KR20060080482A - Effusion cell for depositing material and deposition system having it - Google Patents

Effusion cell for depositing material and deposition system having it Download PDF

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KR20060080482A
KR20060080482A KR1020050000964A KR20050000964A KR20060080482A KR 20060080482 A KR20060080482 A KR 20060080482A KR 1020050000964 A KR1020050000964 A KR 1020050000964A KR 20050000964 A KR20050000964 A KR 20050000964A KR 20060080482 A KR20060080482 A KR 20060080482A
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heating
deposition
organic
crucible
divided
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KR100645719B1 (en
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황민정
안재홍
김도근
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삼성에스디아이 주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/27—Adaptation for use in or on movable bodies
    • H01Q1/32—Adaptation for use in or on road or rail vehicles
    • H01Q1/325—Adaptation for use in or on road or rail vehicles characterised by the location of the antenna on the vehicle
    • H01Q1/3275—Adaptation for use in or on road or rail vehicles characterised by the location of the antenna on the vehicle mounted on a horizontal surface of the vehicle, e.g. on roof, hood, trunk
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/08—Means for collapsing antennas or parts thereof
    • H01Q1/084—Pivotable antennas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60R—VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR
    • B60R11/00—Arrangements for holding or mounting articles, not otherwise provided for
    • B60R2011/0001—Arrangements for holding or mounting articles, not otherwise provided for characterised by position
    • B60R2011/0003—Arrangements for holding or mounting articles, not otherwise provided for characterised by position inside the vehicle
    • B60R2011/0028—Ceiling, e.g. roof rails

Abstract

본 발명은 물질증착용 증착원 및 이를 구비한 증착시스템에 관한 것으로서, 진공챔버; 상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지; 상기 진공챔버의 타측에 설치되는 구동축; 및 상기 구동축을 따라서 이동가능하도록 설치되는 증착원으로 구성되고, 상기 증착원은 복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와; 상기 도가니를 가열하는 가열체와; 상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 하므로 분사노즐부를 통해서 분사되는 유기기상물질의 증착율을 전체적으로 균일화시켜 기판에 균일한 유기물층을 형성할 수 있다.The present invention relates to a deposition source for vapor deposition and a deposition system having the same, comprising: a vacuum chamber; A stage having a chuck supporting the substrate and the mask installed in one side of the vacuum chamber in an aligned state; A drive shaft installed at the other side of the vacuum chamber; And a deposition source installed to be movable along the driving shaft, wherein the deposition source has a plurality of divided sections, each of which comprises a crucible for storing organic materials; A heating body for heating the crucible; Since the organic material is formed by the injection nozzle unit is sprayed by the heating action of the heating material is characterized in that the injection nozzle portion is injected as a uniform organic material layer on the substrate by uniformizing the deposition rate of the organic vapor substance injected through the injection nozzle Can be formed.

가열체, 증착율 감지센서, 유기기상물질Heating element, deposition rate sensor, organic gaseous substance

Description

물질증착용 증착원 및 이를 구비한 증착시스템{EFFUSION CELL FOR DEPOSITING MATERIAL AND DEPOSITION SYSTEM HAVING IT} Evaporation source for material deposition and deposition system having same {EFFUSION CELL FOR DEPOSITING MATERIAL AND DEPOSITION SYSTEM HAVING IT}             

도 1은 본 발명에 따른 진공증착 시스템의 버퍼영역에 증착원이 위치하고 있는 상태를 나타내는 개략도;1 is a schematic view showing a state where the deposition source is located in the buffer region of the vacuum deposition system according to the present invention;

도 2는 본 발명에 따른 진공증착 시스템의 성막영역에 증착원이 위치하고 있는 상태를 나타내는 개략도;2 is a schematic view showing a state where the deposition source is located in the deposition region of the vacuum deposition system according to the present invention;

도 3은 본 발명에 따른 도가니가 내장된 증착원을 도시한 측단면도;Figure 3 is a side cross-sectional view showing a deposition source embedded with a crucible according to the present invention;

도 4는 본 발명에 따른 다수의 분할구역을 갖는 도가니를 도시한 사시도;4 is a perspective view of a crucible having a plurality of partitions according to the present invention;

