KR20160041488A - Optical system for focusing laser beam - Google Patents

Optical system for focusing laser beam Download PDF

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Publication number
KR20160041488A
KR20160041488A KR1020140135533A KR20140135533A KR20160041488A KR 20160041488 A KR20160041488 A KR 20160041488A KR 1020140135533 A KR1020140135533 A KR 1020140135533A KR 20140135533 A KR20140135533 A KR 20140135533A KR 20160041488 A KR20160041488 A KR 20160041488A
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KR
South Korea
Prior art keywords
laser beam
laser
cutting
focus
focused
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Application number
KR1020140135533A
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Korean (ko)
Inventor
권성옥
백성훈
정진만
박승규
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한국원자력연구원
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Priority to KR1020140135533A priority Critical patent/KR20160041488A/en
Publication of KR20160041488A publication Critical patent/KR20160041488A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The present invention relates to a laser beam focusing optical system device, and more particularly, to a laser beam focusing optical system device that includes a plurality of beam expanders that enlarge a width of a laser beam incident from one side and output the laser beam to the other side, And a curvilinear focusing mirror for reflecting the laser beams output from the beam expander downward and concentrating the reflected laser beams so that a focus is formed at different positions in the vertical direction and the horizontal direction, respectively; And the laser beams focused by the curved surface focusing mirror are sequentially focused at the upper, middle, and lower heights of the cutting specimen in the up-and-down direction, respectively, and the backward, The focal point is formed in the forward position in order, so that the efficiency of the laser cutting can be increased, the thick plate can be processed quickly and precisely, and the laser beam focusing Optical system device.

Description

[0001] The present invention relates to an optical system for focusing laser beams,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser beam focusing optical system, and more particularly, to a laser beam focusing optical system that uses multiple beams to focus and focus at different positions, The present invention relates to a laser beam focusing optical system device capable of efficiently cutting a thick plate material by reducing an affected zone and allowing a plate material to be processed to effectively absorb the laser beam.

The laser cutting device is a device for cutting or cutting materials using the energy of a laser beam. It can be used for precision machining of various materials such as metal, wood, cloth, plastic and glass do.

However, since the conventional laser processing cutting apparatus uses a single laser beam to focus the laser beam to cut the laser beam, the focus of the laser beam deviates from the upper and lower ends of the plate during high power laser processing such as cutting of thick plate, The laser beam is not focused, so that the cutting efficiency due to melting is lowered. As a result, the heat affected zone (HAZ: Heat Affected Zone), which is a region affected by heat, The precision is lowered and the laser beam is prevented from being transmitted to the lower side by the melt on the upper surface portion of the plate material melted by the laser beam. In addition, when a single laser beam is condensed to form a single focal point, the laser beam is not efficiently absorbed by the gas generated in the melted portion or the plate material cut by the plume, have.

In order to solve this problem, US Pat. No. 2003-0006221 (entitled Method and apparatus for cutting a muli-layer substrate by a dual laser irradiation) or a Korean patent (KR 2011-0111608, A method of laser cutting a film) has been devised in which a laser beam is irradiated to a sample to be sequentially cut by dividing the laser beam into a plurality of laser beams and varying the focal position of each laser beam. However, There is a conceptual difference from the simultaneous cutting method in which the beam cuts a part of the specimen.

In addition, Korean Laid Open Patent Application (KR 2014-0020776, a laser processing apparatus using a Fresnel region element and a substrate cutting method using the same) and US Patent Application Publication No. 2013-0197634, Apparatus for Patterned Plasma-Mediated Laser Trephination of the Lens Capsule and three dimensinal phaco-segmentation), a method of increasing the efficiency of the cutting process by simultaneously irradiating a plurality of focal points of a single laser beam using a multi-focal point is also devised. However, in this method, it is difficult to arrange the focus of the plurality of laser beams in the depth direction so as to spatially separate or partially overlap the laser beams, and to solve the problem of the processing deterioration due to the plasma plume.

Accordingly, there is a need to develop a laser cutting apparatus capable of increasing the efficiency of laser cutting, making it possible to process a thick plate quickly and precisely, and reducing the area affected by heat to improve the quality of the cutting material.

KR 10-1388181 (April 14, 2014)

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and it is an object of the present invention to provide a laser cutting method and a laser cutting method, And to improve the processing quality of the plate material to be cut by reducing the area affected by heat, and to provide a laser beam focusing optical system device capable of improving the quality of the plate material to be cut.

