KR20170082079A - The system and method for detecting defect of substrate using moving detection device - Google Patents

The system and method for detecting defect of substrate using moving detection device Download PDF

Info

Publication number
KR20170082079A
KR20170082079A KR1020160001251A KR20160001251A KR20170082079A KR 20170082079 A KR20170082079 A KR 20170082079A KR 1020160001251 A KR1020160001251 A KR 1020160001251A KR 20160001251 A KR20160001251 A KR 20160001251A KR 20170082079 A KR20170082079 A KR 20170082079A
Authority
KR
South Korea
Prior art keywords
substrate
defect
inspection equipment
mobile inspection
absence
Prior art date
Application number
KR1020160001251A
Other languages
Korean (ko)
Inventor
김재현
양명곤
최항석
박창석
김호진
Original Assignee
주식회사 엘지화학
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 엘지화학 filed Critical 주식회사 엘지화학
Priority to KR1020160001251A priority Critical patent/KR20170082079A/en
Publication of KR20170082079A publication Critical patent/KR20170082079A/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/02—Mechanical

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

As an embodiment of the present invention, a system for detecting presence or absence of defects of a substrate using a mobile inspection equipment can be provided. A system for detecting presence / absence of a substrate using a mobile inspection apparatus according to an embodiment of the present invention includes a substrate transporting unit for transporting a substrate, a mobile inspection equipment disposed at a predetermined angle with a substrate transported through the substrate transporting unit, A guide part for guiding the movement of the inspection equipment, and an information acquisition part for acquiring data on the substrate in real time, the moving part being connected to the mobile inspection equipment and including a camera and a light source, So that it can reciprocate by the width of the substrate.

Figure P1020160001251

Description

TECHNICAL FIELD [0001] The present invention relates to a system for detecting the presence or absence of defects on a substrate using a mobile inspection apparatus, and a method for detecting presence / absence of defects on a substrate through the system.

The present invention relates to a system for detecting the presence or absence of a defect in a substrate using a mobile inspection apparatus and a method for detecting presence or absence of a defect in the substrate through the system, and more particularly to a mobile inspection apparatus (for example, A camera and a light source), and a method for detecting the presence or absence of a defect in a substrate using the system.

Recently, various thin film type display devices such as an organic light emitting diode display (OLED), a liquid crystal display (LCD), and a plasma display (PDP) have emerged due to the explosion of optical technology. These thin film type display devices are thinner, lighter, and operate at lower power than conventional CRT cathode tubes, and their usability is increasing. Such thin film type display devices generally have a structure including a polarizing plate for providing a specific polarized light to a display panel, and the polarizing plate includes a polarizer and a protective film or the like that can be attached to one or both sides of the polarizer to protect the polarizer .

Such a protective film or a polarizing film may cause bubbles in its production, processing and distribution, or may cause optical defects in the appearance of the film due to folding. The defective film can be produced in the inspection process for detecting defects to produce a display device of high quality. In other words, in order to greatly reduce the defect rate and improve the productivity of the display device, it is necessary to detect the defective film quickly and accurately. For this purpose, there is a method for detecting the presence or absence of defects of a substrate, May be more important.

The system for detecting and detecting defects in a substrate using the mobile inspection equipment provided as an embodiment of the present invention can quickly and accurately detect defects on a substrate generated during manufacturing, processing, or distribution of substrates such as optical films I want to.

As one embodiment of the present invention, there is provided a system for detecting presence / absence of a defect in a substrate using a mobile inspection equipment and a method for detecting presence / absence of a defect in the substrate through the system.

A system for detecting presence / absence of a substrate using a mobile inspection apparatus according to an embodiment of the present invention includes a substrate transporting unit for transporting a substrate, a mobile inspection equipment disposed at a predetermined angle with a substrate transported through the substrate transporting unit, A guide part for guiding the movement of the inspection equipment, and an information acquisition part for acquiring data on the substrate in real time, the moving part being connected to the mobile inspection equipment and including a camera and a light source, So that it can reciprocate by the width of the substrate.