도 5는 도가니의 분할구역에 대응하여 분사노즐부로부터 분사되는 유기기상물질의 증착율을 측정하는 센서의 설치상태를 도시한 도면.FIG. 5 is a view illustrating an installation state of a sensor for measuring a deposition rate of an organic gaseous substance sprayed from an injection nozzle unit in correspondence with a divided area of a crucible

< 도면의 주요부분에 대한 부호의 설명 ><Description of Symbols for Major Parts of Drawings>

10 : 진공챔버10: vacuum chamber

20 : 증착원20: evaporation source

22 : 도가니22: crucible

24 : 분사노즐부24: injection nozzle unit

26a, 26b, 28 : 센서26a, 26b, 28: sensor

30 : 기판30: substrate

40 : 마스크40: mask

50 : 척50: Chuck

100 : 진공증착 시스템100: vacuum deposition system

본 발명은 유기물질을 저장하는 도가니를 갖는 증착원 및 이를 구비한 증착시스템에 관한 것이고, 더 상세하게는 복수개로 나누어져 있는 분할구역 각각에 유기물질이 저장되어 있는 도가니를 갖는 증착원 및 이를 구비한 증착시스템에 관한 것이다.The present invention relates to a deposition source having a crucible for storing organic materials and a deposition system having the same, and more particularly, to a deposition source having a crucible having organic materials stored in each of a plurality of divided regions. It relates to a deposition system.

일반적으로, 평판 디스플레이 중의 하나인 전계발광 디스플레이 장치는 발광층으로 사용하는 물질에 따라서 무기전계발광 디스플레이 장치와, 유기전계발광 디스플레이 장치로 구분되고, 유기전계발광 디스플레이 장치는 저전압으로 구동이 가능하고, 경량의 박형이면서 시야각이 넓을 뿐만 아니라 응답속도 또한 빠르다는 장점을 구비하고 있기 때문에 각광을 받고 있다.In general, an electroluminescent display device, which is one of flat panel displays, is classified into an inorganic electroluminescent display device and an organic electroluminescent display device according to a material used as a light emitting layer, and the organic electroluminescent display device can be driven at low voltage and is light in weight. It is attracting attention because of its thinness and wide viewing angle as well as fast response speed.

이러한 유기전계발광 디스플레이 장치의 유기전계 발광소자는 기판 상에 적층식으로 형성되는 양극, 유기물층 및 음극으로 구성된다. 상기 유기물층은 정공과 전자가 재결합하여 여기자를 형성하고 빛을 방출하는 유기 발광층의 유기물층을 포함하고, 또한 정공과 전자를 유기 발광층으로 원활하게 수송하여 발광효율을 향상시키기 위하여 상기 음극과 유기 발광층 사이에 전자 주입층과 전자 수송층의 유기물층을 개재시키면서 양극과 유기 발광층 사이에 정공 주입층과 전자 수송층의 유기물층을 개재시킨다.The organic light emitting device of the organic light emitting display device includes an anode, an organic material layer, and a cathode that are stacked on a substrate. The organic material layer includes an organic material layer of an organic light emitting layer that recombines holes and electrons to form excitons and emits light, and also between the cathode and the organic light emitting layer to smoothly transport holes and electrons to the organic light emitting layer to improve luminous efficiency. The organic material layer of the hole injection layer and the electron transport layer is interposed between the anode and the organic light emitting layer while interposing the organic material layer of the electron injection layer and the electron transport layer.

상술된 구조로 이루어진 유기전계 발광소자는 일반적으로, 진공증착법, 이온 플레이팅법 및 스퍼터링법 등과 같은 물리기상 증착법 또는 가스 반응에 의한 화학기상 증착법으로 제작된다. 특히, 유기전계 발광소자의 유기물층을 형성하기 위해서는 진공중에서 증발시킨 유기물질을 기판에 증착시키는 진공증착법이 널리 사용되고 있으며, 이러한 진공증착법에는 진공챔버 내에서 증발되는 유기물질을 기판에 분사시키는 증착원(effusion cell)이 사용된다.The organic light emitting device having the above-described structure is generally manufactured by a physical vapor deposition method such as a vacuum deposition method, an ion plating method and a sputtering method or a chemical vapor deposition method by a gas reaction. In particular, in order to form an organic material layer of an organic light emitting device, a vacuum deposition method for depositing an organic material evaporated in a vacuum on a substrate is widely used. effusion cells) are used.

