KR20150123736A

KR20150123736A - Floating dielectric barrier discharge plasma source

Info

Publication number: KR20150123736A
Application number: KR1020150057661A
Authority: KR
Inventors: 은하 최; 상학 이; 영준 홍; 주수 강
Original assignee: 광운대학교 산학협력단
Priority date: 2014-04-24
Filing date: 2015-04-24
Publication date: 2015-11-04
Also published as: KR101671625B1

Abstract

It is an object of the present invention to provide a novel floating DBD plasma source designed for medical or cosmetic procedures.
According to the present invention, an electrode having a plurality of vertexes is formed on the back surface of a glass substrate, and one electrical contact point is provided on the back surface of the glass substrate, so that the electrode is short- And the plasma or plasma is irradiated to the skin surface or the cell surface of the human body to be subjected to the plasma treatment so as to serve as an opposite electrode to the electrode, thereby providing a floating DBD plasma source.

Description

[0001] FLOATING DIELECTRIC BARRIER DISCHARGE PLASMA SOURCE [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an atmospheric pressure plasma source, and more particularly, to an atmospheric pressure plasma source configuration that can be applied for in vivo experiments, medical use, and cosmetic procedures.

Plasma has been widely used for the surface treatment of semiconductors, display devices, and various parts, and has expanded its applicability to become a fusion technology field for biotechnology research, medical use, air cleaning, and incinerator. Particularly, in the case of lasers conventionally used for medical purposes such as tooth whitening, cancer cell death, and blood coagulation speed promotion, since they act in a spot form, the treatment efficiency is low when the treatment area is wide, It is possible to generate a large area, thereby improving the processing efficiency. In the case of a DBD (Dielectric Barrier Discharge) plasma, a plasma source of a surface discharge structure is constituted, and a voltage of about 2 kV is applied and it is tested for medical use. In the case of the DBD plasma source used up to now, the structure is composed of an X electrode / dielectric / Y electrode, and a Y electrode is manufactured by attaching a mesh electrode to a dielectric (see FIG. 1). Accordingly, there is a problem in that the amount of plasma directly radiated to the target object to be processed by plasma is not so large because the discharge part is the side surface of the Y electrode when voltage is applied. Korean Patent Application No. 10-2012-0054037, invented by the present inventor and filed by the present applicant, has provided an atmospheric pressure plasma source in which all XY electrodes are formed on the same plane using lithography.

However, when this type of plasma source is directly accessed to the human body and cosmetic treatment or therapeutic treatment is performed, plasma discharged between X and Y electrodes acts on the surrounding chemical species, Is not generated directly but needs to be improved in terms of effectiveness. Even if the operation performed by the atmospheric pressure plasma source is effective, the patient may not be able to receive any treatment from the patient because the patient can not directly observe the patient or feel no sensation.

In the case of cosmetic treatment using plasma, when a cell wall of the skin is slightly opened to apply a cosmetic ingredient or moisture, an atmospheric pressure plasma source such as that described above is spaced from the surface of the skin where the plasma acting on the skin cell wall is generated It is necessary to make the plasma generation position closer to the skin surface.

On the other hand, in the case of a floating DBD plasma source that has been studied conventionally, since a surface electrode made of a metal is used on a ceramic substrate, a relatively high voltage is required to be applied. Therefore, practical use for practical cosmetic treatment or medical treatment is preferable in terms of safety and operation cost not.

It is therefore an object of the present invention to provide a novel floating DBD plasma source designed for medical or cosmetic procedures. That is, an object of the present invention is to provide a floating DBD plasma source having practicality by allowing the generation position of the plasma to more reliably approach the skin side, lowering the applied voltage as much as possible, .

It is another object of the present invention to provide a plasma source in which plasma treatment can be more easily observed and transmitted through the naked eye or skin sensation to a patient undergoing plasma treatment.

