KR20160141590A - NDIR Sensor and Air Sampling Multi Gas Detecting Apparatus Having The Same - Google Patents
NDIR Sensor and Air Sampling Multi Gas Detecting Apparatus Having The Same Download PDFInfo
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- KR20160141590A KR20160141590A KR1020150077492A KR20150077492A KR20160141590A KR 20160141590 A KR20160141590 A KR 20160141590A KR 1020150077492 A KR1020150077492 A KR 1020150077492A KR 20150077492 A KR20150077492 A KR 20150077492A KR 20160141590 A KR20160141590 A KR 20160141590A
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- 238000001745 non-dispersive infrared spectroscopy Methods 0.000 title abstract 3
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2273—Atmospheric sampling
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/24—Suction devices
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
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- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/626—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using heat to ionise a gas
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- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/02—Alarms for ensuring the safety of persons
- G08B21/12—Alarms for ensuring the safety of persons responsive to undesired emission of substances, e.g. pollution alarms
- G08B21/14—Toxic gas alarms
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Abstract
The present invention relates to an air intake type complex gas sensing apparatus including an NDIR sensor for detecting leakage of a toxic gas including a PFC gas in a factory or the like.
In the present invention, there is provided an air conditioner comprising: a suction unit for controlling suction of air for measurement and air discharge after measurement; a sensor unit for measuring a gas component in the sucked air; A control unit; And a terminal unit for communicating with outside and inputting and outputting information according to the control of the control unit. The upper sensor unit is provided with an NDIR sensor cartridge for measuring the presence or absence of PFC gas in the sucked gas, An air intake type multiple gas sensing apparatus capable of mounting a maximum of two sensor cartridges capable of being mounted thereon is disclosed.
According to the present invention, it is possible to detect a large number of toxic gases with a single gas sensor without installing a plurality of gas detectors, and it is possible to save a high cost due to installation of a bar, and reduce the maintenance cost required for the operation. Also, according to the present invention, it is possible to prevent a malfunction due to an interference gas which may occur at the time of PFC measurement.
Description
The present invention relates to an air suction type multiple gas sensing device, and more particularly, to an air suction type multiple gas sensing device that independently senses various types of gases including PFC gas in one device.
Perfluorocarbos (PFC) gases are widely used in chemical vapor deposition (CVD) chamber cleaning, film etching, etc. used in dry processing applications in semiconductor manufacturing facilities Is used. PFC gas is mainly classified as toxic gas, and measurements must be made in PPM (part per million) to ensure safety. Table 1 shows the predominant PFC gases and their applications.
Currently, common PFC gases are measured by a combination of pyrolysis unit and electrochemical sensor. However, such gas detection methods are not limited to isopropyl alcohol, ethanol and acetone, which are used as semiconductor cleaning agents, It may generate an interference reaction to the coolant and cause malfunction due to wrong measurement value. In the case of a pyrolysis apparatus, the molecular binding energy is released by heat energy, and the gas is measured by an electrochemical sensor. However, this principle is applied to both the measurement gas and the interference gas.
In order to detect the PFC gas, an optical system may be used instead of a pyrolysis apparatus. In this case, the dual-sensing NDIR measurement method, which is mainly used, has a problem that the reaction spectra of the PFC gases to be measured are overlapped.
In addition, in factories using such gases, there are disadvantages in that, in addition to various PFC gases, gases such as COS, CO, and CH4 are simultaneously used, so that it is necessary to use several gas detectors as many as the types of gas to be measured. The gas detector has a problem that the measurement time and condition are influenced by the natural diffusion rate of the leaked gas and the air flow.
SUMMARY OF THE INVENTION It is an object of the present invention to solve the above problems and provide a multi-type NDIR measuring apparatus capable of measuring six wavelength bands for accurate measurement of various PFC gases.
It is another object of the present invention to solve the above-described problems. It is an object of the present invention to provide a gas measurement system and a gas measurement method thereof, In which the measurement gas is detected under the same conditions and has quick response.
It is another object of the present invention to solve the above-described problems and provide an air intake type complex gas apparatus and an alarm preventing method for preventing generation of an alarm that may occur during PFC gas measurement.
According to an aspect of the present invention, there is provided an NDIR sensor cartridge including: an infrared light source that emits energy in a 2 to 12 um wavelength band; a waveguide to which the emitted energy is transmitted; A measurement unit capable of simultaneously measuring six wavelength bands within the wavelength band energy, and an interface unit outputting data measured by the measurement unit.
