KR20120050108A - Non-contact moving apparatus of floating table using magnet - Google Patents

Non-contact moving apparatus of floating table using magnet Download PDF

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Publication number
KR20120050108A
KR20120050108A KR1020100111458A KR20100111458A KR20120050108A KR 20120050108 A KR20120050108 A KR 20120050108A KR 1020100111458 A KR1020100111458 A KR 1020100111458A KR 20100111458 A KR20100111458 A KR 20100111458A KR 20120050108 A KR20120050108 A KR 20120050108A
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KR
South Korea
Prior art keywords
magnets
magnet
load
flat
straight
Prior art date
Application number
KR1020100111458A
Other languages
Korean (ko)
Inventor
임광윤
Original Assignee
(주)가온솔루션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by (주)가온솔루션 filed Critical (주)가온솔루션
Priority to KR1020100111458A priority Critical patent/KR20120050108A/en
Publication of KR20120050108A publication Critical patent/KR20120050108A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H49/00—Other gearings
    • F16H49/005—Magnetic gearings with physical contact between gears
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Nonlinear Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: A non-contact transport apparatus of a floating table using a magnet is provided to deliver driving force without contacts by eliminating a driving and transfer media and constructing a rack and pinion system. CONSTITUTION: A magnet guide(111) includes first and second load/evenness correction units. A cross section of the magnet guide includes vertical plates(113a,113b) and a horizontal plate(112). A magnet block(132) is mounted on a floating table(13). The magnet block is inserted to an opening of the magnet guide in a contactless mode. The magnet block includes third and fourth load/evenness correction units.

Description

Non-contact conveying device of floating table using magnet {NON-CONTACT MOVING APPARATUS OF FLOATING TABLE USING MAGNET}

The present invention relates to a conveying device, and more particularly, to a rail-free and non-contact conveying device using a magnet that does not require a rail and does not require contact between objects for power transmission.

In general, a rail system such as an LM guide and a ball bush bearing is required to transfer parts through a transfer line in a vacuum chamber in a semiconductor production line or a display production line, and a ball screw and a drive belt to transfer a transfer drive force. The drive transmission system of the back is essential.

However, foreign matters in the vacuum chamber cause fatal defects in the product and device configuration (vacuum pumps, etc.). These foreign matters are built into the transfer system under the internal vacuum and interlocked with mechanical parts (LM guides, balls). Frequently occurs between bush bearings, ball screws and drive belts).

In other words, the mechanical parts engaged with each other are brought into contact with each other, causing fine foreign matters to come off, thereby degrading the function in the vacuum chamber.

This foreign matter is attached to the product to be transported to cause a defect of the product, foreign matter flows into the vacuum pump to form a vacuum to shorten the life of the vacuum pump and cause the cause of fixing.

In order to solve this problem, many studies on magnetic levitation using magnetic have been conducted in the past, but in the case of the magnetic levitation structure, it is impossible to control the load force on the weight of the injury table and the force on the straightness on the direction. It is not applied to the system.

An object of the present invention for solving the above-described conventional problems, eliminating the LM guide and ball bush bearings used to transport a specific object, and by lifting the object in the air by the magnetic force of the magnet to transfer without the need for a transport rail To provide a device.

In addition, in order to transfer the driving force for transporting the object to remove the drive transmission media such as ball screw and drive belt and to build a rack and pinion system using a magnet to provide a transfer device that can transfer the driving force by non-contact between the conveying parts. I would like to.

In addition, it is possible to solve the imbalance of the load and left and right flatness of the support table by the magnet, and to provide a non-contact conveying device of the floating table using a magnet that can maintain the straightness of the support table.

In the non-contact conveying device of the floating table using a magnet according to the present invention for solving the above problems, the cross-section includes a pair of vertical plate and a horizontal plate connected or integrated with the pair of vertical plate and the horizontal plate is A magnet guide mounted on a fixed table, the magnet guide including first and second load / flat correction parts inserted into the pair of vertical plates with a plurality of magnets formed in a horizontal direction spaced apart at equal intervals up and down; A magnet mounted to a table, non-contactly inserted into the opening of the magnet guide, and a magnet including a third and fourth load / flat correction part in which a plurality of magnets are inserted in a portion corresponding to the first and second load / flat correction parts Consists of blocks.

Here, a first straight retaining portion in which at least one magnet is arranged is formed on the inner top or bottom surface of the magnet guide, and a second straight retaining portion in which the at least one magnet is arranged at a portion corresponding to the first straight retaining portion in the magnet block. It can be implemented to form an additional.

Here, the magnet guide may be formed at both left and right ends of the fixing table, and the magnet block may be formed at both left and right ends of the floating table.

