KR20110093068A - System for inspecting position accuracy and method thereof - Google Patents
System for inspecting position accuracy and method thereof Download PDFInfo
- Publication number
- KR20110093068A KR20110093068A KR1020100012883A KR20100012883A KR20110093068A KR 20110093068 A KR20110093068 A KR 20110093068A KR 1020100012883 A KR1020100012883 A KR 1020100012883A KR 20100012883 A KR20100012883 A KR 20100012883A KR 20110093068 A KR20110093068 A KR 20110093068A
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- KR
- South Korea
- Prior art keywords
- chuck
- image
- movement
- reference coordinate
- error
- Prior art date
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
The present invention relates to a position accuracy test, and more particularly, to examine and provide a position movement precision of a probe station equipment through image analysis, and furthermore, to determine the position movement precision of the probe station equipment by using the position movement precision. The present invention relates to a position accuracy inspection system and a method capable of correcting errors.
The semiconductor production industry is so expensive to invest in equipment that it is called a device industry. The semiconductor production process takes place in many stages. It is not easy to introduce new equipment as the equipment for each process costs 100 billion units. However, since the size of the chip into the semiconductor is getting smaller, the performance of the existing equipment does not keep up with the aging of the equipment and the trend of the current chip size has a lot of difficulties in the semiconductor production.
For example, probe stations are increasingly demanding higher precision due to the smaller pad sizes of semiconductor chips. However, the existing probe stations already sold on the market are becoming more and more problematic in recent years due to the low precision and obsolescence caused by the demands of the past. Improvement is needed.
To solve this problem, if we implement a system that can improve the performance of existing equipment and support the production of semiconductor chips without difficulty, it will not only reduce the investment cost of semiconductor manufacturers, but also create new sustainable business areas. have.
However, since such a system is not well implemented yet, the current situation uses a lot of temporary methods.
Therefore, there is a need for a system or method that can inspect the accuracy of existing equipment and provide it.
An object according to an embodiment of the present invention, which was devised to solve the above problems, is to measure an error of position movement precision by measuring a moving distance of a semiconductor production equipment, for example, a probe station chuck through an image image, and thereby The present invention provides a position precision inspection system and method capable of providing a user with a state of precision of a probe station.
Further, another object according to an embodiment of the present invention is to provide a position accuracy inspection system and method capable of correcting a precision error by using the position movement precision of the inspected probe station.
In order to achieve the above object, a position precision inspection system according to an aspect of the present invention is an image providing unit for providing an image including the reference coordinates to measure the moving distance of the chuck based on at least one reference reference coordinates ; An image capturing unit configured to capture an image of the movement of the chuck on the image provided by the image providing unit; And detecting the reference coordinate value from the image of the movement of the chuck taken by the image capturing unit, calculating a change in the reference coordinate value before and after the chuck movement, and calculating the calculated change in the reference coordinate value and the distance of the chuck moved. It characterized in that it comprises a control unit for calculating the position movement precision error of the chuck.
Preferably, the control unit may calculate the position movement precision error of the chuck by comparing the movement distance commanded to the chuck with the actual movement distance of the chuck calculated by the reference coordinate value change, and further, the control unit reads the chuck. The position movement error of the chuck may be calculated by moving the predetermined distance for a predetermined number of times, and the process may be repeated a predetermined number of times to calculate the position movement precision error of the chuck.
Preferably, the controller may detect the coordinate of the portion with the highest contrast in the image of the movement of the chuck as the reference coordinate.
Preferably, the controller may set a coordinate selected by the user on the image of the image providing unit captured by the image capturing unit as a reference coordinate, and then calculate a change in the reference coordinate value according to the movement of the chuck.
Position precision inspection method according to an aspect of the present invention comprises the steps of providing an image for measuring the moving distance of the chuck; Setting reference coordinates on the image; Moving the chuck by a predetermined distance on the image in which the reference coordinate is set and photographing an image of the movement of the chuck; Calculating a reference coordinate value change before and after the chuck movement by detecting the reference coordinate value from the captured image; And calculating the position movement precision error of the chuck using the calculated change in the reference coordinate value and the preset movement distance of the chuck.
According to the present invention, it is possible to measure the movement distance of the probe station chuck through vision inspection using an imaging camera to measure the error of precision and provide it to the user. It can be applied to all systems that can be used to build precision improvement system and improve the precision of existing equipment.
