KR20160141590A

KR20160141590A - NDIR Sensor and Air Sampling Multi Gas Detecting Apparatus Having The Same

Info

Publication number: KR20160141590A
Application number: KR1020150077492A
Authority: KR
Inventors: 권경수
Original assignee: 주식회사 가스트론
Priority date: 2015-06-01
Filing date: 2015-06-01
Publication date: 2016-12-09

Abstract

The present invention relates to an air intake type complex gas sensing apparatus including an NDIR sensor for detecting leakage of a toxic gas including a PFC gas in a factory or the like.
In the present invention, there is provided an air conditioner comprising: a suction unit for controlling suction of air for measurement and air discharge after measurement; a sensor unit for measuring a gas component in the sucked air; A control unit; And a terminal unit for communicating with outside and inputting and outputting information according to the control of the control unit. The upper sensor unit is provided with an NDIR sensor cartridge for measuring the presence or absence of PFC gas in the sucked gas, An air intake type multiple gas sensing apparatus capable of mounting a maximum of two sensor cartridges capable of being mounted thereon is disclosed.
According to the present invention, it is possible to detect a large number of toxic gases with a single gas sensor without installing a plurality of gas detectors, and it is possible to save a high cost due to installation of a bar, and reduce the maintenance cost required for the operation. Also, according to the present invention, it is possible to prevent a malfunction due to an interference gas which may occur at the time of PFC measurement.

Description

TECHNICAL FIELD [0001] The present invention relates to an NDIR sensor and an air intake type multiple gas sensing device including the NDIR sensor.

The present invention relates to an air suction type multiple gas sensing device, and more particularly, to an air suction type multiple gas sensing device that independently senses various types of gases including PFC gas in one device.

Perfluorocarbos (PFC) gases are widely used in chemical vapor deposition (CVD) chamber cleaning, film etching, etc. used in dry processing applications in semiconductor manufacturing facilities Is used. PFC gas is mainly classified as toxic gas, and measurements must be made in PPM (part per million) to ensure safety. Table 1 shows the predominant PFC gases and their applications.

name purpose of use Classification Difluoromethane (CH2F2) Etching Flammability Fluoromethane (CH3F) Etching Flammability Hexafluorobutadiene (C4F6) Dielectric Etching Flammable, toxic Octofluorocyclopentene (C5F8) Dry Etching toxicity Perfluorocyclobutane (C4F8) Deposition, Etching Low toxicity

Currently, common PFC gases are measured by a combination of pyrolysis unit and electrochemical sensor. However, such gas detection methods are not limited to isopropyl alcohol, ethanol and acetone, which are used as semiconductor cleaning agents, It may generate an interference reaction to the coolant and cause malfunction due to wrong measurement value. In the case of a pyrolysis apparatus, the molecular binding energy is released by heat energy, and the gas is measured by an electrochemical sensor. However, this principle is applied to both the measurement gas and the interference gas.

In order to detect the PFC gas, an optical system may be used instead of a pyrolysis apparatus. In this case, the dual-sensing NDIR measurement method, which is mainly used, has a problem that the reaction spectra of the PFC gases to be measured are overlapped.

In addition, in factories using such gases, there are disadvantages in that, in addition to various PFC gases, gases such as COS, CO, and CH4 are simultaneously used, so that it is necessary to use several gas detectors as many as the types of gas to be measured. The gas detector has a problem that the measurement time and condition are influenced by the natural diffusion rate of the leaked gas and the air flow.

SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and provide a multi-type NDIR measuring apparatus capable of measuring six wavelength bands for accurate measurement of various PFC gases.

It is another object of the present invention to solve the above-described problems. It is an object of the present invention to provide a gas measurement system and a gas measurement method thereof, In which the measurement gas is detected under the same conditions and has quick response.

It is another object of the present invention to solve the above-described problems and provide an air intake type complex gas apparatus and an alarm preventing method for preventing generation of an alarm that may occur during PFC gas measurement.

According to an aspect of the present invention, there is provided an NDIR sensor cartridge including: an infrared light source that emits energy in a 2 to 12 um wavelength band; a waveguide to which the emitted energy is transmitted; A measurement unit capable of simultaneously measuring six wavelength bands within the wavelength band energy, and an interface unit outputting data measured by the measurement unit.

The six wavelength bands to be measured are four in the wavelength band ranging from 8 탆 to 11 탆 and can be two in the wavelength band ranging from 3 탆 to 4 탆. In particular, 10.3 袖 m, 9.3 袖 m, 8.9 袖 m, 8.0 袖 m, It may be a wavelength band of 3.3 um.

