KR20110093068A - System for inspecting position accuracy and method thereof - Google Patents

System for inspecting position accuracy and method thereof Download PDF

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Publication number
KR20110093068A
KR20110093068A KR1020100012883A KR20100012883A KR20110093068A KR 20110093068 A KR20110093068 A KR 20110093068A KR 1020100012883 A KR1020100012883 A KR 1020100012883A KR 20100012883 A KR20100012883 A KR 20100012883A KR 20110093068 A KR20110093068 A KR 20110093068A
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KR
South Korea
Prior art keywords
chuck
image
movement
reference coordinate
error
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KR1020100012883A
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Korean (ko)
Inventor
배유석
지효근
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한국산업기술대학교산학협력단
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Priority to KR1020100012883A priority Critical patent/KR20110093068A/en
Publication of KR20110093068A publication Critical patent/KR20110093068A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: A location accuracy inspecting system and a method thereof are provided to measure an error of precision through visual inspection and supply information about the error to a user. CONSTITUTION: An image photographing unit photographs the movement of a chuck on an image that an image providing unit provides(S640). Reference coordinate value changes before/after the movement of the chuck are calculated(S660). A moved location precision error is calculated using the calculated reference coordinate value changes and the distance of a moved chuck(S670).

Description

Position precision inspection system and its method {SYSTEM FOR INSPECTING POSITION ACCURACY AND METHOD THEREOF}

The present invention relates to a position accuracy test, and more particularly, to examine and provide a position movement precision of a probe station equipment through image analysis, and furthermore, to determine the position movement precision of the probe station equipment by using the position movement precision. The present invention relates to a position accuracy inspection system and a method capable of correcting errors.

The semiconductor production industry is so expensive to invest in equipment that it is called a device industry. The semiconductor production process takes place in many stages. It is not easy to introduce new equipment as the equipment for each process costs 100 billion units. However, since the size of the chip into the semiconductor is getting smaller, the performance of the existing equipment does not keep up with the aging of the equipment and the trend of the current chip size has a lot of difficulties in the semiconductor production.

For example, probe stations are increasingly demanding higher precision due to the smaller pad sizes of semiconductor chips. However, the existing probe stations already sold on the market are becoming more and more problematic in recent years due to the low precision and obsolescence caused by the demands of the past. Improvement is needed.

To solve this problem, if we implement a system that can improve the performance of existing equipment and support the production of semiconductor chips without difficulty, it will not only reduce the investment cost of semiconductor manufacturers, but also create new sustainable business areas. have.

However, since such a system is not well implemented yet, the current situation uses a lot of temporary methods.

Therefore, there is a need for a system or method that can inspect the accuracy of existing equipment and provide it.

An object according to an embodiment of the present invention, which was devised to solve the above problems, is to measure an error of position movement precision by measuring a moving distance of a semiconductor production equipment, for example, a probe station chuck through an image image, and thereby The present invention provides a position precision inspection system and method capable of providing a user with a state of precision of a probe station.

Further, another object according to an embodiment of the present invention is to provide a position accuracy inspection system and method capable of correcting a precision error by using the position movement precision of the inspected probe station.

In order to achieve the above object, a position precision inspection system according to an aspect of the present invention is an image providing unit for providing an image including the reference coordinates to measure the moving distance of the chuck based on at least one reference reference coordinates ; An image capturing unit configured to capture an image of the movement of the chuck on the image provided by the image providing unit; And detecting the reference coordinate value from the image of the movement of the chuck taken by the image capturing unit, calculating a change in the reference coordinate value before and after the chuck movement, and calculating the calculated change in the reference coordinate value and the distance of the chuck moved. It characterized in that it comprises a control unit for calculating the position movement precision error of the chuck.

Preferably, the control unit may calculate the position movement precision error of the chuck by comparing the movement distance commanded to the chuck with the actual movement distance of the chuck calculated by the reference coordinate value change, and further, the control unit reads the chuck. The position movement error of the chuck may be calculated by moving the predetermined distance for a predetermined number of times, and the process may be repeated a predetermined number of times to calculate the position movement precision error of the chuck.

Preferably, the controller may detect the coordinate of the portion with the highest contrast in the image of the movement of the chuck as the reference coordinate.

Preferably, the controller may set a coordinate selected by the user on the image of the image providing unit captured by the image capturing unit as a reference coordinate, and then calculate a change in the reference coordinate value according to the movement of the chuck.

Position precision inspection method according to an aspect of the present invention comprises the steps of providing an image for measuring the moving distance of the chuck; Setting reference coordinates on the image; Moving the chuck by a predetermined distance on the image in which the reference coordinate is set and photographing an image of the movement of the chuck; Calculating a reference coordinate value change before and after the chuck movement by detecting the reference coordinate value from the captured image; And calculating the position movement precision error of the chuck using the calculated change in the reference coordinate value and the preset movement distance of the chuck.