In addition, since the present invention can measure the position movement accuracy, there is a general purpose that can be applied to all fields using not only the probe station but also the chuck, and thus, the present invention can be applied to various fields in the future.
1 shows a configuration of a position precision inspection system according to an embodiment of the present invention.
2 illustrates an example of reference coordinates set in the position precision test.
3 shows an example of a position precision inspection procedure for five directions.
4 shows an example of a graph displayed on the screen for the position precision check.
5 illustrates an example of stored data for an X-axis precision test result.
6 is a flowchart illustrating an operation of a method for checking position precision according to an embodiment of the present invention.
Other objects and features of the present invention in addition to the above objects will be apparent from the description of the embodiments with reference to the accompanying drawings.
Preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In describing the present invention, when it is determined that the detailed description of the related well-known configuration or function may obscure the gist of the present invention, the detailed description thereof will be omitted.
Hereinafter, a position precision inspection system and a method thereof according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 6.
1 shows a configuration of a position precision inspection system according to an embodiment of the present invention.
Referring to FIG. 1, the position precision inspection system includes an
The
The
Here, the reference coordinates on the image provided by the
Of course, the
The
In this case, the image photographed by the
The
More specifically, the
In this case, the
Here, the reference coordinate may be a reference coordinate on an image provided by the
As described above, the reference coordinate in the present invention may refer to a coordinate selected by the user, a coordinate having the highest contrast, and a mode coordinate capable of calculating the actual moving distance of the chuck with respect to the commanded moving distance through image processing.
The
In addition, the
In order to increase the accuracy and the reliability of the position movement accuracy of the
In addition, the
In this case, the resolution means a resolution per pixel (20 [mil] x 20 [mil]), and may be determined by a user's selection.
Furthermore, the
Preferably, the
In addition, the
Here, the ROW and COL parameters refer to the inspection direction, that is, the direction and the number of movements about the X and Y axes. When the inspection is performed on the X axis, the ROWs are all 0 and the COL can be increased by 1 as the number of movements. Information stored in the ROW parameter and the COL parameter may be changed. The X-STEP and Y-STEP parameters indicate the position of the current platen, the data indicating the position of the chuck in the platen, and the QUAL parameter indicates the quality of precision. The -ERROR and Y-ERROR parameters indicate the degree of error on each axis.
These parameters indicate the error rate for each platoon position and are used to inform the inspector of the status of the platoon. The error in the chuck travel is caused by various factors such as the PROM data stored in the system, the aging status of the platoon and the horizontal status of the platoon. Can be. Of course, it is necessary to know exactly whether these errors are due to the age of the platoon, the horizontal state, or the PROM data. You can correct the errors using this information and the error data.
In addition, if necessary, the
As such, the position precision inspection system according to an exemplary embodiment of the present invention may measure an error on the position movement of the chuck through the change of the reference coordinate value and the commanded movement distance according to the movement of the chuck photographed using the image camera. Based on this information, it is possible to provide the inspector or the user with the state of the device having the chuck, for example, the probe station.
Furthermore, the precision test data can be used to calibrate the precision of the device, thus extending the service life of the device.
6 is a flowchart illustrating an operation of a method for checking position precision according to an embodiment of the present invention.
Referring to FIG. 6, the method for checking position accuracy provides an image for measuring a chuck moving distance of a probe station (S610).
Here, the provided image may be an image including at least one reference coordinate, and as an example of the image, a square line having a predetermined size described in the system may be formed in a grid form.
When the image for measurement is provided, set a reference coordinate for measuring the moving distance of the chuck from an image taken by an image camera, for example, a CCD camera that captures an image mounted on the chuck, and sets the resolution of the moving distance of the chuck. (S620).
Here, the reference coordinate may be set by user selection or may be automatically set in the system, and this reference coordinate may be a coordinate of the portion with the highest contrast on the image.
When the reference coordinate and the resolution are set, the chuck is controlled to be moved by a predetermined distance according to the set resolution, and the chuck is photographed by moving the predetermined distance (S630 and S640).
At this time, the image is being captured in real time through the video camera, and the time point for storing the captured image may be stored before the first chuck is moved and after the chuck is moved by a command. It may vary.
The preset reference coordinate value is detected from the captured image after the chuck is moved, and the reference coordinate is compared by changing the detected reference coordinate value, that is, the reference coordinate value before the chuck is moved and the reference coordinate value after the chuck is moved. The change of the value is calculated (S650, S660).