According to another aspect of the present invention, there is provided an air-intake-type multi-gas sensing apparatus including a suction unit for controlling suction of air for measurement and air discharge after measurement, a gas component in the sucked air, And a terminal unit for communicating with the outside and for inputting and outputting information according to the control of the control unit, wherein the sensor unit comprises: Part may include an NDIR sensor cartridge for measuring a PFC gas component in the sucked gas and at least one second sensor cartridge for measuring a gas component other than the PFC gas.

The suction unit of the air suction type multi-gas sensing device measures the amount of the air sucked, measures a quantity of air And a flow rate sensor for controlling the pump so that the pump can be introduced.

The NDIR sensor cartridge and the second sensor cartridge may be detachably attached to the sensor unit.

The second sensor cartridge may include a sensing unit for mounting one of a photoionization detector sensor, an electrochemical sensor, and a contact combustion sensor, and an interface unit for transmitting data measured by the sensing unit to the controller.

The sensor cartridge may be configured to have the same size and shape regardless of the type of the sensor to be measured.

A communication unit for supporting at least one of an RS485 communication unit for sharing the measurement result with an external system and a current output unit for outputting a current indicating a measurement result, An alarm output unit for outputting an alarm generated by the device under the control of the control unit, a key input unit for inputting a user, and a display unit for displaying a setting screen and a measurement result according to the control of the control unit.

The current output part of the terminal part

mA, and the set maximum value may be a maximum value of the range set by the controller.

The alarm output unit of the terminal unit may be configured to have a system terminal group for outputting an alarm generated in the air intake type complex gas sensing apparatus and a sensor terminal group for outputting a measurement related alarm in the sensor unit Number of channel terminal groups.

The system terminal group and each channel terminal group may include three alarm signals. In addition, a jumper or switch for determining the output mode of the alarm signal is further provided, and the alarm signal can be outputted in the form of NC (Normal Close) signal or NO (Normal Open) signal by connection of the jumper or switch have

The key input unit of the terminal unit includes an M key for requesting entry of a menu mode, S1, S2, S3 and S4 keys set to go directly to a specific menu at the time of key input, an ESC key used for returning to a previous screen during each mode operation, An ENTER key for entering or storing a set value, a direction key used for moving between items configured in each mode, and a RESET key used for returning to the measurement mode in the specific mode state entered by using the above keys .

The display unit of the terminal unit may include a status LED unit indicating a status of the device, and a screen unit displaying a screen set by control of the controller according to the key input of the key input unit or displaying a measurement result.

The status LED of the display unit shows POWER LED to check whether the power of the device is properly connected, STATUS LED to check the operation status, FAULT LED to operate when the fault occurs, And an ALARM1 LED that operates when an alarm 1 occurs in a system or sensor cartridge during operation. The alarm 1 is an alarm that occurs when the measured gas concentration is larger than the Alarm 1 set value set by the control unit and smaller than the Alarm 2 set value And the Alarm2 may be an alarm that occurs when the measured gas concentration is greater than the Alarm2 set value set by the controller.

The control unit may further include a self-diagnosis function for checking whether the system of the air-intake-type multi-gas sensing device and each sensor cartridge mounted on the sensor unit operates normally.

The control unit may process the measurement signal from the sensor unit and output an alarm when the concentration of the detected gas is above a predetermined threshold or within a predetermined range.

According to another aspect of the present invention, there is provided a gas detection malfunction prevention method comprising: receiving a measurement result from an NDIR sensor and a photoionization detector sensor; Determining whether the detection of the desired PFC gas or the detection of the alcohol or the like which is an interfering gas, and outputting the information indicating the detection of the interfering gas based on the determination result.

According to the present invention, it is possible to detect a large number of gases by one device, which can save a high cost incurred in installing a plurality of individual gas detectors. By applying a modular sensor cartridge, By configuring the detector adaptively, high scalability can be provided.

It is also possible to reduce maintenance costs by operating one instrument rather than a number of individual gas detectors.

Also, according to the present invention, it is possible to prevent a malfunction due to an interference gas which may occur at the time of PFC measurement.

1 is a block diagram schematically showing a configuration of an NDIR sensor cartridge according to an embodiment of the present invention.
2 is a block diagram schematically showing the overall configuration of an air-intake type multiple gas sensing apparatus including an NDIR sensor cartridge according to an embodiment of the present invention.
3 is a configuration diagram showing a schematic configuration of the sensor cartridge.
4 is an exemplary diagram showing a terminal structure of an alarm output unit according to an embodiment of the present invention.
5 is an exemplary view illustrating a key input unit and a display unit of the air intake type multiple gas sensing apparatus according to an embodiment of the present invention.
6 is an exemplary diagram showing a device control flow of a control unit according to an embodiment of the present invention.
7 is an exemplary diagram showing a self-diagnosis result according to an embodiment of the present invention.
8 is an exemplary diagram showing an example of a screen that the control unit outputs to the display unit in the measurement mode according to an embodiment of the present invention.
9 is an exemplary view showing an example of an information screen for a measurement gas measured in a specific sensor cartridge in a measurement mode according to an embodiment of the present invention.
10A to 10C are views showing an example of a screen for displaying an alarm by the control unit in the measurement mode according to the embodiment of the present invention.
11 is a view showing an example of a screen displaying a failure by the control unit according to an embodiment of the present invention.
12 is an exemplary view showing an internal structure of a multi-gas sensing device including an NDIR sensor cartridge according to an embodiment of the present invention.
13 is a flowchart illustrating a method for preventing gas detection malfunction according to an embodiment of the present invention.

