KR20200111116A - Apparatus and method for detecting shape - Google Patents

Apparatus and method for detecting shape Download PDF

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Publication number
KR20200111116A
KR20200111116A KR1020200032698A KR20200032698A KR20200111116A KR 20200111116 A KR20200111116 A KR 20200111116A KR 1020200032698 A KR1020200032698 A KR 1020200032698A KR 20200032698 A KR20200032698 A KR 20200032698A KR 20200111116 A KR20200111116 A KR 20200111116A
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South Korea
Prior art keywords
measuring
heat insulating
shape
axis direction
grinding
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KR1020200032698A
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Korean (ko)
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나 가오
츠토무 미야타케
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스미도모쥬기가이고교 가부시키가이샤
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Publication of KR20200111116A publication Critical patent/KR20200111116A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Golf Clubs (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Soft Magnetic Materials (AREA)

Abstract

The present invention relates to a shape measurement apparatus and a shape measurement method. The present invention reduces influence of external temperature changes and realizes high-precision shape measurement. In the shape measurement apparatus (40) for measuring a surface shape of a measurement target (W) through scanning in a scanning direction by three measuring elements (41) arranged in the scanning direction, the three measuring elements (41) are contained in a heat insulating member (43). According to the present invention, the three measuring elements (41) are embedded in the heat insulating member (43) to perform measurement, so that even when temperature characteristics of the individual measuring elements (41) are different, the influence of external temperature changes is suppressed, and therefore shape measurement can be performed while maintaining high precision.

Description

형상측정장치 및 형상측정방법{APPARATUS AND METHOD FOR DETECTING SHAPE}Shape measurement device and shape measurement method {APPARATUS AND METHOD FOR DETECTING SHAPE}

본 출원은, 2019년 03월 18일에 출원된 일본 특허출원 제2019-050154호에 근거하여 우선권을 주장한다. 그 출원의 전체 내용은 이 명세서 중에 참고로 원용되어 있다.This application claims priority based on Japanese Patent Application No. 2019-050154 for which it applied on March 18, 2019. The entire contents of the application are incorporated by reference in this specification.

본 발명은, 진직도(眞直度)의 측정을 행하는 형상측정장치 및 형상측정방법에 관한 것이다.The present invention relates to a shape measuring apparatus and a shape measuring method for measuring straightness.

축차3점법에 의하여 계측대상물의 표면형상을 구하여, 진직도의 측정을 행하는 형상측정장치가 알려져 있다(예를 들면, 특허문헌 1 참조).A shape measuring apparatus is known that obtains the surface shape of an object to be measured by a sequential three-point method and measures the straightness (see, for example, Patent Document 1).

특허문헌 1: 일본 공개특허공보 2013-195082호Patent Document 1: Japanese Laid-Open Patent Publication No. 2013-195082

상기 형상측정장치에서는, 예를 들면 3개의 검출광의 수발광부에 의하여 주사를 행하여, 검출광의 출사방향의 변위의 검출을 행하고 있다.In the shape measuring apparatus, for example, three detection light receiving and emitting portions are used to scan, and the displacement in the emission direction of the detection light is detected.

상기 측정에 있어서는, 고분해능이며 고정밀도의 변위검출이 높게 요구되고 있지만, 각 수발광부의 광학계는 외부의 온도변화의 영향을 받는 경우가 있어, 이것이 검출정밀도의 저하를 초래할 우려가 있었다.In the above measurement, high resolution and high-precision displacement detection is required, but the optical system of each light-receiving unit may be affected by external temperature changes, and this may lead to a decrease in detection accuracy.

본 발명은, 외부의 온도변화의 영향을 저감시키는 것을 목적으로 한다.An object of the present invention is to reduce the influence of external temperature changes.

본 발명은, 주사방향으로 나열되어 마련된 3개의 측정자에 의하여 상기 주사방향으로 주사하여 측정대상물의 표면형상을 계측하는 형상측정장치로서, 상기 3개의 측정자를 단열재료 또는 단열부재에 내포한 구성으로 하고 있다.The present invention is a shape measuring device for measuring the surface shape of an object to be measured by scanning in the scanning direction by three measuring persons arranged in the scanning direction, and the three measuring elements are contained in a heat insulating material or a heat insulating member. have.

또, 본 발명은, 주사방향으로 나열되어 마련된 3개의 측정자에 의하여 상기 주사방향으로 주사하여 측정대상물의 표면형상을 계측하는 형상측정방법으로서, 상기 3개의 측정자를 단열재료 또는 단열부재에 내포한 상태로 계측하는 구성으로 하고 있다.In addition, the present invention is a shape measuring method for measuring the surface shape of an object to be measured by scanning in the scanning direction by three measuring persons arranged in the scanning direction, wherein the three measuring elements are embedded in a heat insulating material or a heat insulating member. It is configured to measure by.

본 발명에 의하면, 외부의 온도변화의 영향을 저감시키는 것이 가능해진다.According to the present invention, it becomes possible to reduce the influence of external temperature change.

도 1은 본 발명의 실시형태에 관한 형상측정장치를 탑재한 공작기계를 나타내는 사시도이다.
도 2는 공작기계의 제어계를 나타내는 블록도이다.
도 3에 있어서, 도 3의 (a)는 단열재료로 이루어지는 단열부재를 제거한 상태의 헤드의 사시도, 도 3의 (b)는 단열부재를 갖는 상태의 헤드의 사시도이다.
도 4는 워크의 표면에 대한 주사를 행하는 경우의 개념도이다.
도 5에 있어서, 도 5의 (a) 및 도 5의 (b)는 워크의 표면까지의 거리 및 곡률의 산출의 설명도이다.
도 6은 단열부재의 예를 나타내는 단면도이다.1 is a perspective view showing a machine tool equipped with a shape measuring device according to an embodiment of the present invention.
2 is a block diagram showing a control system of a machine tool.
In Fig. 3, Fig. 3(a) is a perspective view of the head in a state in which a heat insulating member made of a heat insulating material is removed, and Fig. 3(b) is a perspective view of the head in a state with a heat insulating member.
4 is a conceptual diagram when scanning is performed on the surface of a work.
In FIG. 5, FIG. 5(a) and FIG. 5(b) are explanatory diagrams for calculating the distance and curvature to the surface of the work.
6 is a cross-sectional view showing an example of a heat insulating member.

본 발명의 실시형태를 도면에 근거하여 설명한다.Embodiments of the present invention will be described based on the drawings.

도 1은 발명의 실시형태로서의 형상측정장치(40)를 탑재한 공작기계(1)를 나타내는 사시도, 도 2는 공작기계(1)의 제어계를 나타내는 블록도이다. 도면 중, X축방향 및 Y축방향은 모두 수평이며 서로 직교하고, Z축방향은 X축방향 및 Y축방향에 직교하는 연직상하방향이다.1 is a perspective view showing a machine tool 1 equipped with a shape measuring device 40 as an embodiment of the invention, and FIG. 2 is a block diagram showing a control system of the machine tool 1. In the figure, both the X-axis direction and the Y-axis direction are horizontal and orthogonal to each other, and the Z-axis direction is a vertical vertical direction perpendicular to the X-axis direction and Y-axis direction.

