KR20100018613A - 부상 장치 및 부상 반송 장치 - Google Patents
부상 장치 및 부상 반송 장치 Download PDFInfo
- Publication number
- KR20100018613A KR20100018613A KR1020107000547A KR20107000547A KR20100018613A KR 20100018613 A KR20100018613 A KR 20100018613A KR 1020107000547 A KR1020107000547 A KR 1020107000547A KR 20107000547 A KR20107000547 A KR 20107000547A KR 20100018613 A KR20100018613 A KR 20100018613A
- Authority
- KR
- South Korea
- Prior art keywords
- fluid
- floating
- inner circumference
- opening
- levitation
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Advancing Webs (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007173433A JP5396695B2 (ja) | 2007-06-29 | 2007-06-29 | 浮上ユニット及び浮上搬送装置 |
JPJP-P-2007-173433 | 2007-06-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20100018613A true KR20100018613A (ko) | 2010-02-17 |
Family
ID=40225916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020107000547A KR20100018613A (ko) | 2007-06-29 | 2008-05-09 | 부상 장치 및 부상 반송 장치 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5396695B2 (ja) |
KR (1) | KR20100018613A (ja) |
CN (1) | CN101715422B (ja) |
TW (1) | TW200918427A (ja) |
WO (1) | WO2009004859A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101142959B1 (ko) * | 2009-06-29 | 2012-05-08 | 김영태 | 평판 정밀 플로팅 시스템 |
JP5879680B2 (ja) * | 2010-11-05 | 2016-03-08 | 株式会社Ihi | 非接触式静電チャック |
JP5790121B2 (ja) * | 2011-04-26 | 2015-10-07 | 株式会社Ihi | 浮上搬送装置 |
CN102785940A (zh) * | 2012-08-15 | 2012-11-21 | 吉林大学 | 超声波/气浮混合式非接触自动运输装置 |
CN206705256U (zh) * | 2016-11-01 | 2017-12-05 | 昆山高艺泽机械设备有限公司 | 一种气浮式输送*** |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11268830A (ja) * | 1998-03-19 | 1999-10-05 | Toray Eng Co Ltd | 気流搬送セル |
JP2005075496A (ja) * | 2003-08-28 | 2005-03-24 | Murata Mach Ltd | 浮上搬送装置 |
JP4613800B2 (ja) * | 2004-12-01 | 2011-01-19 | 株式会社Ihi | 浮上装置および搬送装置 |
JP4501713B2 (ja) * | 2005-02-09 | 2010-07-14 | シンフォニアテクノロジー株式会社 | エア浮上搬送装置 |
TW200800773A (en) * | 2005-11-14 | 2008-01-01 | Ishikawajima Harima Heavy Ind | Floating device and carrying device |
KR101213991B1 (ko) * | 2005-12-16 | 2012-12-20 | 엘아이지에이디피 주식회사 | 기판 이송 장치 및 방법 |
-
2007
- 2007-06-29 JP JP2007173433A patent/JP5396695B2/ja active Active
-
2008
- 2008-05-09 WO PCT/JP2008/058625 patent/WO2009004859A1/ja active Application Filing
- 2008-05-09 KR KR1020107000547A patent/KR20100018613A/ko active Search and Examination
- 2008-05-09 CN CN200880021740.6A patent/CN101715422B/zh active Active
- 2008-06-06 TW TW97121180A patent/TW200918427A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
WO2009004859A1 (ja) | 2009-01-08 |
JP2009012875A (ja) | 2009-01-22 |
CN101715422B (zh) | 2013-03-27 |
TW200918427A (en) | 2009-05-01 |
CN101715422A (zh) | 2010-05-26 |
JP5396695B2 (ja) | 2014-01-22 |
TWI359778B (ja) | 2012-03-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
AMND | Amendment | ||
E601 | Decision to refuse application | ||
J201 | Request for trial against refusal decision | ||
AMND | Amendment | ||
B601 | Maintenance of original decision after re-examination before a trial | ||
J301 | Trial decision |
Free format text: TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20120504 Effective date: 20130219 |