Here, when the number of magnets of the first and second load / flat correction units is n (n is a positive integer), the number of magnets of the third and fourth load / flat correction units is n−1, and the first straight line is If the number of magnets in the holding portion is m (m is a positive integer), the number of magnets in the second straight holding portion may be m-1.

Here, each of the magnets of the third load / flat correction unit is located between two adjacent magnets of the first load / flat correction unit, and each of the magnets of the fourth load / flat correction unit is the second The magnets may be positioned between two adjacent magnets of the load / plate correction unit, and each of the magnets of the second linear maintenance unit may be positioned between two adjacent magnets of the first linear maintenance unit.

Here, the edges of the magnets of the third and fourth load / flat compensator are positioned to engage the edges of the magnets of the first and second load / flat compensator, and the edges of the magnets of the second straight maintenance part are It is preferable to implement so as to be positioned to engage with the corners of the magnets of the first straight holding.

According to the above-described configuration of the present invention, it is possible to provide a transfer device that does not require a transfer rail by eliminating the LM guide and ball bush bearings used to transfer a specific object, and supporting the object in the air by the magnetic force of the magnet. Done.

In addition, in order to transfer the driving force for transporting the object to remove the drive transmission media such as ball screw and drive belt and to build a rack and pinion system using a magnet to provide a transfer device that can transfer the driving force by non-contact between the conveying parts. It becomes possible.

In addition, it is possible to solve the imbalance of the load and the left and right flatness of the support table by the magnet, it is possible to provide a non-contact transfer device of the floating table using a magnet that can maintain the straightness of the support table.

Figure 1 shows a plan view of the non-contact transfer device of the lift table using a magnet according to the present invention.
Figure 2 shows a front view of the non-contact transfer device of the lift table using a magnet according to the present invention.
Figure 3 shows a side view of the non-contact transfer device of the lift table using a magnet according to the present invention.
4 is an enlarged view of a portion A of FIG. 3.
5 is an enlarged view of a portion B of FIG. 4.

Hereinafter, with reference to the accompanying drawings looks at the structure, operation and effect of the non-contact transfer device of the lift table using a magnet according to the present invention.

Figure 1 shows a plan view of the non-contact transfer device of the lift table using a magnet according to the invention, Figure 2 shows a front view of the non-contact transfer device of the lift table using a magnet according to the invention, Figure 3 The side view of the non-contact transfer device of the lift table using a magnet according to the invention is shown.

With reference to Figures 1 to 3 looks at the structure of the non-contact transfer device of the lift table using a magnet according to the present invention.

As shown, the non-contact transfer device (hereinafter referred to as the "transfer device") of the floating table using the magnet according to the present invention is the upper fixed table 11 formed on the upper side, and the upper side frame 14 standing vertically And, the lower fixing table 12 connected to the upper fixing table 11 via the upper side frame 14, the lower side frame 15 to be vertically erected to the lower end of the lower fixing table 12, The base frame 16 is connected to the front end of the lower side frame 15 to form an external configuration.

A base 18 may be connected to the bottom of the base frame 16, and a wheel for movement may be connected.

In addition, the transfer apparatus has a structure in which the floating table 13 is formed between the upper fixed table 11 and the lower fixed table 12.

3 and 4, the connection structure of the upper fixing table 11, the lower fixing table 12, and the floating table 13 will be described.

The upper fixing table 11 has a pair of magnet guides 111 formed at both ends thereof, and each of the magnet guides 111 has first and second vertical plates 113a and 113b formed in the vertical direction, and the first and second magnet guides 111. The horizontal plates 112 may be integrally connected to the second vertical plates 113a and 113b or connected by an accessory to be formed in a horizontal direction and coupled to the upper fixing table 11 by bolts or the like.

The first and second vertical plates 113a and 113b are formed in a shape in which a plurality of magnets 116 and 117 are formed in the longitudinal direction and arranged in the vertical direction, and are inserted in the inner side of the horizontal plate 112. The side surface is formed in a shape in which one or more magnets 118 are formed in the longitudinal direction and arranged side by side horizontally.

The magnet block 132 is coupled to both ends of the lift table 13, and the magnet block 132 is in contact with the magnet guide 111 between the first and second vertical plates 113a and 113b of the magnet guide 111. It stays in state and is placed in the incoming state.

A plurality of magnets 136 and 137 are inserted into both outer surfaces of the magnet block 132 so as to correspond to the plurality of magnets 116 and 117, and at least one of the magnets 118 and Correspondingly, the one or more magnets 135 are formed to be inserted.

The plurality of magnets 116 and 117 formed on the first and second vertical plates 113a and 113b of the magnet guide 111 constitute the first and second load / flat correction units 114a and 114b, respectively. The plurality of magnets 136 and 137 formed on the outer surface of the block 132 form the third and fourth load / flat correction units 134a and 134b, respectively.