The six wavelength bands to be measured are four in the wavelength band ranging from 8 탆 to 11 탆 and can be two in the wavelength band ranging from 3 탆 to 4 탆. In particular, 10.3 袖 m, 9.3 袖 m, 8.9 袖 m, 8.0 袖 m, It may be a wavelength band of 3.3 um.
According to another aspect of the present invention, there is provided an air-intake-type multi-gas sensing apparatus including a suction unit for controlling suction of air for measurement and air discharge after measurement, a gas component in the sucked air, And a terminal unit for communicating with the outside and for inputting and outputting information according to the control of the control unit, wherein the sensor unit comprises: Part may include an NDIR sensor cartridge for measuring a PFC gas component in the sucked gas and at least one second sensor cartridge for measuring a gas component other than the PFC gas.
The suction unit of the air suction type multi-gas sensing device measures the amount of the air sucked, measures a quantity of air And a flow rate sensor for controlling the pump so that the pump can be introduced.
The NDIR sensor cartridge and the second sensor cartridge may be detachably attached to the sensor unit.
The second sensor cartridge may include a sensing unit for mounting one of a photoionization detector sensor, an electrochemical sensor, and a contact combustion sensor, and an interface unit for transmitting data measured by the sensing unit to the controller.
The sensor cartridge may be configured to have the same size and shape regardless of the type of the sensor to be measured.
A communication unit for supporting at least one of an RS485 communication unit for sharing the measurement result with an external system and a current output unit for outputting a current indicating a measurement result, An alarm output unit for outputting an alarm generated by the device under the control of the control unit, a key input unit for inputting a user, and a display unit for displaying a setting screen and a measurement result according to the control of the control unit.
The current output part of the terminal part
mA, and the set maximum value may be a maximum value of the range set by the controller.The alarm output unit of the terminal unit may be configured to have a system terminal group for outputting an alarm generated in the air intake type complex gas sensing apparatus and a sensor terminal group for outputting a measurement related alarm in the sensor unit Number of channel terminal groups.
The system terminal group and each channel terminal group may include three alarm signals. In addition, a jumper or switch for determining the output mode of the alarm signal is further provided, and the alarm signal can be outputted in the form of NC (Normal Close) signal or NO (Normal Open) signal by connection of the jumper or switch have
The key input unit of the terminal unit includes an M key for requesting entry of a menu mode, S1, S2, S3 and S4 keys set to go directly to a specific menu at the time of key input, an ESC key used for returning to a previous screen during each mode operation, An ENTER key for entering or storing a set value, a direction key used for moving between items configured in each mode, and a RESET key used for returning to the measurement mode in the specific mode state entered by using the above keys .
The display unit of the terminal unit may include a status LED unit indicating a status of the device, and a screen unit displaying a screen set by control of the controller according to the key input of the key input unit or displaying a measurement result.
The status LED of the display unit shows POWER LED to check whether the power of the device is properly connected, STATUS LED to check the operation status, FAULT LED to operate when the fault occurs, And an ALARM1 LED that operates when an
The control unit may further include a self-diagnosis function for checking whether the system of the air-intake-type multi-gas sensing device and each sensor cartridge mounted on the sensor unit operates normally.
The control unit may process the measurement signal from the sensor unit and output an alarm when the concentration of the detected gas is above a predetermined threshold or within a predetermined range.
According to another aspect of the present invention, there is provided a gas detection malfunction prevention method comprising: receiving a measurement result from an NDIR sensor and a photoionization detector sensor; Determining whether the detection of the desired PFC gas or the detection of the alcohol or the like which is an interfering gas, and outputting the information indicating the detection of the interfering gas based on the determination result.
According to the present invention, it is possible to detect a large number of gases by one device, which can save a high cost incurred in installing a plurality of individual gas detectors. By applying a modular sensor cartridge, By configuring the detector adaptively, high scalability can be provided.
It is also possible to reduce maintenance costs by operating one instrument rather than a number of individual gas detectors.
Also, according to the present invention, it is possible to prevent a malfunction due to an interference gas which may occur at the time of PFC measurement.
1 is a block diagram schematically showing a configuration of an NDIR sensor cartridge according to an embodiment of the present invention.
2 is a block diagram schematically showing the overall configuration of an air-intake type multiple gas sensing apparatus including an NDIR sensor cartridge according to an embodiment of the present invention.
3 is a configuration diagram showing a schematic configuration of the sensor cartridge.
