KR20150008297A - Going up and down apparatus and apparatus for transferring substrate - Google Patents

Going up and down apparatus and apparatus for transferring substrate Download PDF

Info

Publication number
KR20150008297A
KR20150008297A KR1020130082232A KR20130082232A KR20150008297A KR 20150008297 A KR20150008297 A KR 20150008297A KR 1020130082232 A KR1020130082232 A KR 1020130082232A KR 20130082232 A KR20130082232 A KR 20130082232A KR 20150008297 A KR20150008297 A KR 20150008297A
Authority
KR
South Korea
Prior art keywords
pinion gear
transfer arm
arm
coupled
substrate
Prior art date
Application number
KR1020130082232A
Other languages
Korean (ko)
Inventor
윤대규
김동혁
김상현
Original Assignee
현대중공업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대중공업 주식회사 filed Critical 현대중공업 주식회사
Priority to KR1020130082232A priority Critical patent/KR20150008297A/en
Publication of KR20150008297A publication Critical patent/KR20150008297A/en

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/102—Gears specially adapted therefor, e.g. reduction gears
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a lifting apparatus comprising: a lifting frame combined to enable a transfer arm to be lifted for supporting the substrate; a seal belt bonded to the transfer arm in the lifting direction in which the transfer arm is lifted; a rack gear bonded to the lifting frame in the lifting direction; a pinion gear engaged in the rack gear; a drive machinery combined in the transfer arm to rotate the pinion gear in order to lift the transfer arm; and a first cover tool bonded to the transfer arm to be located between the seal belt and the pinion gear for preventing a foreign substance generated from the pinion gear from being moved to the seal belt, and an apparatus for transferring a substrate including the same. According to the present invention, maintenance costs of the seal belt can be reduced by preventing the seal belt from being polluted by the foreign substance which is generated from the rack gear and pinion gear.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an elevating apparatus and a substrate transfer apparatus including the elevating apparatus.

The present invention relates to a substrate transfer apparatus for transferring a substrate.

Display devices, solar cells, semiconductor devices, etc. (hereinafter referred to as "electronic components") are manufactured through various processes. Such a manufacturing process is performed using a substrate for manufacturing the electronic component. For example, the manufacturing process may include a deposition process for depositing a thin film of a conductor, a semiconductor, a dielectric material or the like on a substrate, an etching process for forming a deposited thin film in a predetermined pattern, and the like. These manufacturing processes are performed in a process chamber that performs the process.

1 is a block diagram showing a conventional substrate transfer apparatus.

1, the substrate transfer apparatus 1 according to the related art includes a transfer arm 10 for supporting a substrate, a lift portion 20 for lifting and lowering the transfer arm 10, And a pivoting part (30) for rotating the pivoting part (30).

The transfer arm 10 moves to transfer the substrate while supporting the substrate. The transfer arm 10 includes a support hand 11 for supporting the substrate, a arm unit 12 for moving the support hand 11, and an arm unit 12 coupled to one side, And an arm base (13) to which the unit (20) is coupled.

The lift unit 20 moves the transfer arm 10 in the vertical direction. The lifting and lowering part 20 lifts the arm 11 and the supporting hand 11 coupled to the arm base 13 by raising and lowering the arm base 13. The lift unit 20 includes a lift frame to which the arm base 13 is movably coupled, a rack gear coupled to the lift frame, a pinion gear coupled to the arm base 13, And a seal belt for blocking foreign substances generated from the rack gear and the pinion gear from moving to the outside as the arm base 13 is lifted and lowered.

The swivel part (30) rotates the lifting part (20). The swivel part (30) is rotatably coupled to the traveling part (40). The pivoting part 30 rotates the substrate supported by the transfer arm 10 by rotating the elevating part 20 about a rotation axis.