In the following description, well-known functions or constructions are not described in detail to avoid unnecessarily obscuring the subject matter of the present invention.

Although the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, But should be understood to include all modifications, equivalents, and alternatives.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description with reference to the accompanying drawings, the same or corresponding components will be denoted by the same reference numerals, and redundant description thereof will be omitted.

1 is a block diagram schematically showing a configuration of an NDIR sensor cartridge according to an embodiment of the present invention.

The NDIR sensor can detect gas using Non Dispersive Infrared (NDIR) method. NDIR has an asymmetric structure or uses a phenomenon in which gas molecules of three or more atoms absorb energy corresponding to their natural vibration energy, which is excellent in selectivity and can secure precision, reliability, and long-term stability.

By analyzing the wavelength band of the individual gas to be measured, a band-pass filter capable of absorbing the energy of the six spectral regions having the greatest reaction is constituted, and a gas band is measured by analyzing the wavelength band in real time using a pyroelectric infrared sensor .

Referring to FIG. 1, an NDIR sensor cartridge 100 according to an embodiment of the present invention may include an infrared light source 101, waveguides 102a and 102b, a measurement unit 103, and an interface unit 104 have.

The infrared light source 101 emits vibrational energy in the range of 2 μm (micro meter, 10 ^-6 m) to 12 μm, including the natural vibration energy of the PFC gases.

The emitted energy is transmitted to the measuring unit 103 through the waveguides 102a and 102b. The emitted energy can come into contact with a specific PFC gas while propagating through the waveguides 102a and 102b, and the wavelength band corresponding to the natural vibration energy of the PFC gas is absorbed by the PFC gas upon contact.

The measuring unit 103 can measure the energy transmitted through the waveguides 102a and 102b by the vibration frequency. At this time, the measuring unit 103 can simultaneously measure six wavelength bands. In one embodiment, four can be measured in the main wavelength band of the wavelength band from 8 um to 11 um in which the PFC gas can absorb energy, and two can be measured in the reference wavelength band in the wavelength band from 3 um to 4 um . As an example, it is possible to measure six wavelength bands such as 10.3um, 9.3um, 8.9um, 8.0um, 3.9um, and 3.3um. CHF, CH3F, C4F6, and C5F8, which are the main PFC gases, using four major bands among the six measured wavelength information. The measurement results in the two reference bands can be used to determine a deviation due to environmental change, . &Lt; / RTI >

The interface unit 104 may receive the electrical signal output from the measurement unit 103, calculate the gas concentration, and output it to an external controller or the like.

2 is a block diagram schematically showing the overall configuration of an air-intake type multiple gas sensing apparatus including an NDIR sensor cartridge according to an embodiment of the present invention.

2, an air intake type multiple gas sensing apparatus including an NDIR sensor cartridge according to an embodiment of the present invention includes a suction unit 110, a sensor unit 120, a controller 130, and a terminal unit 140 ).

The suction unit 110 can perform a function of sucking gas for measurement and discharging gas after measurement. The flow rate of the air supplied to the sensor unit 120 for gas measurement must be constantly supplied in order to minimize malfunction. In order to control the inflow air, the suction unit 110 may include a suction port 111, an exhaust port 113, a pump 115, and a flow rate sensor 117.

The suction port 111 is where the air for measurement is sucked, and the sucked air can be delivered to the sensor unit 120 for measurement. The air outlet 113 can discharge the air discharged from the sensor unit 120 to the outside after the measurement. The pump 115 may be a diaphragm-type pump, and actively suck air from the outside through a pump operation. The flow rate sensor 117 controls the pump 115 so that a constant amount of air can always be introduced.

The sensor unit 120 may be configured to mount a plurality of sensor cartridges (for example, 121 to 122) to which various gas detection sensor technologies are applied in addition to the NDIR sensor cartridge 123 for PFC gas measurement.

Fig. 3 is a configuration diagram showing a schematic configuration of the sensor cartridges 121 to 122. Fig.

