KR20170041424A - Ionizer and method for driving the same - Google Patents
Ionizer and method for driving the same Download PDFInfo
- Publication number
- KR20170041424A KR20170041424A KR1020150140828A KR20150140828A KR20170041424A KR 20170041424 A KR20170041424 A KR 20170041424A KR 1020150140828 A KR1020150140828 A KR 1020150140828A KR 20150140828 A KR20150140828 A KR 20150140828A KR 20170041424 A KR20170041424 A KR 20170041424A
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- KR
- South Korea
- Prior art keywords
- circuit board
- printed circuit
- wiring
- ionization
- power supply
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/06—Carrying-off electrostatic charges by means of ionising radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/03—Mounting, supporting, spacing or insulating electrodes
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Elimination Of Static Electricity (AREA)
Abstract
The ionization apparatus includes a first connector portion, a first printed circuit board portion having a plurality of wirings connected to the first connector portion, a plurality of wires of the first printed circuit board portion, A second printed circuit board portion having a plurality of wirings to be connected, a third printed circuit board portion having a plurality of wirings connected to a plurality of wirings of the second printed circuit board portion, A second connector portion connected to the wiring, and an electron beam generator positioned above the second printed circuit board portion and emitting an electron beam.
Description
The present invention relates to an ionization apparatus and a method of driving an ionization apparatus.
A so-called ionizer for electrostatic elimination and dust collection, which directly affects the production yield in a process line for manufacturing semiconductor devices and the like, is recently in the spotlight.
Examples of the ionization method of the ionization apparatus include a method using a corona discharge and a photo-ionization method using an X-ray.
When such an ionization apparatus is used for removing static electricity generated in a large area such as an apparatus for manufacturing a liquid crystal display apparatus or the like, a plurality of ionization apparatuses may be connected in series to remove a large area of static electricity.
However, since a cable is used to connect a plurality of ionization devices in series, the connection process of two different ionization devices becomes complicated and the connection time also becomes long.
Further, due to the cables connected to each other, the structure of the ionization module having a plurality of ionization devices is complicated, and the cables connected to each other during use are disconnected or tangled.
Furthermore, when a plurality of ionizers are connected in series, it is difficult to accurately know whether or not the operation of each of the ionizers connected in series is normally performed. Therefore, it is inconvenient to individually check the operation state of each ionizers, There is an inconvenience in that an identification number assigning operation for a newly replaced ionization apparatus must be performed manually if an ionization apparatus that is newly replaced is present in the ionization module.
SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of the present invention is to improve the satisfaction of a user by facilitating connection operations of a plurality of ionizers.
According to another aspect of the present invention, there is provided an ionization apparatus including:
According to an aspect of the present invention, there is provided an ionization apparatus including a first connector portion, a first printed circuit board portion having a plurality of wirings connected to the first connector portion, a plurality A third printed circuit board portion having a plurality of wirings connected to a plurality of wirings of the second printed circuit board portion, a second printed circuit board portion having a plurality of wirings of the third printed circuit board portion And an electron beam generator positioned above the second printed circuit board and emitting an electron beam.
The first connector unit includes a first power supply pin for receiving a first power supply, a second power supply pin for receiving a second power supply, a first communication pin and a second communication pin for communicating with an external device, It is preferable to include a receiving pin for a driving signal.
The plurality of wirings of the first printed circuit board portion include a first power supply wiring and a second power supply wiring which are respectively connected to the first power supply pin and the second power supply pin, A first communication wiring and a second communication wiring respectively connected to the pins, and an input portion and an output portion of the drive signal wiring connected to the drive signal pin.
The plurality of wirings of the second printed circuit board portion are respectively connected to the first and second power supply wirings of the first printed circuit board portion and the first power supply wiring and the second power supply wiring, The first communication wiring and the second communication wiring respectively connected to the first and second communication wirings of the substrate portion and the driving signal wiring connected to the output portion of the driving signal wiring, The plurality of wirings may include a first power supply wiring and a second power supply wiring which are respectively connected to the first and second power supply wiring lines of the second printed circuit board portion, The first communication wiring and the second communication wiring respectively connected to the communication wiring and the driving signal wiring connected to the driving signal wiring of the second printed circuit board portion .
