KR20120133354A - Virtual simulation system for production by loading simulation engine with Discrete Event Simulation, Smart Dispatcher and Equipment Model Template - Google Patents
Virtual simulation system for production by loading simulation engine with Discrete Event Simulation, Smart Dispatcher and Equipment Model Template Download PDFInfo
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Abstract
Description
본 발명은 빠른 시뮬레이션 속도, 복잡한 생산 과정에서의 시뮬레이터 구현, 시뮬레이션의 정확성 실현, 생산과정에서의 적용 등이 가능한 모의생산 시뮬레이션 시스템에 관한 것이다.
The present invention relates to a simulation simulation system capable of high simulation speed, implementation of a simulator in a complex production process, realization of simulation accuracy, application in a production process, and the like.
반도체나 LCD와 같은 고가 장비를 필요로 하는 하이테크 산업에서 생산과정은 과거 자동차나 조선에 비해 매우 복잡하고, 다양한 공정이 복합된 고도의 관리기술을 필요로 하고 있다. 생산 공정을 관리하는 과정에서 컴퓨터를 이용하여 사전에 생산 과정이나 공정의 흐름이 어떻게 될 것인지 시뮬레이션해볼 수 있다면 그 결과를 이용하여 생산 운영상의 다양한 요구 사항을 해결할 수 있다.
In high-tech industries that require expensive equipment such as semiconductors and LCDs, the production process is much more complicated than in the past, such as automobiles and shipbuilding, and requires advanced management technology that combines various processes. In managing the production process, if the computer can be used to simulate the production process or the flow of the process in advance, the results can be used to solve various requirements of the production operation.
예를 들면, FAB (Fabrication) 공정으로 구성된 반도체 메모리 및 비메모리, 디스플레이 산업(LCD, OLED 등)의 회로를 생산하는 공정은 매우 복잡하고 생산기간도 길어 사람이 직관적으로 판단하고 관리하기는 매우 어렵고, 이러한 분야에서 로딩 시뮬레이션 기술은 실제 FAB에서 생산과정을 신속히 모의실험 할 수 있는 효율적인 방법이라 할 수 있다.
For example, the process of producing circuits in semiconductor memory, non-memory, and display industries (LCD, OLED, etc.) composed of FAB (Fabrication) process is very complicated and the production period is long, so it is very difficult for human to judge and manage intuitively. In this field, loading simulation technology is an efficient way to quickly simulate the production process in a real FAB.
그러나 기존의 모의 시뮬레이션 기술은 고정밀도 산업(FAB 현장 등)에서 복잡한 설비와 공정을 모델링 하는데 난점이 있었고, 시뮬레이션 속도가 느려 현장에서 사용이 어려웠다. 예를 들면, FAB 현장설비가 100대 이상인 경우에는 모델링하기가 현실적으로 어려웠다는 것이 사실이다. 또한, 시뮬레이터 및 시뮬레이션 방법들이 생산과정에 적용되기보다는 공장 설립 시에 적용되는 경우가 대부분이어서 실제 생산 운영 과정에서는 그 용도가 제한적이었다.
However, the existing simulation technology has difficulty in modeling complex facilities and processes in the high precision industry (FAB field, etc.), and the simulation speed is difficult to use in the field. For example, it is true that modeling more than 100 FAB facilities was practically difficult. In addition, simulators and simulation methods are often applied at the time of factory establishment rather than in the production process, and their use was limited in the actual production operation process.
본 발명자들은 이러한 종래 기술의 문제점을 개선하여 빠른 시뮬레이션 속도, 복잡한 생산 과정에 대한 신속한 시뮬레이션 모델 생성, 시뮬레이션 결과의 정확성 실현, 생산과정에서의 적용 등을 목표로 연구를 거듭한 결과, 이산사건 시뮬레이션 알고리즘(Discrete Event Simulation Algorithm), 지능형 분배기(Smart Dispatcher), 설비모델 템플릿(Equipment Model Template)을 장착한 로딩 시뮬레이션 엔진을 포함하는 모의생산 시뮬레이션 시스템을 적용하는 경우 종래기술의 문제점을 해결할 수 있음을 발견하고 본 발명을 완성하였다.The present inventors have improved the problems of the prior art, the result of the study aimed at the rapid simulation speed, rapid simulation model generation for complex production process, realization of the accuracy of simulation results, application in the production process, discrete event simulation algorithm We found that applying simulation simulation systems, including a loading simulation engine equipped with a Discrete Event Simulation Algorithm, a Smart Dispatcher, and an Equipment Model Template, could solve the problems of the prior art. The present invention has been completed.