3, each of the sensor cartridges 121 to 122 includes a sensing unit 210 for mounting one of a photoionization detector sensor, an electrochemical sensor, and a contact combustion sensor, and a control unit 130 (Not shown). The sensing unit 210 may be equipped with an apparatus of a different measurement method depending on the type of gas to be measured.

A photoionization detector (PID) sensor can be used to detect interfering gases such as alcohol and coolant. The PID sensor is a device that measures photons of the volatile organic compounds by emitting photons in the ultraviolet region and making them electrically charged positively charged ions. The PID sensor may include a miniature UV lamp that emits ultraviolet photons of a particular wavelength as a major constituent. The energy level is determined by the gas injected into the lamp and the type of material used in the lamp window, usually between 9.5 and 11.7 eV (electron volts). Here, 1 eV is defined as the work of one electron as it goes up one volt potential.

Contact combustion sensors can be used to detect CH4, a common combustible gas. The contact combustion sensor is a device in which a catalyst is coated with a carrier in the form of a coil of platinum wire. When the sensor in the energized state comes into contact with the combustible gas, it is burned by the action of the catalyst, and the electric resistance is changed by the heat of combustion, and the gas concentration can be measured by measuring this change.

Electrochemical sensors can be used to detect common toxic gases, COS or CO gases. The electrochemical sensor includes a sensing electrode (not shown) where an oxidation (reduction) reaction takes place, a counter electrode (not shown) where a reduction (oxidation) reaction occurs simultaneously with the sensing electrode, and a potential And a reference electrode (not shown). A key feature of electrochemical sensors is the diffusion barrier which limits the flow of the gas to be detected to the sensing electrode. By this method, all the gases can cause an oxidation or reduction reaction at the detection electrode. Since the current generated when this oxidation-reduction reaction is caused is linearly proportional to the gas concentration on the detection electrode side, the concentration of the gas can be measured through the value of this current. In the case of the electrochemical sensor, various electrochemical sensors exist depending on the measurement gas, and the sensor cartridges 121 to 122 can accommodate these various electrochemical sensors.

In addition, although the NDIR sensor cartridge 123 differs from the sensor cartridges 121 to 122 of different sizes due to the waveguide, the sensor cartridges 121 to 122 are of the same size and shape (for example, Rectangular shape). Thus, the sensor cartridge 121 to 122 of the present invention can be designed as a removable / attachable module. Accordingly, the gas sensing device of the present invention can select and mount a sensor cartridge suitable for the gas to be measured, and can detect various types of gas including the PFC gas detection using the NDIR sensor under the same device structure An efficient device can be realized.

The terminal unit 140 displays a measurement result under the control of the controller 130 or transmits measurement results to an external system. The terminal 140 includes a power supply unit 141 for receiving power supply, a current output unit 142 for sharing the measurement result with an external system, an RS485 communication unit 143, A key input unit 145 for allowing a user to input a set value for measurement, and a display unit 146 for displaying a measurement result according to the control of the control unit 130 .

The power supply unit 141 can receive DC power from 18V to 31V. In addition, Power over Ethernet (POE) power supply, which is supplied through the RJ45 connector, can be additionally selected and used. In this case, measurement results can be shared with external systems using TCP / IP Ethernet.

The current output unit 142 may include a plurality of terminals capable of outputting a current of 0 to 22 mA. In the air suction type multiple gas sensing apparatus of the present invention, a plurality of sensor cartridges may be mounted, so that the current output unit 142 may include a terminal for outputting a corresponding 0 to 22 mA current for each sensor cartridge. Each output terminal can output up to 22mA of current. The control unit 130 can set a range of the gas concentration to be measured for each sensor cartridge. Based on this, the current output unit 142 can output a current of 4 mA to indicate that no gas is measured, and a current of 20 mA to indicate that the maximum value of the set range has been measured , The current between 4 and 20 mA can be output proportional to the measured gas concentration for the gas concentration measured in the set range. More specifically, the current value according to the following equation (1) can be outputted in proportion to the measurement result (the concentration of the measured gas) coming from the sensor cartridge.

In Equation (1), the set maximum value means the maximum value of the gas concentration range set by the controller 130.

An output of 0mA or 2mA can act as an alarm signal to signal that the sensor cartridge is faulty. A current of 20 mA or more can be used to indicate that the measured value is greater than the set maximum.

The control unit 130 can perform digital communication with an external system using TCP / IP Ethernet, which can be additionally configured with the RS485 communication unit 143. [ At this time, measurement results can be shared with external system using MODBUS protocol.

4 is an exemplary diagram showing a terminal structure of an alarm output unit according to an embodiment of the present invention.

