KR20150020974A - Crucible for Aluminium Melting and the Fabrication Method Thereof - Google Patents
Crucible for Aluminium Melting and the Fabrication Method Thereof Download PDFInfo
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- KR20150020974A KR20150020974A KR20130098189A KR20130098189A KR20150020974A KR 20150020974 A KR20150020974 A KR 20150020974A KR 20130098189 A KR20130098189 A KR 20130098189A KR 20130098189 A KR20130098189 A KR 20130098189A KR 20150020974 A KR20150020974 A KR 20150020974A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/10—Crucibles
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/0003—Linings or walls
- F27D1/0006—Linings or walls formed from bricks or layers with a particular composition or specific characteristics
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/16—Making or repairing linings increasing the durability of linings or breaking away linings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/10—Crucibles
- F27B2014/104—Crucible linings
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- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a crucible for melting aluminum and a method of manufacturing the same, wherein the crucible for melting aluminum according to the present invention comprises: a main body containing aluminum; And a titanium boride coating layer formed on the inner wall of the body, thereby providing an excellent durability, corrosion resistance, and high temperature stability, and an improved life span.
Description
The present invention relates to a crucible for melting aluminum and a method of manufacturing the same, and more particularly to a crucible for melting an aluminum having improved high temperature durability and a method for producing the crucible.
Aluminum has a relatively low melting point of 660 ° C, while the vaporization temperature is as high as 1200 ° C, and it reacts with most of the refractory metals at high temperatures. Therefore, it is one of the most difficult materials to evaporate using a resistance heating evaporation source.
When aluminum is evaporated using vaporized aluminum, a vapor pressure of 10 mTorr or more is generally required, and a higher vapor pressure is required than in the case where evaporation of aluminum is desired to improve the straightness and aluminum deposition rate of evaporated aluminum and to deposit on a large area substrate.
However, when the heating temperature is raised to about 1400 ° C in order to increase the vapor pressure, the pyrolytic boron nitride crucible, which is known to be relatively stable in terms of chemical reaction with aluminum, can not exceed its lifetime for one week. In practice, aluminum can be evaporated at a high temperature of 1400 ° C or higher The development of a crucible with a high temperature is urgent.
In order to prevent the crucible from being damaged by the reaction with aluminum, a technique of manufacturing a crucible by using a multi-layer pyrolytic boron nitride as in US Pat. No. 3,986,822 has been provided. However, the crucible is physically formed into a multi- And the fundamental cause of the reduction in the crucible life, which is the reaction between the aluminum and the crucible, is not solved.
An object of the present invention is to provide an aluminum melting crucible which is chemically extremely stable and has an improved high-temperature service life, and a method for producing the same.
A crucible according to the present invention is an aluminum melting crucible for melting aluminum, comprising: a main body in which aluminum is accommodated; And a titanium boride coating layer formed on the inner wall of the body.
In a crucible according to an embodiment of the present invention, the titanium boride may include Ti x B y where x is a real number of 0.8? X? 1 and y is a real number of 1? X? 2.
In a crucible according to one embodiment of the present invention, the titanium boride may comprise TiB 2 .
In a crucible according to an embodiment of the present invention, the main body is formed from a group consisting of hexagonal boron nitride (HBN), cubic boron nitride (CBN), and amorphous boron nitride And may include one or more selected materials.
In the crucible according to an embodiment of the present invention, the coating layer may be formed in a region before the inner wall of the body.
The present invention includes a method for producing the crucible for melting aluminum described above.
The method for manufacturing an aluminum melting crucible according to the present invention includes the step of forming a coating layer of titanium boride on the inner wall of a main body in which aluminum is accommodated.
In the method for producing an crucible for melting aluminum according to an embodiment of the present invention, the formation of the coating layer may be performed in one or more selected methods in physical vapor deposition and chemical vapor deposition.
The method for manufacturing an crucible for melting aluminum according to an embodiment of the present invention may further include a step of heat treating the coating layer.
In the method for manufacturing an aluminum melting crucible according to an embodiment of the present invention, the coating layer may be formed by forming a laminated film in which at least a titanium film and a boron film are laminated on the inner wall of the body; And heat treating the laminated film.
In the method for manufacturing an aluminum crucible for melting an aluminum according to an embodiment of the present invention, the main body may include hexagonal boron nitride (HBN), cubic boron nitride (CBN), and amorphous boron nitride Nitrides, and the like.