따라서 본 발명은 모의생산 시뮬레이션 시스템에 있어서, 이산사건 시뮬레이션 알고리즘, 지능형 분배기, 설비모델 템플릿을 장착하였다는 데 종래기술과는 확연히 차별되는 기술적 특징이 있으며, 이러한 시뮬레이션 엔진은 본 발명에서 최초로 개발된 것임을 밝혀둔다.
Therefore, the present invention is equipped with discrete event simulation algorithm, intelligent divider, facility model template in the simulation production simulation system, there is a technical feature that is significantly different from the prior art, such a simulation engine was developed for the first time in the present invention Reveal it.
상기한 바와 같이, 본 발명은 실제 제품 생산 과정에서 이산사건 시뮬레이션 알고리즘, 지능형 분배기, 설비모델 템플릿을 이용하여 사전에 생산과정이나 공정의 흐름이 어떻게 될 것인지를 신속히 시뮬레이션할 수 있는 모의생산 시뮬레이션 시스템을 적용하여, 종래기술에 비해 빠른 시뮬레이션 속도, 복잡한 생산 과정에서의 시뮬레이션 모델 생성, 시뮬레이션의 정확성 실현, 생산 운영 과정에서의 적용, 생산현장의 상황을 즉시 반영할 수 있다는 점 등의 목표를 달성하였음을 알 수 있다.
As described above, the present invention uses a simulation simulation system, intelligent distributor, facility model template in the actual product production process simulation system that can quickly simulate how the flow of the production process or process in advance We have achieved the goals of faster simulation speed compared to the prior art, creation of simulation models in complex production processes, realization of simulation accuracy, application in production operations, and the ability to immediately reflect the situation of production sites. Able to know.
[도 1]은 본 발명의 로딩 시뮬레이션을 이용한 모의생산 시뮬레이션 시스템의 기술개념 및 구성을 나타낸 도면이다.
[도 2]는 본 발명의 로딩 시뮬레이션 엔진의 알고리즘(이산사건 시뮬레이션)을 나타낸 도면이다.
[도 3]은 본 발명의 설비모델 템플릿의 구성과 역할을 나타낸 표이다.
[도 4]는 본 발명의 지능형 분배기를 나타낸 도면이다.1 is a view showing the technical concept and configuration of the simulation simulation system using the loading simulation of the present invention.
2 is a diagram showing an algorithm (discrete event simulation) of the loading simulation engine of the present invention.
3 is a table showing the configuration and role of the facility model template of the present invention.
4 is a diagram showing the intelligent distributor of the present invention.
이하에서 본 발명의 시뮬레이션 엔진에 장착되는 이산사건 시뮬레이션 알고리즘, 지능형 분배기, 설비모델 템플릿을 차례로 설명한다.
Hereinafter, a discrete event simulation algorithm, an intelligent distributor, and a facility model template installed in the simulation engine of the present invention will be described in sequence.
먼저, 본 발명의 로딩 시뮬레이션을 이용한 모의생산 시뮬레이션 시스템의 기술개념 및 구성은 [도 1]에 나타내었다. [도 1]에서 알 수 있는 바와 같이, 모의생산 시뮬레이션 시스템은 1)기준정보(Master Model)(10) 2)입력정보(Input Data)(11) 3) 시뮬레이션 엔진(Simulation Engine)(12) 4)출력정보(Output Data)(13) 단계로 구성되고, 1) 단계(10)의 기준정보에는 제품공정모델, 설비모델, 작업분배 논리 룰 등의 기본 정보로 이루어짐을 알 수 있다. 다음으로, 2) 단계(11)의 입력정보에는 생산계획(Production plan)과 작업 중 재고 (WIP, Work in process) 등의 정보로 이루어짐을 알 수 있으며, 3) 단계는(12) 1) 단계(10)와 2) 단계(11)에서 입력한 정보를 기초로 하여 시뮬레이션 엔진이 최적의 출력정보를 산출하기 위해 연산을 수행하는 과정임을 알 수 있으며, 4) 단계(13)는 최종 출력정보가 얻어지는 과정임을 알 수 있다. 상기 1)단계(10) 내지 4) 단계(13)를 통해 직접 생산과정을 거치지 않고도 사전에 생산과정이나 공정의 흐름이 어떻게 될 것인지를 신속하고 정확하게 알 수 있는 것이라 할 수 있다.