The substrate carrier according to an embodiment of the present invention can be formed to have a roll-to-roll structure, and the defect presence / absence detection system can detect defects generated in a direction parallel to the transport direction of the substrate.

Further, the mobile inspection equipment according to an embodiment of the present invention is arranged to be inclined by a predetermined angle with respect to the plane of the substrate, and the predetermined angle is included in the range of 10 to 80 degrees, Can be determined.

The guide part according to an embodiment of the present invention is a linear rail which is elongated so as to have a length value larger than the width of the substrate by a predetermined height with respect to the surface of the base material and the height of the first guide part on which the camera is mounted, 2 The height of the guide portion may be the same or different.

The system for detecting the presence or absence of a defect in a substrate using a mobile inspection apparatus according to an embodiment of the present invention may further include an index inserter for inserting a mark to indicate that a defect exists in the substrate, The part may allow the marker insert to insert the marker into the substrate.

A method for detecting the presence or absence of a defect in a substrate through a system for detecting a presence or absence of a defect in a substrate using a mobile inspection apparatus according to an embodiment of the present invention includes the steps of transporting a substrate to be subjected to defect detection, Determining whether there is a defect on the substrate based on the result of the analysis, and determining whether the defect is present on the substrate based on the result of the analysis. The mobile inspection equipment includes a camera and a light source, and the mobile inspection equipment can reciprocate by a width of the substrate.

The movable inspection equipment according to an embodiment of the present invention is arranged to be inclined by a predetermined angle with respect to the plane of the substrate, the predetermined angle is included in the range of 10 to 80 degrees, and the angle can be determined based on the characteristics of the substrate have.

In addition, the method according to an embodiment of the present invention may further include the step of indicating whether or not a defect exists in the substrate based on a result of the determination as to whether or not a defect exists on the substrate, The presence or absence of a defect can be indicated by inserting a mark for indicating that the defect exists in the substrate.

Meanwhile, as an embodiment of the present invention, a computer-readable recording medium on which a program for causing the computer to execute the above-described method may be provided.

Conventionally, a user has manually searched only a limited range of areas on a substrate by using a fixed light source and a camera. On the other hand, if a system for detecting the presence or absence of defects of a substrate using the mobile inspection equipment according to an embodiment of the present invention is used, It is possible to quickly and accurately detect whether or not a defect has occurred on the surface. It is possible to repeatedly cross the transport direction of the substrate or to move continuously by the width of the substrate and automatically detect the occurrence of defects on the substrate, thereby greatly reducing the inspection time required for the substrate.

1 shows a conventional fixed inspection method.
FIG. 2 shows a system for detecting presence or absence of defects of a substrate using a mobile inspection apparatus according to an embodiment of the present invention.
FIG. 3 is a side view and a front view of a substrate defect detection system using a mobile inspection apparatus according to an embodiment of the present invention.
FIG. 4 is a flowchart illustrating a method of detecting a presence or absence of a defect in a substrate through a system for detecting presence / absence of a defect using a mobile inspection apparatus according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

The terms used in this specification will be briefly described and the present invention will be described in detail.

While the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments. Also, in certain cases, there may be a term selected arbitrarily by the applicant, in which case the meaning thereof will be described in detail in the description of the corresponding invention. Therefore, the term used in the present invention should be defined based on the meaning of the term, not on the name of a simple term, but on the entire contents of the present invention.

When an element is referred to as "including" an element throughout the specification, it is to be understood that the element may include other elements, without departing from the spirit or scope of the present invention. Also, the terms "part," " module, "and the like described in the specification mean units for processing at least one function or operation, which may be implemented in hardware or software or a combination of hardware and software . In addition, when a part is referred to as being "connected" to another part throughout the specification, it includes not only "directly connected" but also "connected with other part in between".

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 shows a conventional fixed inspection method.

Defects or defects may occur in the stretching direction (MD) in the base material (1) due to skewing or folding during mass production of the substrate (1) such as an optical film. In the case of using the conventional fixed inspection method, as shown in FIG. 1, the inspection blank interval z0 may be generated. Therefore, in order to minimize the inspection missing interval, the user moving his / her body directly to the left or right side, 1) is detected.