According to an aspect of the present invention, there is provided a laser beam focusing optical system, comprising: a plurality of beam expanders that enlarge a width of a laser beam incident from one side and output the laser beam to the other side and are arranged in parallel in a vertical direction; And a curvilinear focusing mirror for reflecting the laser beams output from the beam expander downward and concentrating the reflected laser beams so that a focus is formed at different positions in the vertical direction and the horizontal direction, respectively; And the laser beams focused by the curved surface focusing mirror are sequentially focused at the upper, middle, and lower heights of the cutting specimen in the up-and-down direction, respectively, and the backward, And focal points are formed in order at the front position.

The laser beam focusing optical system of the present invention includes a beam expander for enlarging a width of a laser beam incident from one side and outputting the enlarged laser beam to the other side; And a curvilinear focusing mirror for reflecting the laser beam output from the beam expander downward so as to condense the reflected laser beam so as to form a continuous focal point in a height direction and a horizontal direction; Wherein the laser beams focused by the curved surface focusing mirror are continuously focused in the vertical direction from the upper portion to the lower portion of the cutting specimen and the laser beams focused from the rear to the front in the conveying direction of the cutting specimen And a focal point is continuously formed in the position.

The laser beam focusing optical system of the present invention has an advantage that it can improve the efficiency of laser cutting and can process a thick plate quickly and precisely and reduce the area affected by heat to improve the quality of the plate to be cut.

In addition, the focal point of the laser beams can be adjusted so that the position in the thickness direction of the plate material and the position of the plate material in the transport direction are formed differently. The focus height and position of the laser beams It is advantageous to perform optimized cutting.

1 is a front schematic view showing a laser beam focusing optical system according to a first embodiment of the present invention;
2 is a schematic cross-sectional view showing a beam expander according to the present invention;
3 is a schematic view showing a focus change according to an angle adjustment of a beam splitter and a reflecting mirror according to the present invention;
FIG. 4 is a schematic view showing a focus change according to an angle adjustment of a curved surface condensing mirror according to the present invention; FIG.
5 is a front schematic view showing a laser beam focusing optical system according to a second embodiment of the present invention;

Hereinafter, the laser beam focusing optical system of the present invention as described above will be described in detail with reference to the accompanying drawings.

≪ Example 1 >

1 is a schematic front view showing a laser beam focusing optical system according to a first embodiment of the present invention.

As shown in the drawing, the laser beam focusing optical system 1000 according to the first embodiment of the present invention enlarges the width of a laser beam incident from one side and outputs the enlarged laser beam to the other side, and a plurality of beam expanders 400); And a curvilinear focusing mirror 500 that reflects the laser beams output from the beam expander 400 downward and concentrates the reflected laser beams so that a focus is formed at different positions in the vertical direction and the horizontal direction, respectively. The laser beams focused by the curved surface condensing mirror 500 are sequentially focused on the upper, middle, and lower heights of the cutting piece 600 in the vertical direction. In the forward direction, the center direction, and the rear direction, respectively.

In the first embodiment of the laser beam focusing optical system according to the present invention, one laser oscillator 100 generates a laser beam and generates a laser beam The laser beam is divided into three laser beams, and the laser beams are made incident on the respective beam expanders.

The beam expander 400 enlarges the width of the laser beam incident on one side and outputs the expanded laser beam to the other side. The beam expanders 400 may be arranged in the horizontal direction so that a plurality of the beam expanders 400 may be arranged in parallel in the vertical direction.

The curved surface focusing mirror 500 is disposed at an angle to the right side of the beam expanders 400 to reflect downwardly broadened laser beams through the beam expander 400 and reflects the laser beams to the curved surface focusing mirror 500 The laser beam may be condensed while being reflected on the surface formed by the curved surface, and the laser beams may be focused at different positions in the vertical direction and the horizontal direction, respectively. At this time, the curved surface condensing mirror 500 may be formed as a spherical surface, and may be formed into various curved surfaces such as an ellipsoidal surface and a parabolic surface.

Here, the laser beams focused by the curved surface condensing mirror 500 are focused in the order of the upper, middle, and lower heights of the cutting specimen in the up-and-down direction, respectively. Focus can be formed in order on the position.