4 is an exemplary diagram showing a terminal structure of an alarm output unit according to an embodiment of the present invention.
5 is an exemplary view illustrating a key input unit and a display unit of the air intake type multiple gas sensing apparatus according to an embodiment of the present invention.
6 is an exemplary diagram showing a device control flow of a control unit according to an embodiment of the present invention.
7 is an exemplary diagram showing a self-diagnosis result according to an embodiment of the present invention.
8 is an exemplary diagram showing an example of a screen that the control unit outputs to the display unit in the measurement mode according to an embodiment of the present invention.
9 is an exemplary view showing an example of an information screen for a measurement gas measured in a specific sensor cartridge in a measurement mode according to an embodiment of the present invention.
10A to 10C are views showing an example of a screen for displaying an alarm by the control unit in the measurement mode according to the embodiment of the present invention.
11 is a view showing an example of a screen displaying a failure by the control unit according to an embodiment of the present invention.
12 is an exemplary view showing an internal structure of a multi-gas sensing device including an NDIR sensor cartridge according to an embodiment of the present invention.
13 is a flowchart illustrating a method for preventing gas detection malfunction according to an embodiment of the present invention.
In the following description, well-known functions or constructions are not described in detail to avoid unnecessarily obscuring the subject matter of the present invention.
Although the present invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, But should be understood to include all modifications, equivalents, and alternatives.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description with reference to the accompanying drawings, the same or corresponding components will be denoted by the same reference numerals, and redundant description thereof will be omitted.
1 is a block diagram schematically showing a configuration of an NDIR sensor cartridge according to an embodiment of the present invention.
The NDIR sensor can detect gas using Non Dispersive Infrared (NDIR) method. NDIR has an asymmetric structure or uses a phenomenon in which gas molecules of three or more atoms absorb energy corresponding to their natural vibration energy, which is excellent in selectivity and can secure precision, reliability, and long-term stability.
By analyzing the wavelength band of the individual gas to be measured, a band-pass filter capable of absorbing the energy of the six spectral regions having the greatest reaction is constituted, and a gas band is measured by analyzing the wavelength band in real time using a pyroelectric infrared sensor .
Referring to FIG. 1, an NDIR
The
The emitted energy is transmitted to the measuring
The measuring
The interface unit 104 may receive the electrical signal output from the
2 is a block diagram schematically showing the overall configuration of an air-intake type multiple gas sensing apparatus including an NDIR sensor cartridge according to an embodiment of the present invention.
2, an air intake type multiple gas sensing apparatus including an NDIR sensor cartridge according to an embodiment of the present invention includes a
The
The
The
Fig. 3 is a configuration diagram showing a schematic configuration of the
3, each of the
A photoionization detector (PID) sensor can be used to detect interfering gases such as alcohol and coolant. The PID sensor is a device that measures photons of the volatile organic compounds by emitting photons in the ultraviolet region and making them electrically charged positively charged ions. The PID sensor may include a miniature UV lamp that emits ultraviolet photons of a particular wavelength as a major constituent. The energy level is determined by the gas injected into the lamp and the type of material used in the lamp window, usually between 9.5 and 11.7 eV (electron volts). Here, 1 eV is defined as the work of one electron as it goes up one volt potential.
Contact combustion sensors can be used to detect CH4, a common combustible gas. The contact combustion sensor is a device in which a catalyst is coated with a carrier in the form of a coil of platinum wire. When the sensor in the energized state comes into contact with the combustible gas, it is burned by the action of the catalyst, and the electric resistance is changed by the heat of combustion, and the gas concentration can be measured by measuring this change.
Electrochemical sensors can be used to detect common toxic gases, COS or CO gases. The electrochemical sensor includes a sensing electrode (not shown) where an oxidation (reduction) reaction takes place, a counter electrode (not shown) where a reduction (oxidation) reaction occurs simultaneously with the sensing electrode, and a potential And a reference electrode (not shown). A key feature of electrochemical sensors is the diffusion barrier which limits the flow of the gas to be detected to the sensing electrode. By this method, all the gases can cause an oxidation or reduction reaction at the detection electrode. Since the current generated when this oxidation-reduction reaction is caused is linearly proportional to the gas concentration on the detection electrode side, the concentration of the gas can be measured through the value of this current. In the case of the electrochemical sensor, various electrochemical sensors exist depending on the measurement gas, and the
In addition, although the
The
The
The
In Equation (1), the set maximum value means the maximum value of the gas concentration range set by the
An output of 0mA or 2mA can act as an alarm signal to signal that the sensor cartridge is faulty. A current of 20 mA or more can be used to indicate that the measured value is greater than the set maximum.