According to the present invention,

A glass substrate;

An electrode having an electrical contact point on the front surface of the glass substrate and formed on a back surface of the glass substrate, the electrode having a plurality of vertices;

An AC power source applied to the electrode;

A dielectric layer surrounding the electrode; And

And an anti-hydration layer surrounding the dielectric layer,

And the human body or cells to be used serve as opposing electrodes for the electrodes.

In addition, the present invention can provide a floating DBD plasma source, wherein the electrode causes the plasma discharge more actively at a plurality of vertexes.

Further, the present invention can provide a floating DBD plasma source, wherein the dielectric layer is surrounded by a protective layer.

The plasma DBD plasma source may further include a gas injection hole formed in the plasma source housing by forming a hole for the gas passage in the glass substrate.

Further, the present invention can provide a floating DBD plasma source, wherein the electrode has a hole for a passage of the electrode so that the electrical contact point is located on the front surface of the glass substrate.

Further, the present invention is characterized in that, in the above, the electrode is formed in the form of a fork, and a plurality of extending portions are extended from a vertical body portion, wherein the plurality of extending portions include a plurality of concave- Of the floating DBD plasma source.

In addition, the present invention can provide a method of using a floating DBD plasma source, wherein the floating DBD plasma source is used for skin treatment, and the skin is used as an electrode facing the electrode.

According to the present invention, since the human body itself subjected to the plasma treatment becomes one discharge electrode, the effect of the plasma acting on the skin is excellent, and moreover, the person receiving the treatment can visually observe plasma discharged on the skin It is effective to intuit the certainty of action.

1 is a cross-sectional view showing a configuration of a conventional atmospheric pressure plasma source.
2 is a cross-sectional view showing a configuration of a floating DBD plasma source of the present invention.
3A and 3B are top views of electrodes applied to the floating DBD plasma source of the present invention.
4 is a cross-sectional view showing that the floating DBD plasma source of the present invention further includes a gas injection path.
5 is an exemplary diagram showing the skin procedure performed using the floating DBD plasma source of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a cross-sectional view illustrating a configuration of a floating DBD plasma source according to the present invention.

In the present invention, the substrate 100 is made of glass but can be made of another dielectric material. The electrodes 200 are formed on the back surface of the glass substrate 100 (shown in FIG. 2 as the lower surface) of FIG. The electrode 200 can be formed of a polygon, a closed loop type, a maze type, or the like having a large number of vertices by using lithography. By providing a plurality of branches and forming a plurality of protruding features in each branch, a plasma discharge can be actively generated in the protruding feature itself.

The electrode 200 is surrounded by the dielectric layer 300 and the dielectric layer is surrounded by the protective layer 400 and the protective layer 400 is surrounded by the anti-hydration layer 500 to improve the durability of the plasma source. The dielectric layer 300, the protective layer 400, and the moisture barrier 500 may each be formed to a thickness of 20 to 50 탆.

The electrode 200 shown in FIG. 3A shows a closed loop type using a lithography technique and having a plurality of horizontal protruding lines as if it is a fork shape.

FIG. 3B shows a modification of FIG. 3A, in which a plurality of recessed and projected portions are again provided on a plurality of transverse protruding lines themselves to narrow the gap between the opposed recessed and protruded portions, thereby further improving the discharge efficiency.

FIG. 4 is a cross-sectional view illustrating a structure in which a floating DBD plasma source of the present invention is assembled into a housing 600.

A hole is formed in the glass substrate 100 so that a portion of the electrode 200 passes through the glass substrate 100 in the floating DBD plasma source having the structure as shown in FIG. 2 to be exposed as a front surface . The electrode 200 formed as shown in FIG. 3A or 3B has a short-circuited structure, and the short-circuited linear portion is drawn to the front surface through the hole of the glass substrate 100 so that the power source is connected thereto. This will be described in detail below as a structure in which electrodes are formed in a floating state.

Further, additional gas holes may be further processed in the glass substrate 100 to further inject a plasma discharge gas outside the atmosphere.