First, the technical concept and configuration of the simulation simulation system using the loading simulation of the present invention is shown in FIG. As can be seen in Figure 1, the simulation simulation system 1) Master Model (10) 2) Input Data (11) 3) Simulation Engine (12) 4 It can be seen that the reference information of step 1) comprises basic information such as a product process model, a facility model, and a work distribution logic rule. Next, it can be seen that 2) the input information of
그러나 앞서 설명한 바와 같이, 종래의 모의생산 시뮬레이션 시스템은 FAB 현장 등이 다공정 다설비 산업에 적용하는 데 어려운 점이 있었고, 또한, 시뮬레이션 속도가 느려 생산현장에서 직접 사용하기가 어려웠다. 예를 들면, 복잡한 FAB 현장설비가 100대 이상인 경우에는 모델링하기가 현실적으로 불가능하였다. 따라서 종래의 시뮬레이션 시스템은 생산과정에 직접 적용하기보다는 공장의 최초 설립 시에 적용하는 경우가 대부분이었다. 본 발명은 이러한 모의생산 시뮬레이션 시스템에 있어서, 시뮬레이션 엔진에 이산사건 시뮬레이션, 지능형 분배기, 설비모델 템플릿을 장착함으로써 시뮬레이션 속도와 정확성을 비약적으로 개선하여, 복잡한 생산과정에서도 적용할 수 있는 모의생산 시뮬레이션 시스템을 개발하여 본 발명을 완성하였다.
However, as described above, the conventional simulation simulation system was difficult to be applied to the multi-process multi-equipment industry in the FAB field, etc., and the simulation speed was difficult to use directly in the production site. For example, if there are more than 100 complex FAB facilities, modeling was not practical. Therefore, the conventional simulation system is mostly applied at the initial establishment of the factory rather than directly in the production process. The present invention provides a simulation simulation system that can be applied to a complex production process by dramatically improving simulation speed and accuracy by installing discrete event simulation, intelligent distributor, and facility model template in the simulation engine. Developed to complete the present invention.
이하에서는 차례로, 본 발명의 이산사건 시뮬레이션 알고리즘, 설비모델 템플릿, 지능형 분배기를 상세히 설명한다.
In the following, the discrete event simulation algorithm, facility model template, and intelligent distributor of the present invention will be described in detail.
본 발명의 이산사건 시뮬레이션 알고리즘은 [도 2]에 나타내었다. [도 2]에서 알 수 있는 바와 같이, 이산사건 시뮬레이션 알고리즘은 장착과 탈착, 착수와 해지(Loading/Unloading)를 핵심 이벤트로 하고, 또한, 피드백(Feedback) 구조로 되어 있어 생산현장의 다양한 변동 사항을 상황을 즉시 반영할 수 있어 시뮬레이션 결과의 정확도를 높인 기술적 특징이 있다 할 수 있다.
Discrete event simulation algorithm of the present invention is shown in FIG. As can be seen in FIG. 2, the discrete event simulation algorithm is based on loading, unloading, loading and unloading as key events, and also has a feedback structure, and thus, various changes in production sites. It is possible to reflect the situation immediately, which is a technical feature that increases the accuracy of the simulation results.
본 발명의 설비모델 템플릿은 [도 3]에 나타내었다. [도 3]에 표시한 설비모델 템플릿은 본 발명자들이 최초로 분류한 것으로 신규한 구성임을 밝혀둔다. [도 3]에서 알 수 있는 바와 같이, 설비모델 템플릿은 속도를 빠르게 하기 위해 최적화된 모델을 이용하는 것으로, 구체적인 설비모델 템플릿의 역할 및 입력 파라미터를 [도 3]에 요약하였다. [도 3]에서 알 수 있는 바와 같이, 본 발명에서는 설비모델을 템플릿화하여 최적화함으로써 시뮬레이션 엔진의 속도를 향상시킬 수 있음을 알 수 있다. 또한, 상기 [도 3]에서 Tact Time은 생산목표량을 달성하기 위한 제품단위당 소요 제작시간을 의미하고, Min Batch size는 최소 단위작업 크기, Max Batch size는 최대 단위작업 크기. Flow Time은 공정상의 흐름시간, Split Quantity는 작업 분배량, Time Out은 종료시간을 의미한다.