In the substrate transfer apparatus 1 according to the related art, when foreign substances such as lubricating oil are generated from the rack gear and the pinion gear in the process of raising and lowering the transfer arm 10, Is contaminated. Accordingly, the substrate transfer apparatus 1 according to the related art takes a long time to maintain and repair the contaminated seal belt, and the maintenance cost of the seal belt is increased as the maintenance cycle is shortened.

Since the transfer arm 10 and the elevating unit 20 are separated from each other in order to repair the seal belt, the substrate transfer apparatus 1 according to the related art is configured such that during the maintenance work for the seal belt, There is a problem that the efficiency of the work of transferring the substrate is lowered.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a lifting device and a substrate transferring device including the lifting device for preventing the seal belt from being contaminated by foreign substances generated from the rack gear and the pinion gear.

In order to solve the above-described problems, the present invention can include the following configuration.

The lift device according to the present invention comprises: a lift frame in which a transfer arm for supporting a substrate is elevably coupled; A seal belt coupled to the transfer arm in an ascending / descending direction in which the transfer arm ascends and descends; A rack gear coupled to the lifting frame in the lifting direction; A pinion gear engaged with the rack gear; A drive mechanism coupled to the transfer arm for rotating the pinion gear to raise and lower the transfer arm; And a first cover mechanism coupled to the transfer arm so as to be positioned between the seal belt and the pinion gear to block foreign matter generated from the pinion gear from moving to the seal belt.

According to the elevating apparatus of the present invention, the first cover mechanism includes an insertion groove into which the seal belt is inserted, wherein the insertion groove is formed on one surface of the first cover mechanism facing the seal belt.

The lift mechanism according to the present invention is characterized in that the pinion gear includes a second cover mechanism coupled to the first cover mechanism to block the other side opposite to the one side where the pinion gear meshes with the rack gear.

The lift mechanism according to the present invention includes an upper cover coupled to the second cover mechanism to block the upper side of the pinion gear in the ascending and descending direction, and an upper cover coupled to the second cover mechanism to block the lower side of the pinion gear in the ascending direction A lower cover coupled thereto; And the pinion gear is engaged with the rack gear between the upper cover and the lower cover.

The lift device according to the present invention includes a soundproof portion coupled to the second cover mechanism to block noise generated from the rack gear and the pinion gear.

A substrate transfer apparatus according to the present invention includes: a transfer arm for supporting a substrate; A lifting device according to any one of claims 1 to 5 for lifting the transfer arm so that the height at which the transfer arm is positioned is changed; A turning unit for rotating the lift device so that the direction of the transfer arm is changed; And a running portion for moving the turning portion in the running direction.

According to the present invention, the following effects can be obtained.

According to the present invention, the seal belt is prevented from being contaminated by foreign matter generated from the rack gear and the pinion gear, thereby reducing the maintenance cost of the seal belt.

Since the maintenance work of the seal belt can be reduced, the operation efficiency of the substrate transfer apparatus can be improved, and the efficiency of the substrate transfer operation can be improved.

1 is a block diagram showing a conventional substrate transfer apparatus,
2 is a perspective view showing a substrate transfer apparatus according to the present invention,
3 is a perspective view showing a lift device in the substrate transfer device of FIG. 2,
Fig. 4 is a perspective view showing the cover device in the elevating device of Fig. 3,
5 is a sectional view for explaining a second cover device in the cover device of FIG.

It should be noted that, in the specification of the present invention, the same reference numerals as in the drawings denote the same elements, but they are numbered as much as possible even if they are shown in different drawings.

Meanwhile, the meaning of the terms described in the present specification should be understood as follows.

The word " first, "" second," and the like, used to distinguish one element from another, are to be understood to include plural representations unless the context clearly dictates otherwise. The scope of the right should not be limited by these terms.

It should be understood that the terms "comprises" or "having" does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

It should be understood that the term "at least one" includes all possible combinations from one or more related items. For example, the meaning of "at least one of the first item, the second item and the third item" means not only the first item, the second item or the third item, but also the second item and the second item among the first item, Means any combination of items that can be presented from more than one.