The present invention includes an aluminum evaporation source including the aforementioned crucible for melting aluminum.
The present invention includes a method for aluminum deposition using the aforementioned crucible for melting aluminum.
A method of depositing aluminum according to the present invention comprises the steps of: a) injecting aluminum into the above crucible; b) heating the crucible into which the aluminum is introduced to melt and vaporize the aluminum to provide a gaseous aluminum source; And c) depositing aluminum on the substrate using a gaseous aluminum source.
The crucible according to the present invention can remarkably improve the durability, corrosion resistance and high-temperature stability of the crucible by an extremely stable titanium boron oxide coating layer which does not chemically react with aluminum even at a high temperature of 1000 ° C or higher, .
1 is a cross-sectional view showing a cross section of a crucible according to an embodiment of the present invention,
2 is a cross-sectional view of a crucible according to an embodiment of the present invention,
3 is another cross-sectional view showing a cross section of a crucible according to an embodiment of the present invention.
* Explanation of symbols *
110: main body 120: coating layer
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a crucible of the present invention and a method of manufacturing the same will be described in detail with reference to the accompanying drawings. The following drawings are provided by way of example so that those skilled in the art can fully understand the spirit of the present invention. Therefore, the present invention is not limited to the following drawings, but may be embodied in other forms, and the following drawings may be exaggerated in order to clarify the spirit of the present invention. Hereinafter, the technical and scientific terms used herein will be understood by those skilled in the art without departing from the scope of the present invention. Descriptions of known functions and configurations that may be unnecessarily blurred are omitted.
A crucible according to the present invention is an aluminum melting crucible for melting aluminum, comprising: a main body in which aluminum is accommodated; And a titanium boride coating layer formed on the inner wall of the body.
Specifically, the crucible for melting aluminum according to the present invention includes a body provided with an internal space in which aluminum is accommodated, and a titanium boride coating layer formed at least in one region of the inner wall of the body.
More specifically, the crucible for melting aluminum according to the present invention comprises a body provided with an internal space in which aluminum is accommodated, and a titanium boride coating layer formed in an inner wall region of the main body in contact with the molten aluminum at the time of melting the received aluminum .
The crucible according to the present invention is an aluminum melting crucible for melting aluminum and may be a crucible for the production of aluminum ingots, the production of aluminum alloys, the refining or smelting of aluminum, or the supply of aluminum in vapor phase. Specifically, the crucible according to the present invention may be a crucible used in an aluminum source for melting aluminum to supply gaseous aluminum.
The crucible according to the present invention can remarkably improve the durability, corrosion resistance and high-temperature stability of the crucible by an extremely stable titanium boron oxide coating layer which does not chemically react with aluminum even at a high temperature of 1000 캜 or more, thereby improving the life of the crucible.
In a crucible according to an embodiment of the present invention, the body may be a refractory having an internal space in which aluminum is received. Specifically, the main body may be made of a refractory material commonly used as a crucible for the aluminum, a non-limiting one example, the refractory material of boron nitride (BN), alumina (Al 2 O 3), aluminum nitride (AlN), graphite, molybdenum ( Mo), tungsten (W), and tantalum (Ta).
The above-mentioned refractory material has a risk of reacting with aluminum at a high temperature of 1,000 ° C. or higher to change the wettability of the aluminum molten metal or to change the chemical composition of the molten metal. As a result, the change in the vaporization rate of the aluminum molten metal and the breakage of the crucible frequently occur . However, since the crucible according to the present invention prevents the chemical reaction between the crucible and the molten aluminum when the aluminum is melted by the titanium boride coating layer which is extremely stable even at a high temperature, the wettability of the molten aluminum, the chemical composition of the molten aluminum, And the lifetime of the crucible itself can be remarkably improved.
The coating layer of the titanium boride can improve the life of the crucible more effectively when the body is made of an insulating refractory material containing boron nitride.
Boron nitride has a layered structure similar to graphite, but has a higher ratio of ionic bonding than graphite, has no metal bonding property, and is excellent in electrical insulation. Further, the interlaminar bond strength of the layered structure is advantageous in that it has a weak workability as compared with other directions, has excellent heat resistance, exhibits less strength at high temperature, less deterioration in electric insulation, and excellent thermal shock resistance, Do.