According to the present invention, it is possible to measure the movement distance of the probe station chuck through vision inspection using an imaging camera to measure the error of precision and provide it to the user. It can be applied to all systems that can be used to build precision improvement system and improve the precision of existing equipment.

In addition, since the present invention can measure the position movement accuracy, there is a general purpose that can be applied to all fields using not only the probe station but also the chuck, and thus, the present invention can be applied to various fields in the future.

1 shows a configuration of a position precision inspection system according to an embodiment of the present invention.
2 illustrates an example of reference coordinates set in the position precision test.
3 shows an example of a position precision inspection procedure for five directions.
4 shows an example of a graph displayed on the screen for the position precision check.
5 illustrates an example of stored data for an X-axis precision test result.
6 is a flowchart illustrating an operation of a method for checking position precision according to an embodiment of the present invention.

Other objects and features of the present invention in addition to the above objects will be apparent from the description of the embodiments with reference to the accompanying drawings.

Preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the present invention, when it is determined that the detailed description of the related well-known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.

Hereinafter, a position precision inspection system and a method thereof according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 6.

1 shows a configuration of a position precision inspection system according to an embodiment of the present invention.

Referring to FIG. 1, the position precision inspection system includes an image provider 110, an image photographing unit 120, and a controller 130.

The image providing unit 110 provides an image including at least one reference coordinate, and the system of the present invention uses the reference coordinate provided by the image providing unit 110 to determine the moving distance of the chuck of the probe station 140. By measuring, the error with respect to the position movement precision of a chuck can be inspected or calculated.

The image providing unit 110 is a wafer glass that provides an image in which a square line of 20 [mil] × 20 [mil] is drawn in a lattice form, for example, as shown in FIG. 2. Can be.

Here, the reference coordinates on the image provided by the image providing unit 110 may be a portion having the highest contrast, such as the portion 210 where the square line meets, as shown in FIG. 2.

Of course, the image providing unit 110 may be mounted on the chuck of the probe station 140.

The image capturing unit 120 captures an image of the movement of the chuck on the image provided by the image providing unit 110 and transmits the image to the image board of the controller 130 through the control by the controller 130.

In this case, the image photographed by the image capturing unit 120 may be stored in a storage means configured in the system, may be displayed on a display unit (not shown) configured in the system, or as an example of the image capturing unit 120 It can be a camera.

The controller 130 controls the position precision inspection system to check the position movement accuracy of the probe station 140. The controller 130 moves the chuck captured by the image capturing unit 120 using a serial interface through an I / O port. Command the distance and compare the moving distance of the commanded chuck with the actual distance of the chuck by using the reference coordinate set by the user or the system. Calculate

More specifically, the control unit 130 detects the preset reference coordinates and the movement coordinates of the chuck from the image of the movement of the chuck by using the precision inspection program, and uses the detected reference coordinates and the movement coordinates of the chuck to determine the actual before and after movement of the chuck. By calculating the moving distance and comparing it with the moving distance commanded to the chuck, an error with respect to the movement of the chuck can be calculated.

In this case, the controller 130 may detect the reference coordinates of the image of the movement of the chuck using a corner extraction algorithm. For example, the controller 130 may detect the reference coordinates from the image using the linear regression method.

Here, the reference coordinate may be a reference coordinate on an image provided by the image providing unit 110, but may be a coordinate set directly by a user from an image displayed by the system. Of course, the reference coordinates set directly by the user should be able to clearly determine the portion selected by the user through the image processing process, and the contrast may be the portion with the highest contrast as an example of such a portion.

As described above, the reference coordinate in the present invention may refer to a coordinate selected by the user, a coordinate having the highest contrast, and a mode coordinate capable of calculating the actual moving distance of the chuck with respect to the commanded moving distance through image processing.

The controller 130 should be able to obtain information about the image provided by the image providing unit 110, for example, information about a size of a square, an interval between squares, and the like through a storage means of the system.

In addition, the controller 130 may perform the position movement accuracy test in the X-axis direction and the Y-axis direction, and the basic direction set by the user, as in the example shown in FIG. 3, center, 45 degrees, 135 degrees, and 225. The position movement precision inspection can be performed using each of the five directions of FIG. 315 degrees as the inspection position. Of course, the inspection position can be set by the user for the direction that can be provided by the system, such as not only five directions but also eight directions.

In order to increase the accuracy and the reliability of the position movement accuracy of the probe station 140 inspected by the system, the controller 130 repeatedly performs the position movement precision test for a predetermined number of times, for example, five times. Using this mean value, the position shift error with respect to the chuck may be calculated. Of course, the number of inspections may be set by the user or may be automatically set by the system.