상기 증착원은 유기물질이 수용되어 있는 도가니와, 상기 도가니를 가열시키는 가열수단과, 상기 가열수단에 의해서 증발되는 유기기상물질을 분사하는 분사노즐부를 포함한다.The evaporation source includes a crucible in which an organic material is accommodated, heating means for heating the crucible, and an injection nozzle part for injecting an organic vapor material evaporated by the heating means.

따라서, 기판이 진공챔버 내에 장착된 상태에서, 도가니에 수용된 유기물질이 가열수단에 의해서 가열됨으로써 형성되는 유기기상물질은 분사노즐을 통해서 기판으로 분사되어 증착된다. 이때, 진공증착법의 취급자는 기판에 형성되는 유기물층의 스텝 커버리지 및 균일도를 향상시키기 위한 노력을 경주하고 있다.Therefore, in the state where the substrate is mounted in the vacuum chamber, the organic vapor substance formed by heating the organic substance contained in the crucible by the heating means is sprayed onto the substrate through the spray nozzle and deposited. At this time, the vacuum vapor deposition worker is making efforts to improve the step coverage and uniformity of the organic material layer formed on the substrate.

특히, 기판이 대형화되는 추세하에서, 양호한 스텝 커버리지와 균일도를 갖는 유기물층을 기판에 형성하기 위하여 증착원이 진공챔버 내에서 수직 상하방향으로 이동하면서 정지되어 있는 기판에 유기물질을 증발시킴으로써 형성되는 유기기 상물질을 분사하는 수직 이동형 유기물 증착장치가 개발되었다.In particular, under the trend of larger substrates, organic groups are formed by evaporating organic materials to a stationary substrate while the evaporation source is moved vertically and vertically in a vacuum chamber to form an organic material layer having good step coverage and uniformity. A vertically movable organic material deposition apparatus for spraying a phase material has been developed.

그러나, 이러한 수직 이동형 유기물 증착장치에 있어서, 도가니와 가열수단의 크기도 상대적으로 증가한다. 그리고, 가열수단에 의한 가열작용이 도가니 전체에 걸쳐서 균일해지면 유기물질의 가열상태가 균일해져서 분사노즐을 통해서 분사되는 유기기상물질의 증착율도 균일해진다. However, in such a vertically movable organic vapor deposition apparatus, the size of the crucible and the heating means also increases relatively. When the heating action by the heating means becomes uniform throughout the crucible, the heating state of the organic material becomes uniform, and the deposition rate of the organic vapor material injected through the spray nozzle is also uniform.

그러나, 도가니에 대한 가열수단의 가열작용이 불균일해지면 분사노즐을 통해서 분사되는 유기기상물질의 증착율도 불균일해지며, 결과적으로 유기물층의 균일도를 저하시킨다.However, when the heating action of the heating means on the crucible becomes uneven, the deposition rate of the organic gaseous material sprayed through the spray nozzle is also uneven, and as a result, the uniformity of the organic material layer is reduced.

따라서, 대면적 증착에 사용되는 수직 이동형 유기물 증착장치에 있어서, 도가니의 크기가 증가하여도 도가니에 수용되어 있는 유기물질을 균일하게 가열하여 기판에 형성되는 유기물층의 균일도를 향상시킬 수 있는 방안이 요구되었다.Therefore, in the vertically movable organic material deposition apparatus used for large area deposition, there is a demand for a method of improving the uniformity of the organic material layer formed on the substrate by uniformly heating the organic material contained in the crucible even when the size of the crucible is increased. It became.

