through a polymer phase transfer process.
본 발명에 따른 미소 유체 펌프를 이용하면 별도의 기계적 장치 없이도 필요한 만큼의 유체를 정확하게 목적하는 장소로 이송시킬 수 있다.Using the microfluidic pump according to the present invention, the required amount of fluid can be accurately transported to the desired location without a separate mechanical device.
도1은 본 발명에 따른 미소 유체 펌프의 개념을 설명하는 사시도이다.
도2는 본 발명에 따른 미소 유체 펌프에 커버플레이트가 씌워져 있을 때를 나타내는 사시도이다.Figure 1 is a perspective view explaining the concept of a microfluidic pump according to the present invention.
Figure 2 is a perspective view showing when the microfluidic pump according to the present invention is covered with a cover plate.
이하 본 발명의 일 실시예인 도1을 이용하여 더욱 상세하게 설명한다.Hereinafter, an embodiment of the present invention will be described in more detail using Figure 1.
도1은 본 발명에 따른 전기 삼투를 이용한 미소유체펌프의 구성과 각 요소들 상호 간의 작용과 결합 관계를 설명하고 있다.Figure 1 explains the configuration of a microfluidic pump using electroosmosis according to the present invention and the interaction and coupling relationship between each element.
도1에서 다공성 멤브레인(101)은 친수성이면서 기공을 가지고 있어 유체 흐름의 통로가 될 수 있는 것으로서 기재(108)와 그 위에 설치되는 복수개의 전극(102, 103, 104)과 밀접하게 접촉하도록 설치된다.In FIG. 1, the porous membrane 101 is hydrophilic and has pores, which can serve as a passage for fluid flow, and is installed in close contact with the substrate 108 and the plurality of electrodes 102, 103, and 104 installed thereon. .
상기 기재(108)위에는 제1커버플레이트(111)가 긴밀하게 접촉되도록 설치된다. A first cover plate 111 is installed on the substrate 108 so as to be in close contact with it.
제1커버플레이트(111)는 상기 기재(108)위에 물리적인 압착 또는 점/접착제를 이용한 부착 등의 방법으로 설치되어 다공성 멤브레인(101)을 통하여 토출되는 유체가 흐르는 유로(112)를 구성한다.The first cover plate 111 is installed on the substrate 108 by a method such as physical compression or attachment using a point/adhesive, and forms a flow path 112 through which the fluid discharged through the porous membrane 101 flows.
리드선(105, 106, 107)은 복수개의 전극(102, 103, 104)과 접촉하도록 기재(108)위에 배선 되는 것으로서 펌프가 사용하는 전위의 범위 내에서 물의 전기 분해나 전극 자체의 산화/환원 또는 부반응이 발생하지 않는 소재, 즉 전위창이 넓은 소재로 설치되는 것이 바람직하다.The lead wires (105, 106, 107) are wired on the base material (108) to contact the plurality of electrodes (102, 103, 104), and can be used for electrolysis of water or oxidation/reduction of the electrodes themselves within the range of potential used by the pump. It is desirable to install a material that does not cause side reactions, that is, a material with a wide potential window.
복수개의 전극(102, 103, 104)은 이때 금속은 전극 반응에 참여하지 않는 전극(inert electrode)이거나 또는 Ag/Ag2O전극 처럼 반응에 참여하는 반응성 전극(reactive electrode)일 수 있다.The plurality of electrodes 102, 103, and 104 may be electrodes that do not participate in the metal reaction (inert electrode) or may be reactive electrodes that participate in the reaction, such as the Ag/Ag 2 O electrode.
기재(108)는 상기 전극과 리드선이 설치되는 부재로 유리(glass), 플라스틱 또는 세라믹 등 전기적으로 절연이고 물 또는 분석에 사용되는 매체(medium)에 용해 되지 않는 소재를 사용한다.The substrate 108 is a member on which the electrodes and lead wires are installed and is made of a material such as glass, plastic, or ceramic that is electrically insulating and does not dissolve in water or the medium used for analysis.
