KR20080052230A - 전자소자용 맞물림 전극 구조물 및 이를 이용한 전자소자 - Google Patents
전자소자용 맞물림 전극 구조물 및 이를 이용한 전자소자 Download PDFInfo
- Publication number
- KR20080052230A KR20080052230A KR1020070054905A KR20070054905A KR20080052230A KR 20080052230 A KR20080052230 A KR 20080052230A KR 1020070054905 A KR1020070054905 A KR 1020070054905A KR 20070054905 A KR20070054905 A KR 20070054905A KR 20080052230 A KR20080052230 A KR 20080052230A
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- KR
- South Korea
- Prior art keywords
- electrode
- electronic device
- electrode structure
- sensor
- electrodes
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measuring Fluid Pressure (AREA)
- Micromachines (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
Description
Claims (6)
- 중심으로부터 방사상으로 형성되며, 상호 전기적으로 절연되도록 교대로 형성되는 상호 맞물림 구조를 갖는 복수의 (+) 전극 및 복수의 (-) 전극을 포함하는 전자소자용 전극 구조물.
- 제1항에 있어서,상기 (+) 전극 및 상기 (-) 전극은 대칭을 이루는 원형 또 다각형 맞물림 구조를 갖는 전자소자용 전극 구조물.
- 제1항에 있어서,상기 (+) 전극 및 상기 (-) 전극과 전기적으로 절연되며 상기 (+) 전극 및 (-) 전극 중 어느 하나와 교대로 형성되는 접지(ground: G)를 더 포함하는 전자소자용 전극 구조물.
- 제1항 내지 제3항 중 어느 한 항의 전자 소자용 전극 구조물과 압전물질을 이용하여 제작된 전자 소자.
- 제4항에 있어서,상기 압전물질은 PMN-PT, PZT 및 ZnO를 포함하는 전자 소자.
- 제4항에 있어서,상기 전자소자는 압력센서, 음향 센서 및 초음파 센서를 포함하는 센서소자; MEMS 엑츄에이터, MEMS 센서를 포함하는 MEMS 소자; 전원을 발생시키는 전원 발생 소자; 및 구동 소자를 포함하는 전자 소자.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/865,427 US7520173B2 (en) | 2006-12-06 | 2007-10-01 | Interdigitated electrode for electronic device and electronic device using the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060122720 | 2006-12-06 | ||
KR20060122720 | 2006-12-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20080052230A true KR20080052230A (ko) | 2008-06-11 |
KR100885668B1 KR100885668B1 (ko) | 2009-02-26 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020070054905A KR100885668B1 (ko) | 2006-12-06 | 2007-06-05 | 전자소자용 맞물림 전극 구조물 및 이를 이용한 전자소자 |
Country Status (1)
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KR (1) | KR100885668B1 (ko) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8114697B2 (en) | 2007-12-18 | 2012-02-14 | Electronics And Telecommunications Research Institute | Piezoelectric microphone, speaker, microphone-speaker integrated device and manufacturing method thereof |
KR101159734B1 (ko) * | 2008-12-22 | 2012-06-28 | 한국전자통신연구원 | 압전형 스피커 및 이의 제작방법 |
KR101479038B1 (ko) * | 2013-12-03 | 2015-01-05 | 주식회사 유라코퍼레이션 | 단자압착장치 |
CN112885955A (zh) * | 2021-01-11 | 2021-06-01 | 中国科学院声学研究所 | 一种压电传感器及麦克风 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100234698B1 (ko) * | 1995-12-30 | 1999-12-15 | 김영환 | 나선형 전극패턴을 가진 반도체소자 및 그 제조방법 |
JP3677384B2 (ja) * | 1997-12-22 | 2005-07-27 | 京セラ株式会社 | 弾性表面波装置 |
-
2007
- 2007-06-05 KR KR1020070054905A patent/KR100885668B1/ko active IP Right Grant
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8114697B2 (en) | 2007-12-18 | 2012-02-14 | Electronics And Telecommunications Research Institute | Piezoelectric microphone, speaker, microphone-speaker integrated device and manufacturing method thereof |
KR101159734B1 (ko) * | 2008-12-22 | 2012-06-28 | 한국전자통신연구원 | 압전형 스피커 및 이의 제작방법 |
US8712079B2 (en) | 2008-12-22 | 2014-04-29 | Electronics And Telecommunications Research Institute | Piezoelectric speaker and method of manufacturing the same |
KR101479038B1 (ko) * | 2013-12-03 | 2015-01-05 | 주식회사 유라코퍼레이션 | 단자압착장치 |
CN112885955A (zh) * | 2021-01-11 | 2021-06-01 | 中国科学院声学研究所 | 一种压电传感器及麦克风 |
Also Published As
Publication number | Publication date |
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KR100885668B1 (ko) | 2009-02-26 |
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