The fixed inspection method is a method in which the light source 10 and the cameras 21, 22, and 23, which are fixedly spaced apart from each other by a predetermined distance with respect to the substrate 1 transported through the substrate transport unit 100, Is used to detect whether or not there is a defect on the surface of the base material 1. In other words, it is a method of detecting whether or not a defect has occurred on the base material 1 in the course of carrying the base material 1 in a state where the light source 10 and the cameras 21, 22 and 23 are fixedly positioned. According to this conventional inspection method, in the case where the defect of the base material 1 exists only in the inspection blank period z0, the inspection for the presence of defects may be omitted, so that the inspection can not be performed correctly.

According to one embodiment of the present invention, by using a mobile inspection equipment capable of moving in the width direction TD of the base material 1, it is possible to prevent the defects generated in the stretching direction MD as well as the width direction TD of the base material 1 Can be quickly and accurately detected.

FIG. 2 illustrates a system for detecting the presence or absence of a substrate using a mobile inspection apparatus according to an exemplary embodiment of the present invention. FIG. 3 is a side view of a system for detecting a presence or absence of a substrate using a mobile inspection apparatus according to an exemplary embodiment of the present invention. And a front view.

A substrate defect detection system 1000 using a mobile inspection apparatus according to an embodiment of the present invention includes a substrate transport unit 100 for transporting a substrate, a substrate transported through the substrate transport unit 100, A guide unit 300 for guiding the movement of the mobile inspection equipment 200 and information for acquiring data on the substrate in real time, which is connected to the mobile inspection equipment 200, The mobile inspection equipment 200 includes a camera 210 and a light source 220. The mobile inspection equipment 200 can reciprocate along the guide unit 300 by a width of the substrate have.

The substrate 1 according to one embodiment of the present invention may be an optical film, a polarizing plate, a sheet coated with a functional material, and the like, but is not limited thereto.

The substrate conveyance unit 100 according to an embodiment of the present invention can be formed to have a roll-to-roll structure, and the defect presence / absence detection system 1000 can detect a defect generated in a direction parallel to the conveying direction of the substrate 1 It can be detected effectively.

In addition, the mobile inspection equipment includes an image acquisition unit for acquiring an image of the substrate 1, which may be a camera 210. FIG. For example, the camera 210 may be a high-speed camera, a high-speed camera, a CCD camera, a CMOS camera, an infrared camera, or the like. To detect the presence or absence of defects in the substrate 1, the mobile inspection equipment 200 includes an illumination unit, which may be referred to as a light source 220.

The camera 210 and the light source 220 may be mounted to the guide unit 300 individually or together. The guide unit 300 guides the movement of the camera 210 and the light source 220 and may have a predetermined height and length. For example, such a guide portion 300 may be in the form of a linear rail. 2, the camera 210 and the light source 220 are coupled to the guide unit 300, respectively. The camera 210 and the light source 220 can be moved across the guide direction 300 in the conveying direction of the base material 1. The moving speed of the mobile inspection equipment 200 may be faster than the rotating speed of the substrate transport unit 100. Since the moving speed of the mobile inspection equipment 200 is faster than the rotation speed of the substrate transport unit 100, data (e.g., images, etc.) about the substrate 1 is collected only at the time of one-way movement in the mobile inspection equipment 200 Data on the substrate 1 may be collected during the reciprocating movement.

2 and 3, the length of the guide portion 300 may be greater than the width of the substrate 1. [

According to an embodiment of the present invention, the information obtaining unit 400 can obtain an image of the base material 1 from the camera 210 in real time using the light source 220. An image for the substrate 1 may include an image for a part of the substrate 1 in which a defect exists. In other words, if there is a defect in a part of the substrate 1, the information obtaining unit 400 can obtain all the images of the substrate 1 in real time as well as the image of the region where the defect exists. In addition, in the information obtaining unit 400, information on the defect position on the substrate 1 can be obtained in real time. The defect position information may be represented by a distance value or the like from the reference position of the base material 1.