Where the body contains boron nitride, it may have the advantages of the boron nitride described above, but aluminum may chemically react with boron nitride to form a reactant of aluminum bromide and aluminum nitride. When the crucible is heated to a low temperature (for example, 1000 ° C or less), the chemical reaction rate of aluminum and boron nitride is considerably low, and this chemical reaction does not significantly affect the lifetime of the crucible. A chemical reaction between aluminum and boron nitride is not considered to be technically considered to a person skilled in the art.
However, when the crucible is heated at a high temperature, for example, at 1000 ° C or more, more specifically at 1400 ° C or more, the chemical reaction between aluminum and boron nitride is remarkably accelerated as the temperature increases, and the lifetime and durability of the crucible become extremely poor . For example, by such a chemical reaction, the body becomes thinner, molten aluminum permeates between the atomic layer of boron nitride and the atomic layer, the crucible is broken even by a small impact due to the thinned wall, heating and cooling are repeated, cracks are generated and the lifetime is significantly reduced. As a practical example, when aluminum is charged into a crucible consisting only of pyrolytic boron nitride and then the heating and cooling process is repeated 10 times at a temperature of 1,000 ° C or more, the chemical reaction of aluminum and boron nitride and the solidification of aluminum impregnated into the layered structure of boron nitride The boron nitride crucible having a thickness of 1 mm is broken.
The titanium boride coating layer according to the present invention does not chemically react with aluminum even at a high temperature of 1000 ° C or higher, so that it is possible to fundamentally prevent damage to the main body due to aluminum at a high temperature, and titanium boride has a very high interface bonding strength with boron nitride It is possible to prevent the interphase interface delamination of the titanium boride and the body containing boron nitride by thermal shock caused by heating and cooling the crucible so that the lifetime of the crucible can be improved very effectively.
At this time, the boron nitride contained in the body may be one or more selected from hexagonal boron nitride (HBN), cubic boron nitride (CBN) and amorphous boron nitride have. The hexagonal boron nitride includes pyrolytic boron nitride (PBN), and boron nitride contained in the main body is more preferably pyrolytic boron nitride (PBN) in terms of high purity and excellent corrosion resistance.
As described above, the crucible according to an embodiment of the present invention may include a body containing boron nitride, preferably pyrolytic boron nitride, and a titanium boride coating layer formed on the inner wall of the body. When the main body contains boron nitride, improvement in the crucible lifetime by the titanium boride coating layer can be further maximized.
As described above, the crucible according to one embodiment of the present invention is a crucible for melting aluminum, and a coating layer of titanium boride may be formed on the inner wall of the main body in which aluminum is contained, and the main body is made of boron nitride, specifically pyrolytic boron nitride And more specifically, the body may be composed of boron nitride, and more particularly, the body may be made of pyrolytic boron nitride.
In the crucible according to an embodiment of the present invention, the titanium boride of the coating layer may include Ti x B y (x is a real number with 0.8? X? 1 and y is a real number with 1? X? 2). In terms of better chemical stability and interfacial adhesion with the body containing boron nitride, the titanium boride may comprise TiB 2 .
Crystalline, the coating layer of titanium boride may include amorphous, crystalline, or a mixed phase in which amorphous and crystalline are mixed. Specifically, the coating layer may be composed of crystalline titanium boride. Specifically, immediately after the coating layer is formed on the body, the titanium boride contained in the coating layer may be amorphous or a mixed phase in which amorphous and crystalline materials are mixed. The coating layer containing amorphous material may be formed by supporting aluminum on the crucible, It can be transformed into a coating layer containing crystalline titanium boride by heat treatment. That is, the coating layer immediately after crystallization of the crucible may include an amorphous, crystalline, or mixed phase in which amorphous and crystalline materials are mixed. After the aluminum is charged into the crucible, a heat treatment for melting aluminum Crystallization of the amorphous contained in the coating layer can be achieved in situ.