In addition, the control unit 130 may adjust the resolution for the movement distance commanded to the chuck, the distance for the direction, for example, 20 [mil] when the position movement precision check for the X-axis, Y-axis direction is set You can adjust the resolution by moving it by the number of times. For example, if the resolution supported by the system is low resolution and high resolution, the low resolution moves the X and Y axis distances of 20 [mil] by about 200 times, and the high resolution moves the X and Y axis distances of 20 [mil] to 500. Move to about once. Of course, the controller 130 determines the moving distance of the chuck by controlling the rotation speed of the motor for moving the chuck according to the selected resolution. For example, when the motor for moving the chuck is a linear motor, the controller 130 controls the motor to increase by 1.8 degrees when the low resolution is selected and to increase the motor by 0.7 degrees when the high resolution is selected.

In this case, the resolution means a resolution per pixel (20 [mil] x 20 [mil]), and may be determined by a user's selection.

Furthermore, the controller 130 does not only calculate an error of the X-axis movement from the image of the movement of the corresponding axis, for example, an image of the chuck movement in the X-axis direction, but moves in the X-axis direction while moving in the Y-axis direction. Since an error may occur, an error in the Y-axis direction may also be calculated. To this end, the controller 130 detects the reference coordinate value and the coordinate value of the position of the chuck from the image, and using this, the movement distance error of the chuck moving in the corresponding axis direction (for example, the X axis) and the chuck to the corresponding axis. As you move, you can also calculate the error on the other direction axis (eg, Y axis).

Preferably, the controller 130 may display the current test progress and the test state by graphing the data on the position movement of the chuck on the screen in real time as shown in FIG. The 410 and the cos waveform 420 are signals for driving the linear motor, and the signals for determining the rotational speed of the motor by giving the sin signal and the cos signal long or short, and the thick line 430 indicates the total movement of the corresponding axis. The distance (here 20 [mil]) means the distance the chuck moved, the thin line 440 means the error rate per moving distance of the chuck. The X axis represents the total travel distance and the Y axis represents the error value of the travel distance of the chuck.

In addition, the controller 130 may store the precision test result according to the movement of the chuck in a predetermined format in real time. As an example of the X-axis precision test result shown in FIG. 5, various parameters for the position movement precision test may be obtained. ) Exists.

Here, the ROW and COL parameters refer to the inspection direction, that is, the direction and the number of movements about the X and Y axes. When the inspection is performed on the X axis, the ROWs are all 0 and the COL can be increased by 1 as the number of movements. Information stored in the ROW parameter and the COL parameter may be changed. The X-STEP and Y-STEP parameters indicate the position of the current platen, the data indicating the position of the chuck in the platen, and the QUAL parameter indicates the quality of precision. The -ERROR and Y-ERROR parameters indicate the degree of error on each axis.

These parameters indicate the error rate for each platoon position and are used to inform the inspector of the status of the platoon. The error in the chuck travel is caused by various factors such as the PROM data stored in the system, the aging status of the platoon and the horizontal status of the platoon. Can be. Of course, it is necessary to know exactly whether these errors are due to the age of the platoon, the horizontal state, or the PROM data. You can correct the errors using this information and the error data.

In addition, if necessary, the controller 130 may graph or arithmize and display the result of the accuracy of the inspection so that the user can easily recognize the result.

As such, the position precision inspection system according to an exemplary embodiment of the present invention may measure an error on the position movement of the chuck through the change of the reference coordinate value and the commanded movement distance according to the movement of the chuck photographed using the image camera. Based on this information, it is possible to provide the inspector or the user with the state of the device having the chuck, for example, the probe station.

Furthermore, the precision test data can be used to calibrate the precision of the device, thus extending the service life of the device.

6 is a flowchart illustrating an operation of a method for checking position precision according to an embodiment of the present invention.

Referring to FIG. 6, the method for checking position accuracy provides an image for measuring a chuck moving distance of a probe station (S610).

Here, the provided image may be an image including at least one reference coordinate, and as an example of the image, a square line having a predetermined size described in the system may be formed in a grid form.

When the image for measurement is provided, set a reference coordinate for measuring the moving distance of the chuck from an image taken by an image camera, for example, a CCD camera that captures an image mounted on the chuck, and sets the resolution of the moving distance of the chuck. (S620).

Here, the reference coordinate may be set by user selection or may be automatically set in the system, and this reference coordinate may be a coordinate of the portion with the highest contrast on the image.

When the reference coordinate and the resolution are set, the chuck is controlled to be moved by a predetermined distance according to the set resolution, and the chuck is photographed by moving the predetermined distance (S630 and S640).

At this time, the image is being captured in real time through the video camera, and the time point for storing the captured image may be stored before the first chuck is moved and after the chuck is moved by a command. It may vary.