Referring to FIG. 4, the alarm output unit 144 includes a system terminal group 310 for outputting an alarm generated in the air-intake-type multi-gas sensing apparatus of the present invention, and a measurement- And includes the same number of channel terminal groups 311 and 31x as the number of sensor cartridges (x in the example of FIG. 3).

The alarm generated in the air intake type multiple gas sensing apparatus may be an alarm generated when the apparatus is malfunctioning, for example, when the voltage of the power source is lowered. The measurement related alarm may mean a case where the measured result exceeds the Alarm1 set value set by the controller 130 and the Alarm2 set value set forth below.

Each of the terminal groups 301, 311, and 31x can output a plurality of alarm signals (three in FIG. 4, A1, A2, and TRB). Each alarm signal can be output in the form of NO (Normal Open) and NC (Normal Close). If NO, the A terminal 331 and the B terminal 333 of the respective alarm signals of FIG. 3 are not attached unless an alarm is generated. When an alarm occurs, the A terminal 331 and the B terminal 333 are attached. . In the case of the NC, the A terminal 331 and the B terminal 333 are attached when no alarm is generated, and the A terminal 331 and the B terminal 333 are disconnected when an alarm occurs .

A jumper or switches 320 to 328 may be used for each of the alarm signals A1, A2, and TRB to determine whether the alarm signals A1, A2, and TRB operate as NO or NC . More specifically, when the A and C of the jumper or switches 320 to 328 are connected, an NO-type alarm signal can be output. When C and B are connected, an NC-type alarm signal can be output.

5 is an exemplary diagram showing a key input unit 145 and a display unit 146 of the air suction type multiple gas sensing apparatus according to an embodiment of the present invention.

The key input unit 145 includes keys that allow the user to input a set value relating to the control mode and the like in connection with the operation of the air intake type multiple gas sensing apparatus. 5, the key input unit 145 includes an M key KEY2 for requesting entry of a menu mode, S1 through S4 keys KEY3, KEY4, KEY5, and KEY6 set to go directly to a specific menu upon input, (ESC) key (KEY11) used to return to the previous screen during each mode operation using the S4 key, ENTER key (KEY12) used to enter the mode or to store the set value, movement between the items configured in each mode (KEY7, KEY8, KEY9, KEY10) used for the buzzer operation of the apparatus, a RESET key (KEY1) used for stopping the buzzer when the buzzer operation of the apparatus is stopped or returning to the measurement mode in the specific mode entered by using the above keys .

5, the display unit 146 includes a status LED unit 410 for indicating the status of the apparatus, a display unit for displaying a screen set by key input of the key input unit 145, And a display unit 420. Of course, the display unit 420 is not limited to the TFT LCD shown in the example of FIG. 4, and may be implemented by other display devices such as an OLED, a PDP, an LED, and an LCD according to an implementation. In addition, the display unit 146 may further include a buzzer (not shown) for generating a specific sound when a key is input, an alarm is generated, or a failure occurs.

Referring to FIG. 5, the status LED unit 410, which indicates the status of the apparatus, includes a POWER LED for confirming that the power of the apparatus is properly connected, a STATUS LED for confirming a status during operation, a FAULT LED , An ALARM2 LED operating in the system or sensor cartridge at the time of occurrence of Alarm2, and an ALARM1 LED operating at the occurrence of Alarm1 in the system or sensor cartridge during operation. The conditions for generating the Alarm1 and the Alarm2 may be set by the controller 130 as described below.

The control unit 130 may process various controls of the system, measurement signals from the sensor unit 120, communication, and alarms. Also, the controller 130 can store the measured gas and operation events in real time using the internal memory, and can output the result to the terminal 140 in real time.

6 is an exemplary diagram showing a device control flow of the control unit 130 according to an embodiment of the present invention.

When the power is turned on, the control unit 130 displays an intro screen for introducing the device on the screen unit 420 and performs a self-diagnosis function (Self Test mode) 520. If there is no abnormality, the control unit 130 enters the measurement mode 530 Gas measurement values can be displayed continuously.

7 is an exemplary diagram showing a self-diagnosis result according to an embodiment of the present invention.

Referring to FIG. 7, the controller 130 performs a self-diagnosis function for the system and each sensor cartridge, and displays a portion where there is no abnormality in green and a portion in which a defect and a problem occurs is displayed in red. The control unit 130 may also display the cause (e.g., the sensor cartridge is empty, Fail) when a trouble occurs. During the self-diagnosis function, the warm-up for normal operation of the sensor can be performed.

When the self-diagnosis function is normally completed, the controller 130 enters the measurement mode and can continuously display the gas measurement values. The control unit 130 can display faults, alarms, over and under states for individual channels, and can display additional information such as the current state of being inhaled and interference gas detection simultaneously with the gas measurement values.