[공작기계의 개요][Overview of machine tool]

공작기계(1)는, 워크의 일면을 연삭하는 이른바 연삭반이며, 기부(31a, 31b), 제1 칼럼(10), 제2 칼럼(20), 크로스레일(32), 새들(331), 숫돌헤드(332), 연삭장치(34), 형상측정장치(40), 및 측정대상물로서의 워크가 배치되는 테이블(36) 및 베드(35), 제어장치(60)를 구비하고 있다. 워크는, 연삭이 행해지는 가공대상물이다. The machine tool 1 is a so-called grinding machine for grinding one surface of a work, and bases 31a and 31b, first column 10, second column 20, cross rail 32, saddle 331, A grinding stone head 332, a grinding device 34, a shape measuring device 40, and a table 36 and a bed 35 on which a workpiece as a measurement object is disposed, and a control device 60 are provided. The work is an object to be processed on which grinding is performed.

[베드][Bed]

베드(35)는, X축방향을 따른 도시하지 않은 한 쌍의 리니어가이드를 구비하고, 테이블(36)을 X축방향을 따라 이동 가능하게 지지하고 있다. 또, 베드(35)에는, 테이블(36)을 X축방향을 따라 반송하는 도시하지 않은 반송기구가 탑재되어 있다. 반송기구는, 동작량을 임의로 제어 가능한 테이블이송모터(351)(도 2 참조)를 구동원으로 하고 있어, 테이블(36)에 워크를 유지하여 X축방향으로 반송하는 것을 가능하게 하고 있다.The bed 35 includes a pair of linear guides (not shown) along the X-axis direction, and supports the table 36 so as to be movable along the X-axis direction. Further, the bed 35 is equipped with a transport mechanism (not shown) for transporting the table 36 along the X-axis direction. The conveying mechanism uses a table conveying motor 351 (refer to FIG. 2) capable of arbitrarily controlling an operation amount as a driving source, and makes it possible to hold a workpiece on the table 36 and convey it in the X-axis direction.

다만, 이 반송기구는, 후술하는 3개의 측정자(41)를 워크(W)에 대하여 주사방향(X축방향)을 따라 상대적으로 이동시키는 주사기구로서도 기능한다.However, this conveyance mechanism also functions as an injector for relatively moving the three measuring elements 41 to be described later with respect to the workpiece W along the scanning direction (X-axis direction).

또, 베드(35)의 Y축방향의 양측에는, 한 쌍의 기부(31a, 31b)가 돌출되도록 연결장비되어 있다. 일방의 기부(31a)에는 제1 칼럼(10)이 재치장비되고, 타방의 기부(31b)에는 제2 칼럼(20)이 재치장비되어 있으며, 각 칼럼(10, 20)의 하단부는, 볼트나 용접 등의 주지의 방법으로 기부(31a, 31b)에 고정되어 있다.In addition, on both sides of the bed 35 in the Y-axis direction, a pair of bases 31a and 31b are connected to protrude. One base (31a) is equipped with a first column (10), the other base (31b) is equipped with a second column (20), the lower end of each column (10, 20), a bolt or It is fixed to the bases 31a and 31b by a known method such as welding.

[제1 및 제2 칼럼][First and second column]

제1 칼럼(10) 및 제2 칼럼(20)은 베드(35)를 사이에 두고 Y축방향으로 나열되는 배치로 세워서 설치되어 있다. 그리고, 이들 칼럼(10, 20)의 상단부에는, 브래킷(32a)(제2 칼럼(20)측의 브래킷은 도시 생략)을 개재하여, 크로스레일(32)이 Y축방향으로 향한 상태로 고정지지되어 있다. 그리고, 각 칼럼(10, 20)의 상단부는, 볼트나 용접 등의 주지의 방법으로 크로스레일(32)에 고정되어 있다.The first column 10 and the second column 20 are erected and installed in an arrangement arranged in the Y-axis direction with the bed 35 interposed therebetween. And, at the upper end of these columns 10 and 20, through a bracket 32a (bracket on the side of the second column 20 is not shown), the cross rail 32 is fixed and supported in a state facing the Y-axis direction. Has been. Further, the upper ends of each of the columns 10 and 20 are fixed to the crossrail 32 by a known method such as bolts or welding.

[크로스레일][Cross Rail]

크로스레일(32)은, Y축방향으로 장척이며, 그 전면측에 있어서, 도시하지 않은 리니어가이드를 개재하여 새들(331)을 Y축방향으로 이동 가능하게 지지하고 있다.The cross rail 32 is long in the Y-axis direction, and supports the saddle 331 so as to be movable in the Y-axis direction through a linear guide (not shown) on its front side.

또, 크로스레일(32)에는, 새들(331)을 Y축방향을 따라 이동위치결정하는 도시하지 않은 반송기구가 탑재되어 있다. 이 반송기구는, 동작량을 임의로 제어 가능한 새들이동모터(321)(도 2 참조)를 구동원으로 하고 있어, 새들(331)을 Y축방향을 따라 임의로 이동위치결정할 수 있다.Further, the cross-rail 32 is equipped with a conveying mechanism (not shown) for positioning the saddle 331 along the Y-axis direction. This conveying mechanism uses a saddle moving motor 321 (see Fig. 2) capable of arbitrarily controlling the amount of motion as a driving source, so that the saddle 331 can be arbitrarily moved along the Y-axis direction.

새들(331)은, 숫돌헤드(332)를 지지하고, 숫돌헤드(332)는, 연삭장치(34)를 지지하고 있다. 한편, 크로스레일(32)의 새들이동모터(321)에 의한 새들(331)의 Y축방향의 이동제어와, 베드(35)의 테이블이송모터(351)에 의한 워크의 X축방향의 이동제어는 협동하여 행해진다. 이로써, 연삭장치(34)의 숫돌(34a)을 워크에 대하여, 상대적으로 X-Y평면의 임의의 위치로 이동위치결정할 수 있어, 워크의 전체면 또는 어느 위치에도 연삭가공을 행할 수 있다.The saddle 331 supports the grinding stone head 332, and the grinding stone head 332 supports the grinding device 34. On the other hand, movement control in the Y-axis direction of the saddle 331 by the saddle moving motor 321 of the cross rail 32, and the movement control in the X-axis direction of the work by the table transfer motor 351 of the bed 35 Is done in cooperation. Thereby, the grinding wheel 34a of the grinding device 34 can be moved to a relatively arbitrary position on the X-Y plane with respect to the work, and grinding can be performed on the entire surface of the work or at any position.

[숫돌헤드 및 새들][Whetstone head and saddle]

숫돌헤드(332)는, 새들(331)을 개재하여 크로스레일(32)에 의하여 Y축방향으로 이동 가능하게 지지되고, 새들(331)에 의하여 Z축방향을 따라 승강 가능하게 지지되어 있다. 또, 숫돌헤드(332)는, 하단부에 연삭장치(34)를 지지하고 있다.The grinding stone head 332 is supported so as to be movable in the Y-axis direction by the cross rail 32 via the saddle 331, and is supported so as to be elevating along the Z-axis direction by the saddle 331. In addition, the grinding stone head 332 supports the grinding device 34 at the lower end.

새들(331)은, 숫돌헤드(332)를 Z축방향을 따라 승강시키는 역할을 담당하는 것이다. The saddle 331 serves to lift the grinding stone head 332 along the Z-axis direction.

