KR20140106916A - Method of Coating Catalysis on Carrier and Apparatus of using the same - Google Patents
Method of Coating Catalysis on Carrier and Apparatus of using the same Download PDFInfo
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- KR20140106916A KR20140106916A KR1020130021204A KR20130021204A KR20140106916A KR 20140106916 A KR20140106916 A KR 20140106916A KR 1020130021204 A KR1020130021204 A KR 1020130021204A KR 20130021204 A KR20130021204 A KR 20130021204A KR 20140106916 A KR20140106916 A KR 20140106916A
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- Prior art keywords
- carrier
- slurry
- catalyst
- container
- coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/18—Stationary reactors having moving elements inside
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
- B01J37/02—Impregnation, coating or precipitation
- B01J37/0215—Coating
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Catalysts (AREA)
Abstract
A method and apparatus for efficiently coating a catalyst slurry on a carrier are disclosed. Containers are provided at the upper and lower portions of the carrier for the coating of the carrier. The catalyst slurry is stored in one of the containers, and the carrier is coated by the integrated rotation of the carrier and the containers. Also, at least one of the vessels is supplied with the catalyst slurry, recovered and reused.
Description
The present invention relates to a coating apparatus for a catalyst for purification of exhaust gas and a method for coating a catalyst on a carrier, and more particularly, to a method for uniformly and rapidly coating a catalyst slurry on a carrier and a coating apparatus for carrying out the same.
Coating the catalyst with a carrier having a specific shape is used for purifying the exhaust gas generated from the vehicle or for treating the polluted gas. For example, a carrier coated with a catalyst may be used in an exhaust pipe of a vehicle, and may be used to remove various pollutants generated in a device manufacturing process such as a semiconductor.
In recent years, demands for treatment of gases such as sulfides, nitrides, and fluorides generated in a semiconductor manufacturing process have increased as environmental demands have arisen. Particularly, various processes such as etching and deposition are used in the semiconductor manufacturing process, and various kinds of noxious gases are generated through the process equipment and the like. The generated noxious gas may be removed by wet, dry, or the like, and may be removed through a burning process.
Even if the harmful gas is treated by using the various processing techniques described above, the remaining harmful components and the like are still processed. Therefore, a treatment system using a catalyst or the like is applied, and a system in which a carrier is coated with a certain kind of catalyst is included in the noxious gas treatment equipment.
In the case of a carrier coated with a catalyst, various shapes are obtained, and the type of the gas to be treated varies depending on the shape and the catalyst to be coated. Normally, the carrier has a honeycomb structure. The inner wall of the carrier having a honeycomb structure should be coated with a certain thickness and concentration as a catalyst. Upon coating the catalyst on the carrier, the coated catalyst should be coated to a uniform concentration and thickness.
Various techniques are developed for uniform coating of the catalyst. For example, Japanese Laid-Open Patent Application No. 2009-189983 discloses a technique in which a catalyst slurry is regularly coated at the time of coating and a predetermined amount is coated in the carrier.
According to the disclosed Japanese Laid-Open Patent Application, a carrier in the form of a honeycomb is provided close to the liquid surface of the slurry containing the catalyst material. Subsequently, when a suction force is applied at the top of the carrier, the slurry moves upward from the bottom of the carrier. The movement of the slurry to the top is carried out up to a certain height by a constant suction force. Subsequently, the carrier on which the slurry is sucked is inverted upside down. Therefore, the slurry is applied to the upper portion of the inverted carrier, and when the blowing is performed by the air pressure from the upper portion, the slurry is moved downward. Through the above-described process, the catalytic material is applied to the entire interior of the carrier.
In the above-mentioned Japanese Laid-Open Patent Application, when the lower slurry is sucked, almost all of the slurry is sucked. Further, the rotation of the carrier necessarily occurs. Since most of the lower slurry is inhaled, the slurry must be filled each time the carrier is coated. Further, as the carrier rotates, the slurry leaks due to the holding of the carrier in the rotating state. Therefore, it is troublesome that the slurry must be filled in every unit process, and leakage of the slurry is inevitable.