A defect due to the folding of the substrate 1 or the like may occur in parallel with the conveying direction of the substrate 1 as shown in Fig. For example, a defect may be generated at a position spaced by 10 millimeters (mm) to the left with respect to the center line of the substrate 1 with respect to the conveying direction of the substrate 1. [ In this case, the information obtaining unit 400 obtains the position information of the substrate 1 based on the value of the encoder mounted on the substrate carrying unit 100 and the distance value separated from the center line of the substrate 1 extracted from the image of the substrate 1, Can be estimated. The encoder may gradually increase from an initial value (for example, 0) in accordance with the operation of the substrate conveyance unit 100. For example, in the encoder, every time the substrate conveyance unit 100 rotates once, Respectively. Further, the value of the encoder may increase by 0.5 every time the substrate conveyance unit 100 rotates 1/4 times. The value of the encoder may be equal to or greater than the length of the substrate 1 stretched in the transport direction.

The information obtaining unit 400 according to an exemplary embodiment of the present invention may be a personal computer, a tablet PC, an electronic device including a programmable logic controller (PLC), and the like. The information obtaining unit 400 can be connected to the mobile inspection equipment 300 through a wired or wireless connection, and can analyze whether the defect exists in the substrate 1 by analyzing the obtained data. The analysis of the data may include acquired image analysis on the substrate 1 and the like.

The system 1000 for detecting presence / absence of a substrate using the mobile inspection equipment according to an embodiment of the present invention further includes an embedding unit 500 for inserting a mark to indicate that a defect exists in the substrate, The information obtaining unit 400 may cause the marker inserter 500 to insert the marker into the base material 1. [ The mark inserting section 500 may be an optical marker inserting device or the like and may be provided so as to face the base material 1 adjacent to the outer boundary of the base material 1. If the information obtaining unit 400 determines that a defect exists on the base material 1, the information obtaining unit 400 causes the marker inserting unit 500 to determine that there is a defect on the base material 1 Markers (e.g., optical markers, laser marking, inkjet marking) can be inserted. In addition, according to the embodiment of the present invention, the marker inserting unit 500 can display an image of characters, symbols, etc. on the image of the base material 1 without inserting markers on the base material itself, It is possible to intuitively and quickly recognize the defects in the optical disc 1.

 In addition, the mobile inspection equipment 200 according to an embodiment of the present invention is arranged to be inclined by a predetermined angle with respect to the plane of the substrate 1, the predetermined angle is included in the range of 10 to 80 degrees, Can be determined on the basis of the characteristics of the substrate (1).

The camera can be installed on the guide part 310 by being inclined by the first angle? 1 with respect to the plane of the base material 1 as shown in FIG. 3 (a). Further, the light source 220 can be installed on the guide part 320 by being inclined by the second angle? 2 with respect to the plane of the base material 1. The first angle? 1 and the second angle? 2 may be the same or different. Further, the first angle? 1 and the second angle? 2 may be values within a range of 10 degrees to 80 degrees. Preferably, the first angle? 1 and the second angle? 2 may be 60 degrees. 3 (b), the camera 210 may be disposed to be inclined by the difference between the vertical direction of the substrate 1 and the third angle? 3 . Preferably, the third angle? 3 may be 75 degrees.

The tilt angle of the mobile inspection equipment 200 may be determined based on the characteristics of the substrate 1. [ For example, the inclination angle of the base material 1 can be determined based on the light reflectance, transmittance, absorption rate, and the like of the base material 1. The user can adjust the tilt angle upon placement of the mobile inspection equipment in accordance with the optical characteristics of the substrate.

The guide portions 310 and 320 according to an embodiment of the present invention are linear rails elongated to have a length value larger than the width of the base material 1 by a predetermined height with respect to the base material surface, The height of the first guide part 310 and the height of the second guide part 320 on which the light source 220 is mounted may be the same or different. As shown in FIG. 3, when the height values of the first guide unit 310 and the second guide unit 320 are made different from each other or the height values are made the same depending on the illuminance of the surrounding environment at the time of inspection, the detection speed and accuracy can be further improved have.