The
4 is an exemplary diagram showing a terminal structure of an alarm output unit according to an embodiment of the present invention.
Referring to FIG. 4, the
The alarm generated in the air intake type multiple gas sensing apparatus may be an alarm generated when the apparatus is malfunctioning, for example, when the voltage of the power source is lowered. The measurement related alarm may mean a case where the measured result exceeds the Alarm1 set value set by the
Each of the
A jumper or switches 320 to 328 may be used for each of the alarm signals A1, A2, and TRB to determine whether the alarm signals A1, A2, and TRB operate as NO or NC . More specifically, when the A and C of the jumper or switches 320 to 328 are connected, an NO-type alarm signal can be output. When C and B are connected, an NC-type alarm signal can be output.
5 is an exemplary diagram showing a
The
5, the
Referring to FIG. 5, the
The
6 is an exemplary diagram showing a device control flow of the
When the power is turned on, the
7 is an exemplary diagram showing a self-diagnosis result according to an embodiment of the present invention.
Referring to FIG. 7, the
When the self-diagnosis function is normally completed, the
The
The
The
8 is an exemplary diagram showing an example of a screen that the
8, the
FIG. 9 is an exemplary view showing an example of information (720, 730, 740) of measurement gas information measured on a specific sensor cartridge in a measurement mode according to an embodiment of the present invention.
9, the
10A to 10C are views showing an example of a screen for displaying an alarm by the
The
Referring to FIG. 10A, if the concentration of the gas coming from the
10B, when the concentration of the gas coming from the
Referring to FIG. 10C, if the concentration of the gas coming from the
11 is a view showing an example of a screen displaying a failure by the
When a failure occurs in the air intake type multiple gas sensing apparatus according to the present invention, the
Referring to FIG. 11, when a failure occurs in the air-intake-type multi-gas sensing device, the
* When the EC type is -0.95V or less
* When CB, PID type is less than -0.45V
* When EC type + 0.95V or more
* When CB, PID type + 0.45V or more
6, if there is a key input for entering another mode in the measurement mode state, the
If the input key is S1 to S4, the
If the input key is a menu key, the
12 is an exemplary view showing the internal structure of a multiple gas sensing device including an NDIR sensor cartridge according to an embodiment of the present invention.
12, a
Referring to the
13 is a flowchart illustrating a method for preventing gas detection malfunction according to an embodiment of the present invention.
Isopropyl alcohol, ethanol and acetone used as a semiconductor cleaning agent in the air and coolant such as a semiconductor facility refrigerant cause an interference reaction to PFC gas measurement, Malfunction may be caused. In order to prevent such a malfunction, the
In one embodiment of the present invention, when isopropyl alcohol is present in the air, the
It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents. Only. The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.
Claims (19)
A waveguide through which the emitted energy is transmitted;
A measurement unit capable of simultaneously measuring six wavelength bands within the 2 um to 12 um wavelength band energy transmitted through the waveguide;
And an interface unit for outputting data measured by the measurement unit
Non Dispersive Infrared (NDIR) sensor cartridge.
Four in a wavelength band ranging from 8 to 11 um and two in a wavelength band ranging from 3 to 4 um,
Non Dispersive Infrared (NDIR) sensor cartridge.
10.3um, 9.3um, 8.9um, 8.0um, 3.9um, 3.3um,
Non Dispersive Infrared (NDIR) sensor cartridge.
A sensor unit for measuring a component of the gas in the sucked air;
A controller for processing a measurement signal coming from the sensor unit and outputting a measurement result; And
And a terminal unit for communicating with the outside and inputting and outputting information according to the control of the control unit,
Wherein the sensor unit comprises an NDIR sensor cartridge for measuring a PFC gas component in the inhaled gas and at least one second sensor cartridge for measuring a gas component of a kind other than a PFC gas.
Air intake type composite gas sensing device.
A suction port through which air for measurement is sucked;
An exhaust port for exhausting the air after the measurement;
A pump for sucking the air; And
And a flow sensor for measuring the amount of the sucked air and controlling the pump so that a certain amount of air can be introduced.
Air intake type composite gas sensing device.
And a sensor unit mounted on the sensor unit,
Air intake type composite gas sensing device.
A sensing unit for mounting any one of a photoionization detector sensor, an electrochemical sensor, and a contact combustion sensor; And
And an interface unit for transmitting data measured by the sensing unit to the control unit.