본 발명은 상기된 바와 같은 종래의 문제점을 해결하기 위하여 제안된 것으로, 기판의 대형화에 대응하기 위한 수직 이동형 유기물 증착장치에 있어서 복수개로 나누어져 있고 유기물질이 각각 저장되어 있는 분할구역을 갖는 도가니를 가짐으로써 도가니의 크기가 증가하여도 도가니에 수용되어 있는 유기물질을 균일하게 가열할 수 있는 증착원 및 이를 구비한 증착시스템을 제공하는 데 그 목적이 있다.
The present invention has been proposed to solve the conventional problems as described above, in the vertically movable organic material deposition apparatus to cope with the increase in size of the substrate is divided into a plurality of crucibles having a divided area in which each organic material is stored. The purpose of the present invention is to provide a deposition source capable of uniformly heating the organic material contained in the crucible even though the size of the crucible is increased, and a deposition system having the same.

상기 목적을 달성하기 위하여, 본 발명의 실시예에 따르면, 물질증착용 증착원은 복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와; 상기 도가니를 가열하는 가열체와; 상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 한다.In order to achieve the above object, according to an embodiment of the present invention, the material deposition deposition source has a plurality of divided partitions, each of the divided zones and the crucible for storing the organic material; A heating body for heating the crucible; Characterized in that the injection nozzle portion for spraying the organic vapor material formed by the evaporation of the organic material by the heating action of the heating body.

본 발명의 일실시예에 따르면, 증착시스템은 진공챔버; 상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지; 상기 진공챔버의 타측에 설치되는 구동축; 및 상기 구동축을 따라서 이동가능하도록 설치되는 증착원으로 구성되고, 상기 증착원은 복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와; 상기 도가니를 가열하는 가열체와; 상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 한다.According to one embodiment of the invention, the deposition system comprises a vacuum chamber; A stage having a chuck supporting the substrate and the mask installed in one side of the vacuum chamber in an aligned state; A drive shaft installed at the other side of the vacuum chamber; And a deposition source installed to be movable along the driving shaft, wherein the deposition source has a plurality of divided sections, each of which comprises a crucible for storing organic materials; A heating body for heating the crucible; Characterized in that the injection nozzle portion for spraying the organic vapor material formed by the evaporation of the organic material by the heating action of the heating body.

바람직하게, 상기 도가니의 분할구역에 각각 대응하는 상기 분사노즐부 전방에는 상기 분사노즐부로부터 분사되는 유기기상물질의 증착율을 감지하는 복수개의 증착율 감지센서를 더 포함한다.Preferably, the apparatus further includes a plurality of deposition rate sensing sensors configured to detect a deposition rate of the organic gaseous material sprayed from the injection nozzle part in front of the injection nozzle part corresponding to each of the divided regions of the crucible.

더 바람직하게, 상기 복수개의 증착율 감지센서는 상기 증착원의 양단에 설치되는 한 쌍의 외부 감지센서와, 상기 증착시스템의 내부 바닥면에 고정설치되는 중앙 감지센서로 이루어진다.More preferably, the plurality of deposition rate sensing sensors comprise a pair of external sensing sensors installed at both ends of the deposition source, and a central sensing sensor fixedly installed on the inner bottom surface of the deposition system.

이하, 첨부도면을 참조하여 본 발명의 바람직한 실시예를 설명한다. 그리 고, 용어 '유기물질'은 기판에 유기물층을 형성하기 위하여 도가니에 액체상태 또는 고체상태로 저장되어 있는 물질을 의미하고, 용어 '유기기상물질'은 도가니를 가열할 때 유기물질이 증발함으로써 형성되는 기체상태의 물질을 의미한다. 이와 같이, 본 발명을 설명함에 있어서 사용되는 특정용어는 설명의 편리성을 위하여 정의된 것이므로 당 분야에 종사하는 기술자의 의도 또는 관례 등에 따라 달라질 수 있고 또한 본 발명의 기술적 구성요소를 한정하는 의미로 이해되어서는 아니될 것이다.Hereinafter, with reference to the accompanying drawings will be described a preferred embodiment of the present invention. In addition, the term 'organic material' refers to a material stored in a crucible in a liquid state or a solid state to form an organic material layer on a substrate, and the term 'organic material' is formed by evaporation of an organic material when heating the crucible. It means a gaseous substance that becomes. As such, the specific terminology used in the description of the present invention is defined for convenience of description, and may vary according to the intention or custom of a person skilled in the art, and also to limit the technical components of the present invention. It should not be understood.