FIG. 4 is a flowchart illustrating a method of detecting a presence or absence of a defect in a substrate through a system for detecting presence / absence of a defect using a mobile inspection apparatus according to an embodiment of the present invention.

The method for detecting the presence or absence of a defect in the substrate 1 through the system 1000 for detecting the presence or absence of a defect in the substrate using the mobile inspection apparatus according to an embodiment of the present invention includes the steps of transporting the substrate 1 to be subjected to defect detection A step S200 of driving a mobile inspection equipment 200 disposed at a predetermined angle with the substrate 1 to be transported, a step S300 of obtaining data on a substrate from the mobile inspection equipment 200 in real time (S400) of analyzing the acquired data and determining whether there is a defect on the substrate based on the result of the analysis (S500). The mobile inspection equipment (200) includes a camera (210) and a light source 220, and the mobile inspection equipment 200 can reciprocate by a width of the substrate 1. [

The mobile inspection equipment 200 according to an embodiment of the present invention is arranged to be inclined by a predetermined angle with respect to the plane of the base material 1, the predetermined angle is within a range of 10 to 80 degrees, 1). ≪ / RTI >

Further, the method according to an embodiment of the present invention further includes a step (S600) of indicating the presence or absence of a defect for the substrate 1 based on a result of the determination as to whether or not there is a defect on the substrate 1 , The presence or absence of a defect can be displayed by inserting a mark on the substrate 1 to indicate that a defect exists in the substrate 1 when a defect exists in the substrate.

With respect to the method according to an embodiment of the present invention, the contents of the above-described system can be applied. Therefore, the description of the same contents as those of the above-described system with respect to the method is omitted.

One embodiment of the present invention may also be embodied in the form of a recording medium including instructions executable by a computer, such as program modules, being executed by a computer. Computer readable media can be any available media that can be accessed by a computer and includes both volatile and nonvolatile media, removable and non-removable media. In addition, the computer-readable medium may include both computer storage media and communication media. Computer storage media includes both volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data. Communication media typically includes any information delivery media, including computer readable instructions, data structures, program modules, or other data in a modulated data signal such as a carrier wave, or other transport mechanism.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

1: substrate
10: Fixed light source 21, 22, 23: Fixed camera
100: substrate carrying part 200: mobile inspection equipment
210: Portable camera 220: Portable light source
300: guide portion
310: first guide part 320: second guide part
400: information obtaining unit 500: marker inserting unit
1000: Detection system of substrate defect using mobile inspection equipment

Claims (9)

A system for detecting presence or absence of defects in a substrate using a mobile inspection equipment,
A substrate carrying part for carrying the substrate;
Movable inspection equipment arranged at a predetermined angle with the substrate conveyed through the substrate conveying unit;
A guide unit for guiding the movement of the mobile inspection equipment; And
And an information acquiring unit connected to the mobile inspection equipment and acquiring data on the substrate in real time,
Wherein the movable inspection equipment includes a camera and a light source, and the movable inspection equipment reciprocates along the guide unit by the width of the substrate.
The method according to claim 1,
The substrate carrying portion may be formed to have a roll-to-roll structure,
Wherein the defect presence / absence detection system is capable of detecting a defect generated in a direction parallel to a conveying direction of the substrate.
The method according to claim 1,
Characterized in that the mobile inspection equipment is arranged to be inclined by a predetermined angle with respect to the plane of the substrate and the predetermined angle is included in the range of 10 to 80 degrees and the angle is determined on the basis of the characteristics of the substrate Detection system for defects in substrate using mobile inspection equipment.
The method according to claim 1,
Wherein the guide portion is a linear rail which is elongated so as to have a length value larger than the width of the substrate by a predetermined height with respect to the surface of the base material and the height of the first guide portion on which the camera is mounted and the height of the second guide portion Wherein the height of the substrate is the same as or different from the height of the substrate.
The method according to claim 1,
Further comprising a marker insertion unit for inserting a marker to indicate that a defect exists in the base material,
Wherein when the defect is present in the substrate, the information obtaining unit causes the mark inserting unit to insert the mark with the substrate.
A method for detecting presence or absence of defects in a substrate through a system for detecting presence / absence of defects on a substrate using a mobile inspection equipment,
Carrying the substrate to be subjected to defect presence / absence detection;
Driving a mobile inspection device disposed at an angle with the carrier substrate;
Obtaining data on the substrate from the mobile inspection equipment in real time;
Analyzing the obtained data; And
Determining the presence or absence of a defect on the substrate based on a result of the analysis,
Wherein the mobile inspection equipment includes a camera and a light source, and the mobile inspection equipment is reciprocable by a width of the substrate.
The method according to claim 6,
Characterized in that the mobile inspection equipment is arranged to be inclined by a predetermined angle with respect to the plane of the substrate and the predetermined angle is included in the range of 10 to 80 degrees and the angle is determined on the basis of the characteristics of the substrate A method for detecting the presence or absence of a defect in a substrate.
The method of claim 6, wherein
Further comprising the step of indicating presence or absence of a defect in the substrate based on a result of the judgment, wherein when a defect exists in the substrate, a mark for indicating that a defect exists in the substrate is inserted into the substrate, The presence or absence of a defect is detected.
A computer-readable recording medium on which a program for implementing the method of claim 6 is recorded.