Air intake type composite gas sensing device.
The sensor is configured to have the same size and shape regardless of the type of sensor to be measured.
Air intake type composite gas sensing device.
A power supply for receiving a power supply;
A communication unit for supporting at least one of an RS485 communication unit and a current output unit for outputting a current indicating a measurement result to share the measurement result with an external system;
An alarm output unit for outputting alarms generated by the device under the control of the control unit;
A key input unit for user input; And
And a display unit for displaying a setting screen and a measurement result under the control of the control unit.
Air intake type composite gas sensing device.
In proportion to the measurement result And outputs the current value,
Wherein the set maximum value is a maximum value of a range set by the controller,
Air intake type composite gas sensing device.
Wherein the number of the channel terminal groups is the same as the number of sensor terminals mounted on the sensor unit for outputting a measurement-related alarm in the sensor unit and a system terminal group for outputting an alarm generated in the air- Including,
Air intake type composite gas sensing device.
It includes three alarm signals,
Air intake type composite gas sensing device.
Further comprising a jumper or switch for determining an output mode of the alarm signal,
And outputting the alarm signal in the form of an NC (Normal Close) signal or a NO (Normal Open) signal by connection of the jumper or switch.
Air intake type composite gas sensing device.
An M key requesting entry of a menu mode;
S1, S2, S3, S4 keys set to go directly to a specific menu when a key is pressed;
An ESC key used to return to the previous screen during each mode operation;
An ENTER key for entering a mode or storing a set value;
A direction key used to move between items configured in each mode; And
And a RESET key used for returning to the measurement mode in the specific mode state entered using the above keys
Air intake type composite gas sensing device.
A status LED unit for indicating the status of the device; And
And a display unit for displaying a screen set by the control of the controller according to a key input of the key input unit or displaying a measurement result
Air intake type composite gas sensing device.
POWER LED to check whether the power of the device is properly connected, STATUS LED to check operation status, FAULT LED to operate when a fault occurs during operation, ALARM2 LED to operate when an alarm 2 occurs in the system or sensor cartridge, The alarm 1 is generated when the measured gas concentration is larger than the set value of Alarm 1 set by the control unit and smaller than the set value of Alarm 2, Which is an alarm that occurs when the gas concentration is larger than the Alarm2 set value set by the control unit,
Air intake type composite gas sensing device.
Wherein the system further comprises a self-diagnosis function for checking whether the system of the air-intake-type multi-gas sensing device and each sensor cartridge mounted on the sensor unit operates normally,
Air intake type composite gas sensing device.
And processing the measurement signal from the sensor unit to output an alarm when the concentration of the sensed gas is above a predetermined threshold or within a predetermined range,
Air intake type composite gas sensing device.
Determining whether detection of the desired PFC gas or detection of the interfering gas is performed by combining the measured results; And
And outputting information indicative of interference gas detection based on the determination result.
How to prevent gas detection malfunction.
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KR1020150077492A KR20160141590A (en) | 2015-06-01 | 2015-06-01 | NDIR Sensor and Air Sampling Multi Gas Detecting Apparatus Having The Same |
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KR1020150077492A KR20160141590A (en) | 2015-06-01 | 2015-06-01 | NDIR Sensor and Air Sampling Multi Gas Detecting Apparatus Having The Same |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102073064B1 (en) | 2019-10-10 | 2020-02-04 | (주)세성 | Non-dispersion near infrared gas measuring device |
KR20200091937A (en) * | 2018-01-10 | 2020-07-31 | 허니웰 인터내셔날 인코포레이티드 | Gas detection device |
EP4053543A4 (en) * | 2019-10-29 | 2022-12-07 | Daikin Industries, Ltd. | Gas detection device and gas leakage detection system |
-
2015
- 2015-06-01 KR KR1020150077492A patent/KR20160141590A/en not_active Application Discontinuation
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200091937A (en) * | 2018-01-10 | 2020-07-31 | 허니웰 인터내셔날 인코포레이티드 | Gas detection device |
KR102073064B1 (en) | 2019-10-10 | 2020-02-04 | (주)세성 | Non-dispersion near infrared gas measuring device |
EP4053543A4 (en) * | 2019-10-29 | 2022-12-07 | Daikin Industries, Ltd. | Gas detection device and gas leakage detection system |
AU2020373988B2 (en) * | 2019-10-29 | 2023-07-27 | Daikin Industries, Ltd. | Gas detector and leakage-gas detection system |
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