A first object of the present invention is to provide a catalyst coating method capable of minimizing the leakage of slurry and efficiently coating the carrier.
A second object of the present invention is to provide a catalyst coating apparatus for efficiently coating a catalyst.
According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: disposing a first carrier between a first container disposed on an upper portion and a second container disposed on a lower portion; And coating the first slurry with a catalyst slurry stored in the second slurry by rotating the first slurry, the second slurry and the first slurry, and storing the slurry in the first slurry A catalyst coating method is provided.
According to a second aspect of the present invention, there is provided a catalyst coating apparatus comprising: a catalyst coating unit coating a catalyst slurry on a carrier; A transporting and rotating means for rotating the catalyst coating portion or for detaching the carrier; A slurry collection and supply unit for supplying or recovering the catalyst slurry to the catalyst coating unit; And a pressure control unit for applying a vacuum or an air pressure to the catalyst coating unit.
According to the present invention described above, two containers for storing the catalyst slurry or supplying the carrier to the carrier are rotated together with the carrier. Therefore, the outflow of the catalyst slurry generated during the rotation operation of the carrier only is prevented. In addition, it is possible to secure a uniform coating concentration on the carrier by rotating with the containers rather than only the carrier.
Also, among the vessels, a pipe may be optionally provided in the vessel to perform the supply and recovery of the catalyst slurry. However, according to the embodiment, only the supply of the catalyst slurry to one container may be performed, and only the recovery of the catalyst slurry may be performed to the other container.
Therefore, the catalyst coating method and apparatus of the present invention can increase the efficiency of catalyst coating on the carrier, ensure a uniform coating concentration with minimum operation, and increase the recovery rate of the remaining catalyst slurry have.
1 to 4 are cross-sectional views illustrating a method of coating a catalyst slurry according to a first embodiment of the present invention.
5 to 7 are cross-sectional views illustrating a method of coating a catalyst slurry according to a second embodiment of the present invention.
8 is a conceptual view showing a catalyst coating apparatus according to a third embodiment of the present invention.
The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing.
Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
First Embodiment
1 to 4 are cross-sectional views illustrating a method of coating a catalyst slurry according to a first embodiment of the present invention.
Referring to FIG. 1, a
The catalyst slurry does not remain in the
Further, the
Referring to FIG. 2, the
Since the second opening and closing means 122 has a ring shape, the catalyst slurry is introduced into the
Whereby the
Further, after the
2, the second opening and closing means 122 moves downwardly of the
During the movement and blowing of the catalyst slurry, the second opening and closing means 122 of the
Referring to FIG. 3, the
Referring to FIG. 4, a
Then, the
In the above-described embodiment, two containers in addition to the carrier are rotated together with the carrier. Therefore, leakage of the catalyst slurry due to rotation of the carrier does not occur, and the catalyst can be uniformly coated inside the carrier of the honeycomb structure.
Second Embodiment
5 to 7 are cross-sectional views illustrating a method of coating a catalyst slurry according to a second embodiment of the present invention.
Referring to FIG. 5, a
The catalyst slurry is not stored in the
In addition, the
Referring to FIG. 6, the
Since the second opening and closing means 222 has the shape of a ring, the catalyst slurry is introduced into the
The
Further, after the
6, the second opening and closing means 222 moves to the lower side of the
During the movement and blowing of the catalyst slurry, the second opening and closing means 222 of the
Referring to FIG. 7, the entire
Subsequently, a secondary coating is performed from the
In the second embodiment described above, a two-step coating is performed on one carrier. That is, a two-step coating is carried out through rotation of the containers and the carrier. In the process of FIG. 6, which is a primary coating process, the upper portion of the first carrier adjacent to the first container through the blowing or the like may have a thinner coating thickness than the lower portion. This has the advantage that it can be compensated in the secondary coating through rotation.
Third Embodiment
8 is a conceptual view showing a catalyst coating apparatus according to a third embodiment of the present invention.