Hereinafter, preferred embodiments of the substrate transfer apparatus according to the present invention will be described in detail with reference to the accompanying drawings. Since the lift apparatus according to the present invention is included in the substrate transfer apparatus according to the present invention, a preferred embodiment of the substrate transfer apparatus according to the present invention will be described below.

2 is a perspective view showing a substrate transfer apparatus according to the present invention, FIG. 3 is a perspective view showing a substrate transfer apparatus in the substrate transfer apparatus of FIG. 2, and FIG. 4 is a cross- Fig. 5 is a sectional view for explaining the second cover device in the cover device of Fig. 4. Fig. 5 is a perspective view showing the cover device in the elevating device of Fig.

The substrate transfer apparatus 100 according to the present invention is for transferring the substrate 110. [ The substrate 110 is for manufacturing electronic components such as a display device, a solar cell, and a semiconductor device. For example, the substrate 110 may be a glass substrate for manufacturing the electronic component. The substrate 110 may be a metal substrate, a polyimide substrate, a plastic substrate, or the like. When the electronic component is a display device, the substrate 110 may be a bonded substrate having two or more substrates bonded together. The substrate transfer apparatus 100 according to the present invention may transfer the substrate 110 between process chambers performing a manufacturing process such as a deposition process and an etching process for the substrate 110. In addition, the substrate transfer apparatus 100 according to the present invention may transfer the substrate 110 between the process chambers and a cassette in which the substrate 110 is stored.

2 to 5, the substrate transfer apparatus 100 according to the present invention includes a transfer arm 120 for transferring the substrate 110, a lifting device 200 for lifting and lowering the transfer arm 120, A turning unit 130 for rotating the elevating apparatus 200, and a traveling unit 140 for moving the turning unit 130.

The lifting and lowering device 200 includes a lifting frame 210 to which the transfer arm 120 can be lifted and lowered, a seal belt 220 coupled to the lifting and lowering frame 210, A driving mechanism 250 that rotates the pinion gear 240 to move the transfer arm 240 up and down and a driving mechanism 250 that rotates the pinion gear 240 and the seal belt 220, And a first cover mechanism 260 coupled to the transfer arm 120 to be positioned between the pinion gears 240.

The transfer arm 120 is moved up and down in a state of being coupled to the lifting frame 210 by the pinion gear 240. In this case, the first cover mechanism 260 blocks foreign substances generated from the pinion gear 240.

Accordingly, the substrate transfer apparatus 100 according to the present invention can prevent the foreign material generated from the pinion gear 240 from being scattered. Accordingly, the substrate transfer apparatus 100 according to the present invention can prevent the foreign material from being scattered, thereby preventing the seal belt 220 from being contaminated, thereby reducing the maintenance cost of the seal belt 220 .

The substrate transfer apparatus 100 according to the present invention can prevent the seal belt 220 from being contaminated and prevent the contamination of the seal belt 220 during the maintenance work on the contaminated seal belt 220. [ It is possible to prevent the operating rate from being lowered. Accordingly, the substrate transfer apparatus 100 according to the present invention can improve the efficiency of transferring the substrate 110.

Hereinafter, the transfer arm 120, the elevating device 200, the pivoting part 130, and the traveling part 140 will be described in detail with reference to the accompanying drawings.

The transfer arm 120 transfers the substrate 110. The transfer arm 120 is coupled to the elevating device 200. Accordingly, the conveying arm 120 can be rotated together with the elevating device 200 as the elevating device 200 is rotated by the turning unit 140. The transfer arm 120 may include an arm base 121, an arm body 122, an arm unit 123, and a support hand 124.

The arm base 121 is vertically coupled to the elevating device 200. The arm base 121 is lifted and lowered by the lifting device 200. Accordingly, the height at which the transfer arm 120 is positioned can be changed.

The arm body 122 is coupled to the arm base 121. When one side of the arm base 121 is coupled to the elevating device 200, the arm body 122 may be coupled to the other side of the arm base 121.