먼저, 유기전계 발광소자의 유기물층을 형성하기 위한 진공증착법은 진공챔버를 포함하는 진공증착 시스템에서 수행된다.First, a vacuum deposition method for forming an organic material layer of an organic light emitting device is performed in a vacuum deposition system including a vacuum chamber.

도 1을 참조하면, 진공증착 시스템(100)의 진공챔버(10)에는 유기물층을 형성하고자 하는 기판(30)과, 기판(30)의 전방에 위치되는 마스크(40)와, 마스크(40)로부터 소정 간격으로 이격되어 있는 증착원(20)이 설치된다. 마스크(40)와 기판(30)은 얼라인먼트 시스템(미도시)에 의해서 정렬된 상태로 척(50)에 서로 밀착된 상태로 고정된다. Referring to FIG. 1, the vacuum chamber 10 of the vacuum deposition system 100 includes a substrate 30 to form an organic material layer, a mask 40 positioned in front of the substrate 30, and a mask 40. Deposition sources 20 spaced at predetermined intervals are provided. The mask 40 and the substrate 30 are fixed in close contact with the chuck 50 in an aligned state by an alignment system (not shown).

마스크(40)는 기판(30)에 형성하고자 하는 유기물층에 대응하는 패턴이 형성되어 있는 패턴형성부(가상선으로 표시됨)와, 마스크 프레임(미도시)에 용접을 통해서 고정되는 고정부로 구성된다. 이때, 진공챔버(10)는 마스크(40) 및 기판(30)의 설치위치에 대응하는 성막영역(B)과 상기 성막영역(B) 이외의 위치에 대응하는 버퍼영역(A)으로 구분된다.The mask 40 includes a pattern forming part (indicated by a virtual line) in which a pattern corresponding to an organic layer to be formed on the substrate 30 is formed, and a fixing part fixed by welding to a mask frame (not shown). . At this time, the vacuum chamber 10 is divided into a film forming area B corresponding to the installation position of the mask 40 and the substrate 30 and a buffer area A corresponding to a position other than the film forming area B.

증착원(20)은 이동수단(미도시)의 작동에 의해서 축회전하는 구동축에 이동 가능하게 장착되고, 상기 구동축의 회전방향에 따라서 진공챔버(10) 내에서 수직 상하방향으로 이동한다. The deposition source 20 is movably mounted to a drive shaft that is axially rotated by an operation of a moving means (not shown), and moves vertically in the vacuum chamber 10 along the rotational direction of the drive shaft.

도 3을 참조하면, 증착원(20)은 유기물질이 저장되어 있는 도가니(22)와, 도가니에서 형성된 유기기상물질이 분사되는 분사노즐부(24)로 구성된다. 또한, 도 4를 참조하면, 도가니(22)는 복수개의 격벽(22a, 22b)에 의해서 나누어진 복수개의 분할구역을 포함한다. 도면에는 단지 2개의 격벽만이 도시되어 있지만 격벽의 갯수는 이에 한정되지 않는다.Referring to FIG. 3, the deposition source 20 includes a crucible 22 in which organic materials are stored, and an injection nozzle part 24 through which an organic gaseous material formed in the crucible is injected. 4, the crucible 22 includes a plurality of divided zones divided by a plurality of partitions 22a and 22b. Although only two partitions are shown in the figure, the number of partitions is not limited thereto.

상기 분할구역 각각에는 유기물질이 저장된다. 그리고, 분할구역 각각의 외부에는 가열체(22-1)가 설치되고, 가열체(22-1) 각각의 가열작용은 제어수단(미도시)에 의해서 개별적으로 제어된다. 바람직하게 가열체(22-1)에 대한 상기 제어수단의 제어동작은 도가니(22)의 분할구역 단위로 수행된다. 따라서, 상기 제어수단에 의해서 가열체(22-1)의 가열작용이 도가니(22)의 분할구역 단위로 제어됨으로써 도가니(22)의 분할구역은 개별적으로 가열될 수 있다.Organic substances are stored in each of the divided zones. A heating body 22-1 is provided outside each of the divided zones, and the heating action of each heating body 22-1 is individually controlled by a control means (not shown). Preferably, the control operation of the control means for the heating body 22-1 is performed in units of divided zones of the crucible 22. Therefore, the heating action of the heating body 22-1 is controlled by the division means of the crucible 22 by the control means so that the divided zones of the crucible 22 can be individually heated.