The second connector portion includes a first power supply hole connected to the first power supply wiring of the third printed circuit board portion, a second power supply hole connected to the second power supply wiring of the third printed circuit board portion, A first communication hole connected to the first communication wiring of the printed circuit board portion, a second communication hole connected to the second communication wiring of the third printed circuit board portion, and a drive connected to the drive signal wiring of the third printed circuit board portion It is preferable to include a signal hole.
Wherein the first and third printed circuit board portions are arranged side by side and the first and third printed circuit board portions are connected to an input portion and an output portion of the drive signal wiring of the first printed circuit board portion, And at least one of a module, a high voltage generating unit connected to the electron beam generator, and an insulation transformer connected to the electron beam generator.
The operation control module operates the high voltage generating unit to apply the voltage generated in the high voltage generating unit to the electron beam generator when a drive signal in the corresponding state is transmitted from the input portion of the drive signal wiring of the first printed circuit board .
The operation control module can transmit the operation state data stored in the ionization device to the second communication wiring when the operation state data request signal is transmitted from the first communication wiring.
When the operation signal of the state is input from the input portion of the drive signal wiring of the first printed circuit board portion and the identification number is transmitted from the first communication wiring, The identification number to be transmitted may be adopted as the identification number for the ionization apparatus.
The ionization apparatus according to the above feature may further include a mounting structure located in the second printed circuit board portion and into which the electron beam generator is inserted.
The mounting structure may be made of a flexible material.
According to another aspect of the present invention, there is provided a method of driving an ionization apparatus including an electron beam generator and operating the electron beam generator, the method comprising the steps of: determining whether a driving signal in a corresponding state is input from a front- Determining whether a unique identification number is assigned to the ionization apparatus when the drive signal in the corresponding state is input from the apparatus; Outputting the identification number to the ionization device located at the rear end, and, when the unique identification number is not assigned, assigning the identification number transmitted from the central control device to a unique identification number for the ionization device.
The driving method of the ionizer according to the above feature may further include executing an electron beam emitting operation of the electron beam generator when the driving signal in the corresponding state is input from the front end apparatus.
The method of driving an ionization apparatus according to the above feature may further include the steps of: determining whether an operation state data request signal has been transmitted from the central control apparatus; storing the operation state data request signal in a storage section of the ionization apparatus And transmitting the read operation state data to the central control apparatus.
The method of driving an ionization apparatus according to the above feature may further include transmitting an identification number confirmation signal to the central control device after the step of assigning the identification number to be transmitted to the ionization device as a unique identification defense .
According to this aspect, when a plurality of ionizers are connected in series to form an ionizer module, electrical connection between two adjacent ionizers is performed using a connector without using a cable, so that the connection operation of a plurality of ionizers Quickly and conveniently.
In addition, since the operation of assigning an identification number to a newly installed ionization apparatus is automatically performed, convenience for the user is improved.
1 is a block diagram of an ionization module in accordance with one embodiment of the present invention.
2 is a block diagram of an ionization apparatus according to one embodiment of the present invention.
3 is a perspective view of an electron beam generator mounting structure mounted on an ionizer according to an embodiment of the present invention.
4 is a block diagram of a control apparatus for an ionization system according to an embodiment of the present invention.
5 is an operational timing diagram of an ionization module according to an embodiment of the present invention.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.
It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, but it should be understood that there may be other elements in between do. On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.
Hereinafter, a method of driving an ionization apparatus and an ionization apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings.
First, an ionization module having a plurality of ionization devices connected in series according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 4. FIG.