That is, the first laser beam B1, which is reflected and condensed by the curved surface condensing mirror 500 through the first beam expander 410 disposed on the upper side, is moved in the vertical direction (thickness direction) of the cutting processing sample 600 A first focal point F1 is formed on the upper side and rearward in the transport direction of the cutting specimen 600. [ The second laser beam B2 that is reflected and condensed by the curved surface condensing mirror 500 through the second beam expander 420 disposed at the center is centered in the vertical direction of the cutting processing sample 600, A second focal point F2 is formed at the center in the transport direction of the first lens 600. The third laser beam B3 that is reflected and condensed by the curved surface condensing mirror 500 through the third beam expander 430 disposed on the lower side is vertically lowered and cut off And a third focal point F3 is formed in front of the test piece 600 in the transport direction.

The upper part of the cutting specimen 600 is melted by the first focus F1 of the first laser beam B1 and the center of the cutting specimen 600 is moved The lower portion of the cutting processing specimen 600 is melted by the third focus F3 of the third laser beam B3 after the melted by the second focus F2 of the second laser beam B2, have.

Accordingly, the upper, middle, and lower portions of the specimen can be sequentially melted and cut in the thickness direction while the cutting specimen is being fed, thereby improving the laser cutting efficiency. Thus, it is possible to rapidly and precisely process the thick plate material, The heat affected zone is reduced and the cutting quality of the cutting material is improved.

At this time, the laser beam incident on the beam expander 400 and the laser beam output through the beam expander 400 may be formed in parallel, and the beam expanders 400 may be disposed in the vertical direction.

The beam expander 400 includes a tubular body 403; A first lens 401 coupled to one side of the body 403; And a second lens 402 coupled to the other side of the body 403; And the distance between the first lens 401 and the second lens 402 is adjustable so that the height of the focus formed on the cutting specimen 600 can be adjusted.

2, when the distance between the first lens 401 and the second lens 402 is adjusted, a laser beam incident parallel to the first lens 401 of the beam expander 400 is incident on the second lens 402, The width can be enlarged and output in parallel. 2 (a), a laser beam having a narrow width is incident on the first lens 401 in parallel and can be outputted in parallel through the second lens 402, If the distance between the first lens 401 and the second lens 402 is narrowed, the laser beam output through the beam expander 400 may be output in a form that is not parallel but spreads in a progressive direction, The laser beam output in the spread form in the beam expander 400 can be focused on the lower right side relative to the parallel output laser beam. If the distance between the first lens 401 and the second lens 402 is increased as shown in FIG. 2C, the laser beam passing through the beam expander 400 is not parallel, but becomes narrower toward the progressing direction So that the laser beam output in the form of narrowing in the beam expander 400 can be focused on the upper left side relative to the parallel output laser beam.

Thus, the height of the focal point can be controlled by controlling the distance between the lenses of the beam expander 400, and the height and the position in the transport direction of each focal point can be adjusted. So that efficient cutting can be performed.

The apparatus may further include a plurality of beam splitters and a reflecting mirror for dividing and reflecting the generated laser beam and causing the beams to be incident on the respective beam expanders, wherein the beam splitters and the reflecting mirror are formed to be adjustable in angle, The beam expanders can be angularly and positively adjusted so as to be parallel to the respective incident laser beams.

This reflects the laser beam generated from one laser oscillator 100 through the first reflective mirror 210 downward and transmits it to the first beam splitter 310, the second beam splitter 320, and the second reflective mirror 220 3, the angle of the first beam splitter 310 and the angle of the second reflecting mirror 220 are adjusted as shown in FIG. 3, The divided first laser beam B1 and the third laser beam B3 are reflected not in parallel but obliquely and the second laser beam B2 divided by the second beam splitter 320 is reflected in parallel, The angles and positions of the beam expanders 410, 420 and 430 are adjusted so as to be parallel to the traveling direction of the laser beams reflected by the beam splitters 310 and 320 and the second reflecting mirror 220.

That is, as shown in the figure, if the laser beams are reflected to be spread, the distance in the transport direction between the foci can be distanced. On the contrary, if the laser beams are reflected to converge, the distance in the transport direction between foci can be narrowed.

Thus, it is possible to adjust the position of the focal points on the cutting specimen in the transport direction, thereby optimizing the cutting by adjusting the focal position according to the thickness of the cutting specimen, the feed speed during cutting, and the material.

The curved surface focusing mirror 500 is adjustable in angle so that the angle of the curved surface focusing mirror 500 can be adjusted to adjust the focus position of the cutting specimen 600 in the transport direction.