In the crucible according to an embodiment of the present invention, the thickness of the titanium boride coating layer may be 0.1 탆 or more, specifically 0.1 탆 to 1,000 탆. If the thickness of the titanium boride coating layer is less than 0.1 占 퐉, there is a risk that the coating layer is not uniformly formed on the inner wall of the body, and there is a risk that the inner wall of the body to be protected with the coating layer is exposed to the surface due to defects such as pinholes. As described above, the upper limit of the thickness can be appropriately adjusted, as it is possible to stably form a uniform, homogeneous and defect-free dense film when the coating layer is 0.1 μm or more in thickness. However, from the viewpoint of preventing peeling or damage of the coating layer due to thermal stress generated by the difference in thermal expansion coefficient between the crucible main body and the coating layer during repeated crucible heating and cooling, the thickness of the coating layer is preferably 1,000 탆 or less.
1 is a cross-sectional view illustrating a cross section of a crucible according to an embodiment of the present invention. The overall shape of the crucible may be determined by the shape of the
In detail, the
1, the cross-sectional area of the
However, it is needless to say that the shape of the main body can be suitably changed in consideration of the use of crucibles such as the production of aluminum ingots, the production of aluminum alloys, the refining or smelting of aluminum, or the supply of aluminum in vapor phase, It is needless to say that the present invention is not limited by the shape of the substrate.
FIG. 2 and FIG. 3 are cross-sectional views illustrating a crucible according to an embodiment of the present invention. FIG. 2 is an example of a case where the body has a circular cross-section in a height direction and a cross-sectional area thereof is constant.
As shown in FIG. 2 (a), the
An example shown in Fig. 2 (b) is a graph showing the relationship between the height (H a ) of the aluminum (A) melted in the crucible and the height (H b ) H c) is an example showing an H c ≤H ≤H a case of the titanium boride to a height (Hc) on the side of the interior region so as to satisfy b
An example shown in FIG. 3 (a) is an example of a case where a
The shape of the crucible and the formation region of the coating layer have been described above with reference to Figs. 1 to 3. However, the size and shape of the crucible and the formation region of the coating layer can be appropriately changed in consideration of the use of the crucible and the heating temperature of the crucible. Of course. As a concrete example, when the crucible is heated to a high temperature (for example, 1000 ° C or more), a coating layer may be formed as shown in FIG. 3 (a) or FIG. 3 When the crucible is heated to a low temperature (for example, 1000 ° C or less), a coating layer may be formed as shown in FIG. 2 (a) or FIG. 2 (b).
The present invention includes a method for producing the crucible for melting aluminum described above.
The method for manufacturing an aluminum melting crucible according to the present invention includes the step of forming a coating layer of titanium boride on the inner wall of a main body in which aluminum is accommodated. At this time, a coating layer of boron is formed at least on the inner wall of the body, and is formed at least in a region where the body and the molten aluminum are in contact with each other, and the coating layer is formed not only on the inner wall of the body but also on the outer wall Of course.
Specifically, the body in which the coating layer is formed contains one or more selected materials selected from hexagonal boron nitride (HBN), cubic boron nitride (CBN), and amorphous boron nitride And hexagonal boron nitride may include pyrolytic boron nitride. In terms of high purity, good corrosion resistance and good processability, the body may contain pyrolytic boron nitride and may have a variety of shapes known to the use of the crucible, similar to that described above based on Fig.
In the manufacturing method according to an embodiment of the present invention, the coating layer forming step may include a coating layer containing Ti x B y (x is a real number of 0.8? X? 1 and y is a real number of 1? X? 2) , And may be a step of forming a coating layer containing TiB 2 in terms of better chemical stability and interfacial adhesion with a body containing boron nitride.
The coating layer forming step may be any method capable of depositing the coating layer as a dense film having a uniform thickness on the inner wall of the body having various shapes. In order to form a uniform and dense coating film, the coating layer forming step may be performed by vapor deposition, and may be carried out in detail using one or more selected methods in physical vapor deposition and chemical vapor deposition. Physical vapor deposition and chemical vapor deposition can be performed by sputtering, E-beam evaporation, thermal evaporation, laser molecular beam epitaxy (L-MBE), pulsed laser deposition (PLD) (ALD), plasma enhanced chemical vapor deposition (PECVD), or the like may be used.
In forming the coating layer, the titanium boride may be deposited such that the thickness of the coating layer is 0.1 탆 or more, specifically 0.1 to 1,000 탆. By having such a thickness, the coating layer can have uniformity and uniformity, Can be prevented.