The
In this case, the number of the
As shown in FIG. 2, each of the
The
In the case of this example, the
The first and
The connector of the first connector portion 11 in the form of a male connector is connected to an ionization device (front end ionization device) located at the front end which is an external device or three pins Three pins (i.e., a second power supply pin) for receiving a second power supply (e.g., 0 V) from the front end ionization apparatus or the
On the other hand, the connector of the second connector portion 11 in the form of a female connector has three holes (that is, a first power supply hole) for supplying the first power supply to the ionization apparatus (rear end ionization apparatus) (I.e., a first communication hole) for communicating with a central control device that is an external device (i.e., a first communication hole) and a central control device that is an external device One hole for communication for communication (i.e., the second communication hole), and one driving signal hole for transmitting driving signals to the rear end ionizer.
The five wirings formed on the wiring board of the first and
In the case of this example, the number of pins for supplying power (+24 V, 0 V) of the corresponding size to the first and second power supply lines L11 and L12 is three, but is not limited thereto.
These wirings L11 to L15 are also formed in the first to third printed
Referring to FIG. 2, the first power supply line L11 is formed so as to completely cross the first to third printed
The second power supply line L12 is also formed so as to completely cross the first to third printed
Each of the first and second communication wirings L13 and L14 is also formed so as to completely cross the first to third printed
A first communication line (L13) is a line (T X) for transmitting a second communication line (L14) is a credit line (Rx).
The drive signal transmitted from the outside via the drive signal wiring L15 is supplied to the
The drive signal wiring line L15 is formed such that two portions, that is, the input portion L151 and the output portion L152 are disposed across the
Of course, the two drive signal wires L15-L15 formed on the two adjacent printed
Although not shown in FIG. 2, the connection of the electrical and physical wiring lines L11 to L15 between the adjacent two printed
Wires L21 to L23 formed on the first to third printed
That is, the wiring L21 formed on the first and second printed
The wiring lines L22 and L23 formed on the second and third printed
These wirings L21 to L23 are also electrically and physically connected to each other through male and female coupling of the connectors provided between the adjacent two printed circuit board portions 121-122 and 122-123, as described above.
As described above, the first and second printed
The
The
The high
The voltage output from the high
In the high
The
An
Accordingly, when driving power is applied to the primary coil, a secondary voltage having a corresponding magnitude is induced in the secondary coil by the primary voltage applied to the primary coil, and is applied to the
The voltage generated by the
The
At this time, one end of the filament is connected to the output terminal of the high
Accordingly, when a high voltage is applied to the filament through the high
Thus, the electrons emitted from the filament are accelerated by the focus electrode tube to move toward the target and strike the target. By such an electron target striking operation, an electron beam such as an X-ray is emitted to the outside via an optical radiation window.
3, the
At this time, the mounting structure 150 is made of a flexible material having flexibility such as silicon, and the position and shape of the mounting structure 150 are changed by the pressure applied from the outside, Lt; / RTI >
The mounting structure 150 includes a
The
The
The power
The
The power
The shape and the number of the plurality of engaging
In the
The plurality of wirings L11 to L15 of the
Each of the
Accordingly, the first to third printed
Therefore, the degree of freedom of design is increased and the position of the
As a result, the firing range of the electron beam (e.g., X-ray) emitted from the
Therefore, when a plurality of
Since the second printed
Since the second printed
In this embodiment, as described above, instead of connecting two different ionization devices to each other by using a cable, the first and second connector parts 110 and 112 (first and second connector parts) positioned at the front end and the rear end of the
As a result, the connection operation of the
Further, since there is no cable between the adjacent two
When the
The operation of the
Referring to Fig. 4, the structure of the control device of the ionization system for controlling the operation of the
4, the
The
The
Therefore, the
Each time the
At this time, if a unique identification number is already assigned to a plurality of
Therefore, whenever at least one of the
When the control state of the
When the control state of the
The
The
The
The
The
At this time, the
The
Next, the operation of the ionization system having such a wiring connection structure will be described with reference to FIG.