이 때문에, 새들(331)은, 도시하지 않은 리니어가이드에 의하여 숫돌헤드(332)를 Z축방향을 따라 이동 가능하게 지지하고 있다. 그리고, 새들(331)에는, 숫돌헤드(332)를 Z축방향을 따라 이동위치결정하는 도시하지 않은 반송기구가 탑재되어 있다. 이 반송기구는, 동작량을 임의로 제어 가능한 숫돌승강모터(333)를 구동원으로 하고 있어, 숫돌헤드(332)를 Z축방향을 따라 임의로 이동위치결정할 수 있다.For this reason, the saddle 331 supports the grinding stone head 332 so as to be movable along the Z-axis direction by a linear guide (not shown). Further, the saddle 331 is equipped with a conveying mechanism (not shown) for moving the grinding stone head 332 along the Z-axis direction. This conveying mechanism uses a whetstone lifting motor 333 capable of arbitrarily controlling the amount of motion as a driving source, and the whetstone head 332 can be arbitrarily moved in position along the Z-axis direction.

[연삭장치][Grinding device]

연삭장치(34)는, 숫돌헤드(332)의 하단부에 지지되어 있다.The grinding device 34 is supported on the lower end of the grinding stone head 332.

이 연삭장치(34)는, 공구로서, Y축 둘레로 회전구동되는 원판상 또는 원통상의 숫돌(34a)과, 숫돌(34a)을 회전시키는 숫돌회전모터(341)를 갖는다. 숫돌(34a)은, 숫돌헤드(332)의 하단부의 우단에 배치되어 있다. 이 숫돌(34a)은, 숫돌회전모터(341)에 의한 회전구동에 의하여 그 외주를 워크에 슬라이딩접촉시켜 연삭을 행한다.This grinding device 34 has, as a tool, a disk-shaped or cylindrical grinding wheel 34a that is driven to rotate around the Y-axis, and a grinding wheel rotating motor 341 that rotates the grinding wheel 34a. The grinding stone 34a is disposed at the right end of the lower end of the grinding stone head 332. The grinding wheel 34a is subjected to grinding by sliding the outer circumference of the grinding wheel 34a in contact with the workpiece by rotational drive by the grinding wheel rotary motor 341.

[형상측정장치][Shape measuring device]

형상측정장치(40)는, 이른바 분광간섭계이며, 연삭장치(34)에 의하여 연삭된 워크의 연삭면에 대하여, 3점법에 의하여 표면형상을 측정한다.The shape measuring device 40 is a so-called spectroscopic interferometer, and measures the surface shape of the grinding surface of the work ground by the grinding device 34 by a three-point method.

형상측정장치(40)는, 3개의 측정자(41)를 구비하는 헤드(42)와, 3개의 광원(411)과, 3개의 수광소자(412)를 구비하고 있다.The shape measuring device 40 includes a head 42 including three measuring elements 41, three light sources 411, and three light receiving elements 412.

측정자(41)는, 광전도부재로서의 광파이버(413)를 개재하여 광원(411) 및 수광소자(412)에 접속되어 있다. 즉, 광파이버(413)가 개재하여 광원(411) 및 수광소자(412)는, 측정자(41)로부터 이격하여 마련되어 있다.The measurer 41 is connected to the light source 411 and the light receiving element 412 via an optical fiber 413 as a photoconductive member. That is, the optical fiber 413 is interposed so that the light source 411 and the light-receiving element 412 are provided spaced apart from the measuring element 41.

광원(411)은, 예를 들면 SLD 소자(Super Luminescent Diode)이며, 미리 정해진 복수 종류의 파장의 검출광을 출력한다. 검출광은, 광파이버(413)를 통하여 측정자(41)로 보내진다.The light source 411 is, for example, an SLD element (Super Luminescent Diode), and outputs detection light of a plurality of predetermined wavelengths. The detection light is sent to the measuring person 41 through the optical fiber 413.

측정자(41)는, 투광소자이며, 광원(411)으로부터의 검출광을 워크에 향해진 출력면으로부터 워크를 향하여 투광함과 함께, 워크로부터의 반사광을 출력면에 있어서 수광한다.The measuring person 41 is a light transmitting element, and transmits light from the output surface directed to the work toward the work, and receives the reflected light from the work at the output surface.

측정자(41)의 내부에서는, 출력면에서 내부반사한 검출광과 워크로부터의 반사광의 간섭광이 발생한다. 이 간섭광은, 광파이버(413)를 통하여 수광소자(412)에 보내진다.In the interior of the measuring person 41, interference light of the detection light internally reflected from the output surface and the reflected light from the work is generated. This interference light is sent to the light receiving element 412 through the optical fiber 413.

수광소자(412)는, 예를 들면 CCD이며, 측정자(41)로부터의 간섭광을 도시하지 않은 분광기를 개재하여 수광한다. 분광기는, 미리 정해진 복수 종류의 파장광으로 분광하고, 수광소자(412)는, 각 파장광의 광강도를 개별적으로 검출함과 함께 제어장치(60)에 입력한다.The light-receiving element 412 is, for example, a CCD, and receives the interference light from the measuring element 41 through a spectrometer (not shown). The spectroscope speculates into a plurality of predetermined wavelength light, and the light-receiving element 412 individually detects the light intensity of each wavelength light and inputs it to the control device 60.

측정자(41)는, 간섭광의 각 파장광의 광강도로부터, 출력면부터 워크의 표면까지의 Z축방향의 거리를 검출할 수 있다.The measurer 41 can detect the distance in the Z-axis direction from the output surface to the surface of the work from the light intensity of each wavelength light of the interference light.

도 3은 헤드(42)의 사시도이며, 도 3의 (A)는 단열재료로 이루어지는 단열부재(43)를 제거한 상태, 도 3의 (B)는 단열부재(43)를 갖는 상태를 나타낸다. 도 3에 있어서의 X축방향, Y축방향 및 Z축방향의 기재는, 헤드(42)를 숫돌헤드(332)에 장착한 상태에 있어서의 방향을 나타내고 있다.Fig. 3 is a perspective view of the head 42, Fig. 3(A) is a state in which the heat insulating member 43 made of a heat insulating material is removed, and Fig. 3(B) shows a state with the heat insulating member 43. The substrates in the X-axis direction, Y-axis direction, and Z-axis direction in FIG. 3 indicate directions in a state in which the head 42 is attached to the grinding stone head 332.

헤드(42)는, 도시와 같이, 3개의 측정자(41)와, 이들을 개별적으로 사이에 두고 유지하는 고정지그(414)와, 각 고정지그(414)를 개재하여 3개의 측정자(41)를 일체적으로 지지하는 지그(421)와, 지그(421)에 고정장비된 지지부재(422)와, 지지부재(422)를 개재하여 각 측정자(41)를 지지하는 기대(423)와, 기대(423)를 숫돌헤드(332)의 표면에 장착하는 흡착블록(424)을 구비하고 있다.As shown in the figure, the head 42 integrates three measuring elements 41, a fixing jig 414 holding them separately, and three measuring elements 41 through each fixing jig 414 A jig 421 that is supported as an enemy, a support member 422 fixed to the jig 421, a base 423 supporting each measurer 41 through the support member 422, and a base 423 ) Is provided with an adsorption block 424 mounted on the surface of the grinding stone head 332.