The controller 130 may display a fault when the sensor unit 120 is not equipped with a sensor or is defective, when communication with the sensor unit 120 fails, when a parameter of the sensor cartridge malfunctions, have.

The controller 130 may set a value corresponding to the alarm, Over, Under, and so on. For example, if the concentration of the gas to be measured is in the range of 10 ppm (part per million) to 2000 ppm, the controller 130 determines that the measured gas concentration is lower than the lowest value of the gas concentration to be measured, It can be set to display Under status in small cases. In addition, the controller 130 may set two alarm values Alarm1 and Alarm2. For example, the controller 130 can set the alarm 1 to 500 ppm and the alarm 2 to 1000 ppm. If the measured gas concentration exceeds 500 ppm, the controller 130 can display the alarm 1 status. If the measured gas concentration exceeds 1000 ppm, the controller 130 can display the alarm 2 status. If the measured gas concentration is greater than the maximum value of the gas concentration to be measured, the controller 130 may display an over state.

The control unit 130 may store data measured for each sensor cartridge in the measurement mode and events such as failure, alarm, over, under, etc. in the internal memory. An event log may be provided for each type of sensor, can do.

8 is an exemplary diagram showing an example of a screen that the control unit 130 outputs to the display unit 146 in the measurement mode according to an embodiment of the present invention.

8, the controller 130 displays the current time 710 in the measurement mode, the information 720, 730, 740, and 750 about the measured gas measured in each sensor cartridge, whether or not the SD card is inserted, Off light 760, and whether or not the interference gas is detected 770, for example. In addition, the controller 130 may display the current flow rate of the flow rate sensor and the current flow rate in a graph bar 780 and display a Modbus address 790 for allowing the external system to recognize the apparatus of the present invention You may.

FIG. 9 is an exemplary view showing an example of information (720, 730, 740) of measurement gas information measured on a specific sensor cartridge in a measurement mode according to an embodiment of the present invention.

9, the controller 130 displays the maximum value, the alarm 2 setting value, the alarm 1 setting value 810, the gas name 820, The gas concentration 830 can be output. The control unit 130 can set the values of the Alarm 1 and the Alarm 2 by key input. In the example of FIG. 6, it is possible to enter the "Alarm mode Sub page Item selection" in the LEVEL 3 (Item selection: 570) and set the values of Alarm 1 and Alarm 2.

10A to 10C are views showing an example of a screen for displaying an alarm by the control unit 130 in the measurement mode according to an embodiment of the present invention.

The control unit 130 can output an alarm when the concentration of the gas detected in each sensor cartridge of the sensor unit 120 is equal to or higher than a predetermined threshold value or within a predetermined range.

Referring to FIG. 10A, if the concentration of the gas coming from the sensor unit 120 is larger than the set value of Alarm 1 (for example, 500 ppm) and smaller than the set value of Alarm 2 (for example, 1000 ppm) Can be displayed on the screen. In addition, the controller 130 may also output the ALARM 1 LED in the status LED of the display unit 146.

10B, when the concentration of the gas coming from the sensor unit 120 is larger than the set value of the Alarm 2 (for example, 1000 ppm) and 110% of the set maximum value (HS of FIG. 9B, , It can be displayed on the screen that the alarm 2 has occurred. Also, the controller 130 may also output the ALARM 2 LED in the status LED of the display unit 146.

Referring to FIG. 10C, if the concentration of the gas coming from the sensor unit 120 is greater than 110% of a predetermined maximum value (HS in FIG. 9B, for example, 2000 ppm), the control unit 130 displays the character "RANGE OVER" And informs that the gas concentration exceeds the threshold value.

11 is a view showing an example of a screen displaying a failure by the controller 130 according to an embodiment of the present invention.

When a failure occurs in the air intake type multiple gas sensing apparatus according to the present invention, the control unit 130 may display information on the failure on the screen unit 420.

Referring to FIG. 11, when a failure occurs in the air-intake-type multi-gas sensing device, the controller 130 may display a FAULT on the screen unit 420 and display a fault code. An example of the displayed fault code is shown in Table 2 below.

Fault code meaning Condition E-10 When the sensor is not installed in the body or is defective Sensor channel cable not connected, communication exceeded more than 3 times E-11 When there is no communication between the main unit and the sensor Sensor communication error 3 times or more consecutively E-14 Parameter malfunction in sensor cartridge Above the internal setting value E-15 Sensor voltage output value too low "Check Inc Type only"
* When the EC type is -0.95V or less
* When CB, PID type is less than -0.45V E-16 Sensor voltage output value too high "Dec Type only check"
* When EC type + 0.95V or more
* When CB, PID type + 0.45V or more E-17 Sensor calibration interval too small For non-IR sensors, if the existing calibration interval is less than 0.01V E-21 When the flow rate of the flow sensor is 1000cc / min or less When the sensor check time exceeds time 0 E-22 When the flow rate of the flow sensor is 1000cc / min or more If more than 1000 sensor check time times out E-30 When the gas concentration value is less than -10% When the gas concentration value is less than -10% E-31 Main input voltage value too low 16V or less / 6 seconds or more

6, if there is a key input for entering another mode in the measurement mode state, the controller 130 performs a password check 540 to check whether the user is a legitimate user, and if the user is a legitimate user, Can be performed.