That is, the first and second load / flat correction units 114a and 114b mutually move the magnet block 132 to the magnet guide 111 in a non-contact state with the third and fourth load / flat correction units 134a and 134b. Injury by magnetic force, and as a result, the injury table 13 to implement the role of floating in the fixed state of the upper fixed table (11).

One or more magnets 118 formed on the horizontal plate 112 of the magnet guide 111 constitute the first straight retaining portion 115, and one or more magnets 135 formed on the upper side of the magnet block 132 A second straight maintenance unit 135 is formed.

That is, the first straight maintaining unit 115 and the second straight maintaining unit 135 is in a non-contact state with each other and the magnet block during the horizontal movement of the magnet block 132 in the magnet guide 111 by the mutual magnetic force of the magnets It is formed to ensure the straightness of the (132), as a result to maintain the straightness relative to the upper and lower fixed table (11, 12) during the horizontal movement of the floating table (13).

In addition, the magnet pinion 121 is formed in a circular shape on the upper side of both sides of the lower fixing table 12 by the plate 122, and the magnet is coupled via the magnet block 132 and the plate 133 as a medium. The rack 131 is formed. The magnet pinion 121 and the magnet rack 131 are opposed to each other and are located in contact with each other.

The magnet rack 131 is composed of N pole-S pole-N pole-S pole .. The magnet rack 131 is formed to be long in the length direction in proportion to the length of the conveyed body 17. Magnets can be arranged with a certain slope to eliminate caulking when moving from pole to N pole.

The magnet pinion 121 is formed in a cylindrical shape and is composed of a collection of divided magnets in which NS poles are alternately coupled, and is connected to and rotated by a motor 19.

As the magnet pinion 121 is rotated, the floating table 13 may be transferred in a horizontal direction by a magnetic force with the magnet rack 131. The magnet pinion 121 has a merit of compensating for the left and right distortion caused when the object is injured because the magnetic force is pulled to the center of the circle.

That is, the first and second load / flat correction units 114a and 114b mutually move the magnet block 132 to the magnet guide 111 in a non-contact state with the third and fourth load / flat correction units 134a and 134b. The magnetic force is lifted, the first straight holding unit 115 and the second straight holding unit 135 is in contact with each other and the state of the magnet block 132 in the magnet guide 111 by the mutual magnetic force of the magnets It is formed to ensure the straightness of the magnet block 132 during the horizontal movement, the magnet pinion 121 allows the floating table 13 to be transferred in the horizontal direction by the magnetic force with the magnet rack 131.

Referring to FIG. 5, the arrangement structure of the magnets 116, 117, 118, 135, 136, and 137 will be described in more detail.

As shown in FIG. 5, the magnets 116 and 117 of the first and second load / flat correction units 114a and 114b and the magnets of the third and fourth load / flat correction units 134a and 134b. 136 and 137 are magnetized to the same polarity (N pole or S pole) on the opposite side, and the magnets 118 and the second straight maintenance unit 135 of the first straight maintenance unit 115 are disposed. The magnets of the magnetism also have a state in which the opposite polarity is magnetized to the same polarity (N pole or S pole).

In addition, the magnets 136 and 137 of the third and fourth load / flat correction units 134a and 134b are respectively magnets 116 and 117 of the first and second load / flat correction units 114a and 114b. Located between two adjacent magnets of, the magnets of the second straight maintenance unit 135 is implemented to be located between two adjacent magnets of the magnets 118 of the first straight maintenance unit 115.

For this reason, when the number of magnets of the first and second load / flat correction units 114a and 114b is n (positive integer), the number of magnets of the third and fourth load / flat correction units 134a and 134b is n−. 1 is preferable, and when the number of magnets of the first straight maintenance unit 115 is m (positive integer), the number of magnets of the second straight maintenance unit 135 is preferably m-1.

More preferably, the magnets may have a structure in which corner portions are arranged to engage each other.

By this arrangement, it is possible to minimize the load and the left and right distortion by applying a force in the vector direction of the arrow direction shown, it is possible to implement the optimum magnetic feed device that can maintain the straightness to the left and right distortion.

Conventionally, the magnet is installed up and down to increase the magnetic levitation structure, but the levitation force is increased while the force to maintain the straightness to the left and right twisted by that much, but in the present invention the magnetic levitation force The side arrangement structure allows the first and second load / flat correction units 114a and 114b and the third and fourth load / flat correction units 134a and 134b to maintain the magnetic levitation force and to be distorted accordingly. In order to reduce the size and further, the first straight maintaining unit 115 and the second straight maintaining unit 135 compensate for the left and right twists to maintain the straightness of the injury table 13.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, As will be understood by those skilled in the art. Therefore, it should be understood that the above-described embodiments are to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than the foregoing description, It is intended that all changes and modifications derived from the equivalent concept be included within the scope of the present invention.