지그(421)는, 장척인 직사각형상의 블록이며, 바닥부에 마련된 개구부에 의하여 출력면을 노출시킨 상태로 3개의 측정자(41)가 매립장비되어 있다.The jig 421 is an elongated rectangular block, and three measuring devices 41 are embedded in a state in which the output surface is exposed by an opening provided at the bottom.

지그(421)는, 그 길이방향이 Y축방향에 평행으로 향해져 있다. 그리고, 이 지그(421)에 의하여, 3개의 측정자(41)는, Y축방향에 대하여 균일간격으로 배치되어 있다.In the jig 421, its longitudinal direction is directed parallel to the Y-axis direction. And by this jig 421, the three measuring elements 41 are arrange|positioned at uniform intervals with respect to the Y-axis direction.

또, 지그(421)는, 모두 검출광의 광축이 Z축방향에 평행이 되도록 3개의 측정자(41)를 유지한다.In addition, the jig 421 holds the three measuring elements 41 so that the optical axis of the detection light is parallel to the Z axis direction.

이로써, 3개의 측정자(41)는, Z축방향에 있어서의 거리검출을 행할 수 있다.Thereby, the three measuring persons 41 can perform distance detection in the Z-axis direction.

또, 지그(421)는, 예를 들면 슈퍼 인바(super invar)(등록상표)와 같은, 열팽창율이 매우 작은 불변강(不變鋼) 등의 금속재료로 형성되어 있다. 이로써, 주위의 환경온도에 의한 각 측정자(41)의 간격이나 출력면의 상대적인 위치변동을 억제하고 있다.Further, the jig 421 is formed of, for example, a metal material such as super invar (registered trademark), such as a constant steel having a very small coefficient of thermal expansion. This suppresses the relative positional fluctuation of the output surface or the interval of each measuring person 41 due to the surrounding environmental temperature.

지지부재(422)는, 사다리꼴의 판형부재이며, 볼트나 나사고정장치 등의 수단에 의하여 지그(421)에 대하여 고정적으로 연결되어 있다. 또, 지지부재(422)는 지그(421)로부터 분리할 수도 있다.The support member 422 is a trapezoidal plate-shaped member, and is fixedly connected to the jig 421 by means such as bolts or screw fixing devices. In addition, the support member 422 may be separated from the jig 421.

기대(423)는, X-Y평면을 따른 평판상의 대좌와 당해 대좌로부터 늘어뜨려진 2개의 암으로 이루어지고, 암의 하단부에는 지지부재(422)가 연결되어 있다.The base 423 is composed of a flat base along the X-Y plane and two arms hanging from the base, and a support member 422 is connected to the lower end of the arm.

기대(423)는, 지지부재(422)를 나사와 도시하지 않은 긴 구멍 등의 구조에 의하여 Y축 둘레로 각도조절 가능하게 하고 있다. 이 각도조절에 의하여, 지지부재(422)를 개재하여 지그(421)를 회동(回動)시킬 수 있고, 각 측정자(41)의 검출광의 광축의 방향이나 각 측정자(41)의 출력면의 Z축방향의 높이를 조정할 수 있다.The base 423 allows the support member 422 to be angled around the Y axis by a structure such as screws and a long hole (not shown). By this angle adjustment, the jig 421 can be rotated through the support member 422, and the direction of the optical axis of the detection light of each measurer 41 or the Z of the output surface of each measurer 41 The height in the axial direction can be adjusted.

각 흡착블록(424)은, 영구자석을 내장하고 있고, 외부에 마련된 손잡이를 회전조작함으로써, 영구자석에 의한 흡인력의 유무를 전환할 수 있다.Each adsorption block 424 has a built-in permanent magnet, and by rotating a handle provided outside, the presence or absence of a suction force by the permanent magnet can be switched.

즉, 헤드(42)는, 공작기계(1)에 대하여 착탈 가능하고, 각 흡착블록(424)을 이용하여, 헤드(42)를 숫돌헤드(332) 등의 표면의 적절한 위치에 장착할 수 있다.That is, the head 42 is detachable from the machine tool 1, and the head 42 can be mounted at an appropriate position on the surface of the grinding stone head 332 using each suction block 424. .

각 흡착블록(424)에 의한 헤드(42)의 장착 시에는, 지그(421) 및 각 측정자(41)가 적정한 방향 및 배치가 되도록 적절히 조정되고, 기대(423)-지지부재(422) 간의 각도조정에 의하여 더 정확하게 조정된다.When the head 42 is mounted by each adsorption block 424, the jig 421 and each measuring element 41 are properly adjusted so that they are in an appropriate direction and arrangement, and the angle between the base 423 and the support member 422 It is more accurately adjusted by adjustment.

또, 헤드(42)의 3개의 측정자(41), 고정지그(414) 및 지그(421)에는, 단열구조가 형성되어 있다.In addition, the three measuring elements 41, the fixing jig 414, and the jig 421 of the head 42 are provided with a heat insulating structure.

구체적으로는, 도 3의 (B)에 나타내는 바와 같이, 3개의 측정자(41), 고정지그(414) 및 지그(421)는, 단열부재(43)에 내포된 상태로 되어 있다.Specifically, as shown in FIG. 3B, the three measuring elements 41, the fixing jig 414, and the jig 421 are contained in the heat insulating member 43.

단열부재(43)는, 3개의 측정자(41), 고정지그(414) 및 지그(421)의 표면의 전체(각 측정자(41)의 광파이버의 접속부분을 제외함)를 피복하고 있다. 이 단열부재(43)에는, 각 측정자(41)의 출력면의 출사측에 검출광의 출사 또는 반사광의 입사를 행하기 위한 개구부(431)가 형성되어 있다.The heat insulating member 43 covers the three measuring elements 41, the fixing jig 414, and the entire surface of the jig 421 (excluding the connection portion of the optical fiber of each measuring element 41). In the heat insulating member 43, an opening 431 for emitting detection light or incidence of reflected light is formed on the output side of the output surface of each measuring person 41.

다만, 단열부재(43)는, 도시와 같이, 블록상의 단열부재(43)의 내측에 3개의 측정자(41) 및 지그(421)가 감합(嵌合)하는 오목부를 형성하고, 당해 오목부에 3개의 측정자(41) 및 지그(421)를 격납하는 구조로 해도 되고, 시트상의 1개의 단열부재(43)에 의하여, 3개의 측정자(41) 및 지그(421)의 표면 전체를 감싸는 구조로 해도 된다. 이 경우, 3개의 측정자(41)의 사이에 공간이 생기므로, 동일 공간내에서 각 측정자(41) 간의 측정환경이 평균화되어, 각 측정자(41) 간의 편차가 저감된다.However, as shown in the figure, the heat insulating member 43 forms a recess in which the three measurers 41 and the jig 421 fit inside the block-shaped heat insulating member 43, and the recess is It may be a structure in which the three measuring elements 41 and the jig 421 are stored, or a structure covering the entire surface of the three measuring elements 41 and the jig 421 by one sheet-shaped heat insulating member 43 do. In this case, since a space is created between the three measurement persons 41, the measurement environment between the measurement persons 41 in the same space is averaged, and the deviation between the measurement persons 41 is reduced.

또, 발포성의 단열재료를 3개의 측정자(41) 및 지그(421)의 표면에 분사해도 된다. 이 경우, 간단하게 측정자(41)를 단열재료로 피복할 수 있다.Further, a foamable heat insulating material may be sprayed onto the surfaces of the three measuring devices 41 and the jig 421. In this case, the measuring element 41 can be easily covered with an insulating material.