Facility model template of the present invention is shown in FIG. The facility model template shown in FIG. 3 is classified by the present inventors for the first time, and it is clear that it is a novel configuration. As can be seen in FIG. 3, the facility model template uses an optimized model to speed up the speed, and summarizes the role and input parameters of the specific facility model template in FIG. 3. As can be seen in FIG. 3, it can be seen that in the present invention, the speed of the simulation engine can be improved by optimizing the facility model. In addition, in [Fig. 3], Tact Time refers to the production time required per product unit to achieve the production target amount, Min Batch size is the minimum unit work size, Max Batch size is the maximum unit work size. Flow Time is the flow time of the process, Split Quantity is the job distribution, and Time Out is the end time.
마지막으로, 본 발명의 지능형 분배기는 [도 4]에 나타내었다. [도 4]에서 알 수 있는 바와 같이, 지능형 분배기를 시뮬레이션 엔진에 장착하는 경우 연산속도를 획기적으로 향상시킬 수 있다는 것을 알 수 있다. 지능형 분배기를 시뮬레이션 엔진에 장착하는 경우 다양한 분배 규칙 예를 들면, Tact time(하나의 제품을 생산하는데 필요한 시간)이 가장 짧고, 동작하고 있지 않은 설비 또는 재고가 가장 많은 부분을 먼저 선택하는 작업 분배 규칙(Dispatching Rule)등이 있다. 생산 현장의 다양한 분배규칙을 프로세스 모델로 만든 지능형 분배기를 통하여 시뮬레이션 속도를 획기적으로 향상시킬 수 있다. 또한, 분배 규칙을 변경해 봄으로서 생산 공정상의 애로 사항(예, 병목 현상 해소)을 해결할 수 있고, 생산 예측, 생산 계획 작업 스케줄 등에 필요한 데이터를 수집하기 위해 시뮬레이션을 미리 수행해 볼 수 있다는 데 큰 특징이 있다 할 수 있다. 예를 들면, 종래에는 반도체 FAB 라인 하나에서 30일간의 생산과정을 시뮬레이션하는데 30시간 이상 소요되어 실제 현장에서 사용하는 것이 현실적으로 불가능 하였으나, 지능형 분배기를 장착하는 경우에는 FAB 설비 500대로 이루어진 100단계 공정을 5분 이내에 수행할 수 있음을 확인하였다. 이는 속도의 비약적인 개선으로 본 발명의 큰 특징이라 할 수 있다.
Finally, the intelligent dispenser of the present invention is shown in FIG. As can be seen in FIG. 4, it can be seen that when the intelligent distributor is mounted in the simulation engine, the computation speed can be significantly improved. Various distribution rules when the intelligent distributor is mounted on the simulation engine. For example, a job distribution rule that first selects the part with the shortest Tact time and the most inactive equipment or inventory. (Dispatching Rule). The speed of simulation can be dramatically improved through the intelligent divider that makes various distribution rules of the production site into the process model. In addition, by changing the distribution rules, it is possible to solve problems in the production process (e.g. to eliminate bottlenecks), and to perform simulation in advance to collect data necessary for production prediction, production planning work schedule, etc. It can be. For example, in the past, it took more than 30 hours to simulate a 30-day production process on a single semiconductor FAB line, so it was practically impossible to use it in the field, but when equipped with an intelligent distributor, a 100-step process consisting of 500 FAB facilities It was confirmed that it can be performed within 5 minutes. This is a great feature of the invention as a dramatic improvement in speed.
상기에서 설명한 바와 같이, 본 발명에서는 로딩 시뮬레이션 엔진에 이산사건 시뮬레이션, 지능형 분배기, 설비모델 템플릿을 장착하였다는 데 특징이 있고, 이러한 구성으로 인해 시뮬레이션 속도의 비약적인 향상, 생산현장에의 직접적용, 생산현장 상황을 즉시 반영할 수 있는 모의생산 시뮬레이션 시스템이라는 데 기술적 특징이 있다고 할 수 있다.