이때, 가열체(22-1)는 열선과 같이 통전 등에 의해서 열을 발산시키는 부재를 의미하지만 이에 한정되지는 않는다.At this time, the heating body 22-1 means a member that dissipates heat by energization such as a heating wire, but is not limited thereto.

도 5를 참조하면, 분사노즐부(24)의 전방에는 분사노즐부(24)의 분사노즐(24a)로부터 분사되는 유기기상물질의 증착율을 감지하기 위한 증착율 감지센서(26a, 26b, 28)가 제공된다. 이때, 제1감지센서와 제2감지센서(26a, 26b)는 증착원(22)의 양단에 각각 설치되므로, 증착원(22)이 수직 상하방향으로 이동함에 따라서 같은 방향으로 이동한다. 그리고, 제3감지센서(28)는 진공챔버(10)의 바닥면, 특히 진공챔버(10)의 버퍼영역(A)에서 분사노즐부(24)의 전방에 고정설치된다. 이는, 하기에 설명되는 바와 같이 증착원(22)이 성막영역(B)에서 유기기상물질을 분사하여 기판(10)에 유기물층을 형성하는 것을 제3감지센서(28)가 방해하지 않도록 하기 위함이다.Referring to FIG. 5, in front of the injection nozzle unit 24, deposition rate detection sensors 26a, 26b, and 28 for detecting the deposition rate of the organic gaseous material injected from the injection nozzle 24a of the injection nozzle unit 24 are provided. Is provided. At this time, since the first detection sensor and the second detection sensor 26a, 26b are installed at both ends of the deposition source 22, the deposition source 22 moves in the same direction as the vertical direction moves up and down. In addition, the third detection sensor 28 is fixedly installed in front of the injection nozzle unit 24 at the bottom surface of the vacuum chamber 10, particularly in the buffer area A of the vacuum chamber 10. This is to prevent the third sensor 28 from interfering with the deposition source 22 to form an organic layer on the substrate 10 by spraying an organic vapor material in the deposition region B as described below. .

증착율 감지센서(26a, 26b, 28)은 이에 한정되지는 않지만 증착율에 대한 감지효율을 향상시키기 위하여 크리스탈 센서가 사용될 수 있다. The deposition rate detection sensors 26a, 26b, and 28 are not limited thereto, but a crystal sensor may be used to improve the detection efficiency of the deposition rate.

도 1을 다시 참조하면, 상술된 구조로 이루어진 진공증착 시스템(100)에 있어서 증착원(20)은 진공챔버(10) 내에서 버퍼영역(A)에 위치한다. 마스크(40)와 기판은 증착원(20)으로부터 이격해서 위치하고, 이들은 서로 정렬된 상태로 얼라인먼트 시스템(미도시)의 척(50)에 밀착된다.Referring back to FIG. 1, in the vacuum deposition system 100 having the above-described structure, the deposition source 20 is located in the buffer region A in the vacuum chamber 10. The mask 40 and the substrate are positioned away from the deposition source 20, and they are in close contact with the chuck 50 of the alignment system (not shown) in alignment with each other.

그리고, 기판(30) 상에 유기물층을 형성하기 위하여 가열체(22-1)에 동력이 인가되면, 가열체(22-1)의 가열작용에 의해 도가니(22)가 가열됨으로써 도가니(22)에 저장되어 있는 유기물질이 증발하여 유기기상물질을 형성한다. 이때, 상술된 바와 같이, 상기 제어수단에 의해서 가열체(22-1)의 가열작용은 도가니(22)의 분할구역 단위로 이루어지므로, 도가니(22)의 분할구역 각각에 저장되어 있는 유기물질은 개별적으로 가열된다.When power is applied to the heating body 22-1 to form an organic material layer on the substrate 30, the crucible 22 is heated by the heating action of the heating body 22-1 to the crucible 22. Stored organic matter evaporates to form organic vapor. At this time, as described above, since the heating action of the heating body 22-1 by the control means is made in the divided section of the crucible 22, the organic material stored in each of the divided sections of the crucible 22 Heated individually.