The preset reference coordinate value is detected from the captured image after the chuck is moved, and the reference coordinate is compared by changing the detected reference coordinate value, that is, the reference coordinate value before the chuck is moved and the reference coordinate value after the chuck is moved. The change of the value is calculated (S650, S660).

Here, the present invention can detect the reference coordinate value from the image using a corner extraction algorithm, for example, a linear regression method.

The distance that the chuck is actually moved is calculated using the calculated change of the reference coordinate value, and the position movement precision error of the chuck is calculated by comparing the calculated movement distance of the chuck with the movement distance commanded to the chuck (S670).

Through this process, the error about the movement of the chuck can be calculated, and this series of processes are calculated by moving the series of times corresponding to the preset resolution in the corresponding axis, for example, the X-axis direction and the Y-axis direction, to calculate the position movement precision error. do. In addition, in order to increase the reliability and accuracy of the positional accuracy error, the positional precision in each line is repeated a certain number of times, and the average value of the repeated positional precision is calculated to calculate the movement error at the corresponding position of the chuck. You can also calculate

Here, the number of repetitions for calculating the precision may be set by the user or automatically set by the system.

Furthermore, the chuck may calculate precision for each position, and the position may be set as 5 directions, 8 directions, or the like.

The position accuracy inspection system and method thereof according to the present invention can be modified and applied in various forms within the scope of the technical idea of the present invention and are not limited to the above embodiments. In addition, the embodiments and drawings are merely for the purpose of describing the contents of the invention in detail, not intended to limit the scope of the technical idea of the invention, the present invention described above is common knowledge in the technical field to which the present invention belongs As those skilled in the art can have various substitutions, modifications, and changes without departing from the spirit of the present invention, it is not limited to the embodiments and the accompanying drawings. And should be judged to include equality.

110: image provider
120: video recording unit
130: control unit

Claims (10)

An image providing unit providing an image including the reference coordinates to measure a moving distance of the chuck based on at least one preset reference coordinate;
An image capturing unit configured to capture an image of the movement of the chuck on the image provided by the image providing unit; And
Detects the reference coordinate value from the image of the movement of the chuck taken by the image capturing unit, calculates a change in the reference coordinate value before and after the chuck movement, and uses the calculated reference coordinate value change and the distance of the chuck moved. To calculate the position movement precision error of the chuck
Position precision inspection system comprising a. The method of claim 1,
The control unit
And a position movement precision error of the chuck is calculated by comparing the movement distance commanded to the chuck with the actual movement distance of the chuck calculated by the reference coordinate value change. The method according to claim 1 or 2,
The control unit
A positional movement error of the chuck is calculated while moving the chuck by a predetermined interval for a number of times corresponding to a preset resolution, and the process is repeated for a predetermined number of times to calculate the positional movement precision error of the chuck. Precision inspection system. The method according to claim 1 or 2,
The control unit
And a coordinate of the portion with the highest contrast in the image of the movement of the chuck as the reference coordinate. The method according to claim 1 or 2,
The image providing unit
Position precision inspection system, characterized in that to provide an image drawn in the form of a grid of square lines of a certain size. The method according to claim 1 or 2,
The control unit
And a corner extraction algorithm to detect the reference coordinates. The method of claim 6,
The control unit
Position precision inspection system, characterized in that for detecting the reference coordinates using a linear regression method. The method according to claim 1 or 2,
The control unit
And setting the coordinates selected by the user on the image of the image providing unit captured by the image capturing unit as reference coordinates, and then calculating a change in the reference coordinate values according to the movement of the chuck. Providing an image for measuring the moving distance of the chuck;
Setting reference coordinates on the image;
Moving the chuck by a predetermined distance on the image in which the reference coordinate is set and photographing an image of the movement of the chuck;
Calculating a reference coordinate value change before and after the chuck movement by detecting the reference coordinate value from the captured image; And
Calculating a position movement precision error of the chuck using the calculated change in the reference coordinate value and a preset movement distance of the chuck
Position precision inspection method comprising a. 10. The method of claim 9,
The step of calculating the error
The position movement error of the chuck is calculated by moving the chuck by the predetermined distance for the number of times corresponding to a preset resolution, and the process is repeated a predetermined number of times to calculate the position movement precision error of the chuck. Position precision inspection method.
KR1020100012883A 2010-02-11 2010-02-11 System for inspecting position accuracy and method thereof KR20110093068A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114719710A (en) * 2022-03-08 2022-07-08 中国电子科技集团公司第十三研究所 Displacement deviation measuring method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114719710A (en) * 2022-03-08 2022-07-08 中国电子科技集团公司第十三研究所 Displacement deviation measuring method
CN114719710B (en) * 2022-03-08 2024-01-30 中国电子科技集团公司第十三研究所 Displacement deviation measuring method

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