As described above, the present invention is characterized in that the loading simulation engine is equipped with a discrete event simulation, an intelligent distributor, and a facility model template, and due to this configuration, a significant improvement in simulation speed, direct application to a production site, and production It is a technical feature that it is a simulation simulation system that can immediately reflect the situation in the field.
본 발명의 이산사건 시뮬레이션 알고리즘, 지능형 분배기, 설비모델 템플릿은 통상적으로 반도체, LCD, OLED 공장의 컨트롤 판넬(PCB) 등에 널리 사용되는 통상적인 컴퓨터에 설치되는 경우 바로 사용이 가능하고, 또한, 사용되는 컴퓨터에 기술적 특징이 있는 것이 아니므로, 본 발명의 모의생산 시뮬레이션 시스템이 장착되는 컴퓨터에 대한 구체적인 설명은 생략한다. 또한, 본 발명의 모의생산 시뮬레이션 시스템은 컴퓨터 이외에도 이에 상응하는 모든 연산장치에 적용될 수 있으므로, 본 발명의 모의생산 시뮬레이션 시스템이 작동하는 장치는 컴퓨터에 국한되지 않음도 밝혀둔다.
Discrete event simulation algorithm, intelligent distributor, facility model template of the present invention can be used immediately when installed in a conventional computer that is commonly used in semiconductor, LCD, OLED factory control panel (PCB), etc. Since the computer does not have technical features, a detailed description of the computer equipped with the simulation production simulation system of the present invention will be omitted. In addition, since the simulation simulation system of the present invention can be applied to all corresponding computing devices in addition to the computer, the apparatus in which the simulation simulation system of the present invention operates is not limited to the computer.
Claims (9)
In the simulation simulation system, it is equipped with a Discrete Event Simulation-based Loading Simulation Engine, an Intelligent Dispatcher and an Equipment Model Template algorithm. Simulation simulation system with improved accuracy and modeling capabilities.
The method of claim 1, wherein the simulation simulation system comprises the following steps: 1) Master Model 2) Input Data 3) Simulation Engine 4) Output Data Simulation simulation system with improved speed, accuracy and ability to reflect on the shop floor.
According to claim 1, Discrete event simulation based on the key events in the process of carrying out work, such as loading / unloading, loading / unloading to reflect the speed, accuracy and production site situation to simulate the production process Simulation simulation system with improved loading simulation engine.
The simulated production simulation system of claim 1, wherein the speed, accuracy, and ability to reflect the production site situation are improved, including an intelligent dispatcher that can immediately reflect the accuracy and characteristics of the production site and optimize the work order.
The simulation model of claim 1, wherein the facility model template is an input parameter reflecting facility features, and is equipped with a facility model template reflecting dynamic characteristics of mounting and detaching, thereby reducing simulation model generation time and improving modeling capability.
According to claim 1, The facility model template is a speed model characterized in that the minimum model size, the maximum batch size, the maximum waiting time and the tact time as input parameters, the work model is configured to work batch at one time Simulation system with improved performance, accuracy and ability to reflect production situations.
The speed, accuracy, and production site situation of claim 1, wherein the facility model template is a facility model template which simultaneously processes the workpiece by the number of chambers as input parameters and the number of chambers and the tact time per unit chamber. Simulation production simulation system with improved reflectivity.
The speed, accuracy, and production site situation of claim 1, wherein the facility model template is a facility model template capable of continuously loading a workpiece on a conveyor using flow time and tact time as input parameters. Simulation production simulation system with improved reflectivity.
The equipment model template of claim 1, wherein the equipment model template is an equipment model template having a flow time, a tact time, and a split quantity as input parameters, and a work piece is divided into several pieces. Simulation system with improved performance, accuracy and ability to reflect production situations.
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KR20200041489A (en) * | 2018-10-12 | 2020-04-22 | 인하대학교 산학협력단 | System and method for discerte event system specifiaction and simulation entity outsourcing based semiconductor process modeling and simulation |
WO2023048751A1 (en) * | 2021-09-23 | 2023-03-30 | Schlumberger Technology Corporation | Digital avatar platform |
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KR20200041489A (en) * | 2018-10-12 | 2020-04-22 | 인하대학교 산학협력단 | System and method for discerte event system specifiaction and simulation entity outsourcing based semiconductor process modeling and simulation |
WO2023048751A1 (en) * | 2021-09-23 | 2023-03-30 | Schlumberger Technology Corporation | Digital avatar platform |
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