KR1020160001251A 2016-01-05 2016-01-05 The system and method for detecting defect of substrate using moving detection device KR20170082079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160001251A KR20170082079A (en) 2016-01-05 2016-01-05 The system and method for detecting defect of substrate using moving detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160001251A KR20170082079A (en) 2016-01-05 2016-01-05 The system and method for detecting defect of substrate using moving detection device

Publications (1)

Publication Number Publication Date
KR20170082079A true KR20170082079A (en) 2017-07-13

Family

ID=59352579

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160001251A KR20170082079A (en) 2016-01-05 2016-01-05 The system and method for detecting defect of substrate using moving detection device

Country Status (1)

Country Link
KR (1) KR20170082079A (en)

Similar Documents

Publication Publication Date Title
CN104777168B (en) For detecting the equipment at the edge of substrate
US8305569B2 (en) Apparatus for optical inspection
US9330451B2 (en) Method and apparatus for detecting defect of backlight module
JP5198535B2 (en) Glass substrate cut surface inspection system
US20150132471A1 (en) Method and apparatus for curtain coating
JP6033041B2 (en) Automatic quality inspection device for optical glass base material and automatic quality inspection method for optical glass base material
KR20110088706A (en) Detection apparatus for particle on the glass
JP6707443B2 (en) Defect inspection image capturing system, defect inspection system, film manufacturing apparatus, defect inspection image capturing method, defect inspection method and film manufacturing method
JP2007205724A (en) Shape measuring device and measuring method of glass substrate
CN108628015B (en) Detection device, detection method thereof and detection equipment
TWI582415B (en) Image processing apparatus, image acquiring apparatus, image processing method, and image acquiring method
CN106546603A (en) A kind of TP, the industrial vision detection means of glass cover-plate and detection method
KR102289972B1 (en) Device and method for detecting defect of optical film
CN102928442A (en) Optical detection device of transparent glass
CN108469437A (en) The defect inspection method and device of float glass
JP2017219343A (en) Defect inspection device, defect inspection method, film manufacturing device, and film manufacturing method
CN105823780B (en) Panel detection device and method
JP2013092469A (en) Work inspection system
KR20170082079A (en) The system and method for detecting defect of substrate using moving detection device
TWI470210B (en) Defect inspection method of optical layer part of display device
KR102495565B1 (en) How to inspect optical display panels for damage
CN207198061U (en) A kind of SP251 camera lenses detection device for foreign matter
JP2010083745A (en) Method for manufacturing image display, and apparatus for dividing panel
KR20160101436A (en) Method for inspectiong the outside of panels
TWM457889U (en) Panel defect detection device

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E90F Notification of reason for final refusal
E601 Decision to refuse application