4, an angle adjusting unit 510 is formed on the curved surface condensing mirror 500 so that the inclined angle of the curved surface condensing mirror 500 with respect to the conveying direction of the cutting processing sample 600 can be adjusted. Accordingly, when the angle of the curved surface condensing mirror 500 is adjusted so as to decrease the tilted angle (left side of FIG. 4), the distances of the focal points are shifted in the conveying direction of the cutting piece 600, When the angle of the connecting line is reduced with respect to the conveying direction and the angle is adjusted so that the inclined angle of the curved surface condensing mirror 500 is increased (right side of FIG. 4) The angle of the connecting line connecting the focal points becomes larger with respect to the feeding direction.

In this way, the angle of the curved surface condensing mirror 500 can be adjusted to adjust the position in the horizontal direction between the focal points (the conveying direction of the cutting specimen). At this time, the curved surface focusing mirror 500 can be angularly adjusted so that the focal points are moved in the width direction of the cutting specimen 600 perpendicular to the conveying direction of the cutting specimen 600.

The focal points of the laser beam focused at the center and the lower portion of the cutting specimen 600 are focused at positions overlapping with the laser beam focused so that the focal point is formed at the upper portion or the center of the cutting specimen 600 .

That is, as shown in FIG. 1, after the first laser beam B1 is condensed so that the first focus F1 is formed on the upper portion of the cutting piece 600 and the first focus F1 is formed, And passes through the center and the lower portion of the cutting specimen 600 as it spreads. At this time, the focused second laser beam B2 is formed with a second focus F2 at the center of the cutting specimen 600, and the second focus F2 is focused by the first laser beam May be formed on the beam B1. Similarly, the condensed third laser beam B3 has a third focus F3 formed on the lower portion of the cutting piece 600, and the third focus F3 is formed on the lower portion of the second laser beam B3, May be formed on the first laser beam B1 that is formed on the second laser beam B2 or spreads after the first focal point F1.

Since foci are formed so as to overlap the laser beams, the efficiency of laser cutting can be increased.

≪ Example 2 >

5 is a front schematic view showing a laser beam focusing optical system according to a second embodiment of the present invention.

As shown in the drawing, the laser beam focusing optical system 1000 according to the second embodiment of the present invention includes a beam expander 400 for enlarging a width of a laser beam incident from one side and outputting the enlarged laser beam to the other side; And a curvilinear focusing mirror 500 for reflecting the laser beam output from the beam expander 400 downward and condensing the reflected laser beam so as to form a continuous focal point in a height direction and a horizontal direction; The laser beams focused by the curved surface condensing mirror 500 are successively focused at the height from the upper portion to the lower portion of the cutting piece 600 in the vertical direction, The focal point can be continuously formed at a position from the rear to the front in the transport direction.

When the width of the laser beam is output through the beam expander 400 as in the first embodiment of the present invention, the laser beam is reflected and condensed by the curved surface condensing mirror 500 to focus the cutting processing specimen 600, As shown in the figure, is incident on the curved focusing mirror 500 in the form of a single wide laser beam through one or a plurality of beam expanders 400 so as to form a continuous focal point on the cutting processing specimen 600.

At this time, the focal point of the cutting specimen 600 is continuously focused from the upper part of the cutting piece 600 and the rear (left side) in the feeding direction to the lower part of the cutting piece 600 and forward (right side) .

That is, the first embodiment of the present invention is such that a plurality of foci are formed so as to be sequentially arranged, and the second embodiment is such that the foci are continuously formed.

Thus, the focus of the laser beam can be uniformly formed over the entire thickness of the cutting specimen, and the efficiency of laser cutting can be improved.

As in the first embodiment, the curvilinear focusing mirror 500 is adjustable in angle so that the angle of the curvilinear focusing mirror 500 is adjusted so that the focus of the cutting sample 600 in the moving direction The position can be adjusted.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It goes without saying that various modifications can be made.