제1투입구(109)와 제2투입구(110는 다공성 멤브레인(101)에 매체로 사용되는 버퍼 등의 용액, 초순수 등의 미디어(media) 또는 샘플 등을 투입하는 용도로 사용된다.The first inlet 109 and the second inlet 110 are used to inject solutions such as buffers, media such as ultrapure water, or samples used as media into the porous membrane 101.
즉, 상기 제1투입구(109)와 제2투입구(110)에 버퍼 용액을 투입하면 다공성 멤브레인은 이 용액을 빨아들이고 기공 내부는 버퍼 용액으로 채워지며 동시에 전극 표면도 버퍼 용액으로 젖게 되어 펌핑을 할 준비가 된다.That is, when the buffer solution is introduced into the first inlet 109 and the second inlet 110, the porous membrane absorbs this solution, the inside of the pores is filled with the buffer solution, and at the same time, the electrode surface is also wetted with the buffer solution, enabling pumping. I'm ready.
이때 상기 리드선(105, 106, 107)에 전압을 가하면 전기 삼투현상으로 펌핑된 유체는 상기 유로(112)를 통과하여 화학반응부(113)에 도달하여 미리 준비된 반응을 일으킨다.At this time, when voltage is applied to the lead wires 105, 106, and 107, the fluid pumped by electroosmosis passes through the flow path 112 and reaches the chemical reaction unit 113, causing a previously prepared reaction.
상기 반응은 전기화학적 반응, 광화학적 반응, 효소반응 또는 항원/항체 반응을 포함하는 것으로서 필요한 분석의 목적에 부응하도록 미리 설계된 반응을 의미한다.The reaction includes an electrochemical reaction, a photochemical reaction, an enzyme reaction, or an antigen/antibody reaction, and refers to a reaction designed in advance to meet the purpose of the analysis.
도2는 제1커버플레이트 위에 제2커버플레이트를 덮어 씌운 상태를 나타낸 것이다.Figure 2 shows a state in which the second cover plate is covered over the first cover plate.
상기 제2커버플레이트를 덮어 줌으로써 제1커버 플레이트로 구성한 유로(112)가 완전한 채널로 완성된다.By covering the second cover plate, the flow path 112 formed by the first cover plate is completed as a complete channel.
또한, 상기 제2커버플레이트에는 관찰창(203)이 설치되어 화학반응부(113)에서 일어나는 반응의 정도를 측정하는 용도로 사용된다.Additionally, an observation window 203 is installed on the second cover plate and is used to measure the degree of reaction occurring in the chemical reaction unit 113.
상기 다공성 멤브레인(101)으로는 다공성이면서 물을 흡수하는 친수성을 띄는 소재, 즉 세라믹, 종이 및 기타 합성 수지로 제조한 멤브레인 등도 사용가능 하다.The porous membrane 101 can also be made of a porous, hydrophilic material that absorbs water, that is, a membrane made of ceramic, paper, and other synthetic resins.
물론, 물을 사용하지 않고 유기 용매를 이용하는 반응을 이용하는 경우에는 다공성 멤브레인은 소수성인 것이 바람직할 수도 있으며 이러한 반응 기구의 선택은 당해 업자가 취사 선택하여 사용할 수 있는 영역이다.Of course, when using a reaction using an organic solvent rather than using water, it may be desirable for the porous membrane to be hydrophobic, and the selection of such a reaction mechanism is within the discretion of those skilled in the art.
아울러 상기 다공성 멤브레인(101)을 기재위에 도입하는 방법으로는 이미 전극과 리드선의 배선이 완료된 상태에서 고분자가 용해된 도프(dope)를 기재위에 미리 정해진 형태로 토출시킨 후 이를 상전이(phase transition) 또는 상분리(phase separation) 공정을 통하여 다공성 멤브레인으로 전환시키는 것이 바람직하다.In addition, a method of introducing the porous membrane 101 on the substrate involves discharging dope in which the polymer is dissolved in a predetermined form on the substrate in a state in which the wiring of the electrodes and lead wires has already been completed, and then performing a phase transition or It is desirable to convert it into a porous membrane through a phase separation process.