11: upper fixing table 12: lower fixing table
13: Injury Table 14: Upper Side Frame
15: lower side frame 16: base frame
17: body to be transferred 18: holder
19: motor 111: magnet guide
112: horizontal plate 113a, 113b: vertical plate
114a, 114b, 134a, 134b: load / flat correction part
115: straight maintenance
116, 117, 118, 136, 137: magnet coupling
121: magnet pinion 131: magnet rack
122, 133: plate 132: magnet block
135: magnet (or straight holding unit)

Claims (6)

The cross section includes a pair of vertical plates and a horizontal plate connected or integrated with the pair of vertical plates, the horizontal plates being mounted on a fixed table, and a plurality of vertical plates formed in a horizontal direction on the inner surfaces of the pair of vertical plates. A magnet guide including first and second load / flat correction parts inserted with the magnets spaced apart from each other at upper and lower equal intervals;
A third and fourth load / flat correction part mounted on a floating table, non-contactly inserted into the opening of the magnet guide, and corresponding to the first and second load / flat correction parts including a plurality of magnets inserted therein; Non-contact transfer device of the lift table using a magnet, consisting of a magnet block. The method of claim 1,
On the inner upper surface or the lower surface of the magnet guide is formed a first straight retaining portion is arranged one or more magnets,
The magnet block is a non-contact conveying device of the lift table using a magnet, the second straight holding portion is formed at one or more magnets are arranged in a portion corresponding to the first straight holding portion. The method according to claim 1 or 2,
The magnet guide is formed on both left and right ends of the fixed table,
The magnet block is formed on the left and right both ends of the floating table, the non-contact conveying device of the floating table using a magnet. The method according to claim 1 or 2,
When the number of magnets of the first and second load / flat correction units is n (n is a positive integer), the number of magnets of the third and fourth load / flat correction units is n-1,
The number of magnets of the said 1st straight holding part is m (m is a positive integer), The number of magnets of the said 2nd straight holding part is m-1, The non-contact conveying apparatus of the floating table using a magnet. The method of claim 4, wherein
Each of the magnets of the third load / flat compensator is located between two adjacent magnets of the first load / flat compensator,
Each of the magnets of the fourth load / flat compensator is located between two adjacent magnets of the second load / flat compensator,
And each of the magnets of the second straight holding portion is positioned between two adjacent magnets of the first straight holding portion. The method of claim 5,
Corners of the magnets of the third and fourth load / flat correction units are positioned to engage edges of the magnets of the first and second load / flat correction units,
And the edges of the magnets of the second straight holding portion are positioned to engage the edges of the magnets of the first straight holding portion.
KR1020100111458A 2010-11-10 2010-11-10 Non-contact moving apparatus of floating table using magnet KR20120050108A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020100111458A KR20120050108A (en) 2010-11-10 2010-11-10 Non-contact moving apparatus of floating table using magnet

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Application Number Priority Date Filing Date Title
KR1020100111458A KR20120050108A (en) 2010-11-10 2010-11-10 Non-contact moving apparatus of floating table using magnet

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KR20120050108A true KR20120050108A (en) 2012-05-18

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101339701B1 (en) * 2012-07-09 2013-12-10 (주)가온솔루션 Transfer guide of no contact type
CN108519693A (en) * 2018-04-16 2018-09-11 京东方科技集团股份有限公司 A kind of substrate alignment apparatus, substrate and substrate alignment method
WO2020228939A1 (en) * 2019-05-13 2020-11-19 Applied Materials, Inc. Magnetic levitation system, base structure of a magnetic levitation system, and method of transporting a carrier
WO2021043411A1 (en) * 2019-09-05 2021-03-11 Applied Materials, Inc. Magnetic guide for guiding a carrier, transport system for transporting a carrier, and method of guiding a carrier

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101339701B1 (en) * 2012-07-09 2013-12-10 (주)가온솔루션 Transfer guide of no contact type
CN108519693A (en) * 2018-04-16 2018-09-11 京东方科技集团股份有限公司 A kind of substrate alignment apparatus, substrate and substrate alignment method
WO2020228939A1 (en) * 2019-05-13 2020-11-19 Applied Materials, Inc. Magnetic levitation system, base structure of a magnetic levitation system, and method of transporting a carrier
WO2021043411A1 (en) * 2019-09-05 2021-03-11 Applied Materials, Inc. Magnetic guide for guiding a carrier, transport system for transporting a carrier, and method of guiding a carrier

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