Referring to FIG. 8, the catalyst coating apparatus of this embodiment includes a transfer and
The transporting and
Through the rotation of the
The slurry collection and
The
The
The catalyst slurry coated in the
The
The
When the
The
When the
According to the embodiment, by opening the first and second
Subsequently, the catalyst-coated
The new carrier, which is seated between the
The supply and recovery of the catalyst slurry is accomplished through a
In the embodiments of the present invention described above, two containers for storing the catalyst slurry or supplying the carrier slurry are rotated together with the carrier. Therefore, the outflow of the catalyst slurry generated during the rotation operation of the carrier only is prevented. In addition, it is possible to secure a uniform coating concentration on the carrier by rotating with the containers rather than only the carrier.
Also, among the vessels, a pipe may be optionally provided in the vessel to perform the supply and recovery of the catalyst slurry. However, according to the embodiment, only the supply of the catalyst slurry to one container may be performed, and only the recovery of the catalyst slurry may be performed to the other container.
Therefore, the catalyst coating method and apparatus of the present invention can increase the efficiency of catalyst coating on the carrier, ensure a uniform coating concentration with minimum operation, and increase the recovery rate of the remaining catalyst slurry have.
110, 210, 610:
111, 211: first holding means 121, 221: second holding means
112, 212: first opening and closing means 122, 222: second opening and closing means
300: Feeding and rotating means 400: Slurry collecting and feeding unit
410: Slurry reservoir 420: Slurry feed pump
430: Slurry recovery pump 500: Pressure control unit
510: Vacuum pump 600: Catalyst coating part
Claims (11)
Coating the catalyst slurry stored in the second vessel with the first vessel, the second vessel and the first carrier to coat the first carrier, and storing the catalyst slurry in the first vessel Coating method.
Separating the first carrier from the first container and the second container, and placing a second carrier between the first container and the second container; And
Further comprising rotating the first vessel, the second vessel, and the second carrier to coat the catalyst slurry stored in the first vessel with the second carrier.
Further comprising the step of blowing the first carrier from the second vessel to the first vessel.
Further comprising rotating the first vessel, the second vessel and the first carrier to perform a secondary coating on the first carrier.
A transporting and rotating means for rotating the catalyst coating portion or for detaching the carrier;
A slurry collection and supply unit for supplying or recovering the catalyst slurry to the catalyst coating unit; And
And a pressure control unit for applying a vacuum or an atmospheric pressure to the catalyst coating unit.
A first container coupled with the carrier at an upper portion thereof; And
And a second container coupled with the carrier at a lower portion thereof,
Wherein the first container, the second container, and the carrier rotate simultaneously when the catalyst coated portion rotates.
A slurry reservoir for storing the catalyst slurry;
A slurry supply pump for supplying a catalyst slurry from the slurry booster tank to the catalyst coating portion; And
And a slurry recovery pump for recovering the catalyst slurry from the catalyst coating portion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020130021204A KR20140106916A (en) | 2013-02-27 | 2013-02-27 | Method of Coating Catalysis on Carrier and Apparatus of using the same |
Applications Claiming Priority (1)
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KR1020130021204A KR20140106916A (en) | 2013-02-27 | 2013-02-27 | Method of Coating Catalysis on Carrier and Apparatus of using the same |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101586287B1 (en) * | 2015-03-30 | 2016-01-18 | 한국기계연구원 | A catalyst coating apparatus and Catalyst coating method using the same |
WO2020076009A1 (en) * | 2018-10-12 | 2020-04-16 | 희성촉매 주식회사 | Method for coating porous catalyst support and device therefor |
-
2013
- 2013-02-27 KR KR1020130021204A patent/KR20140106916A/en active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101586287B1 (en) * | 2015-03-30 | 2016-01-18 | 한국기계연구원 | A catalyst coating apparatus and Catalyst coating method using the same |
WO2020076009A1 (en) * | 2018-10-12 | 2020-04-16 | 희성촉매 주식회사 | Method for coating porous catalyst support and device therefor |
US11813599B2 (en) | 2018-10-12 | 2023-11-14 | Heesung Catalysts Corporation | Method for coating porous catalyst support and device therefor |
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