The floating DBD plasma source of the present invention applies AC power to the electrode 200, uses a target object to be subjected to plasma processing as an opposite electrode, and discharges the plasma using the atmosphere as a discharge gas. For example, as shown in FIG. 5, when a cosmetic treatment is performed using plasma, when AC power is applied to the electrode 200 of the plasma source of FIG. 2 and approaches the surface of the skin of the human body, A plasma discharge occurs at a point where the distance from the surface of the skin is appropriate. Thus, energy can be applied to the surface of the skin to exhibit direct effects such as wrinkle removal and whitening. In addition, the skin cell wall may become porous due to the plasma energy discharged to the skin surface. Therefore, the cosmetic ingredient (nutrient such as moisture, collagen) to be administered to the skin is applied immediately after the plasma discharge procedure, The plasma discharge can be caused and the effect can be greatly improved. Such a plasma discharge procedure can be applied not only to cosmetics but also to the treatment of diseases when a skin cell wall of a specific site is opened to be greatly effective.

In other words, the electrode 200 of the present invention is not connected to both ends of the power source, but has a shape that is short-circuited, so that only one electrical contact point is provided. One end of the power source is connected to the one electrical contact point and the other end is grounded. Therefore, the electrode 200 is in a floating state as a whole.

3B, the structure of the electrode 200 includes a plurality of protrusions. The structure of the electrode 200 has many vertexes at right angles, and the plasma discharge can be enhanced at the vertexes. That is, due to the electrode structure having such a shape, a plasma discharge having a desired level can be obtained even if a relatively low voltage is applied. Generally, when the electrode has a planar structure for plasma discharge necessary for making the cell wall of a human skin porous, a high voltage of 3 to 5 kV is required. However, in the case of forming a shape having many vertices as in the present invention, 1 to 3 kV is sufficient. Therefore, more secure and stable operation becomes possible.

4, an inert gas such as argon may be injected into a plasma source that is seated in a housing 600 made of an insulator, such as argon, to generate a more active discharge. This injection of the discharge gas gives the patient receiving the treatment a sensual assurance according to the procedure, thereby enhancing the satisfaction of the patient.

Figure 5 illustrates the use of a floating DBD plasma source according to the present invention to undergo skin aesthetic treatments.

It is to be understood that the invention is not limited to the disclosed embodiment, but is capable of many modifications and variations within the scope of the appended claims. It is self-evident.

100: substrate
200: electrode
300: dielectric layer
400: protective layer
500: hydration barrier
600: housing

Claims

A dielectric substrate;
A planar electrode having an electrical contact point located on the front surface of the dielectric substrate and having a plurality of branches and protruding features on the back surface of the dielectric substrate;
An AC power source applied to the electrode;
A dielectric layer surrounding the electrode; And
And an anti-hydration layer surrounding the dielectric layer,
Wherein the human body or cells to be used serve as counter electrodes to the electrodes.

The floating DBD plasma source as claimed in claim 1, wherein the electrode is formed of a line forming a closed loop so that a plasma discharge is actively generated in a plurality of projecting portions.

2. The floating DBD plasma source of claim 1, wherein the dielectric layer is surrounded by a protective layer.

The floating DBD plasma source according to claim 1, wherein a hole for a gas passage is formed in the dielectric substrate to further include a gas injection path in the plasma source housing.

2. The floating DBD plasma source of claim 1, wherein the dielectric substrate comprises a hole for a passage of the electrode such that the electrical contact point is located on the front surface of the dielectric substrate.

[3] The apparatus of claim 1, wherein the electrode is formed in a fork shape and includes a plurality of extending portions extending from a vertical body portion, wherein the plurality of extending portions include a plurality of protruding portions, Wherein the plasma source is a floating DBD plasma source.

Use of a floating DBD plasma source according to any one of claims 1 to 6 for use in skin aesthetics wherein the skin is used as an electrode facing a planar electrode having a plurality of branches and a protruding feature, How to use.