The arm unit 123 is movably coupled to the arm body 122. As the arm unit 123 moves, the supporting hand 124 can move together. The arm unit 123 can move the supporting hand 123 in a straight line. In this case, the arm unit 123 moves in a straight line, thereby moving the supporting hand 123 in a straight line. Although not shown, the arm unit 123 can be rotated to move the supporting hand 123 in a straight line. The arm unit 123 may include a first arm mechanism 123a and a second arm mechanism 123b.

The first arm mechanism 123a is movably coupled to the arm body 122. [ The first arm mechanism 123a can move in a ball screw manner using a motor and a ball screw. The first arm mechanism 123a includes a gear mechanism using a motor, a rack gear and a pinion gear, a belt mechanism using a motor, a pulley and a belt, a linear motor using a coil and a permanent magnet, (Linear Motor) method. When the arm unit 123 is linearly moved, the first arm mechanism 123a may be movably coupled to the arm body 122 in a straight line. When the arm unit 123 is rotationally moved, the first arm mechanism 123a may be rotatably coupled to the arm body 122.

The second arm mechanism 123b is movably coupled to the first arm mechanism 123a. The first arm mechanism 123a can be moved in a belt manner using a motor, a pulley, and a belt. The first arm mechanism 123a may be moved by a ball screw system using a motor and a ball screw, a gear system using a motor, a rack gear, and a pinion gear, or a linear motor system using a coil and a permanent magnet. When the arm unit 123 is configured to move linearly, the second arm mechanism 123b may be movably coupled to the first arm mechanism 123a. When the arm unit 123 is rotationally moved, the second arm mechanism 123b may be rotatably coupled to the first arm mechanism 123a. The second arm mechanism 123b and the first arm mechanism 123a rotate in opposite directions to move the support hand 124 in a straight line.

The supporting hand 124 is coupled to the arm unit 123. The supporting hand 124 can move in a straight line as the arm unit 123 moves, thereby transferring the substrate 110. The support hand 124 may be coupled to the second arm mechanism 123b.

The transfer arm 120 may be configured to transfer a plurality of the substrates 110. In this case, the transfer arm 120 may include a plurality of the second arm mechanisms 123b and the support hands 124, respectively. For example, when the transfer arm 120 is configured to transfer two substrates 110, the transfer arm 120 can transfer the second arm mechanism 123b and the support hand 124 to two . The second arm mechanisms 123b may be coupled to the first arm mechanism 123a so as to be positioned opposite to each other with respect to the first arm mechanism 123a. The supporting hands 124 may be coupled to the second arm mechanisms 123b such that the elevating apparatus 200 is positioned at a different height with respect to a direction in which the transfer arm 120 is moved up and down.

The elevating device 200 moves the transfer arm 120 up and down. Accordingly, the elevation device 200 can change the height at which the transfer arm 120 is positioned. The lifting device 200 includes the lifting frame 210, the seal belt 220, the rack gear 230, the pinion gear 240, the driving unit 250, and the first cover mechanism 260, .

The lifting frame 210 is coupled to the swivel part 130. The transfer arm 120 is coupled to the lifting frame 210 so as to be able to move up and down. Accordingly, the elevation device 200 can change the height at which the transfer arm 120 is positioned.

The seal belt 220 is coupled to the transfer arm 120 in an ascending / descending direction in which the transfer arm 120 ascends and descends. Thereby preventing foreign matter generated from the pinion gear 240 from being scattered to the outside of the substrate transfer apparatus 100. Both ends of the seal belt 220 may be fixed to the transfer arm 120 or may move together as the transfer arm 120 moves.

The rack gear 230 is coupled to the lifting frame 210 in the lifting direction. On one side of the rack gear 230, a thread is formed. The rack gear 230 is meshed with the pinion gear 240 by a thread. The rack gear 230 provides a path through which the pinion gear 240 moves along the lifting direction.