If the input key is S1 to S4, the control unit 130 can directly enter the set menu for each key (540). As an example, when the S1 key is input, the user can directly enter the "Calibration Mode Sub page selection" menu, and when the S2 key is input, the user can directly enter the "All Zero mode selection" menu.

If the input key is a menu key, the control unit 130 may display a mode for selecting the LEVEL1 (mode selection, 550) menu. The control unit 130 receives the direction key and the ESC key of the ENTER key from the key input unit 145 and displays menus of LEVEL1 (mode selection) 550, LEVEL2 (page selection) 560, LEVEL3 (item selection) I can show you. When the setting by the menu selection by the key input unit 145 is completed, the control unit 130 can store the result in the internal memory.

12 is an exemplary view showing the internal structure of a multiple gas sensing device including an NDIR sensor cartridge according to an embodiment of the present invention.

12, a terminal unit 140 is mounted at the lower end, and a suction port 111, an exhaust port 113, a pump 115, and a flow sensor 117 of the suction unit 110, the sensor unit 120, Can be mounted. Although not shown in FIG. 12, the controller 130 is located inside the lid portion of the apparatus proposed by the present invention, and the display portion 146 is located outside. The air introduced by the pump 115 enters the suction port along the path 1110 of Fig. 12 and passes through the NDIR sensor cartridge 123 mounted on the sensor unit 120 and the other sensor cartridges 121 to 122 to the exhaust port Can be discharged.

Referring to the sensor unit 120 of FIG. 12, other sensor cartridges, except for the NDIR sensor cartridge, have the same size and the same outer shape, and may have the same mounting structure (for example, four screws). In addition, each sensor cartridge may be configured to have the same interface for transmitting data to be measured to the controller 130. [ Therefore, regardless of the type of the sensor cartridge, the sensor unit 120 can be mounted at any position except the position for the NDIR sensor cartridge, and can be easily detached. Therefore, the air suction type gas sensing apparatus of the present invention can easily change the configuration of the sensor cartridge in accordance with the user's demand (kind of gas to be measured).

13 is a flowchart illustrating a method for preventing gas detection malfunction according to an embodiment of the present invention.

Isopropyl alcohol, ethanol and acetone used as a semiconductor cleaning agent in the air and coolant such as a semiconductor facility refrigerant cause an interference reaction to PFC gas measurement, Malfunction may be caused. In order to prevent such a malfunction, the controller 130 receives the measured result from the sensor unit 120 and the NDIR sensor 123 and the photoionization detector sensor 121 or 122 (S1200) It is possible to judge whether the detection of PFC gas to be measured or the detection of alcohol or the like which is an interfering gas (S1210). The control unit 130 may output information indicating the interference gas detection (S1230) based on the determination result.

In one embodiment of the present invention, when isopropyl alcohol is present in the air, the NDIR sensor 123 shows spectral results similar to PFC gas. Therefore, it can not be distinguished whether PFC gas or isopropyl alcohol exists in the air only by the NDIR sensor 123, so that the control unit 130 may malfunction due to the presence of the PFC gas and generate an alarm. The photoionization detector sensor 121 or 122 may indicate presence or absence of reaction only with isopropyl alcohol. Therefore, if the results of the photoionization detector sensor 121 or 122 are used together, the controller 130 can determine whether there is PFC gas in the air, whether isopropyl alcohol is present, Propyl alcohol) can be output.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents. Only. The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

Claims

An infrared light source that emits energy in a 2um to 12um wavelength band;
A waveguide through which the emitted energy is transmitted;
A measurement unit capable of simultaneously measuring six wavelength bands within the 2 um to 12 um wavelength band energy transmitted through the waveguide;
And an interface unit for outputting data measured by the measurement unit
Non Dispersive Infrared (NDIR) sensor cartridge.

The optical pickup apparatus according to claim 1,
Four in a wavelength band ranging from 8 to 11 um and two in a wavelength band ranging from 3 to 4 um,
Non Dispersive Infrared (NDIR) sensor cartridge.

The optical pickup apparatus according to claim 1,
10.3um, 9.3um, 8.9um, 8.0um, 3.9um, 3.3um,
Non Dispersive Infrared (NDIR) sensor cartridge.