After the formation of the Ti x B y (x is a real number and y is 0.8≤x≤1 1≤x≤2 a real number), preferably TiB, more preferably a coating layer of TiB 2 containing a second coating layer formed in step, A heat treatment step of heat-treating the coating layer may be performed. Such heat treatment can be performed to improve the interfacial bonding force between the coating layer and the main body, to improve the crystallinity of the coating layer itself, and / or to cure defects in the coating layer. The heat treatment may be carried out in a boron atmosphere or an inert gas atmosphere at 1000 ° C to 2500 ° C, specifically at 1000 ° C to 2000 ° C.
In the method of forming a coating layer according to an embodiment of the present invention, a method of directly coating titanium boride on a region where a coating layer is to be formed on the inner wall of the body may be used as described above, A method may be used in which a precursor layer of titanium boride is formed on the inner wall and then the precursor layer is reacted to prepare a coating layer of the titanium boride.
In the manufacturing method according to an embodiment of the present invention, the step of forming a coating layer includes: forming a laminated film in which a titanium film and a boron film are laminated on an inner wall of a body; And heat treating the laminated film. At this time, the laminated film may be one in which at least one titanium film and at least one boron film are laminated, or two or more titanium films and two or more boron films are alternately laminated. When forming the laminated film, a laminated film may be formed so that the surface of the body and the titanium film are in contact with each other, or a laminated film may be formed such that the body surface and the boron film are in contact with each other.
The lamination film can be performed through a conventionally known deposition method, specifically, the formation of the boron film can be carried out using one or more selected methods in physical vapor deposition and chemical vapor deposition, and the formation of the titanium film is performed by electroless plating, physical vapor deposition, The deposition may be performed using one or more selected methods.
The total amount of titanium and the total amount of boron contained in the laminated film can be controlled by the thickness of the titanium film and the boron film and the thickness of the titanium film and the boron film can be controlled by considering the original consumption of titanium and boron of the titanium boride to be produced . As a specific and non-limiting example, when the titanium boride to be produced is Ti x B y (x is a real number of 0.8? X? 1 and y is a real number of 1? X? 2), the thickness ratio of the titanium film: x: y. In this case, when two or more titanium films and two or more boron films are alternately stacked to form a laminated film, it goes without saying that the total thickness of the titanium film: the thickness ratio of the total boron film may be x: y.
The total thickness of the laminated film may be such that a titanium boride coating layer of 0.1 탆 or more, specifically 0.1 to 1,000 탆 thick, is formed when heat treatment is performed to cause a chemical reaction between the titanium film and the boron film after formation of the laminated film.
After the formation of the laminated film, a step of heat-treating the laminated film to form a titanium boride coating layer may be performed. In the heat treatment for the chemical reaction between titanium and boron (boron), the heat treatment is performed in a boron atmosphere or an inert gas atmosphere at 500 to 2500 Lt; 0 > C. If the annealing temperature is lower than 500 ° C, the chemical reaction between titanium and boron does not occur smoothly, unreacted titanium and unreacted boron may remain, the interfacial bonding force between the body and the coating layer may be weakened, C, the chemical reaction takes place in a shorter time, but a high heat treatment temperature may lead to an excessive increase in cost and a decrease in productivity.
In the manufacturing method according to an embodiment of the present invention, the coating layer forming step includes forming a titanium film on the inner wall of the body; And boronizing the titanium film.
The formation of the titanium film can be performed by a conventionally known deposition method, and specifically, can be carried out using one or more selected methods of electroless plating, physical vapor deposition and chemical vapor deposition. The thickness of the titanium film may be such that after the boronization, a titanium boride coating layer of 0.1 탆 or more, specifically 0.1 to 1,000 탆 in thickness, is formed.
Boronization of the titanium film may be accomplished by heat treating the titanium film under the presence of a gaseous boron source (i.e., boron atmosphere), wherein the boron source is B 2 H 6 , trimethyl borate (TMB), BF 3 , isopropyl borate A boron compound commonly used for doping boron or for producing a boride, such as isopropyl borate or boron oxide.
Boronization of the titanium film may be performed by heat treatment at a temperature of 500 ° C to 2500 ° C in a boron atmosphere. If the heat treatment temperature is lower than 500 ° C, the chemical reaction between titanium and boron does not occur smoothly and unreacted titanium may remain. When the heat treatment temperature exceeds 2500 ° C, the chemical reaction is performed in a shorter time The heat treatment temperature may cause an excessive increase in cost and a decrease in productivity.