또, 도시는 하지 않지만 측정자(41)를 각각 개별적으로 단열재료 또는 단열부재로 감싸는 구조로 해도 된다. 단 이 경우, 센서 자체의 편차를 교정한 다음 계측을 행하는 것이 바람직하다.In addition, although not shown, the measuring elements 41 may be individually wrapped with a heat insulating material or a heat insulating member. However, in this case, it is desirable to perform measurement after correcting the deviation of the sensor itself.

각 측정자(41)를 피복하는 단열재료로서는, 섬유계 단열재인 글라스 울, 로크 울, 셀룰로스 섬유, 탄화 코르크, 양모 단열재 등이나, 발포계 단열재인 유레테인 폼, 페놀 폼, 폴리스타이렌 폼 등의 이른바 단열재로 불리는 소재가 바람직하지만, 이들에 한정되지 않는다. 예를 들면, 열전도율이 5.0[W/mk] 이하, 바람직하게는 1.0[W/mk] 이하, 보다 바람직하게는 0.5[W/mk] 이하인 다른 단열성의 소재를 이용해도 된다.As the insulating material covering each of the measuring elements 41, so-called fiber-based insulating materials such as glass wool, lock wool, cellulose fiber, carbonized cork, wool insulating material, and the like, urethane foam, phenolic foam, polystyrene foam, etc. Although a material called a heat insulating material is preferable, it is not limited to these. For example, other heat insulating materials having a thermal conductivity of 5.0 [W/mk] or less, preferably 1.0 [W/mk] or less, and more preferably 0.5 [W/mk] or less may be used.

이 단열부재(43)에 의하여, 3개의 측정자(41), 고정지그(414) 및 지그(421)는, 바깥 공기로부터 단열되어, 외부의 환경온도로부터 받는 영향의 저감이 도모되고 있다.By this heat insulating member 43, the three measuring elements 41, the fixing jig 414, and the jig 421 are insulated from outside air, and the influence received from the external environmental temperature is reduced.

[제어장치][Control device]

제어장치(60)는, 공작기계(1)를 전체적으로 통괄제어하기 위한 장치이며, 예를 들면 CPU(Central Processing Unit), RAM(Random Access Memory), ROM(Read Only Memory), 그 외의 불휘발성 메모리 등을 구비한 컴퓨터이다.The control device 60 is a device for controlling the machine tool 1 as a whole, for example, a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), and other nonvolatile memories. It is a computer with a back.

제어장치(60)는, 도 2에 나타내는 바와 같이, 전술한 테이블이송모터(351), 새들이동모터(321), 숫돌승강모터(333), 숫돌회전모터(341)와 전기적으로 접속되어 있으며, 이들의 구동을 제어할 수 있다.The control device 60 is electrically connected to the table transfer motor 351, the saddle moving motor 321, the whetstone lifting motor 333, and the grinding stone rotating motor 341, as shown in FIG. 2, Their driving can be controlled.

또, 제어장치(60)는, 형상측정장치(40), 표시장치(61), 입력장치(62)와 접속되어 있다.Further, the control device 60 is connected to the shape measuring device 40, the display device 61, and the input device 62.

표시장치(61)는, 각종 정보를 표시하기 위한 장치이며, 예를 들면 액정 디스플레이 등이다.The display device 61 is a device for displaying various types of information, and is, for example, a liquid crystal display.

입력장치(62)는, 공작기계(1)에 각종 정보나 각종 지령을 입력하기 위한 입력 인터페이스이다.The input device 62 is an input interface for inputting various types of information and various commands to the machine tool 1.

상기 제어장치(60)는, 연삭제어부(63), 형상측정처리부(64)를 구비하고 있다.The control device 60 includes a light removal control unit 63 and a shape measurement processing unit 64.

제어장치(60)는, 예를 들면 연삭제어부(63) 및 형상측정처리부(64)로서의 기능에 대응하는 각종 프로그램을 ROM에 격납하고 있고, CPU가 각각의 프로그램을 실행함으로써, 연삭제어부(63) 및 형상측정처리부(64)로서의 기능을 실현시킨다. 다만, 연삭제어부(63), 형상측정처리부(64)로서의 회로를 개별적으로 마련하여, 하드웨어에 의하여 실현되는 구성으로 해도 된다.The control device 60 stores various programs corresponding to functions as the soft delete control unit 63 and the shape measurement processing unit 64, for example, in the ROM, and the CPU executes each program, so that the soft delete control unit 63 And the function as the shape measurement processing unit 64 is realized. However, circuits as the light removal control unit 63 and the shape measurement processing unit 64 may be separately provided, and a configuration implemented by hardware may be employed.

연삭제어부(63)는, 공작기계(1)에 의한 워크의 연삭가공에 있어서의 동작제어를 실행한다. The light removal fisherman 63 performs operation control in grinding work of a work by the machine tool 1.

예를 들면, 전술한 입력장치(62)에 의하여, 미리 숫돌의 회전수, 연삭깊이, 연삭범위 등의 각종 가공조건이 입력되면, 연삭제어부(63)는, 테이블이송모터(351), 새들이동모터(321), 숫돌승강모터(333), 숫돌회전모터(341)를 제어하고, 입력된 가공조건에 근거하는 연삭가공을 실행한다.For example, when various processing conditions, such as the number of revolutions, grinding depth, and grinding range, are input in advance by the above-described input device 62, the soft removal fisherman 63, the table transfer motor 351, the saddle movement The motor 321, the grinding stone lifting motor 333, and the grinding stone rotating motor 341 are controlled, and grinding processing is performed based on the input processing conditions.

형상측정처리부(64)는, Y축방향으로 3개의 측정자(41)를 주사했을 때의 검출출력으로부터 3점법에 의하여 워크의 표면형상을 측정하는 처리를 행한다.The shape measurement processing unit 64 performs a process of measuring the surface shape of a work by a three-point method from the detection output when three measuring elements 41 are scanned in the Y-axis direction.

도 4는 워크(W)의 표면에 대한 주사를 행하는 경우의 개념도, 도 5의 (a) 및 도 5의 (b)는 워크(W)의 표면까지의 거리 및 곡률의 산출의 설명도이다. 다만, 도 4 및 도 5에서는 3개의 측정자(41)를 구별하기 위하여, 이들 부호를, 주사방향상류측(워크(W)의 반송방향하류측)부터 순서대로 41a, 41b, 41c로 한다.Fig. 4 is a conceptual diagram when scanning is performed on the surface of the work W, and Figs. 5A and 5B are explanatory views for calculating the distance and curvature to the surface of the work W. However, in Figs. 4 and 5, in order to distinguish the three measuring persons 41, these symbols are denoted by 41a, 41b, and 41c in order from the upstream side in the scanning direction (the downstream side in the conveyance direction of the work W).

도 4~도 5의 (b)에 근거하여 형상측정처리부(64)가 실행하는 측정방법의 내용을 설명한다.Contents of the measurement method executed by the shape measurement processing unit 64 will be described based on FIGS. 4 to 5B.