1000: laser beam focusing optical system device
100: laser oscillator
210: first reflection mirror 220: second reflection mirror
310: first beam splitter 320: second beam splitter
400: beam expander
401: first lens 402: second lens
403: Body
410: first beam expander 420: second beam expander
430: Third beam expander
500: Curved surface focusing mirror 510: Angle adjusting part
600: (Cutting process) Specimen
F1: first focus B1: first laser beam
F2: second focus B2: second laser beam
F3: Third focus B3: Third laser beam

Claims (7)

A plurality of beam expanders for enlarging the width of the laser beam incident on one side and outputting the enlarged laser beam to the other side and arranged in parallel in the vertical direction; And
A curved surface focusing mirror for reflecting the laser beams output from the beam expander downward so as to focus the reflected laser beams so that focus is formed at different positions in the vertical direction and the horizontal direction; , ≪ / RTI >
The laser beams focused by the curved surface focusing mirror are sequentially focused on the upper, middle, and lower heights of the cutting specimen in the up-and-down direction, and are sequentially arranged in the rearward, And a focal point are formed on the surface of the laser beam converging optical system.
The method according to claim 1,
The beam expander includes:
Tubular body; A first lens coupled to one side of the body; And a second lens coupled to the other side of the body; And,
Wherein a distance between the first lens and the second lens is adjustable so that a height of a focus formed on the cutting specimen can be adjusted.
The method according to claim 1,
Further comprising a plurality of beam splitters and a reflecting mirror for dividing and reflecting the generated laser beam and making it incident on each of the beam expanders,
Wherein the beam splitters and the reflecting mirror are formed to be adjustable in angle, and the beam expanders are adjusted in angle and position so as to be parallel to the respective incident laser beams.
The method according to claim 1,
Wherein the curvilinear focusing mirror is configured to be adjustable in angle so that the angle of the curvilinear focusing mirror is adjusted to adjust the focus position of the cutting sample in the conveying direction.
The method according to claim 1,
Wherein the focal points of the laser beam focused on the center and the lower portion of the cutting specimen are formed at positions overlapping with the laser beam focused so as to focus on the upper or middle of the cutting specimen. Device.
A beam expander for enlarging a width of the laser beam incident from one side and outputting the enlarged laser beam to the other side; And
A curved surface focusing mirror for reflecting the laser beam output from the beam expander downward so as to condense the reflected laser beam so as to form a continuous focal point in a height direction and a horizontal direction; , ≪ / RTI >
The laser beams focused by the curved surface condensing mirror are successively focussed to the height from the upper portion to the lower portion of the cutting specimen in the vertical direction and continuously focused on the position from the rear to the front in the conveying direction of the cutting specimen And wherein the laser beam converging optical system is a laser beam converging optical system.
The method according to claim 6,
Wherein the curvilinear focusing mirror is configured to be adjustable in angle so that the angle of the curvilinear focusing mirror is adjusted to adjust the focus position of the cutting sample in the conveying direction.
KR1020140135533A 2014-10-08 2014-10-08 Optical system for focusing laser beam KR20160041488A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180040744A (en) * 2016-10-12 2018-04-23 주식회사 인스텍 3D Printing Laser Beam Irradiation Apparatus and 3D Printing Laser Beam Irradiation System compring the same
KR20190115158A (en) * 2018-03-30 2019-10-11 삼성디스플레이 주식회사 Laser cutting device
CN112705859A (en) * 2020-12-14 2021-04-27 华虹半导体(无锡)有限公司 Laser cutting ring-removing method for wafer
CN113001015A (en) * 2021-03-25 2021-06-22 连云港倍特超微粉有限公司 Thick metal plate laser welding head based on double-focus reflector and welding method
RU2753066C1 (en) * 2021-01-14 2021-08-11 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева - КАИ" Optical head for laser cutting
CN115026412A (en) * 2021-02-25 2022-09-09 深圳市大族半导体装备科技有限公司 Laser processing device and method for brittle product

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180040744A (en) * 2016-10-12 2018-04-23 주식회사 인스텍 3D Printing Laser Beam Irradiation Apparatus and 3D Printing Laser Beam Irradiation System compring the same
KR20190115158A (en) * 2018-03-30 2019-10-11 삼성디스플레이 주식회사 Laser cutting device
CN112705859A (en) * 2020-12-14 2021-04-27 华虹半导体(无锡)有限公司 Laser cutting ring-removing method for wafer
RU2753066C1 (en) * 2021-01-14 2021-08-11 Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский национальный исследовательский технический университет им. А.Н. Туполева - КАИ" Optical head for laser cutting
CN115026412A (en) * 2021-02-25 2022-09-09 深圳市大族半导体装备科技有限公司 Laser processing device and method for brittle product
CN113001015A (en) * 2021-03-25 2021-06-22 连云港倍特超微粉有限公司 Thick metal plate laser welding head based on double-focus reflector and welding method
CN113001015B (en) * 2021-03-25 2024-05-28 连云港倍特超微粉有限公司 Thick metal plate laser welding head based on double-focus reflector and welding method

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