The pinion gear 240 is coupled to the transfer arm 120. A thread is formed on the outer surface of the pinion gear 240. The pinion gear 240 is meshed with the rack gear 230 by a thread. The pinion gear 240 is rotated by the driving mechanism 250 so that the thread of the pinion gear 230 is engaged with the thread of the rack gear 230, ) Can be raised and lowered.

The drive mechanism (250) is coupled to the transfer arm (120). The driving mechanism 250 rotates the pinion gear 240 to move the transfer arm 120 up and down. As the drive mechanism 250 rotates the pinion gear 240, the transfer arm 120 can be moved up and down. The driving mechanism 250 may be a motor.

The first cover mechanism (260) blocks foreign matter generated from the pinion gear (240) from moving to the seal belt (220). The first cover mechanism 260 is coupled to the transfer arm 120 so as to be positioned between the seal belt 220 and the pinion gear 240. The first cover mechanism 260 includes an insertion groove 261 into which the seal belt 220 is inserted.

The insertion groove 261 is formed on one surface of the first cover mechanism 260 facing the seal belt 220. The seal belt 220 is inserted into the insertion groove 261. Thus, the substrate transport apparatus 100 according to the present invention can prevent the foreign material generated from the pinion gear 240 from moving to the seal belt 220 by the first cover mechanism 201, It is possible to prevent contamination of the substrate 220. Therefore, since the substrate transfer apparatus 100 according to the present invention can prevent the seal belt 220 from being contaminated, the maintenance operation of the seal belt 220 and maintenance of the seal belt 220 The cost can be reduced.

Here, the transfer arm 120 and the elevating device 200 should be separated from each other in order to maintain the contaminated seal belt 220. Therefore, conventionally, there has been a problem that the operation of transferring the substrate 110 must be stopped while the maintenance work for the seal belt 220 is performed.

Accordingly, the substrate transfer apparatus 100 according to the present invention can reduce the maintenance work of the seal belt 220, thereby reducing the number of times that the transfer operation of the substrate 110 is stopped. Accordingly, the substrate transfer apparatus 100 according to the present invention can improve the operation rate of the substrate transfer apparatus 100 by reducing the period in which the transfer operation of the substrate 110 is stopped, It is possible to improve the efficiency of the work of transferring the wafer W.

The substrate transfer apparatus 100 according to the present invention includes a second cover mechanism 270, an upper cover 281, and a lower cover 282. [

The second cover mechanism 270 blocks foreign matter from moving to the other side opposite to the side where the pinion gear 240 engages with the rack gear 230. The second cover mechanism 270 provides a receiving space 271 in which the pinion gear 240 is received. The pinion gear 240 is received in the receiving space 271, thereby preventing foreign matter from moving to the seal belt 220.

The upper cover 281 is coupled to the upper side of the second cover mechanism 270. The upper cover 281 blocks the upper side of the pinion gear 240 in the ascending / descending direction. Accordingly, the upper cover 281 can prevent foreign matter from moving to the upper side of the pinion gear 240.

The lower cover 282 is coupled to the lower side of the second cover mechanism 270. The lower cover 282 blocks the lower side of the pinion gear 240 in the up and down direction. Accordingly, the lower cover 282 can prevent foreign matter from moving to the lower side of the pinion gear 240.

Accordingly, the substrate transfer device 100 according to the present invention blocks the path of the foreign material generated from the pinion gear 240 to the seal belt 220 in various directions, Can be prevented. Therefore, the substrate transfer apparatus 100 according to the present invention can further prevent the seal belt 220 from being contaminated. Therefore, the maintenance operation of the seal belt 220 and maintenance of the seal belt 220 Thereby reducing the cost of the system. In addition, the substrate transfer apparatus 100 according to the present invention can further reduce the maintenance work of the seal belt 220, thereby further improving the operation rate of the substrate transfer apparatus 100, ) Can be further improved.

Here, when the pinion gear 240 is driven, the substrate transfer apparatus 100 according to the present invention issues noise from the pinion gear 240.