이 후에, 유기기상물질은 분사노즐부(24)의 분사노즐(24a)을 통해서 분사된다. 이때, 분사되는 유기기상물질의 증착율은 분사노즐부(24)의 전방에 위치하는 증착율 감지센서(26a, 26b, 28)에 의해서 감지되어 상기 제어수단으로 전송된다. 상기 감지수단은 감지센서로부터 제공되는 감지신호에 의해서 도가니(22)의 분할구 역 각각에 대한 가열체(22-1)의 가열작용을 제어하여 유기기상물질의 증착율이 전체적으로 균일해지도록 한다.Thereafter, the organic gaseous substance is sprayed through the spray nozzle 24a of the spray nozzle portion 24. At this time, the deposition rate of the sprayed organic vapor material is sensed by the deposition rate sensor (26a, 26b, 28) located in front of the injection nozzle unit 24 is transmitted to the control means. The sensing means controls the heating action of the heating body 22-1 to each of the division zones of the crucible 22 by the sensing signal provided from the sensing sensor so that the deposition rate of the organic gaseous substance is uniform.

분사노즐부(24)를 통해 분사되는 유기기상물질의 증착율이 전체적으로 균일해지면, 증착원(22)은 성막영역(B)으로 이동한 후 수직 상하방향으로 이동하면서 유기기상물질을 분사하여 기판(30)에 유기물층을 형성한다.When the deposition rate of the organic gaseous material sprayed through the spray nozzle part 24 becomes uniform as a whole, the deposition source 22 moves to the film forming area B, and then moves the organic gaseous material while moving vertically and vertically to the substrate 30. To form an organic layer.

상기 내용은 본 발명의 바람직한 실시예를 단지 예시한 것으로 본 발명이 속하는 분야의 당업자는 첨부된 청구범위에 기재된 본 발명의 사상 및 요지로부터 벗어나지 않고 본 발명에 대한 수정 및 변경을 가할 수 있다는 것을 인식하여야 한다.The foregoing is merely illustrative of the preferred embodiments of the present invention and those skilled in the art to which the present invention pertains recognize that modifications and variations can be made to the present invention without departing from the spirit and gist of the invention as set forth in the appended claims. shall.

본 발명에 따르면, 유기물질이 저장되어 있는 도가니를 복수개의 분할구역으로 나누고 분할구역 각각에 대한 가열체의 가열작용을 개별적으로 제어함으로써 증착원의 분사노즐부를 통해 분사되는 유기기상물질의 증착율을 전체적으로 균일화시켜 기판에 유기물층을 균일하게 증착할 수 있다.
According to the present invention, by dividing the crucible in which the organic material is stored into a plurality of divided zones and individually controlling the heating action of the heating body for each divided zone, the overall deposition rate of the organic vapor substance sprayed through the spray nozzle part of the deposition source as a whole. By homogenizing, the organic material layer may be uniformly deposited on the substrate.

Claims (10)