이러한 상전이 공정에 사용될 수 있는 고분자 수지로는 폴리설폰(polysulfone), PVDF(polyvinylidene difluoride), 폴리아크릴로니트릴(polyacrylonitrile) 등의 소재가 널리알려져 있고 이들 재료를 이용한 상전이 공정은 상온에서 사용가능한 것으로서 비용매 유도 상전이(NIPS, non-solvent induced phase separation), 증기 유도 상전이(VIPS, vapor induced phase separation), 증발 유도 상전이(EIPS, evaporation induced phase transition) 등의 방법이 널리 사용되어 왔다.Materials such as polysulfone, polyvinylidene difluoride (PVDF), and polyacrylonitrile are widely known as polymer resins that can be used in this phase transfer process, and the phase transfer process using these materials can be used at room temperature and is cost-effective. Methods such as non-solvent induced phase separation (NIPS), vapor induced phase separation (VIPS), and evaporation induced phase transition (EIPS) have been widely used.
본 발명의 여러 형태들은 본 실시예의 기술 사상을 설명하기 위한 것으로서 이러한 실시예에 의하여 본 발명의 기술 사상의 범위가 한정되는 것은 아니다. 본 발명의 보호 범위는 청구 범위에 의하여 해석되어야 하며, 그와 동등한 범위 내에 있는 모든 기술 사상은 본 발명의 권리 범위에 포함되는 것으로 해석되어야 할 것이다.The various forms of the present invention are intended to explain the technical idea of the present embodiment, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be interpreted in accordance with the claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of rights of the present invention.
본 발명에 따른 미소 유체 펌프는 신속 진단, 현장 검사(point-of-care test, POCT), 랩온어칩과 같은 분야에서 미소량의 유체를 이송하는 목적으로 사용되는 펌프 또는 약물 전달 등의 목적으로 사용될 수 있다.The microfluidic pump according to the present invention is a pump used for the purpose of transferring a small amount of fluid in fields such as rapid diagnosis, point-of-care test (POCT), and lab-on-a-chip, or for drug delivery. can be used
101: 다공성 멤브레인
102, 103, 104: 전극
105, 106, 107: 리드선
108: 기재
109: 제1투입구, 110: 제2투입구
111: 제1커버플레이트
112: 유로
113: 화학반응부
201: 제2커버플레이트
203: 관찰창101: porous membrane
102, 103, 104: electrodes
105, 106, 107: Lead wire
108: Description
109: 1st input port, 110: 2nd input port
111: First cover plate
112: Euro
113: Chemical reaction unit
201: Second cover plate
203: observation window
Claims (3)
상기 멤브레인에 밀접하게 접촉하는 2개 이상의 전극과,
상기 2개 이상의 전극에 일정한 전압을 가하여 다공성 멤브레인의 기공을 통하여 물을 토출하는 것을 특징으로 하는 미소 유체 펌프.
A porous membrane installed on the substrate,
two or more electrodes in close contact with the membrane,
A microfluidic pump characterized in that water is discharged through pores of a porous membrane by applying a constant voltage to the two or more electrodes.
상기 다공성 멤브레인은 상기 기재위에 코팅된 후 고분자 상전이 공정을 거쳐서 형성되는 것을 특징으로 하는 미세 유체 펌프.
According to paragraph 1,
The porous membrane is a microfluidic pump, characterized in that it is formed by coating on the substrate and then going through a polymer phase transfer process.
상기 상전이 공정은 비용매 유도 상전이, 증기 유 도상전이 또는 증발 유도 상전이 중에서 선택되는 어느 1종 이상의 방법인 것을 특징으로 하는 미세 유체 펌프.
According to paragraph 2,
The phase transition process is a microfluidic pump, characterized in that one or more methods selected from non-solvent induced phase transition, vapor induced phase transition, or evaporation induced phase transition.
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