In order to prevent this, the substrate transfer apparatus 100 according to the present invention includes a soundproofing portion 290 for shielding noise.

The soundproof portion 290 is coupled to the second cover mechanism 270. The soundproof part (290) blocks noise generated from the pinion gear (240). For this, the soundproofing part 290 may be formed of a material having a soundproof effect. The soundproof portion 290 may be coupled to the first cover mechanism 260, the upper cover 281, and the lower cover 282. Accordingly, the substrate transfer apparatus 100 according to the present invention can prevent the noise generated from the pinion gear 240 from leaking into the workplace for transferring the substrate 110. Therefore, the substrate transfer apparatus 100 according to the present invention can protect the hearing of the worker who is working in the workplace.

The swivel part 140 rotates the elevating device 200. Accordingly, the swivel part 140 can change the direction in which the transfer arm 120 is directed. The swivel part 140 is rotatably coupled to the traveling device 200. The swivel part 140 may be rotated about the rotation axis in a state of being coupled to the traveling device 200 to rotate the elevator device 200.

The travel unit 140 moves the swivel unit 130 along the traveling direction. Accordingly, the travel unit 140 can move the substrate 110 mounted on the transfer arm 200 in the traveling direction. The traveling unit 140 includes a traveling base 141 and a traveling guide unit 142.

The travel base 141 moves along the travel guide portion 142 in the traveling direction. The running base 141 moves in the running direction by a driving force provided from a driving unit (not shown). For example, as the traveling base 141 moves along the traveling direction, the substrate 110 can be transported along the traveling direction. The swivel unit 130 is coupled to the travel base 141.

The travel guide portion 142 is installed along the running direction. The travel guide unit 142 provides a path through which the travel base 141 is moved. The travel guide 141 is coupled to the travel guide unit 142.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Will be clear to those who have knowledge of.

100: substrate transfer device 110: substrate
120: transfer arm 121: arm base
122: arm body 123: arm unit
123a: first arm mechanism 123b: second arm mechanism
124: support hand 130:
140: running section 141: running base
142: traveling guide unit 200: elevating device
210: lift frame 220: seal belt
230: Rack gear 240: Pinion gear
250: drive mechanism 260: first cover mechanism
261: insertion groove 270: second cover mechanism
271: accommodation space 281: upper cover
282: lower cover 290: soundproof portion

Claims (6)

A lift frame in which a transfer arm for supporting a substrate is movably coupled;
A seal belt coupled to the transfer arm in an ascending / descending direction in which the transfer arm ascends and descends;
A rack gear coupled to the lifting frame in the lifting direction;
A pinion gear engaged with the rack gear;
A drive mechanism coupled to the transfer arm for rotating the pinion gear to raise and lower the transfer arm; And
And a first cover mechanism coupled to the transfer arm so as to be positioned between the seal belt and the pinion gear to block foreign matter generated from the pinion gear from moving to the seal belt. The method according to claim 1,
Wherein the first cover mechanism includes an insertion groove into which the seal belt is inserted, wherein the insertion groove is formed on one surface of the first cover mechanism facing the seal belt. The method according to claim 1,
And a second cover mechanism coupled to the first cover mechanism to block the other side opposite to one side of the pinion gear engaged with the rack gear. The method of claim 3,
An upper cover coupled to the second cover mechanism to block the upper side of the pinion gear in the up and down direction, and a lower cover coupled to the second cover mechanism to block the lower side of the pinion gear in the up and down direction and;
And the pinion gear is engaged with the rack gear between the upper cover and the lower cover. The method according to claim 1,
And a soundproof portion coupled to the second cover mechanism to block noise generated from the rack gear and the pinion gear. A transfer arm for supporting the substrate;
A lifting device according to any one of claims 1 to 5 for lifting the transfer arm so that the height at which the transfer arm is positioned is changed;
A turning unit for rotating the lift device so that the direction of the transfer arm is changed; And
And a traveling portion for moving the pivot portion in the traveling direction.
KR1020130082232A 2013-07-12 2013-07-12 Going up and down apparatus and apparatus for transferring substrate KR20150008297A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020130082232A KR20150008297A (en) 2013-07-12 2013-07-12 Going up and down apparatus and apparatus for transferring substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020130082232A KR20150008297A (en) 2013-07-12 2013-07-12 Going up and down apparatus and apparatus for transferring substrate