In the method for manufacturing an aluminum melting crucible according to an embodiment of the present invention, the main body may include hexagonal boron nitride (HBN), cubic boron nitride (CBN), and pyrolytic boron nitride (PBN) Pyrolytic Boron Nitride).
The present invention provides an aluminum evaporation source including a crucible described above or a crucible manufactured by the above-described manufacturing method.
Specifically, the aluminum evaporation source according to the present invention may include a crucible in which aluminum is accommodated, and a heater located on a side or lower side of the crucible to heat the crucible and fuse and evaporate aluminum, And a nozzle for supplying aluminum such as a substrate to an object to which aluminum is to be deposited. However, it goes without saying that the aluminum evaporation source according to the present invention can not be limited by the position of the heater, the type of the heater, the shape of the nozzle, and the like, and may have various shapes and structures known according to the use of the aluminum evaporation source. For example, the aluminum evaporation source according to the present invention may be a linear aluminum evaporation source for forming an electrode of a substrate for manufacturing an organic light emitting diode (OLED).
The present invention includes a method for depositing aluminum using a crucible described above or a crucible manufactured by the above-described manufacturing method.
In detail, a method for depositing aluminum according to the present invention comprises the steps of: a) injecting aluminum into the crucible described above; b) heating the crucible into which aluminum is introduced to melt and vaporize aluminum to provide a gaseous aluminum source (thermally vaporized aluminum); And c) depositing aluminum on the substrate using a gaseous aluminum source (thermally vaporized aluminum).
In the method of depositing aluminum according to the present invention, since the chemical reaction between the crucible and the molten aluminum does not occur, in the step b), the crucible may be heated to 1000 to 2900 ° C and may be heated to 1400 to 2900 ° C have. As a result, aluminum can be effectively deposited on a substrate having a large area in which a large amount of gaseous aluminum is required to be supplied.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, Those skilled in the art will recognize that many modifications and variations are possible in light of the above teachings.
Accordingly, the spirit of the present invention should not be construed as being limited to the embodiments described, and all of the equivalents or equivalents of the claims, as well as the following claims, belong to the scope of the present invention .
Claims (12)
A titanium boride coating layer formed on the inner wall of the body;
And a crucible for melting aluminum.
Wherein the titanium boride comprises TixBy (x is a real number of 0.8? X? 1 and y is a real number of 1? X? 2).
Wherein the titanium boride comprises TiB 2 .
Wherein the body comprises an aluminum melting furnace comprising at least one material selected from the group consisting of hexagonal boron nitride (HBN), cubic boron nitride (CBN), and amorphous boron nitride .
Wherein the coating layer is formed on the entire inner wall of the main body.
Wherein the coating layer is formed by one or more selected methods of physical vapor deposition and chemical vapor deposition.
And the heat treatment of the coating layer is further performed.
The formation of the coating layer
Forming a laminated film in which at least a titanium film and a boron film are laminated on an inner wall of the body; And
And a step of heat-treating the laminated film.
Wherein the body comprises an aluminum melting furnace comprising at least one material selected from the group consisting of hexagonal boron nitride (HBN), cubic boron nitride (CBN), and amorphous boron nitride ≪ / RTI >
b) heating the crucible into which the aluminum is introduced to melt and vaporize the aluminum to provide a gaseous aluminum source; And
c) depositing aluminum on the substrate using the gaseous aluminum source;
≪ / RTI >
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KR20130098189A KR20150020974A (en) | 2013-08-19 | 2013-08-19 | Crucible for Aluminium Melting and the Fabrication Method Thereof |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101958824B1 (en) * | 2018-03-07 | 2019-03-18 | 지구화학(주) | Manufacturing equipment of polyethylene synthetic wax powder |
KR20210078611A (en) | 2019-12-18 | 2021-06-29 | 윤종만 | Aluminum nitride based crucible and method for manufacturing same |
-
2013
- 2013-08-19 KR KR20130098189A patent/KR20150020974A/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101958824B1 (en) * | 2018-03-07 | 2019-03-18 | 지구화학(주) | Manufacturing equipment of polyethylene synthetic wax powder |
KR20210078611A (en) | 2019-12-18 | 2021-06-29 | 윤종만 | Aluminum nitride based crucible and method for manufacturing same |
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