For convenience of explanation, the operation will be described assuming that the first to
First, when it is determined that the
Accordingly, the
The
Accordingly, the
As described above, when the
The
The
However, if the identification number of the
When the operation of assigning an identification number to the
The
On the other hand, since the driving signals of the corresponding states are not input to the remaining
The
Accordingly, when the second pulse P12 is received, the
However, since the identification number (ID1) is already assigned to the
The
The
Accordingly, the
At this time, since the
The
Therefore, when the third pulse P12 is received, the
The
Thus, the
The
Accordingly, the central control unit 3 recognizes that the third identification number (ID3) has been adopted as the identification number of the
When the identification number confirmation signal ACK3 is received from the
Accordingly, the
The
Since the first to
If the identification number confirmation signal is not received from the
Therefore, the
To this end, the
Accordingly, the corresponding
Since the drive pulse for driving the
At this time, when the driving signal (i.e., driving pulse) in the corresponding state for operating the
Therefore, the
The
The operation state data request signal DRp is transmitted to the
That is, when the operation mode of the
Therefore, in the diagnostic mode, the
In this example, the identification number for the ionization device which desires to receive the operation state data is determined by the user through a separate input device or already stored in the
As in the present embodiment, when the operation of assigning an identification number to the
For example, if the newly replaced ionizer is the second ionizer, then the newly replaced second ionizer will not be assigned an identification number.
Accordingly, when the
The
The second ionizer also operates its own electron beam generator in synchronization with the input of the drive pulse.
At this time, since the newly installed second ionization apparatus is in a state in which its own identification number is not assigned, as described above, the second ionization apparatus adopts the transmitted fifth identification number as its own identification number, And notifies the
Since the identification number of the third ionizer has already been given (the third identification number), the identification number assigning operation is not performed even if the drive pulse is applied.
As a result, the identification number for the newly replaced second ionization apparatus is automatically assigned to the fifth identification number.
If all of the identification numbers corresponding to all the ionization devices constituting the ionization module are given, the central control device does not receive the identification number confirmation signal from the ionization device. Therefore, the identification number assignment operation control is terminated and the electron emission operation .
In this manner, since the operation of assigning identification numbers to a plurality of
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It belongs to the scope of right.
1: Ionization module 2: Central control device
101 to 10n: ionization device 111: first connector portion
112: second connector part 121: first printed circuit board part
122: second printed circuit board part 123: third printed circuit board part
130:
141: electron beam generator 142: high voltage generating unit
143: electrothermal transformer L11: first power supply wiring
L12: second power supply wiring L13: first communication wiring
L14: second communication wiring L15: drive signal wiring
Claims (12)
A first printed circuit board portion having a plurality of wirings connected to the first connector portion,
A second printed circuit board portion having a plurality of wirings connected to a plurality of wirings of the first printed circuit board portion,
A third printed circuit board portion having a plurality of wirings connected to a plurality of wirings of the second printed circuit board portion,
A second connector part connected to a plurality of wirings of the third printed circuit board part, and
An electron beam generator positioned above the second printed circuit board portion and emitting an electron beam;
/ RTI >
The first connector unit includes a first power supply pin for receiving a first power supply, a second power supply pin for receiving a second power supply, a first communication pin and a second communication pin for communicating with an external device, Receiving pins for driving signals,
The plurality of wirings of the first printed circuit board portion include a first power supply wiring and a second power supply wiring which are respectively connected to the first power supply pin and the second power supply pin, A first communication wiring and a second communication wiring respectively connected to the pins, and an input portion and an output portion of the drive signal wiring connected to the drive signal pin
The plurality of wirings of the second printed circuit board portion are respectively connected to the first and second power supply wirings of the first printed circuit board portion and the first power supply wiring and the second power supply wiring, A first communication wiring and a second communication wiring respectively connected to the first and second communication wirings of the substrate portion, and a drive signal wiring connected to the output portion of the drive signal wiring,
The plurality of wirings of the third printed circuit board portion are connected to the first power supply wiring and the second power supply wiring which are respectively connected to the first and second power supply wiring of the second printed circuit board portion, A first communication wiring and a second communication wiring which are respectively connected to the first and second communication wirings of the substrate portion, and a drive signal wiring which is connected to the drive signal wiring of the second printed circuit board portion,
The second connector portion includes a first power supply hole connected to the first power supply wiring of the third printed circuit board portion, a second power supply hole connected to the second power supply wiring of the third printed circuit board portion, A first communication hole connected to the first communication wiring of the printed circuit board portion, a second communication hole connected to the second communication wiring of the third printed circuit board portion, and a drive connected to the drive signal wiring of the third printed circuit board portion Including signal holes
Ionizing device.