Here, the present invention can detect the reference coordinate value from the image using a corner extraction algorithm, for example, a linear regression method.
The distance that the chuck is actually moved is calculated using the calculated change of the reference coordinate value, and the position movement precision error of the chuck is calculated by comparing the calculated movement distance of the chuck with the movement distance commanded to the chuck (S670).
Through this process, the error about the movement of the chuck can be calculated, and this series of processes are calculated by moving the series of times corresponding to the preset resolution in the corresponding axis, for example, the X-axis direction and the Y-axis direction, to calculate the position movement precision error. do. In addition, in order to increase the reliability and accuracy of the positional accuracy error, the positional precision in each line is repeated a certain number of times, and the average value of the repeated positional precision is calculated to calculate the movement error at the corresponding position of the chuck. You can also calculate
Here, the number of repetitions for calculating the precision may be set by the user or automatically set by the system.
Furthermore, the chuck may calculate precision for each position, and the position may be set as 5 directions, 8 directions, or the like.
The position accuracy inspection system and method thereof according to the present invention can be modified and applied in various forms within the scope of the technical idea of the present invention and are not limited to the above embodiments. In addition, the embodiments and drawings are merely for the purpose of describing the contents of the invention in detail, not intended to limit the scope of the technical idea of the invention, the present invention described above is common knowledge in the technical field to which the present invention belongs As those skilled in the art can have various substitutions, modifications, and changes without departing from the spirit of the present invention, it is not limited to the embodiments and the accompanying drawings. And should be judged to include equality.
110: image provider
120: video recording unit
130: control unit
Claims (10)
An image capturing unit configured to capture an image of the movement of the chuck on the image provided by the image providing unit; And
Detects the reference coordinate value from the image of the movement of the chuck taken by the image capturing unit, calculates a change in the reference coordinate value before and after the chuck movement, and uses the calculated reference coordinate value change and the distance of the chuck moved. To calculate the position movement precision error of the chuck
Position precision inspection system comprising a.
The control unit
And a position movement precision error of the chuck is calculated by comparing the movement distance commanded to the chuck with the actual movement distance of the chuck calculated by the reference coordinate value change.
The control unit
A positional movement error of the chuck is calculated while moving the chuck by a predetermined interval for a number of times corresponding to a preset resolution, and the process is repeated for a predetermined number of times to calculate the positional movement precision error of the chuck. Precision inspection system.
The control unit
And a coordinate of the portion with the highest contrast in the image of the movement of the chuck as the reference coordinate.
The image providing unit
Position precision inspection system, characterized in that to provide an image drawn in the form of a grid of square lines of a certain size.
The control unit
And a corner extraction algorithm to detect the reference coordinates.
The control unit
Position precision inspection system, characterized in that for detecting the reference coordinates using a linear regression method.
The control unit
And setting the coordinates selected by the user on the image of the image providing unit captured by the image capturing unit as reference coordinates, and then calculating a change in the reference coordinate values according to the movement of the chuck.
Setting reference coordinates on the image;
Moving the chuck by a predetermined distance on the image in which the reference coordinate is set and photographing an image of the movement of the chuck;
Calculating a reference coordinate value change before and after the chuck movement by detecting the reference coordinate value from the captured image; And
Calculating a position movement precision error of the chuck using the calculated change in the reference coordinate value and a preset movement distance of the chuck
Position precision inspection method comprising a.
The step of calculating the error
The position movement error of the chuck is calculated by moving the chuck by the predetermined distance for the number of times corresponding to a preset resolution, and the process is repeated a predetermined number of times to calculate the position movement precision error of the chuck. Position precision inspection method.
Priority Applications (1)
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KR1020100012883A KR20110093068A (en) | 2010-02-11 | 2010-02-11 | System for inspecting position accuracy and method thereof |
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KR1020100012883A KR20110093068A (en) | 2010-02-11 | 2010-02-11 | System for inspecting position accuracy and method thereof |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114719710A (en) * | 2022-03-08 | 2022-07-08 | 中国电子科技集团公司第十三研究所 | Displacement deviation measuring method |
-
2010
- 2010-02-11 KR KR1020100012883A patent/KR20110093068A/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114719710A (en) * | 2022-03-08 | 2022-07-08 | 中国电子科技集团公司第十三研究所 | Displacement deviation measuring method |
CN114719710B (en) * | 2022-03-08 | 2024-01-30 | 中国电子科技集团公司第十三研究所 | Displacement deviation measuring method |
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