복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와;A crucible having a plurality of divided sections, each of which comprises an organic material; 상기 도가니를 가열하는 가열체와;A heating body for heating the crucible; 상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 하는 물질증착용 증착원.Evaporation source for the material deposition, characterized in that consisting of a spray nozzle unit for spraying the organic gas formed by the evaporation of the organic material by the heating action of the heating element. 제1항에 있어서,The method of claim 1, 상기 가열체는 상기 분할구역 각각에 대응하는 복수개의 분할 가열수단으로 이루어져 있는 것을 특징으로 하는 물질증착용 증착원.And the heating body comprises a plurality of divided heating means corresponding to each of the divided zones. 제1항에 있어서,The method of claim 1, 상기 가열체는 열선으로 이루어져 있는 것을 특징으로 하는 물질증착용 증착원.Deposition source for the material deposition, characterized in that the heating element is made of a hot wire. 진공챔버;Vacuum chamber; 상기 진공챔버의 일측에 설치되는 기판과 마스크를 정렬된 상태로 지지하는 척을 갖는 스테이지;A stage having a chuck supporting the substrate and the mask installed in one side of the vacuum chamber in an aligned state; 상기 진공챔버의 타측에 설치되는 구동축; 및A drive shaft installed at the other side of the vacuum chamber; And 상기 구동축을 따라서 이동가능하도록 설치되는 증착원으로 구성되고,It is composed of a deposition source which is installed to be movable along the drive shaft, 상기 증착원은 복수개로 구분된 분할구역을 갖고, 상기 분할구역 각각에는 유기물질을 저장하는 도가니와; 상기 도가니를 가열하는 가열체와; 상기 가열체의 가열작용에 의해 상기 유기물질이 증발함으로써 형성되는 유기기상물질이 분사되는 분사노즐부로 이루어진 것을 특징으로 하는 증착시스템.The evaporation source has a plurality of divided sections, each of the divided zones and the crucible for storing the organic material; A heating body for heating the crucible; And a spray nozzle unit for spraying the organic vapor substance formed by evaporating the organic substance by the heating action of the heating element. 제4항에 있어서, The method of claim 4, wherein 상기 가열체는 상기 분할구역 각각에 대응하는 복수개의 분할 가열수단으로 이루어져 있는 것을 특징으로 하는 증착시스템.And the heating body comprises a plurality of divided heating means corresponding to each of the divided zones. 제5항에 있어서,The method of claim 5, 상기 분할 가열수단에 대한 가열제어를 개별적으로 수행할 수 있는 제어부를 더 포함하는 것을 특징으로 하는 증착시스템.And a controller capable of individually performing heating control for the divided heating means. 제4항에 있어서,The method of claim 4, wherein 상기 도가니의 분할구역에 각각 대응하는 상기 분사노즐부 전방에는 상기 분사노즐부로부터 분사되는 유기기상물질의 증착율을 감지하는 복수개의 증착율 감지센서를 더 포함하는 것을 특징으로 하는 증착시스템.And a plurality of deposition rate detection sensors in front of the injection nozzle portions corresponding to the divided regions of the crucible, for detecting a deposition rate of the organic gaseous substance sprayed from the injection nozzle portion. 제7항에 있어서,The method of claim 7, wherein 상기 복수개의 증착율 감지센서는 상기 증착원의 양단에 설치되는 한 쌍의 외부 감지센서와, 상기 진공챔버의 내부 바닥면에 고정설치되는 중앙 감지센서로 이루어진 것을 특징으로 하는 증착시스템.And a plurality of deposition rate sensing sensors comprising a pair of external sensing sensors installed at both ends of the deposition source, and a central sensing sensor fixedly installed on an inner bottom surface of the vacuum chamber. 제8항에 있어서,The method of claim 8, 상기 중앙 감지센서는 상기 진공챔버의 버퍼영역에 설치되는 것을 특징으로 하는 증착시스템.And the central sensor is installed in the buffer region of the vacuum chamber. 제8항에 있어서,The method of claim 8, 상기 증착율 감지센서는 크리스탈 센서인 것을 특징으로 하는 증착시스템.The deposition rate sensor is a deposition system, characterized in that the crystal sensor.
KR1020050000964A 2005-01-05 2005-01-05 Effusion cell for depositing material and deposition apparatus having it KR100645719B1 (en)

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US8993360B2 (en) 2013-03-29 2015-03-31 Samsung Display Co., Ltd. Deposition apparatus, method of manufacturing organic light emitting display apparatus, and organic light emitting display apparatus
US9534288B2 (en) 2013-04-18 2017-01-03 Samsung Display Co., Ltd. Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus
US9040330B2 (en) 2013-04-18 2015-05-26 Samsung Display Co., Ltd. Method of manufacturing organic light-emitting display apparatus
US8962360B2 (en) 2013-06-17 2015-02-24 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the organic layer deposition apparatus
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