형상측정처리부(64)는, 도 4에 나타내는 바와 같이, 형상측정 시에 있어서, 테이블이송모터(351)를 제어하여, 규정의 속도로 워크(W)를 Y축방향을 따라 반송한다. 이 상태에서, 3개의 측정자(41)에 의하여 규정의 주기로 형상측정을 실행함으로써, 워크(W)의 표면에 대한 주사가 실행된다.As shown in Fig. 4, the shape measurement processing unit 64 controls the table transfer motor 351 to transfer the work W along the Y-axis direction at a prescribed speed during shape measurement. In this state, by performing shape measurement at a prescribed period by three measuring persons 41, a scan on the surface of the work W is performed.

측정자(41a, 41b, 41c)는, 도 5의 (a)에 나타내는 바와 같이, 간격 P로 X축방향으로 일렬로 배치되어 있다. 이 때의 워크(W)의 표면상의 a점, b점, c점까지의 Z축방향의 거리를 측정한다.The measuring elements 41a, 41b, and 41c are arranged in a row in the X-axis direction at intervals P, as shown in Fig. 5A. At this time, the distances in the Z-axis direction to points a, b, and c on the surface of the work W are measured.

측정자(41a, 41b, 41c)에 의하여 구해지는 각 측정자(41a, 41b, 41c)의 출력면부터 워크(W)의 표면까지의 Z축방향을 따른 거리를 각각 A, B, C로 하면, b점부터 선분 ac까지의 Z축방향을 따른 거리(갭 g라 함)는, 다음 식 (1)에 의하여 구해진다.If the distances along the Z-axis direction from the output surface of each measurer 41a, 41b, 41c to the surface of the work W determined by the measurers 41a, 41b, 41c are A, B, C, b The distance from the point to the line segment ac along the Z-axis direction (referred to as the gap g) is obtained by the following equation (1).

g=B-(A+C)/2 …(1)g=B-(A+C)/2 … (One)

한편, 워크(W)의 표면의 b점에 있어서의 변위 z의 2차 미분(d2z/dx2)은, b점의 곡률(1/r)이며, 도 5의 (b)에 나타내는 바와 같이, 선분 ab의 기울기(dzab/dx)와, 선분 bc의 기울기(dzbc/dx)의 사이에 다음 식 (2)가 성립한다.On the other hand, the second derivative (d 2 z/dx 2 ) of the displacement z at the point b of the surface of the work W is the curvature (1/r) at the point b, as shown in Fig. 5(b) Similarly, the following equation (2) holds between the slope of the line segment ab (dz ab /dx) and the slope of the line segment bc (dz bc /dx).

[수학식 1][Equation 1]

Figure pat00001
Figure pat00001

선분 ab의 기울기(dzab/dx)는 다음 식 (3)으로 구해지고, 선분 bc의 기울기(dzbc/dx)는 다음 식 (4)로 구해진다.The slope of the line segment ab (dz ab /dx) is obtained by the following equation (3), and the slope of the line segment bc (dz bc /dx) is obtained by the following equation (4).

따라서, 상기 식 (2)에 다음 식 (3), (4)를 대입하고, 다시 식 (1)을 대입하면, 다음 식 (5)가 구해진다. 따라서, 변위 z의 2차 미분인 b점의 곡률은, 갭 g 및 측정자(41a, 41b, 41c)의 간격 P로부터 구할 수 있다.Therefore, if the following equations (3) and (4) are substituted into the above equation (2) and the equation (1) is substituted again, the following equation (5) is obtained. Accordingly, the curvature of the point b, which is the second derivative of the displacement z, can be obtained from the gap g and the interval P between the measuring elements 41a, 41b, and 41c.

[수학식 2][Equation 2]

Figure pat00002
Figure pat00002

[수학식 3][Equation 3]

Figure pat00003
Figure pat00003

[수학식 4][Equation 4]

Figure pat00004
Figure pat00004

측정자(41a, 41b, 41c)의 간격 P는 이미 알고 있으며, 미리 제어장치(60)의 메모리에 기록해 둘 수 있다.The interval P between the measuring persons 41a, 41b, and 41c is already known, and can be recorded in the memory of the control device 60 in advance.

형상측정처리부(64)는, 주사 시에, 각 측정자(41a, 41b, 41c)에 의한 검출출력으로부터 거리 A, B, C를 취득하고, 식 (1)에 근거하여 갭 g를 산출한다. 또한, 메모리로부터 간격 P의 값을 읽어냄과 함께, 식 (5)에 근거하여 곡률을 산출한다. 그리고, 구해진 곡률을 적분피치로 2차 적분함으로써, 임의의 x점에 있어서의 변위 z를 구할 수 있다. 적분피치는, 예를 들면 주사 시에 있어서의 X방향의 각 측정자(41a, 41b, 41c)의 데이터취득간격(주사속도×샘플링주기) 등이다.At the time of scanning, the shape measurement processing unit 64 acquires distances A, B, and C from the detection output of each measuring person 41a, 41b, and 41c, and calculates the gap g based on equation (1). Further, while reading the value of the interval P from the memory, the curvature is calculated based on equation (5). Then, by integrating the obtained curvature by the integral pitch, the displacement z at an arbitrary x point can be obtained. The integral pitch is, for example, the data acquisition interval (scanning speed x sampling period) of each of the measuring subjects 41a, 41b, and 41c in the X direction during scanning.

[공작기계의 동작][Machine tool operation]

제어장치(60)는, 연삭제어부(63)의 제어하에, 설정된 연삭깊이가 되도록 숫돌승강모터(333)를 구동하고, 설정된 숫돌의 회전수로 숫돌회전모터(341)의 구동을 실행한다.The control device 60 drives the grinding wheel lifting motor 333 to a set grinding depth under the control of the grinding wheel removal unit 63, and drives the grinding wheel rotating motor 341 at the set rotation speed of the grinding wheel.

그리고, 테이블이송모터(351)에 의하여 연삭장치(34)의 숫돌(34a)을 워크에 대하여 상대적으로 X축방향으로 보내면서 연삭을 실행한다. 또한, 새들이동모터(321)의 구동에 의하여 숫돌(34a)을 소정의 거리단위로 Y축방향으로 이동시키면서, X축방향의 연삭을 반복하며, 워크(W)에 대하여, 설정된 연삭범위의 연삭을 실행한다.Then, grinding is performed while the grinding stone 34a of the grinding device 34 is sent relative to the work in the X-axis direction by the table transfer motor 351. In addition, by the drive of the saddle motor 321, while moving the grinding stone 34a in the Y-axis direction by a predetermined distance unit, grinding in the X-axis direction is repeated, and for the workpiece W, grinding of the set grinding range Run.

다음으로, 제어장치(60)는, 연삭 후의 워크(W)에 대하여, 가공면의 곡률 및 평면도의 검출을 행한다.Next, the control device 60 detects the curvature and flatness of the processed surface with respect to the workpiece W after grinding.

즉, 테이블이송모터(351) 및 새들이동모터(321)의 구동에 의하여, 숫돌헤드(332)에 장착된 헤드(42)의 각 측정자(41)의 검출위치가 워크(W)의 검색범위의 개시위치가 되도록 헤드(42)와 워크(W)의 상대적인 위치결정을 행한다. 또, 숫돌승강모터(333)를 구동하여 각 측정자(41)의 출력면이 규정의 높이가 되도록 조정한다.That is, by the driving of the table transfer motor 351 and the saddle motor 321, the detection position of each measurer 41 of the head 42 mounted on the grinding stone head 332 is within the search range of the work W. The relative positioning of the head 42 and the work W is performed so that the starting position is reached. Further, the grinding wheel lifting motor 333 is driven to adjust the output surface of each measuring person 41 to a specified height.