A suction unit for controlling suction of air for measurement and discharge of air after measurement;
A sensor unit for measuring a component of the gas in the sucked air;
A controller for processing a measurement signal coming from the sensor unit and outputting a measurement result; And
And a terminal unit for communicating with the outside and inputting and outputting information according to the control of the control unit,
Wherein the sensor unit comprises an NDIR sensor cartridge for measuring a PFC gas component in the inhaled gas and at least one second sensor cartridge for measuring a gas component of a kind other than a PFC gas.
Air intake type composite gas sensing device.

5. The apparatus according to claim 4,
A suction port through which air for measurement is sucked;
An exhaust port for exhausting the air after the measurement;
A pump for sucking the air; And
And a flow sensor for measuring the amount of the sucked air and controlling the pump so that a certain amount of air can be introduced.
Air intake type composite gas sensing device.

5. The image forming apparatus as claimed in claim 4, wherein the NDIR sensor cartridge and the second sensor cartridge further comprise:
And a sensor unit mounted on the sensor unit,
Air intake type composite gas sensing device.

7. The sensor cartridge according to claim 6,
A sensing unit for mounting any one of a photoionization detector sensor, an electrochemical sensor, and a contact combustion sensor; And
And an interface unit for transmitting data measured by the sensing unit to the control unit.
Air intake type composite gas sensing device.

7. The sensor cartridge according to claim 6,
The sensor is configured to have the same size and shape regardless of the type of sensor to be measured.
Air intake type composite gas sensing device.

The terminal according to claim 4,
A power supply for receiving a power supply;
A communication unit for supporting at least one of an RS485 communication unit and a current output unit for outputting a current indicating a measurement result to share the measurement result with an external system;
An alarm output unit for outputting alarms generated by the device under the control of the control unit;
A key input unit for user input; And
And a display unit for displaying a setting screen and a measurement result under the control of the control unit.
Air intake type composite gas sensing device.

10. The semiconductor memory device according to claim 9,
In proportion to the measurement result

And outputs the current value,
Wherein the set maximum value is a maximum value of a range set by the controller,
Air intake type composite gas sensing device.

The apparatus as claimed in claim 9,
Wherein the number of the channel terminal groups is the same as the number of sensor terminals mounted on the sensor unit for outputting a measurement-related alarm in the sensor unit and a system terminal group for outputting an alarm generated in the air- Including,
Air intake type composite gas sensing device.

12. The system of claim 11, wherein the system terminal group and each channel terminal group comprise:
It includes three alarm signals,
Air intake type composite gas sensing device.

13. The system of claim 12, wherein the system terminal group and each channel terminal group comprise:
Further comprising a jumper or switch for determining an output mode of the alarm signal,
And outputting the alarm signal in the form of an NC (Normal Close) signal or a NO (Normal Open) signal by connection of the jumper or switch.
Air intake type composite gas sensing device.

The apparatus of claim 9, wherein the key input unit comprises:
An M key requesting entry of a menu mode;
S1, S2, S3, S4 keys set to go directly to a specific menu when a key is pressed;
An ESC key used to return to the previous screen during each mode operation;
An ENTER key for entering a mode or storing a set value;
A direction key used to move between items configured in each mode; And
And a RESET key used for returning to the measurement mode in the specific mode state entered using the above keys
Air intake type composite gas sensing device.

The display device according to claim 9,
A status LED unit for indicating the status of the device; And
And a display unit for displaying a screen set by the control of the controller according to a key input of the key input unit or displaying a measurement result
Air intake type composite gas sensing device.

16. The apparatus of claim 15,
POWER LED to check whether the power of the device is properly connected, STATUS LED to check operation status, FAULT LED to operate when a fault occurs during operation, ALARM2 LED to operate when an alarm 2 occurs in the system or sensor cartridge, The alarm 1 is generated when the measured gas concentration is larger than the set value of Alarm 1 set by the control unit and smaller than the set value of Alarm 2, Which is an alarm that occurs when the gas concentration is larger than the Alarm2 set value set by the control unit,
Air intake type composite gas sensing device.

5. The apparatus of claim 4,
Wherein the system further comprises a self-diagnosis function for checking whether the system of the air-intake-type multi-gas sensing device and each sensor cartridge mounted on the sensor unit operates normally,
Air intake type composite gas sensing device.

5. The apparatus of claim 4,
And processing the measurement signal from the sensor unit to output an alarm when the concentration of the sensed gas is above a predetermined threshold or within a predetermined range,
Air intake type composite gas sensing device.

Receiving a measured result from the NDIR sensor and photoionization detector sensor;
Determining whether detection of the desired PFC gas or detection of the interfering gas is performed by combining the measured results; And
And outputting information indicative of interference gas detection based on the determination result.
How to prevent gas detection malfunction.