The first to third printed circuit board portions are arranged side by side,
Wherein the first and third printed circuit board portions include an operation control module connected to an input portion and an output portion of the drive signal wiring of the first printed circuit board portion, a high voltage generating unit connected to the operation control module and the electron beam generator, And at least one of the connected isolation transformers
Ionizing device.
The operation control module operates the high voltage generating unit to apply the voltage generated in the high voltage generating unit to the electron beam generator when a driving signal in the corresponding state is transmitted from the input portion of the drive signal wiring of the first printed circuit board Ionizing device.
Wherein the operation control module transmits the operation state data stored in the ionization device to the second communication wiring when the operation state data request signal is transmitted from the first communication wiring.
When the operation signal of the state is input from the input portion of the drive signal wiring of the first printed circuit board portion and the identification number is transmitted from the first communication wiring, And the identification number to be transmitted is adopted as an identification number for the ionization apparatus.
And a mounting structure located in the second printed circuit board portion and into which the electron beam generator is inserted.
Wherein the mounting structure is made of a flexible material.
Determining whether a driving signal in a corresponding state is inputted from an apparatus at a preceding stage,
Determining whether a unique identification number is assigned to the ionization apparatus when the drive signal in the corresponding state is input from the apparatus at the preceding stage,
Outputting the driving signal in the corresponding input state to an ionization device positioned at a subsequent stage when the unique identification number is assigned,
The identification number transmitted from the central control device is assigned to the ionization device with a unique identification number
Wherein the ionizing device comprises:
And performing an electron beam emission operation of the electron beam generator when the drive signal in the corresponding state is input from the device at the preceding stage.
Determining whether an operation state data request signal has been transmitted from the central control device, and
When the operation state data request signal is transmitted from the central control device, reading the operation state data stored in the storage unit of the ionization device and transmitting the data to the central control device
Further comprising the step of:
Further comprising transmitting an identification number confirmation signal to the central control device after the step of assigning the identification number to be transmitted to the ionization device as a unique identification code.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150140828A KR101748394B1 (en) | 2015-10-07 | 2015-10-07 | Ionizer and method for driving the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150140828A KR101748394B1 (en) | 2015-10-07 | 2015-10-07 | Ionizer and method for driving the same |
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| Publication Number | Publication Date |
|---|---|
| KR20170041424A true KR20170041424A (en) | 2017-04-17 |
| KR101748394B1 KR101748394B1 (en) | 2017-06-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| KR1020150140828A KR101748394B1 (en) | 2015-10-07 | 2015-10-07 | Ionizer and method for driving the same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210106640A (en) | 2020-02-21 | 2021-08-31 | 주식회사엑스엘 | The generating system of soft X-ray to install multi X-ray generation part for removing static electricity |
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2015
- 2015-10-07 KR KR1020150140828A patent/KR101748394B1/en active IP Right Grant
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210106640A (en) | 2020-02-21 | 2021-08-31 | 주식회사엑스엘 | The generating system of soft X-ray to install multi X-ray generation part for removing static electricity |
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| Publication number | Publication date |
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| KR101748394B1 (en) | 2017-06-23 |
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