그리고, 테이블이송모터(351)에 의하여 워크(W)를 소정의 속도로 반송하고, X축방향을 주사방향으로 하여, 각 측정자(41)에 있어서 소정의 샘플링주기로 Z축방향의 거리 A, B, C를 검출한다. 이에 근거하여, 연삭범위의 주사방향의 전장에 걸쳐 갭 g를 산출한다.Then, the work W is conveyed at a predetermined speed by the table transfer motor 351, and the X-axis direction is the scanning direction, and the distances A and B in the Z-axis direction at a predetermined sampling period in each measuring person 41 , Detect C. Based on this, the gap g is calculated over the entire length of the grinding range in the scanning direction.

또한, 새들이동모터(321)의 구동에 의하여 숫돌(34a)을 소정의 거리단위로 Y축방향으로 이동시키면서, X축방향의 연삭범위 전체에 걸쳐 곡률 및 변위 z를 구하고, 연삭범위 전체의 평면도를 측정한다.In addition, while moving the grindstone 34a in the Y-axis direction by the drive of the saddle motor 321, the curvature and displacement z are obtained over the entire grinding range in the X-axis direction, and the flatness of the entire grinding range Measure

[발명의 실시형태의 기술적 효과][Technical effect of the embodiment of the invention]

상기 공작기계(1)는, X축방향(주사방향)으로 나열되어 마련된 3개의 측정자(41)에 의하여 주사방향으로 주사하여 워크의 표면형상으로서의 평면도를 계측하는 형상측정장치(40)를 구비하고 있고, 당해 형상측정장치(40)의 3개의 측정자(41)는, 단열부재(43)에 내포되어 있다.The machine tool 1 includes a shape measuring device 40 that scans in the scanning direction by three measuring devices 41 arranged in the X-axis direction (scanning direction) and measures the flatness as the surface shape of the work. In addition, the three measuring elements 41 of the shape measuring device 40 are contained in the heat insulating member 43.

이 때문에, 3개의 측정자(41)는, 단열부재(43)에 내포된 상태로 계측이 행해져, 각 측정자(41)에 대하여, 주위의 환경온도변화의 영향을 저감시켜, 곡률이나 변위에 대하여 정밀도가 높은 검출을 행하는 것이 가능해진다.For this reason, the measurement is performed in the state that the three measuring persons 41 are contained in the heat insulating member 43, and for each measuring person 41, the influence of ambient temperature change is reduced, and accuracy with respect to curvature and displacement is reduced. It becomes possible to perform high detection.

또, 형상측정장치(40)는, 3개의 측정자(41)를 이용하여, 3점법에 의하여 워크(W)의 표면형상을 계측하고 있으므로, 각 측정자(41)의 Z축방향의 운동오차나 피칭운동오차를 상쇄하여, 정밀도가 높은 검출을 행하는 것이 가능해진다.In addition, since the shape measuring device 40 measures the surface shape of the workpiece W by the three-point method using three measuring elements 41, the motion error or pitching of each measuring element 41 in the Z-axis direction It is possible to cancel motion errors and perform highly accurate detection.

또한, 각 측정자(41)의 온도특성이 개별적으로 다른 것 같은 경우여도, 단열부재(43)가 개개의 측정자(41)의 환경온도의 영향을 저감시키므로, 검출정밀도의 저하를 효과적으로 억제하는 것이 가능해진다.In addition, even in the case that the temperature characteristics of each measuring person 41 are individually different, the heat insulating member 43 reduces the influence of the environmental temperature of each measuring person 41, so it is possible to effectively suppress a decrease in detection accuracy. It becomes.

또, 단열부재(43)는, 3개의 측정자(41)를 일체적으로 지지하는 지그(421)도 내포하고 있으므로, 지그(421)에 대한 환경온도변화의 영향을 저감시킬 수 있어, 가일층의 정밀도가 높은 검출을 행하는 것이 가능해진다.In addition, since the heat insulating member 43 also includes a jig 421 that integrally supports the three measuring devices 41, it is possible to reduce the influence of environmental temperature change on the jig 421, further increasing precision. It becomes possible to perform high detection.

또, 단열부재(43)는, 지지부재(422)와 지그(421)를 합하여 피복하므로, 형상측정장치(40) 전체를 덮는 경우보다 비용을 저감시키는 것이 가능하다. 또, 기대(423)는 단열부재(43)에 의하여 피복되어 있지 않기 때문에, 먼저 지지부재(422) 및 지그(421)를 단열부재(43)로 합하여 피복한 후에, 이들을 기대(423)에 접속할 수 있어, 형상측정장치(40) 전체를 피복부재(43)로 피복하는 것보다 간단하게 단열부재(43)를 설치하는 것이 가능하다. In addition, since the heat insulating member 43 covers the support member 422 and the jig 421 together, it is possible to reduce the cost compared to the case of covering the shape measuring device 40 as a whole. Further, since the base 423 is not covered by the heat insulating member 43, first, the support member 422 and the jig 421 are combined and covered with the heat insulating member 43, and then they can be connected to the base 423. Thus, it is possible to install the heat insulating member 43 more simply than covering the entire shape measuring device 40 with the covering member 43.

또, 공작기계(1)는, 테이블이송모터(351)에 의하여, 3개의 측정자(41)를 워크(W)에 대하여 주사방향을 따라 상대적으로 이동시키는 반송기구를 가지므로, 3점법에 있어서의 3개의 측정자(41)의 주사를 양호하게 행하는 것이 가능하다.In addition, the machine tool 1 has a conveying mechanism that moves the three measuring elements 41 relative to the work W along the scanning direction by the table conveying motor 351, It is possible to satisfactorily perform the scanning of the three measuring persons 41.

또, 3개의 측정자(41)는, 모두 광원(411)이 광파이버(413)를 개재하여 단열부재(43)의 외부에 이격하여 마련되어 있으므로, 광원(411)이 열을 발생시키는 경우여도, 단열부재(43) 내의 온도의 영향을 충분히 저감시킬 수 있어, 정밀도가 높은 검출을 행하는 것이 가능하다.In addition, since the three measurers 41 are all provided with the light source 411 spaced apart from the heat insulating member 43 through the optical fiber 413, even if the light source 411 generates heat, the heat insulating member (43) The influence of the internal temperature can be sufficiently reduced, and high-precision detection can be performed.

[그 외][etc]

이상, 본 발명의 각 실시형태에 대하여 설명했다. 그러나, 본 발명은 상기의 실시형태에 한정되지 않는다. 예를 들면, 공작기계(1)로서 연삭반을 예시했지만, 가공 후의 워크(W)의 표면형상을 측정하는 용도가 있는 다른 공작기계에도 형상측정장치(40)는 탑재 가능하다. 예를 들면, 절삭반 등에도 형상측정장치(40)를 탑재 가능하다.In the above, each embodiment of the present invention has been described. However, the present invention is not limited to the above embodiments. For example, although the grinding plate was illustrated as the machine tool 1, the shape measuring device 40 can be mounted on other machine tools that have a purpose of measuring the surface shape of the workpiece W after processing. For example, the shape measuring device 40 can be mounted on a cutting board or the like.