Publications (1)

Publication Number Publication Date
KR20150008297A true KR20150008297A (en) 2015-01-22

Family

ID=52571996

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020130082232A KR20150008297A (en) 2013-07-12 2013-07-12 Going up and down apparatus and apparatus for transferring substrate

Country Status (1)

Country Link
KR (1) KR20150008297A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107984495A (en) * 2017-12-29 2018-05-04 上海智能制造***创新中心有限公司 Scalable grabbing device and multiaxis transportation robot
CN111098324A (en) * 2019-12-27 2020-05-05 东莞市蓝企信息科技有限公司 Vertical lifting mechanism of transfer robot
KR20200109055A (en) * 2019-03-12 2020-09-22 현대중공업지주 주식회사 Maintenance unit of substrate transfer apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107984495A (en) * 2017-12-29 2018-05-04 上海智能制造***创新中心有限公司 Scalable grabbing device and multiaxis transportation robot
CN107984495B (en) * 2017-12-29 2024-04-02 上海智能制造***创新中心有限公司 Telescopic grabbing device and multi-axis transportation robot
KR20200109055A (en) * 2019-03-12 2020-09-22 현대중공업지주 주식회사 Maintenance unit of substrate transfer apparatus
CN111098324A (en) * 2019-12-27 2020-05-05 东莞市蓝企信息科技有限公司 Vertical lifting mechanism of transfer robot

Similar Documents

Publication Publication Date Title
KR100900388B1 (en) Processing table
JP5068738B2 (en) Substrate processing apparatus and method
KR20160007946A (en) Carriage for stocker conveyor
KR20150008297A (en) Going up and down apparatus and apparatus for transferring substrate
JP5047859B2 (en) Lift pin unit and XY stage apparatus having the same
KR101563780B1 (en) Going up and down device and apparatus for transferring substrate having the same
KR101587337B1 (en) Lifting apparatus and apparatus for transferring substrate comprising the same
KR101500158B1 (en) Running device and transferring apparatus for substrate comprising the same
KR20060117663A (en) Cleaning brush unit for manufacture of flat panel display
KR200463079Y1 (en) Apparatus for Transferring Substrate
KR102314364B1 (en) Robot for transferring substrate
KR101587336B1 (en) Going up and down apparatus for transferring substrate and apparatus for transferring substrate
KR20150009189A (en) Apparatus for driving and apparatus for transferring substrate
KR101488091B1 (en) Apparatus for Blocking Foreign Substance and Transferring Apparatus having the same for Substrate
KR100730459B1 (en) Glass cell automatic loading device of liquid crystal display
KR20150009195A (en) Lifting Apparatus and Apparatus for Transferring Substrate
KR102314363B1 (en) Robot for transferring substrate
KR102312697B1 (en) Robot for transferring substrate
JP2007266033A (en) Method of teaching reference position of substrate transfer robot
KR102238974B1 (en) Substrate Transfer Apparatus with Suction Part
KR20150012158A (en) Storage device and apparatus for transferring substrate comprising the same
KR101580390B1 (en) Rotating apparatus and apparatus for transferring substrate comprising the same
KR20150010437A (en) Lifting Device and Apparatus for Transferring Substrate having the same
KR20150104472A (en) Lifting Device and Apparatus for Transferring Substrate having the same
KR20150010442A (en) Safety Device and Apparatus for Transferring Substrate having the same

Legal Events

Date Code Title Description
N231 Notification of change of applicant
WITN Withdrawal due to no request for examination