또, 예를 들면 도 6에 나타내는 바와 같이, 3개의 측정자(41)나 고정지그(414) 및 지그(421)를 복수의 단열부재로 구성된 단열구조(43A)에 내포하는 구성으로 해도 된다.Further, for example, as shown in Fig. 6, the three measuring elements 41, the fixing jig 414, and the jig 421 may be included in a heat insulating structure 43A composed of a plurality of heat insulating members.

예를 들면, 단열구조(43A)는, 3개의 측정자(41)나 고정지그(414) 및 지그(421)를 내부에 격납하는 단열부재로서의 내측층(432A)과, 내측층(432A)의 전체를 내측에 격납하는 단열부재로서의 외측층(433A)을 갖는 2층 구조로 하고, 내측층(432A)과 외측층(433A)의 사이의 중공 에어리어를 진공화하여 진공단열구조를 구성한다. 또, 이 경우도, 각 측정자(41)의 출력면측에는, 검출광이나 반사광이 통과하는 개구부(431A)를 마련하는 것이 바람직하다.For example, the heat insulating structure 43A includes the inner layer 432A and the inner layer 432A as a heat insulating member storing the three measuring elements 41, the fixing jig 414 and the jig 421 therein. A two-layer structure having an outer layer 433A as a heat insulating member stored inside, and a hollow area between the inner layer 432A and the outer layer 433A is evacuated to constitute a vacuum insulating structure. Also in this case, it is preferable to provide an opening 431A through which detection light or reflected light passes on the output surface side of each measuring person 41.

이 경우, 내측층(432A)과 외측층(433A)의 사이에 진공층을 마련함으로써 외부와의 효과적인 단열을 도모하는 것이 가능하다.In this case, by providing a vacuum layer between the inner layer 432A and the outer layer 433A, it is possible to achieve effective heat insulation from the outside.

또, 내측층(432A) 및 외측층(433A) 그 자체는 단열재료로서 형성하지 않아도, 단열효과를 얻을 수 있다. 따라서, 예를 들면 내측층(432A) 및 외측층(433A)을, 가공이 용이하며 강도를 얻기 쉬운 금속재료로 형성해도 된다.Moreover, even if the inner layer 432A and the outer layer 433A itself are not formed as a heat insulating material, a heat insulating effect can be obtained. Therefore, for example, the inner layer 432A and the outer layer 433A may be formed of a metal material that is easy to process and easy to obtain strength.

이들 구성의 경우도, 3개의 측정자(41)는, 단열구조(43A)에 의하여 주위의 환경온도변화의 영향을 저감시켜, 곡률이나 변위에 대하여 정밀도가 높은 검출을 행하는 것이 가능해진다.Even in the case of these configurations, the three measuring persons 41 can perform highly accurate detection of curvature and displacement by reducing the influence of the ambient temperature change by the heat insulating structure 43A.

또, 전술한 헤드(42)에서는, 지그(421)와 지지부재(422)가 직접적으로 접촉하여 연결되어 있는 경우를 예시했지만, 이들 사이에도 단열재료를 개재하여, 열전달을 억제하는 구성으로 해도 된다.In addition, in the above-described head 42, a case in which the jig 421 and the support member 422 are directly contacted and connected has been illustrated, but the heat transfer may be suppressed by interposing an insulating material therebetween. .

또, 각 측정자(41)로부터 광원(411) 및 수광소자(412)를 접속하는 광파이버(413)도 단열재료 등에 의하여 주위로부터 단열을 도모해도 된다.Further, the optical fiber 413 that connects the light source 411 and the light receiving element 412 from each measuring device 41 may also be insulated from the surroundings by an insulating material or the like.

1 공작기계
34 연삭장치
34a 숫돌
35 베드
36 테이블
40 형상측정장치
41 측정자
41a, 41b, 41c 측정자
42 헤드
421 지그
43 단열부재
43A 단열구조
60 제어장치
63 연삭제어부
64 형상측정처리부
351 테이블이송모터
332 숫돌헤드
411 광원
412 수광소자
413 광파이버(광전도부재)
W 워크(측정대상물)1 machine tool
34 Grinding device
34a whetstone
35 beds
36 tables
40 Shape measuring device
41 measurer
41a, 41b, 41c measurer
42 head
421 jig
43 Insulation member
43A insulation structure
60 control unit
63 fisherman
64 Shape measurement processing unit
351 Table transfer motor
332 Whetstone Head
411 light source
412 light receiving element
413 Optical fiber (photoconductive member)
W work (object to be measured)

Claims (7)

주사방향으로 나열되어 마련된 3개의 측정자에 의하여 상기 주사방향으로 주사하여 측정대상물의 표면형상을 계측하는 형상측정장치로서,
상기 3개의 측정자를 단열재료 또는 단열부재에 내포한 형상측정장치.A shape measuring device for measuring the surface shape of an object to be measured by scanning in the scanning direction by three measuring persons arranged in a scanning direction,
A shape measuring device in which the three measuring elements are embedded in an insulating material or a heat insulating member. 제1항에 있어서,
상기 3개의 측정자를 이용하여, 3점법에 의하여 측정대상물의 표면형상을 계측하는 형상측정장치.The method of claim 1,
A shape measuring device for measuring the surface shape of an object to be measured by using the three measuring devices. 제1항 또는 제2항에 있어서,
상기 3개의 측정자를 일체적으로 지지하는 지그를 구비하고,
상기 3개의 측정자를 상기 지그와 함께 상기 단열재료 또는 상기 단열부재에 내포한 형상측정장치.The method according to claim 1 or 2,
It has a jig that integrally supports the three measuring elements,
A shape measuring device in which the three measuring elements are embedded in the heat insulating material or the heat insulating member together with the jig. 제1항 또는 제2항에 있어서,
상기 3개의 측정자를, 1개의 상기 단열부재로 덮은 형상측정장치.The method according to claim 1 or 2,
A shape measuring device in which the three measuring elements are covered with one of the heat insulating members. 제1항 또는 제2항에 있어서,
상기 3개의 측정자를 상기 측정대상물에 대하여 상기 주사방향을 따라 상대적으로 이동시키는 주사기구를 구비하는 형상측정장치.The method according to claim 1 or 2,
A shape measuring device comprising a syringe tool for relatively moving the three measuring elements along the scanning direction with respect to the measurement object. 제1항 또는 제2항에 있어서,
상기 3개의 측정자는, 모두 광원이 광전도부재를 개재하여 상기 단열재료 또는 상기 단열부재의 외부에 이격하여 마련되어 있는 형상측정장치.The method according to claim 1 or 2,
The shape measuring apparatus in which all of the three measuring elements have a light source interposed between a photoconductive member and spaced apart from the outside of the insulating material or the insulating member. 주사방향으로 나열되어 마련된 3개의 측정자에 의하여 상기 주사방향으로 주사하여 측정대상물의 표면형상을 계측하는 형상측정방법으로서,
상기 3개의 측정자를 단열재료 또는 단열부재에 내포한 상태로 계측하는 형상측정방법.A shape measuring method for measuring the surface shape of an object to be measured by scanning in the scanning direction by three measuring persons arranged in a scanning direction,
A shape measurement method for measuring the three measuring elements in a state of being embedded in a heat insulating material or a heat insulating member.
KR1020200032698A 2019-03-18 2020-03-17 Apparatus and method for detecting shape KR20200111116A (en)

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